Chip test liquid sprayer device

Abstract

The utility model discloses a liquid sprayer device for chip testing. The liquid sprayer device comprises a base, a fine adjustment sliding table, an adapter arm, a liquid sprayer adapter plate and a liquid sprayer, the liquid sprayer is flexibly arranged and installed at the front end of the adapter arm through the liquid sprayer adapter plate, the rear end of the adapter arm is arranged and installed at the front end of the fine adjustment sliding table through one adapter plate, and the fine adjustment sliding table is arranged and installed on the base through the other adapter plate. According to the utility model, through the liquid sprayer adapter plate and the adapter arm, the liquid sprayer is flexibly arranged and installed at the front end of the fine adjustment sliding table, and the fine adjustment sliding table provides accurate position adjustment for the liquid sprayer in an X-axis, Y-axis and Z-axis space range, thereby adapting to the field of semiconductor testing. Meanwhile, the liquid sprayer adapter plate can be released by unscrewing and releasing fasteners in the fixing holes in the liquid sprayer adapter plate and the adjusting groove holes, so that the angle of the liquid sprayer is adjusted along the arcs of the adjusting groove holes, and a better liquid spraying effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor test probes, and particularly relates to a chip test liquid sprayer device. Background Art

[0002] With the rapid development of semiconductors, the requirements for testing semiconductor wafers are getting higher and higher. The testing methods for different chips are generally the same. Generally, a needle-poking test is carried out by contacting test probes with the PADs on the wafer.

[0003] However, during the testing process of some special chips, it is necessary to drop PBS solution at specific positions on the wafer devices to make the special positions of the devices conductive, and then carry out the needle-poking test work. In this testing mode, on the one hand, it is very difficult to integrate the liquid sprayer onto the test probe table, and on the other hand, it is very difficult to achieve automated liquid spraying processing. Summary of the Utility Model

[0004] The utility model provides a chip test liquid sprayer device that is convenient to use and simple to operate.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0006] A chip test liquid sprayer device includes a base, a fine-tuning slide table, a transfer arm, a liquid sprayer transfer plate, and a liquid sprayer; the liquid sprayer is flexibly arranged and installed at the front end of the transfer arm through the liquid sprayer transfer plate, the rear end of the transfer arm is arranged and installed at the front end of the fine-tuning slide table through a transfer plate, and the fine-tuning slide table is arranged and installed on the base through another transfer plate.

[0007] Furthermore, the liquid sprayer is arranged and installed on the outer side of the front end of the liquid sprayer transfer plate. Fixed holes and adjustment slot holes are regularly arranged at the rear end of the liquid sprayer transfer plate; a first threaded hole is arranged at the front end of the transfer arm corresponding to the position of the fixed block. The liquid sprayer transfer plate is fixed to the front end of the transfer arm by a fastener passing through the fixed hole and cooperating with the first threaded hole on the transfer arm; the adjustment slot hole is an arc-shaped slot hole, and a second threaded hole is arranged at the front end of the transfer arm within the area of the arc-shaped slot hole. The liquid sprayer transfer plate is flexibly fixed to the front end of the transfer arm with adjustable angle by another fastener passing through the adjustment slot hole and cooperating with the second threaded hole on the transfer arm.

[0008] Further, the fine adjustment slide includes an XY-axis differential slide and a Z-axis differential slide. The XY-axis differential slide is fixed to the upper end of the base through a first adapter plate. The Z-axis differential slide is vertically arranged at the front end of the XY-axis differential slide through a second adapter plate and forms the fine adjustment slide together with it. The rear end of the transfer arm is horizontally fixed to the front end of the Z-axis differential slide through a third adapter plate.

[0009] Further, the arc-shaped slot is a quarter circle.

[0010] Further, the base is a magnetic base and is provided with a magnetic switch for controlling opening and closing.

[0011] Further, the liquid sprayer is arranged obliquely downward and installed on the outer side of the front end of the liquid sprayer adapter plate.

