Purification device with corrosion-resistant filler

Abstract

The utility model discloses a purification device with corrosion-resistant filler, which belongs to the technical field of semiconductor material preparation and comprises a purification pipe body, two ends of the purification pipe body are respectively connected with an upper seal head and a lower seal head, the upper seal head is isolated from a cavity of the purification pipe body by an upper cover plate, and the lower seal head is isolated from the cavity of the purification pipe body by a lower cover plate; a liquid inlet pipe is arranged at the top end of the upper sealing head; a liquid outlet pipe is arranged at the bottom end of the lower sealing head; and a plurality of filling pipes are uniformly distributed between the upper cover plate and the lower cover plate. According to the utility model, a plurality of groups of filler pipes are arranged in the purification pipe body in a matched manner and can be conveniently replaced and maintained, so that the purification reaction efficiency and the treatment capacity of the purification device are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material preparation, in particular to a purification device with corrosion-resistant packing. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors have a wide range of applications in radios, televisions, and temperature measurement. For example, diodes are devices made of semiconductors. A semiconductor refers to a material whose conductivity can be controlled and can range from an insulator to a conductor. From the perspective of both technology and economic development, semiconductors are of great importance. Today, most electronic products require the purification of chemical materials used in semiconductors during semiconductor processing, such as the purification and recycling of electronic-grade ultra-pure semiconductor stripping solutions. Electronic-grade ultra-pure semiconductor stripping solutions are indispensable solvents in chip production, and they have quite high requirements for the content of electronic-grade semiconductor stripping solutions and metal ion content. However, the quality of electronic-grade semiconductor stripping solutions used in chip cleaning agents, photoresists, etc. usually does not meet the requirements, and the residual liquid cannot be recycled, and the treatment of the residual liquid is difficult, which is not environmentally friendly. In the prior art, the use of packing in the purification device can improve the purification reaction efficiency of the electronic-grade ultra-pure semiconductor stripping solution. Among them, bulk packing refers to packing mainly in a random pile of packing, and this type of packing is a granular body with a certain external structure. Traditional packings include packings of different shapes such as ring packings, saddle packings, and ring-saddle packings. However, for some products that require a purification separation purity of high-purity reagents higher than 99.9 wt%, the existing packings have poor effects; in addition, the corrosion resistance of stainless steel packings is relatively poor, and liquid is likely to be stored inside the packings, resulting in poor purification separation effects. Summary of the Invention

[0003] Technical problems to be solved: Aiming at the technical problems existing in the purification device of the prior art, the utility model provides a purification device with corrosion-resistant packing. A plurality of packing tubes are arranged in cooperation inside the purification tube body, and the packing tubes can be conveniently replaced and maintained, so as to improve the purification reaction efficiency and processing capacity of the purification device.

[0004] Technical solution: A purification device with corrosion-resistant packing described in the utility model, the purification device includes a purification tube body, upper and lower end heads are respectively connected to both ends of the purification tube body, the upper end head is isolated from the cavity of the purification tube body by an upper cover plate, and the lower end head is isolated from the cavity of the purification tube body by a lower cover plate; a liquid inlet tube is arranged at the top of the upper end head, and a liquid outlet tube is arranged at the bottom of the lower end head; a plurality of packing tubes are evenly distributed between the upper cover plate and the lower cover plate.

[0005] Preferably, the packing tube is made of conventional high-purity PFA or high-purity PTFE materials; the packing tube is a tube body with any one of the pipe diameters of 1 / 8, 1 / 4, 3 / 8, and 1 / 2, and its diameter-height ratio is 1:(1-5).

[0006] Preferably, reaction holes are uniformly distributed on the tube wall of the packing tube. The reaction holes are drilled in a 180° straight line, with a hole diameter of 0.3-0.8 mm and a hole pitch of 0.5 mm.

[0007] Preferably, a plurality of liquid passing holes are correspondingly formed on the plates of the upper cover plate and the lower cover plate. Connecting end pipes are respectively connected inside the corresponding liquid passing holes on the lower side of the upper cover plate and the upper side of the lower cover plate. Fixed ring bodies are respectively arranged at the connection ends of the connecting end pipes and the packing tube. The packing tube and the connecting end pipe are fixedly connected through quick-connect clamps on the fixed ring bodies.

