Dry type adsorption device

Abstract

The utility model relates to the technical field of waste gas treatment equipment, and provides a dry type adsorption device which comprises an air inlet chamber, an exhaust hood and a plurality of adsorption units, the adsorption units are stacked between the air inlet chamber and the exhaust hood in the waste gas flowing direction, an air inlet is formed in the air inlet chamber, and an exhaust port is formed in the exhaust hood. Filling cavities used for being filled with adsorbents are formed in the adsorption units, the filling cavities of the adjacent adsorption units are communicated with each other, the outer edges of the adjacent adsorption units are matched in a sealed mode, the air inlet chamber is communicated with the filling cavity of the adsorption unit located at the air inlet end, and the exhaust hood is communicated with the filling cavity of the adsorption unit located at the air outlet end. The outer edge of the air inlet chamber is in sealing fit with the outer edge of the adsorption unit located at the air inlet end, and the outer edge of the exhaust hood is in sealing fit with the outer edge of the adsorption unit located at the air outlet end. The dry type adsorption device provided by the utility model overcomes the defect that the existing integrated adsorption barrel is not suitable for treating diversified waste gases.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment equipment, in particular to a dry adsorption device. Background Art

[0002] The dry adsorption equipment is an important part of the Local Scrubber for tail gas treatment of the semiconductor industry. The treatment method is relatively direct. The target tail gas is collected through a pipeline and collected by a specific adsorbent material.

[0003] In the existing dry adsorption equipment, the adsorption barrel is usually integrated. The target waste gas enters the barrel from the bottom, and the pollutants in the waste gas come into contact with the adsorbent in the barrel and are absorbed. The clean gas is discharged from the top. The integrated storage barrel is generally of a cylindrical structure, which is convenient for processing, has high structural strength and is convenient for transportation. However, based on the diverse characteristics of the tail gas of the semiconductor process gas, the waste gas to be treated is numerous and complex, and the properties are inconsistent. The existing integrated adsorption barrel can only contain one type of adsorbent and cannot be used to treat diverse waste gases. In addition, the integrated adsorption barrel also has defects such as high loading and unloading difficulty, inability to judge the real-time loss of different adsorbents, easy generation of waste of resource materials, and being unfavorable for the collection and treatment operations of heavyweight hazardous wastes. Summary of the Utility Model

[0004] The utility model provides a dry adsorption device to solve the defect that the existing integrated adsorption barrel cannot be used to treat diverse waste gases.

[0005] The utility model provides a dry adsorption device, including: an air inlet chamber, an exhaust hood and a plurality of adsorption units. The plurality of adsorption units are stacked between the air inlet chamber and the exhaust hood along the waste gas flow direction. An air inlet is provided on the air inlet chamber, and an air outlet is provided on the exhaust hood.

[0006] A packing cavity for filling the adsorbent is formed in the adsorption unit. The packing cavities of adjacent adsorption units are communicated with each other, and the outer edges of adjacent adsorption units are in sealing cooperation.

[0007] The air inlet chamber is communicated with the packing cavity of the adsorption unit at the air inlet end, and the exhaust hood is communicated with the packing cavity of the adsorption unit at the air outlet end. The outer edge of the air inlet chamber is in sealing cooperation with the outer edge of the adsorption unit at the air inlet end, and the outer edge of the exhaust hood is in sealing cooperation with the outer edge of the adsorption unit at the air outlet end.

[0008] According to the dry adsorption device provided by the utility model, the air inlet chamber is detachably connected to the adsorption unit at the air inlet end, the exhaust hood is detachably connected to the adsorption unit at the air outlet end, and adjacent adsorption units are detachably connected.

[0009] According to the dry adsorption device provided by the present utility model, the air inlet chamber is connected to the adsorption unit at the air inlet end through a clamp, the exhaust hood is connected to the adsorption unit at the air outlet end through a clamp, and adjacent adsorption units are connected through a clamp.

[0010] According to the dry adsorption device provided by the present utility model, vacuum flanges are provided on the outer edges of adjacent adsorption units, and the adjacent vacuum flanges are in sealing fit with each other, and a sealing ring is provided between the adjacent vacuum flanges.

[0011] According to the dry adsorption device provided by the present utility model, communication plates are provided on both sides of the adsorption unit, and communication holes are evenly distributed on the communication plates.

[0012] According to the dry adsorption device provided by the present utility model, a discharge port is provided on the side wall of each adsorption unit, the discharge port is communicated with the packing cavity, a quick connector is connected to the discharge port, and the quick connector is configured to be connected to a negative pressure device.

[0013] According to the dry adsorption device provided by the present utility model, a pressure sensor is provided in each packing cavity.