[0012] The beneficial effects of the present utility model are as follows:

[0013] 1. Through the liquid sprayer adapter plate and the transfer arm, the liquid sprayer of the present utility model is flexibly arranged and installed at the front end of the fine adjustment slide, and the fine adjustment slide provides precise position adjustment for the liquid sprayer within the XYZ-axis space range, so as to adapt to the semiconductor testing field. At the same time, after loosening the fasteners in the fixing holes and adjustment slots of the liquid sprayer adapter plate, the liquid sprayer adapter plate can be released, and then the angle of the liquid sprayer can be adjusted along the arc of the adjustment slot to achieve a better liquid spraying effect.

[0014] 2. The present utility model uses a magnetic base as the base of the entire device. Through the magnetic base, the chip testing liquid sprayer device can be quickly adsorbed and positioned on the tabletop of the test probe station to achieve quick positioning and fixation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional structure diagram of the present utility model;

[0016] Figure 2 is Figure 1 a three-dimensional structure diagram from another perspective;

[0017] Figure 3 is Figure 1 a left side view;

[0018] The reference signs in the figures are:

[0019] 1, magnetic base, 101, magnetic switch, 2, fine adjustment slide, 21, XY-axis fine adjustment slide, 22, Z-axis fine adjustment slide, 201, differential head, 31, first adapter plate, 32, second adapter plate, 33, third adapter plate, 4, transfer arm, 401, first threaded hole, 402, second threaded hole, 5, liquid sprayer adapter plate, 501, fixing hole, 502, adjustment slot, 6, liquid sprayer. Detailed implementation manners

[0020] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe in detail the specific implementation manners of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this utility model belongs. The terms used herein in the description of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term “and / or” used herein includes any and all combinations of one or more of the related listed items.

[0022] As Figures 1-3 shown, the present utility model discloses a chip test sprayer device, which includes a base 1, a fine adjustment slide table 2, a transfer arm 4, a sprayer adapter plate 5, and a sprayer 6. Among them, the sprayer 6 is arranged and installed at the front end of the transfer arm 4 through the sprayer adapter plate 5. The rear end of the transfer arm 4 is arranged and installed at the front end of the fine adjustment slide table 2 through an adapter plate, and the fine adjustment slide table 2 is arranged and installed on the base 1 through an adapter plate.

[0023] Further, the base 1 adopts a magnetic base and is provided with a magnetic switch 101. Through the magnetic base 1, the chip test sprayer device of the present utility model can be quickly adsorbed and positioned on the table surface of the test probe station, realizing quick positioning and fixation.

[0024] Further, the fine adjustment slide table 2 includes an XY-axis differential slide table 21 and a Z-axis differential slide table 22. The XY-axis differential slide table 21 is fixed to the upper end of the magnetic base 1 through a first adapter plate 31, and the Z-axis differential slide table 22 is vertically arranged at the front end of the XY-axis differential slide table 21 through a second adapter plate 32. Among them, the XY-axis differential slide table 21 controls the moving position of the sprayer 6 on the horizontal plane, and the Z-axis differential slide table 22 controls the moving position of the sprayer 6 on the vertical plane. Thus, the moving position of the sprayer 6 within the spatial range can be controlled through the fine adjustment slide table 2. In cooperation with the magnetic base 1, the sprayer 6 can be integrated into the test probe station and used in cooperation with the test probe device.

[0025] Further, both the XY-axis differential slide table 21 and the Z-axis differential slide table 22 include manually adjustable differential heads 201, respectively forming an X-axis differential head, a Y-axis differential head, and a Z-axis differential head.

[0026] As shown Figure 1 in the figure, the rear end of the transfer arm 4 is horizontally fixed to the front end of the Z-axis differential slide 22 through the third transfer plate 33. The liquid sprayer 5 is flexibly arranged at the front end of the transfer arm 4, and together with the transfer arm 4, it forms an arm with an adjustable angle.

[0027] Furthermore, as shown Figure 2 and Figure 3 in the figure, fixing holes 501 and adjusting slot holes 502 are regularly arranged at the rear end of the liquid sprayer transfer plate 5. The fixing hole 501 is a standard through hole, and at the corresponding position at the front end of the transfer arm 4, a first threaded hole 401 is provided. The liquid sprayer transfer plate is fixed to the front end of the transfer arm 4 by bolts and other fasteners passing through the fixing hole 501 and mating with the first threaded hole on the transfer arm 4. The adjusting slot hole 502 is an arc-shaped slot hole, and at the front end of the transfer arm 4 within the arc region, a second threaded hole 402 is provided. The liquid sprayer transfer plate is flexibly fixed to the front end of the transfer arm 4 at an adjustable angle by bolts and other fasteners passing through the adjusting slot hole 502 and mating with the second threaded hole on the transfer arm 4.

