Three-axis motion platform for femtosecond laser processing

Abstract

The utility model discloses a three-axis motion platform for femtosecond laser processing, which comprises an X-axis assembly, a second-axis assembly, a third-axis assembly, a fourth-axis assembly, a fifth-axis assembly and a sixth-axis assembly, the Y-axis assembly comprises a Y-axis fixing part arranged on the X-axis moving part, a Y-axis moving part and a Y-axis air floatation supporting structure; the Z-axis assembly comprises a Z-axis fixing part arranged on the Y-axis moving part, a Z-axis moving part and a Z-axis air floatation supporting structure; wherein the Z-axis moving part is provided with a machined part mounting hole which is used for mounting a machined part to be machined; the support assembly comprises a supporting rod and three wire buckling holes formed in the top of the supporting rod, and the three wire buckling holes are used for buckling a Z-axis air pipe in the Z-axis air floatation supporting structure, a Z-axis cable in the Z-axis moving part and a Y-axis air pipe in the Y-axis air floatation supporting structure correspondingly. Through a convenient air pipe and cable management structure, the tension influence in the movement process is reduced to the minimum, and the high precision of the platform is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of precision instruments. More specifically, the utility model relates to a three-axis motion stage for femtosecond laser processing. Background Art

[0002] With the progress and development of technology, the requirements for the machining accuracy and quality of parts are getting higher and higher. Especially in microfabrication, micro-nano structure fabrication, photonic devices, high-density storage, medical and bioengineering, etc., traditional machining devices and technologies are difficult to meet the development requirements of modern manufacturing.

[0003] Due to its ultrafast time characteristics, ultra-high peak power and extremely strong focusing ability, femtosecond laser can achieve extremely high machining accuracy. The emergence of femtosecond laser is particularly crucial for high-end manufacturing technologies such as aviation, aerospace, and 3C. Femtosecond laser processing devices and technologies have also become an important means to solve the high-precision and high-quality machining of parts. To make full use of the characteristics of femtosecond laser, the supporting motion platform also needs to have higher running accuracy.

[0004] The motion stages for femtosecond laser processing in the prior art have the following defects: 1) There are problems with improper management of cables and air pipes in the motion stage. During the movement of the motion stage, especially during the movement of the air pipes, tension is easily generated, which affects the interaction between moving parts and is not conducive to ensuring the high precision of the overall motion stage; 2) The motion platform realized by the air-floating support form can only move in one direction (X-axis, Y-axis or Z-axis) and cannot move in three directions simultaneously.

[0005] Therefore, an improved motion stage for femtosecond laser processing is needed, which can minimize the influence of tension during the movement of cables and air pipes and is conducive to ensuring the high precision of the overall platform. Summary of the Utility Model

[0006] An object of the utility model is to solve at least the above problems and / or defects and provide at least the advantages described hereinafter.

[0007] The object of the utility model is to provide a three-axis motion stage for femtosecond laser processing, which uses a convenient management structure for air pipes and cables to minimize the influence of tension during the movement of cables and air pipes and is conducive to ensuring the high precision of the overall platform.

[0008] To achieve the object and other advantages according to the utility model, a three-axis motion stage for femtosecond laser processing is provided, including:

[0009] An X-axis component, which includes an X-axis fixed part, an X-axis moving part, and an X-axis air-floating support structure provided between the X-axis fixed part and the X-axis moving part;

[0010] A Y-axis component, which includes a Y-axis fixed component, a Y-axis moving component provided on an X-axis moving component, and a Y-axis air-floating support structure provided between the Y-axis fixed component and the Y-axis moving component;

[0011] A Z-axis component, which includes a Z-axis fixed component, a Z-axis moving component provided on the Y-axis moving component, and a Z-axis air-floating support structure provided between the Z-axis fixed component and the Z-axis moving component; wherein, a workpiece mounting hole is provided on the Z-axis moving component, which is used for mounting a workpiece to be processed;

[0012] A bracket component, which includes a support rod vertically provided on a workbench and three wire buckling holes provided at the top of the support rod. The three wire buckling holes are respectively used for buckling a Z-axis air pipe in the Z-axis air-floating support structure, a Z-axis cable in the Z-axis moving component, and a Y-axis air pipe in the Y-axis air-floating support structure.

[0013] Preferably, a wire buckling piece is provided in each wire buckling hole. Each wire buckling piece includes: a detachable outer frame adapted to the inner wall of the wire buckling hole, and an arc-shaped structure provided at both ends on the opposite surface of the outer frame. A groove is provided on the outer periphery of each outer frame, and an elastic member is embedded in the groove. The elastic member is adapted to the inner wall of the wire buckling hole; a rollable ball is embedded on the inner wall of each arc-shaped structure.