[0008] Preferably, the fixed ring bodies of the connecting end pipe and the packing tube abut against each other to form a trapezoidal cross-section structure, and a plurality of trapezoidal clamping ring petals are arranged at intervals in the circumferential direction of the fixed ring body.

[0009] Preferably, the quick-connect clamp includes a hoop band and connecting ear rings formed by bending both ends of the hoop band. An installation position groove is formed in the middle of the connecting ear ring along the length direction of the hoop band;

[0010] A positioning column and a limiting column are respectively connected inside the two connecting ear rings. A connecting screw rod for connecting the positioning column and the limiting column is arranged in the installation position groove. Rotating the connecting screw rod can drive the positioning column and the limiting column to approach or move away from each other to realize the tensioning or relaxation of the hoop band.

[0011] Preferably, a connecting screw hole is arranged on the positioning column, a positioning card slot for clamping the connecting screw rod is formed on the limiting column, and a clamping platform is arranged at one end of the positioning card slot corresponding to the screw head of the connecting screw rod.

[0012] Preferably, a liquid distributor corresponding to the liquid inlet pipe is arranged on the upper side of the upper cover plate. The liquid distributor includes a distribution frame and a plurality of distribution balls filled in the distribution frame.

[0013] Preferably, a purification cavity is formed outside the packing tube inside the purification tube body. A plurality of baffle plates are arranged along the height direction of the purification tube body. The baffle plates are supported in a net shape outside the tube wall of the packing tube.

[0014] Compared with the prior art, the utility model has at least the following beneficial effects:

[0015] 1. A plurality of packing tubes are arranged in cooperation inside the purification tube body of the utility model, which can improve the purification reaction efficiency and processing capacity of the purification device;

[0016] 2. The packing tube can effectively solve the problems of packing corrosion and secondary pollution. The open-hole structure can enhance the gas-liquid and liquid-liquid separation effects. At the same time, there is less liquid stored inside the packing tube, and the purification effect is good. It has good corrosion resistance and versatility.

[0017] 3. The quick-connect clamp with this kind of setting can quickly realize the fixed connection or disassembly of the packing tube and the connecting end tube, thus facilitating the replacement and maintenance of the packing tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the internal structure of the purification device of the present utility model;

[0019] Figure 2 is Figure 1 a schematic diagram of the structure of the liquid distributor at the upper end of the purification tube body in

[0020] Figure 3 is Figure 1 a top view of the structure of the upper cover plate or the lower cover plate in

[0021] Figure 4 is Figure 1 a schematic diagram of the installation structure of the packing tube and the baffle plate in

[0022] Figure 5 is Figure 1 a schematic diagram of the connection structure between the upper cover plate or the lower cover plate and the packing tube in

[0023] Figure 6 is Figure 5 a schematic diagram of the enlarged structure at A in

[0024] Figure 7 is Figure 5 a schematic diagram of the structure of the quick-connect clamp in

[0025] Figure 8 is Figure 7 a schematic diagram of the structure of the trapezoidal snap ring in

[0026] Figure 9 is Figure 7 a schematic diagram of the structure of the connecting column in

[0027] Figure 10 is Figure 7 a schematic diagram of the structure of the limiting column in

[0028] Figure 11 is Figure 1 a schematic diagram of the structure of the packing tube in

[0029] Figure numerals: 100, purification device; 1, purification tube body; 2, lower cover plate; 3, lower head; 4, liquid storage cavity; 5, filling tube; 51, reaction hole; 6, upper cover plate; 7, liquid distributor; 71, distribution frame; 72, distribution ball; 8, upper head; 9, liquid inlet pipe; 10, liquid outlet pipe; 11, skirt; 12, baffle; 13, inspection manhole; 14, liquid through hole; 15, connecting end pipe; 16, fixing ring body; 17, trapezoidal clamp petal; 18, quick-connect clamp; 19, hoop; 191, connecting earring; 192, mounting groove; 20, positioning column; 201, connecting screw hole; 21, connecting screw; 22, limiting column; 221, positioning slot; 222, clamping platform. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the following will be combined with the attached Figures 1 - 11 The technical scheme of the embodiment of the utility model is clearly and completely described. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of the utility model.