[0028] Furthermore, the adjusting slot hole 502 is a quarter circle arc, so that an angle adjustment of 0° - 90° can be achieved. As shown Figure 3 in the figure, that is, the angle between the horizontal plane and the vertical plane is adjustable.

[0029] When the fasteners in the fixing hole 501 and the adjusting slot hole 502 are simultaneously loosened and released, the liquid sprayer transfer plate 5 can be released, and thus the angle of the liquid sprayer can be adjusted along the arc of the adjusting slot hole to achieve a better liquid spraying effect.

[0030] As shown Figure 1 in the figure, the liquid sprayer 6 is arranged and installed on the outer side of the front end of the liquid sprayer transfer plate 5. Among them, standard through holes are regularly arranged at the front end of the liquid sprayer transfer plate, and the liquid sprayer 6 is installed and fixed on the outer side of the front end of the liquid sprayer transfer plate 5 by bolts and other fasteners.

[0031] Furthermore, as shown Figure 1 and Figure 3 in the figure, the liquid sprayer 6 is arranged and installed obliquely on the outer side of the front end of the liquid sprayer transfer arm 5.

[0032] In order to facilitate the automatic liquid spraying of the chip testing liquid sprayer device of the present utility model, the computer host of the test probe table system communicates with the liquid sprayer controller through USB to RS232, so that the automatic liquid spraying and dotting of the liquid sprayer can be realized. The liquid spraying speed and the liquid spraying amount can also be controlled through the control software. At the same time, the liquid spraying angle of the liquid sprayer 6 is adjusted by the angle of the liquid sprayer transfer plate to achieve a better liquid spraying effect.

[0033] The specific embodiments described above further elaborate on the purpose, technical solutions, and beneficial effects of the present utility model. It should be understood that the above description is only for the specific embodiments of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A chip testing liquid sprayer device, characterized in that: It includes a base, a fine-tuning slide, an adapter arm, a sprayer adapter plate and a sprayer; the sprayer is flexibly arranged and installed on the front end of the adapter arm through the sprayer adapter plate, the rear end of the adapter arm is arranged and installed on the front end of the fine-tuning slide through an adapter plate, and the fine-tuning slide is arranged and installed on the base through another adapter plate.

2. A chip testing liquid sprayer device as claimed in claim 1, characterized in that: The sprayer is arranged and installed on the outer side of the front end of the sprayer adapter plate, and the rear end of the sprayer adapter plate is regularly provided with fixing holes and adjustment slots; the front end of the adapter arm at the position corresponding to the fixing hole is provided with a first threaded hole, and the sprayer adapter plate is fixed to the front end of the adapter arm by a fastener passing through the fixing hole and cooperating with the first threaded hole on the adapter arm; the adjustment slot is an arc-shaped slot, and the front end of the adapter arm located in the arc-shaped slot area is provided with a second threaded hole, and the sprayer adapter plate is flexibly fixed to the front end of the adapter arm with an adjustable angle by another fastener passing through the adjustment slot and cooperating with the second threaded hole on the adapter arm.

3. A chip testing liquid sprayer device as claimed in claim 2, characterized in that: The fine-tuning slide includes an XY-axis differential slide and a Z-axis differential slide. The XY-axis differential slide is fixed to the upper end of the base through a first adapter plate, and the Z-axis differential slide is vertically arranged at the front end of the XY-axis differential slide through a second adapter plate to form the fine-tuning slide; the rear end of the adapter arm is horizontally fixed to the front end of the Z-axis differential slide through a third adapter plate.

4. A chip testing liquid sprayer device as claimed in claim 2, characterized in that: The arc-shaped slot is in the form of a quarter of a circle.

5. A chip testing liquid sprayer device according to any one of claims 1 to 4, characterized in that: The base is a magnetic base and is provided with a magnetic switch for controlling opening and closing.

6. A chip testing liquid sprayer device as claimed in claim 5, characterized in that: The liquid sprayer is arranged to be tilted downward and installed on the outer side of the front end of the liquid sprayer adapter plate.

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