[0014] According to the dry adsorption device provided by the present utility model, an observation window is provided on the outer wall of each adsorption unit, and a placement structure for placing an indicator is provided inside the observation window.

[0015] According to the dry adsorption device provided by the present utility model, the air inlet chamber, the plurality of adsorption units and the exhaust hood are stacked vertically.

[0016] According to the dry adsorption device provided by the present utility model, universal wheels are provided at the bottom of the air inlet chamber.

[0017] In the dry adsorption device provided by the present utility model, a plurality of adsorption units are stacked between the air inlet chamber and the exhaust hood. The packing cavities of the plurality of adsorption units can be respectively used to fill different adsorbents. When treating waste gas, the air inlet is connected to the waste gas source. After the waste gas enters the air inlet chamber, it enters each adsorption unit in turn. In this process, different harmful substances in the waste gas are absorbed by different adsorbents. The treated waste gas is finally discharged to a set position through the exhaust hood. And according to the type of waste gas to be treated, the number of adsorption units between the air inlet chamber and the exhaust hood, and the type of adsorbent in the packing cavity can be adjusted, so as to be able to adapt to the treatment of diverse waste gases (such as the treatment of multi-strand mixed waste gases with inconsistent properties).

[0018] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present utility model. Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the attached drawings required for the description of the embodiments or the prior art. Obviously, the attached drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can also be obtained based on these drawings.

[0020] Figure 1 It is one of the schematic diagrams of the dry adsorption device provided by the embodiment of the present utility model.

[0021] Figure 2 It is the second schematic diagram of the dry adsorption device provided by the embodiment of the present utility model.

[0022] Figure 3 It is the schematic diagram of the adsorption unit in the dry adsorption device provided by the embodiment of the present utility model.

[0023] Reference numerals:

[0024] 10, intake chamber; 110, intake port; 20, exhaust hood; 210, exhaust port; 30, adsorption unit; 310, main body part; 320, connecting plate; 321, connecting hole; 330, quick connector; 40, universal wheel. Specific embodiments

[0025] To make the objectives, technical solutions, and advantages of the present utility model clearer, the following will clearly and completely describe the technical solutions in the present utility model with reference to the attached drawings in the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0026] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the attached drawings. They are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0027] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0028] In the embodiments of the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0029] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without conflict, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0030] The following Figures 1 to 3 describes the dry adsorption device provided by the present utility model.

[0031] Refer to Figure 1 and Figure 2 As shown, the dry adsorption device provided by the embodiments of the present utility model includes an intake chamber 10, an exhaust hood 20, and a plurality of adsorption units 30. The plurality of adsorption units 30 are stacked between the intake chamber 10 and the exhaust hood 20 along the waste gas flow direction. An intake port 110 is provided on the intake chamber 10, and an exhaust port 210 is provided on the exhaust hood 20.

[0032] A packing cavity for filling an adsorbent is formed in the adsorption unit 30. The packing cavities of adjacent adsorption units 30 communicate with each other, and the outer edges of adjacent adsorption units 30 are sealingly fitted.

[0033] The intake chamber 10 communicates with the packing chamber of the adsorption unit 30 at the intake end, the exhaust hood 20 communicates with the packing chamber of the adsorption unit 30 at the outlet end, the outer edge of the intake chamber 10 is in sealing cooperation with the outer edge of the adsorption unit 30 at the intake end, and the outer edge of the exhaust hood 20 is in sealing cooperation with the outer edge of the adsorption unit 30 at the outlet end.

[0034] In the dry adsorption device provided by the present utility model, a plurality of adsorption units 30 are stacked between the intake chamber 10 and the exhaust hood 20. The packing chambers of the plurality of adsorption units 30 can be respectively used to fill different adsorbents. When treating waste gas, the intake port 110 is connected to the waste gas source. After the waste gas enters the intake chamber 10, it sequentially enters each adsorption unit 30. During this process, different harmful substances in the waste gas are absorbed by different adsorbents. The treated waste gas finally exits through the exhaust hood 20 to a set position. And according to the type of waste gas to be treated, the number of adsorption units 30 between the intake chamber 10 and the exhaust hood 20 and the type of adsorbent in the packing chamber can be adjusted, so as to be capable of adapting to treating diverse waste gases (such as treating mixed waste gases with inconsistent properties of multiple strands).

[0035] Specifically, in this embodiment, the intake chamber 10, the plurality of adsorption units 30 and the exhaust hood 20 are stacked vertically. After the waste gas enters the intake chamber 10 through the intake port 110, it can automatically flow through each adsorption unit 30 from bottom to top without additionally arranging a driving device to drive the waste gas to flow.