[0014] Preferably, the bracket component further includes a base provided on the workbench and a magnet block provided at the bottom of the base and magnetically attracted to the workbench. An insertion groove for inserting the support rod is provided at the top of the base.

[0015] Preferably, an X-axis air pipe joint is provided on the X-axis moving component, an X-axis air pipe guide seat and an X-axis cable guide seat are provided on the X-axis fixed component. One end of the X-axis air pipe in the X-axis air-floating support structure is connected to the X-axis air pipe joint, and the other end is guided and fixed through the air pipe guide seat; an X-axis junction box is provided on the X-axis moving component. One end of the X-axis cable in the X-axis moving component is led out from the joint of the X-axis junction box, and the other end is guided and fixed through the X-axis cable guide seat provided on the X-axis fixed component.

[0016] Preferably, a Y-axis junction box is provided on the Y-axis moving component. One end of the Y-axis cable in the Y-axis moving component is led out from the joint of the Y-axis junction box, and the other end extends to the X-axis fixed part for arrangement.

[0017] Preferably, an X-axis load plate is provided at the top of the X-axis moving component; 8 pairs of first fixed mounting holes are provided at corresponding positions on the X-axis load plate and the Y-axis fixed component. The X-axis load plate and the Y-axis fixed component are fixedly connected by screwing through the paired first fixed mounting holes.

[0018] Preferably, a Y-axis load plate is provided on the top of the Y-axis moving member; 12 pairs of second fixed mounting holes are provided at corresponding positions on the Y-axis load plate and the Z-axis fixed member, and the Y-axis load plate and the Z-axis fixed member are fixedly connected by screws passing through the paired second fixed mounting holes.

[0019] Preferably, the bottom of the base is an octagonal structure, and 4 third fixed mounting holes are symmetrically provided at the bottom of the base.

[0020] The utility model has at least the following beneficial effects:

[0021] First, the three-axis moving platform for femtosecond laser processing of the utility model uses a convenient management structure for air pipes and cables, minimizing the tension influence during the movement of the cables and air pipes, which is beneficial to ensuring the high precision of the overall platform.

[0022] Second, the three-axis moving platform for femtosecond laser processing of the utility model can simultaneously realize the movement in the X, Y, and Z directions, providing high-precision three-dimensional movement guarantee for the high-precision and high-quality realization of femtosecond laser processing.

[0023] Third, the fixed member and the moving member in each direction of the three-axis moving platform for femtosecond laser processing of the utility model are connected by an air-floating support structure, so that there is no contact between the fixed member and the moving member, further ensuring the ultra-high precision of the three-axis moving platform.

[0024] Fourth, the structures of each axis of the three-axis moving platform for femtosecond laser processing of the utility model are designed to be lightweight to ensure the small and compact overall structure.

[0025] Other advantages, objectives and features of the utility model will be partially reflected by the following description, and partially will also be understood by those skilled in the art through the research and practice of the utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic structural diagram of a three-axis moving platform for femtosecond laser processing in an embodiment of the utility model;

[0027] Figure 2 is Figure 1 the rear view of

[0028] Figure 3 is Figure 1 the right view of

[0029] Figure 4 is Figure 1 the front view of

[0030] Figure 5 is Figure 1Top view;

[0031] Figure 6 Figure 4 is a schematic diagram of the connection relationship between the X-axis assembly and the Y-axis assembly in an embodiment of the present utility model;

[0032] Figure 7 Figure 8 is a schematic diagram of the connection relationship between the Z-axis assembly and the Y-axis assembly in an embodiment of the present utility model;

[0033] Figure 8 Figure 12 is a schematic diagram of the structure of the bracket assembly in an embodiment of the present utility model;

[0034] Figure 9 Figure 16 is a schematic diagram of the structure of the bottom of the base in the bracket assembly in an embodiment of the present utility model;

[0035] Figure 10 Figure 20 is a schematic diagram of the system of the three-axis moving stage for femtosecond laser processing in an embodiment of the present utility model;

[0036] Figure 11 Figure 24 is a schematic diagram of the structure of the wire buckling member in an embodiment of the present utility model;

[0037] Figure 12 Figure 28 is a schematic diagram of the structure of the outer peripheral groove of the outer frame in an embodiment of the present utility model;