[0031] like Figure 1 and Figure 3 As shown, a purification device with corrosion-resistant filler of the utility model, the purification device 100 comprises a purification tube body 1, and the two ends of the purification tube body 1 are respectively connected with an upper head 8 and a lower head 3, the upper head 8 and the lower head 3 are both hemispherical structures, and the upper head 8 and the lower head 3 are respectively fixedly connected with the two ends of the purification tube body 1 through flanges. The upper head 8 is isolated from the cavity of the purification tube body 1 by the upper cover plate 6, and the lower head 3 is isolated from the cavity of the purification tube body 1 by the lower cover plate 2; a liquid inlet pipe 9 is arranged at the top of the upper head 8, and a liquid outlet pipe 10 is arranged at the bottom of the lower head 3. The purification tube body 1 forms a liquid storage cavity 4 below the lower cover plate 2, and the purified solution in the liquid storage cavity 4 can be discharged through the liquid outlet pipe 10. A plurality of filler tubes 5 are evenly distributed between the upper cover plate 6 and the lower cover plate 2, and the filler tubes 5 are filled with fillers, and the fillers can be selected from suitable catalysts to promote the reaction. During operation, the reaction material enters the cavity at the top of the upper cover plate 6 through the liquid inlet pipe 9, and enters the filling pipe 5 after the solution is distributed through the upper cover plate 6, flows through the filling pipe 5, and is purified by the catalyst and other fillers, and then enters the liquid storage cavity 4 for discharge. The purification pipe body of the utility model is equipped with multiple filling pipes, which can improve the purification reaction efficiency and processing capacity of the purification device.

[0032] like Figure 11As shown, the packing tube 5 is made of conventional high-purity PFA or high-purity PTFE material; the packing tube 5 is a tube body with any one of the pipe diameters of 1 / 8, 1 / 4, 3 / 8, and 1 / 2, and its diameter-height ratio is 1:(1-5). Reaction holes 51 are evenly distributed on the tube wall of the packing tube 5. The reaction holes 51 are drilled in a 180° straight line, with a hole diameter of 0.3~0.8 mm and a hole spacing of 0.5 mm. This packing tube 5 can effectively solve the problems of packing corrosion and secondary pollution. The use of an open-hole structure can increase the gas-liquid and liquid-liquid separation effects. At the same time, there is less liquid stored inside the packing tube, and the purification effect is good, with good corrosion resistance and versatility. It should be noted that this packing tube 5 utilizes the inherent corrosion resistance of high-purity PFA or high-purity PTFE materials, which is a conventional selection and utilization of the known properties of existing materials and does not involve the improvement of materials.

[0033] As Figure 3 and Figures 5 - 6 shown, a plurality of liquid passing holes 14 are correspondingly formed on the plate bodies of the upper cover plate 6 and the lower cover plate 2, and connecting end pipes 15 are respectively connected inside the corresponding liquid passing holes 14 on the lower side of the upper cover plate 6 and the upper side of the lower cover plate 2. Fixed ring bodies 16 are respectively arranged at the connection ends of the connecting end pipes 15 and the packing tube 5. When fixedly connecting the packing tube 5 and the connecting end pipe 15, the quick-connect clamp 18 can be correspondingly buckled on the outer wall of the fixed ring body 16 to conveniently realize the fixed connection between the packing tube 5 and the connecting end pipe 15.