[0036] See Figure 1 As shown, according to some embodiments of the present utility model, the intake chamber 10 is detachably connected to the adsorption unit 30 at the intake end, the exhaust hood 20 is detachably connected to the adsorption unit 30 at the outlet end, and adjacent adsorption units 30 are detachably connected. By configuring the intake chamber 10 and the adsorption unit 30 at the intake end, the exhaust hood 20 and the adsorption unit 30 at the outlet end, and adjacent adsorption units 30 to be detachably connected, it is possible to facilitate the disassembly of the intake chamber 10, the adsorption unit 30 and the exhaust hood 20, so that the whole device can be transported in a split form, reducing the occupied space. And, according to the type of waste gas to be treated, the number of adsorption units 30 between the intake chamber 10 and the exhaust hood 20 and the type of adsorbent in the packing chamber can be adjusted to adapt to treating diverse waste gases.

[0037] According to some embodiments of the present utility model, a handle is provided on the side wall of each adsorption unit 30, which is convenient for disassembly and transfer.

[0038] According to some embodiments of the present utility model, the intake chamber 10 is connected to the adsorption unit 30 located at the intake end through a clamp, the exhaust hood 20 is connected to the adsorption unit 30 located at the outlet end through a clamp, and adjacent adsorption units 30 are connected through a clamp. By configuring the connection between the intake chamber 10 and the adsorption unit 30 at the intake end, the exhaust hood 20 and the adsorption unit 30 at the outlet end, and adjacent adsorption units 30 as detachable connections through clamps, the disassembly and assembly efficiency between components can be improved while ensuring connection stability.

[0039] According to some embodiments of the present utility model, vacuum flanges are provided on the outer edges of adjacent adsorption units 30, and the adjacent vacuum flanges are in sealing fit with each other, and a sealing ring is provided between the adjacent vacuum flanges. By providing vacuum flanges on the outer edges of adjacent adsorption units 30 and equipping a sealing ring between the flanges, the device can effectively prevent waste gas from leaking from the connection position of adjacent adsorption units 30, ensuring the stability and safety of the operation of waste gas adsorption treatment. And it can make maintenance more convenient, and the operator can easily disassemble and install the adsorption unit 30.

[0040] See Figure 3 As shown, according to some embodiments of the present utility model, communication plates 320 are provided on both sides of the adsorption unit 30, and communication holes 321 are uniformly distributed on the communication plates 320. By providing communication plates 320 on both sides and uniformly distributing communication holes 321 on the communication plates 320, waste gas can enter the packing chamber evenly to contact the packing, and the waste gas can be discharged evenly from different positions of the communication plate 320, improving the adsorption treatment effect on the waste gas.

[0041] Specifically, the adsorption unit 30 includes a main body portion 310 and communication plates 320 located on both sides of the main body portion 310. The main body portion 310 is an annular component, and the above-mentioned packing chamber is formed by enclosing with the communication plates 320 provided on both sides.

[0042] See Figure 1 and Figure 3 As shown, according to some embodiments of the present utility model, a discharge port is provided on the side wall of each adsorption unit 30. The discharge port is communicated with the packing chamber, and a quick connector 330 is connected to the discharge port. The quick connector 330 is configured to be connected to a negative pressure device. By providing a discharge port on the side wall of the adsorption unit 30, when collecting hazardous waste, it can be connected to the negative pressure device through the quick connector 330, and the hazardous waste in the packing chamber can be directly exported to a set position through negative pressure, preventing the hazardous waste from contacting the external environment and causing pollution. And the hazardous waste can be treated independently according to the usage of the adsorbent in each adsorption unit 30, without affecting the other adsorption units 30.

[0043] According to some embodiments of the present utility model, a pressure sensor is provided in each packing cavity. By providing a pressure sensor in each packing cavity, the pressure in each packing cavity can be monitored in real time, and it can be determined whether the packing cavity is blocked according to the currently detected pressure value. When the adsorption unit 30 is blocked, it can respond in a timely manner (such as issuing an alarm) to instruct the operator to perform maintenance on the corresponding adsorption unit 30.

[0044] According to some embodiments of the present utility model, an observation window is provided on the outer wall of each adsorption unit 30, and a placement structure (such as a placement groove) for placing an indicator is provided inside the observation window. During the use of the device, the color change of the indicator can be observed through the observation window of each adsorption unit 30, and the adsorption state of the adsorbent under long-term working conditions in the corresponding adsorption unit 30 can be judged according to the color change of the indicator, so as to export it outside the packing bin after the adsorbent loses its adsorption capacity.

[0045] See Figure 1 As shown, according to some embodiments of the present utility model, universal wheels 40 are provided at the bottom of the air inlet chamber 10. By providing universal wheels 40 at the bottom of the air inlet chamber 10, the device can be transferred to a set position according to actual use requirements.