[0038] Reference numerals: 1: X-axis assembly, 100: X-axis load plate, 110: X-axis air pipe, 120: X-axis air pipe joint, 130: X-axis air pipe guide seat, 140: X-axis cable guide seat, 150: X-axis junction box, 2: Y-axis assembly, 200: Y-axis fixing member, 210: Y-axis load plate, 220: Y-axis cable, 230: Y-axis junction box, 240: connection head of Y-axis junction box, 3: Z-axis assembly, 300: Z-axis fixing member, 4: bracket assembly, 400: base, 401: insertion slot, 402: fixing slot, 410: support rod, 420: wire buckling hole, 430: wire buckling member, 431: outer frame, 432: arc structure, 433: groove, 434: elastic member, 435: ball, 440: magnet block, 450: third fixed mounting hole, 5: Z-axis air pipe, 6: Y-axis air pipe, 7: Z-axis cable, 8: first fixed mounting hole, 9: second fixed mounting hole, 10: workpiece, 11: scanning galvanometer, 12: control device and related lens group, 13: femtosecond laser. Detailed implementation manners

[0039] The following further describes the present utility model in detail with reference to the drawings, so that those skilled in the art can implement it according to the description in the specification.

[0040] It should be understood that terms such as "having", "including", and "comprising" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0041] It should be noted that in the description of the present utility model, the orientation or positional relationship indicated by terms such as "lateral", "longitudinal", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present utility model.

[0042] It should be noted that the control methods in the following embodiments are all conventional methods unless otherwise specified, and the device structures can be obtained from commercial channels unless otherwise specified.

[0043] As Figures 1 to 12 , the present utility model provides a three-axis motion stage for femtosecond laser processing, including:

[0044] An X-axis assembly 1, which includes an X-axis fixed part, an X-axis moving part, and an X-axis air-floating support structure provided between the X-axis fixed part and the X-axis moving part;

[0045] A Y-axis assembly 2, which includes a Y-axis fixed part 200 provided on the X-axis moving part, a Y-axis moving part, and a Y-axis air-floating support structure provided between the Y-axis fixed part 200 and the Y-axis moving part;

[0046] A Z-axis assembly 3, which includes a Z-axis fixed part 300 provided on the Y-axis moving part, a Z-axis moving part, and a Z-axis air-floating support structure provided between the Z-axis fixed part 300 and the Z-axis moving part; wherein, a workpiece mounting hole is provided on the Z-axis moving part 300 for mounting a workpiece 10 to be processed;

[0047] A bracket assembly 4, which includes a vertical rod 410 provided on the workbench and three wire buckling holes 420 provided at the top of the rod 410. The three wire buckling holes 420 are respectively used for buckling a Z-axis air pipe 5 in the Z-axis air-floating support structure, a Z-axis cable 7 in the Z-axis moving part, and a Y-axis air pipe 6 in the Y-axis air-floating support structure.