[0034] As Figures 5 - 10 shown, the fixed ring bodies 16 of the connecting end pipe 15 and the packing tube 5 are in contact with each other to form a trapezoidal cross-section structure. A plurality of trapezoidal clamping ring petals 17 are arranged at intervals in the circumferential direction of the fixed ring body 16. The cooperation of the plurality of trapezoidal clamping ring petals 17 can meet the preliminary buckling and limiting of the fixed ring bodies 16 with different diameter sizes. When initially fixing the large-size fixed ring body 16, the gap between two adjacent trapezoidal clamping ring petals 17 is larger; when initially fixing the small-size fixed ring body 16, the gap between two adjacent trapezoidal clamping ring petals 17 is smaller, thus increasing the use cost of the trapezoidal clamping ring petals 17. The trapezoidal clamping ring petals 17 of this structure can meet the preliminary fixed clamping between the packing tube 5 and the connecting end pipe 15, thereby reducing the difficulty of fixedly connecting the packing tube 5 through the quick-connect clamp 18 and improving the connection efficiency of the packing tube 5.

[0035] As Figure 7 shown, the quick-connect clamp 18 includes a hoop band 19 and connecting ear rings 191 formed by bending both ends of the hoop band 19. An installation position groove 192 is formed in the middle of the connecting ear ring 191 along the length direction of the hoop band 19; a positioning post 20 and a limiting post 22 are respectively connected inside the two connecting ear rings 191, and a connecting screw 21 for connecting the positioning post 20 and the limiting post 22 is arranged in the installation position groove 192. Rotating the connecting screw 21 can drive the positioning post 20 and the limiting post 22 to approach or move away from each other to realize the tensioning or relaxation of the hoop band 19.

[0036] In a preferred embodiment, as Figures 9 - 10 shown, a connecting screw hole 201 is provided on the positioning post 20, a positioning card slot 221 for clamping the connecting screw 21 is formed on the limiting post 22, and a clamping platform 222 is arranged at one end of the positioning card slot 221 corresponding to the screw head of the connecting screw 21. Rotating the connecting screw 21 can adjust its connecting position on the positioning post 20. When the quick-connect clamp 18 is connected, first, the connecting screw 21 is correspondingly clamped in the positioning card slot 221 of the limiting post 22, and the screw head of the connecting screw 21 is correspondingly supported on the clamping platform 222. Then, rotating the connecting screw 21 drives the positioning post 20 to approach the limiting post 22, and the fixed connection of the quick-connect clamp 18 can be realized. When the quick-connect clamp 18 is removed, rotating the connecting screw 21 drives the positioning post 20 away from the limiting post 22, so that the screw head of the connecting screw 21 relaxes the pressure on the clamping platform 222, and the connecting screw 21 can be easily rotated out of the positioning card slot 221, realizing the separation of both ends of the strap 19. The quick-connect clamp 18 with this kind of setting can quickly realize the fixed connection or disassembly of the packing pipe and the connecting end pipe, so as to facilitate the replacement and maintenance of the packing pipe.

[0037] As Figure 2 shown, a liquid distributor 7 corresponding to the liquid inlet pipe 9 is arranged on the upper side of the upper cover plate 6. The liquid distributor 7 includes a distribution frame 71 and a plurality of distribution balls 72 filled in the distribution frame 71. The liquid distributor 7 with this kind of structure can fully disperse the purified liquid entering through the liquid inlet pipe 9 and improve the liquid inlet uniformity of the purified liquid.

[0038] As Figure 1 and Figure 4 shown, a purification cavity is formed inside the purification pipe body 1 on the outer side of the packing pipe 5. A plurality of baffle plates 12 are arranged along the height direction inside the purification pipe body 1. The baffle plates 12 are supported in a net shape on the outer side of the pipe wall of the packing pipe 5. This structure of the baffle plates 12 can not only form a limiting support for a plurality of packing pipes 5, but also isolate and block the reaction solution entering the purification cavity, prolong the contact time between the reaction solution and the packing pipe 5, and thus improve the purification effect.

[0039] As Figure 1 shown, maintenance manholes 13 are respectively arranged on the upper and lower parts of the side wall of the purification pipe body 1. Entering the purification pipe body 1 through the maintenance manholes 13, the packing pipe 5 can be conveniently installed or disassembled. A skirt support 11 is arranged at the bottom end of the purification pipe body 1, and the purification pipe body 1 can be stably supported through the skirt support 11.