[0046] From the description of the above embodiments, it can be seen that the dry adsorption device provided by the present utility model has at least the following advantages.

[0047] (1) The dry adsorption device provided by the present utility model can adapt to the treatment of diverse waste gases (such as the treatment of multi-strand mixed waste gases with inconsistent properties) by laminating a plurality of adsorption units 30 between the air inlet chamber 10 and the exhaust hood 20.

[0048] (2) The dry adsorption device provided by the present utility model can facilitate the disassembly of the air inlet chamber 10, the adsorption unit 30 and the exhaust hood 20, so that the whole device can be transported in a split manner, reducing the occupied space. Moreover, according to the type of waste gas to be treated, the number of adsorption units 30 between the air inlet chamber 10 and the exhaust hood 20 and the type of adsorbent in the packing cavity can be adjusted to adapt to the treatment of diverse waste gases.

[0049] (3) When collecting hazardous waste, the dry adsorption device provided by the present utility model can be connected to a negative pressure device through a quick-connect joint 330, and the hazardous waste in the packing cavity can be directly exported to a set position through negative pressure to prevent the hazardous waste from contacting the external environment and causing pollution. Moreover, the hazardous waste can be treated independently according to the use situation of the adsorbent in each adsorption unit 30 without affecting the other adsorption units 30.

[0050] (4)The dry adsorption device provided by the present utility model can monitor the pressure in each packing cavity in real time, and determine whether the packing cavity is blocked according to the currently detected pressure value. When the adsorption unit 30 is blocked, it can respond in a timely manner (such as issuing an alarm) to instruct the operator to perform maintenance on the corresponding adsorption unit 30.

[0051] (5)The dry adsorption device provided by the present utility model can observe the color change of the indicator through the observation window of each adsorption unit 30, and judge the adsorption state of the adsorbent in the corresponding adsorption unit 30 under the long-term working state according to the color change of the indicator, so as to export the adsorbent out of the packing bin after it loses its adsorption capacity.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit it; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A dry adsorption device, characterized in that: include: An air intake chamber, an exhaust hood and a plurality of adsorption units, wherein the plurality of adsorption units are stacked between the air intake chamber and the exhaust hood along the exhaust gas flow direction, the air intake chamber is provided with an air intake port, and the exhaust hood is provided with an exhaust port; A filling cavity for filling the adsorbent is formed in the adsorption unit, the filling cavities of adjacent adsorption units are interconnected, and the outer edges of adjacent adsorption units are sealed and matched; The air inlet chamber is connected to the filling chamber of the adsorption unit located at the air inlet end, the exhaust hood is connected to the filling chamber of the adsorption unit located at the air outlet end, the outer edge of the air inlet chamber is sealed with the outer edge of the adsorption unit located at the air inlet end, and the outer edge of the exhaust hood is sealed with the outer edge of the adsorption unit located at the air outlet end.

2. The dry adsorption device according to claim 1, characterized in that: The air inlet chamber is detachably connected to the adsorption unit located at the air inlet end, the exhaust hood is detachably connected to the adsorption unit located at the air outlet end, and the adjacent adsorption units are detachably connected.

3. The dry adsorption device according to claim 2, characterized in that: The air inlet chamber is connected to the adsorption unit located at the air inlet end through a clamp, the exhaust hood is connected to the adsorption unit located at the air outlet end through a clamp, and adjacent adsorption units are connected through a clamp.

4. The dry adsorption device according to claim 1, characterized in that: The outer edges of the adjacent adsorption units are each provided with a vacuum flange, the adjacent vacuum flanges are sealed and matched, and a sealing ring is provided between the adjacent vacuum flanges.

5. The dry adsorption device according to claim 1, characterized in that: Both sides of the adsorption unit are provided with connecting plates, and connecting holes are evenly distributed on the connecting plates.

6. The dry adsorption device according to claim 1, characterized in that: A discharge port is provided on the side wall of each adsorption unit, and the discharge port is communicated with the filling cavity. A quick-release connector is provided in connection with the discharge port, and the quick-release connector is configured to be connected to a negative pressure device.

7. The dry adsorption device according to claim 1, characterized in that: A pressure sensor is arranged in each of the packing cavities.

8. The dry adsorption device according to claim 1, characterized in that: The outer wall of each adsorption unit is provided with an observation window, and the inner side of the observation window is provided with a placement structure for placing an indicator.

9. The dry adsorption device according to claim 1, characterized in that: The air inlet chamber, the plurality of adsorption units and the exhaust hood are vertically stacked.

10. The dry adsorption device according to claim 1, characterized in that: The bottom of the air inlet chamber is provided with a universal wheel.

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