[0040] The above are the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present invention, several improvements and retouches can still be made, and these improvements and retouches should also be regarded as the protection scope of the present invention.

Claims

1. A purification device with corrosion-resistant filler, the purification device (100) comprising a purification tube body (1), the two ends of the purification tube body (1) are respectively connected to an upper head (8) and a lower head (3), the upper head (8) is isolated from the cavity of the purification tube body (1) by an upper cover plate (6), and the lower head (3) is isolated from the cavity of the purification tube body (1) by a lower cover plate (2); a liquid inlet pipe (9) is arranged at the top end of the upper head (8), and a liquid outlet pipe (10) is arranged at the bottom end of the lower head (3); characterized in that: A plurality of filling tubes (5) are evenly distributed between the upper cover plate (6) and the lower cover plate (2).

2. The purification device with corrosion-resistant filler according to claim 1, characterized in that: The stuffing tube (5) is made of conventional high-purity PFA or high-purity PTFE material; the stuffing tube (5) is a tube body with a diameter of 1 / 8, 1 / 4, 3 / 8, or 1 / 2, and a diameter-to-height ratio of 1:(1-5).

3. The purification device with corrosion-resistant filler according to claim 2, characterized in that: The tube wall of the filling tube (5) is evenly distributed with reaction holes (51), the reaction holes (51) are punched in a 180° straight line, the hole diameter is 0.3-0.8 mm, and the hole spacing is 0.5 mm.

4. The purification device with corrosion-resistant filler according to any one of claims 1 to 3, characterized in that: A plurality of liquid passage holes (14) are correspondingly provided on the plate bodies of the upper cover plate (6) and the lower cover plate (2), and connecting end tubes (15) are respectively connected in the corresponding liquid passage holes (14) on the lower side of the upper cover plate (6) and the upper side of the lower cover plate (2). The connecting ends of the connecting end tube (15) and the stuffing tube (5) are respectively provided with fixing ring bodies (16), and the fixing ring bodies (16) are connected to the stuffing tube (5) and the connecting end tube (15) via a quick-connect clamp (18).

5. The purification device with corrosion-resistant filler according to claim 4, characterized in that: The connecting end tube (15) abuts against the fixing ring body (16) of the filling tube (5) to form a trapezoidal cross-sectional structure, and a plurality of trapezoidal clamping ring petals (17) are arranged at intervals in the circumferential direction of the fixing ring body (16).

6. The purification device with corrosion-resistant filler according to claim 5, characterized in that: The quick-connect clamp (18) comprises a clamp band (19) and connecting earrings (191) formed by bending at both ends of the clamp band (19), and a mounting groove (192) is provided in the middle of the connecting earring (191) along the length direction of the clamp band (19); A positioning column (20) and a limiting column (22) are respectively connected to the two connecting earrings (191); a connecting screw (21) connecting the positioning column (20) and the limiting column (22) is arranged in the installation slot (192); rotating the connecting screw (21) can drive the positioning column (20) and the limiting column (22) to move closer or farther away from each other to achieve the tensioning or loosening of the hoop (19).

7. The purification device with corrosion-resistant filler according to claim 6, characterized in that: The positioning column (20) is provided with a connecting screw hole (201), the limiting column (22) is provided with a positioning slot (221) for the connecting screw rod (21) to be clamped, and a clamping platform (222) is provided at one end of the positioning slot (221) corresponding to the screw head of the connecting screw rod (21).

8. The purification device with corrosion-resistant filler according to claim 4, characterized in that: A liquid distributor (7) corresponding to the liquid inlet pipe (9) is arranged on the upper side of the upper cover plate (6), and the liquid distributor (7) comprises a distribution frame (71) and a plurality of distribution balls (72) filled in the distribution frame (71).

9. The purification device with corrosion-resistant filler according to claim 4, characterized in that: The purification tube body (1) is located outside the filling tube (5) to form a purification cavity. The purification tube body (1) is provided with multiple layers of baffles (12) along its height direction. The baffles (12) are supported in a mesh shape on the outside of the tube wall of the filling tube (5).

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