[0048] In the above embodiments, the structure of the X-axis component is the same as the overall structure in the patent named "Large Load Precision Air-Floating Linear Stage" (application number: 202121869806.6). Among them, the X-axis fixed component corresponds to the base in the patent, the X-axis moving component corresponds to the slide table assembly and the linear drive assembly in the patent, and the X-axis air-floating support structure corresponds to the two air-floating guide rails, the porous throttle air-floating block, the orifice throttle unit, and the air pipe in the patent; by loading airflows into both the porous throttle air-floating block and the orifice throttle unit, an air film can be formed between the side and bottom surfaces of the slide table assembly and the air-floating guide rails, realizing contactless sliding; the slide table assembly includes a top plate and side plates located on both sides of the top plate. Multiple bosses are provided at the bottom of the top plate, and the bottoms of the multiple bosses are respectively in contact with the tops of the two air-floating guide rails. The air outlet holes are provided on the bosses, and the bosses can be integrally formed with the top plate. The inner walls of the two side plates are respectively in contact with the side walls of the two air-floating guide rails. The design of the multiple bosses is in one-to-one contact with the air-floating guide rails. The two side plates overlap on the outside of the air-floating guide rails, and the combination of the two makes the contact and limit between the slide table assembly and the air-floating guide rails stable. By setting the air outlet holes on the bosses, the airflow of the orifice throttle unit is stable, and a stable air film can be formed between the top plate and the upper surface of the air-floating guide rail. The permanent magnets at the bottoms of the two side plates and the preloading plate installed at the bottom of the base together provide a constant preloading force in the vertical direction, enabling the slide table assembly to be stably located on the air-floating guide rails. The structure of the Y-axis component is the same as the overall structure in the patent named "Precision Air-Floating Linear Stage" (application number: 202121869713.3). Among them, the Y-axis fixed component 200 corresponds to the base in the patent, the Y-axis moving component corresponds to the air-floating slide table and the linear motor in the patent, and the air-floating function of the Y-axis air-floating support structure is realized by providing an air inlet on the outer wall of the air-floating slide table and multiple air outlet holes on the inner wall. Compressed gas is filled through the air inlet, and the compressed gas passes through the multiple air outlet holes into the gap between the air-floating slide table and the base, forming a thin air film to realize the air-floating function for suspending and supporting the air-floating slide table; at the same time, the two sides of the air-floating slide table and the two sides of the bottom of the base are magnetically attracted to each other, forming a load adsorption state between the two sides of the air-floating slide table and the two sides of the bottom of the base, realizing the magnetic preloading function; the positive pressure of the air-floating formed between the air-floating slide table and the base and the adsorption force of the magnetic preloading formed cooperate with each other, making the air-floating slide table and the base in a high-rigidity pulling state of both adsorption and repulsion, increasing the air-floating stiffness, and further improving the stability, running accuracy, and positioning accuracy. Through a pair of preloading plates and multiple permanent magnets located on any one of the preloading plates, the permanent magnet preloading function between the air-floating slide table and the base is realized, and the structure is stable, which is beneficial to ensuring the running accuracy and positioning accuracy; the multiple permanent magnets are evenly spaced along the length direction of the base, and the adsorption force of the permanent magnet preloading formed between the air-floating slide table and the base is balanced and stable. The multiple air outlet holes are evenly spaced on the inner wall of the air-floating slide table, and the positive pressure of the air-floating formed between the air-floating slide table and the base is balanced and stable. The uniform arrangement of the multiple permanent magnets and the multiple air outlet holes can improve the structural stability, and further is beneficial to improving the running accuracy and positioning accuracy.The structure of the Z-axis assembly is the same as the overall structure in the patent named "High-precision Vertical Motion Air-bearing Stage" (application number: 202122119524.0). Among them, the Z-axis fixed component corresponds to the fixed seat in the patent, the Z-axis moving component corresponds to the slide table in the patent, and the Z-axis air-bearing support structure corresponds to the air-bearing guide rail and the corresponding structure in the patent. The air-bearing function is realized by fixing a pair of preloading strips along the sliding direction of the slide table on both sides of the bottom surface of the air-bearing guide rail, and fixing permanent magnets corresponding to the preloading strips on both sides of the slide table. A magnetic adsorption state is formed between the preloading strips and the permanent magnets to achieve the permanent magnetic preloading function on both sides of the air-bearing guide rail and the slide table. An air pipe joint is arranged on the slide table. One end of the air pipe joint is connected to an air pipe, and the air pipe connected to the high-pressure gas equipment is fixed to the side of the slide table by an air pipe fixing clip, so that the air pipe moves together with the slide table. A transverse and a longitudinal air passage are also arranged on the slide table and are in communication with the other end of the air pipe joint. The transverse air passage is perpendicular and in communication with the longitudinal air passage. An air outlet for the vertical air-bearing guide rail is provided on the air passage, and a throttle air nozzle made of ruby material is inlaid at the air outlet of the air passage. A throttle small hole is provided at the end of the throttle air nozzle. After the high-pressure gas enters the air pipe on the slide table and then enters the air pipe joint, the air passage on the slide table is filled with gas. The gas in the air passage flows into the throttle small hole from the air outlet of the air passage. Through the throttling effect of the small hole, a stable air film is formed between the air-bearing guide rail and the slide table. Through the combined action of air film air-bearing support and permanent magnetic preloading, there is no contact friction between the air-bearing guide rail and the slide table when the slide table moves, ensuring the high precision of the vertical motion air-bearing stage.

[0049] After the X-axis assembly, Y-axis assembly, and Z-axis assembly are combined to form a three-axis motion stage, for the X-axis cable involved in the X-axis moving component and the X-axis air pipe involved in the X-axis air-bearing support structure; the Y-axis cable involved in the Y-axis moving component and the Y-axis air pipe involved in the Y-axis air-bearing support structure; the Z-axis cable involved in the Z-axis moving component and the Z-axis air pipe involved in the Z-axis air-bearing support structure, if the cable and air pipe management and layout are improper, during the movement of the three-axis motion stage, especially during the movement of the air pipe, it is easy to generate tension and affect each other, which is not conducive to ensuring the high precision of the overall platform. Among them, the X-axis cable and the X-axis air pipe are guided and fixed through the X-axis air pipe guide seat and the X-axis cable guide seat provided on the X-axis fixed component. The Y-axis cable extends to the X-axis fixed component and is arranged together with the X-axis cable and the X-axis air pipe through the X-axis air pipe guide seat and the X-axis cable guide seat. The Y-axis air pipe, Z-axis cable, and Z-axis air pipe pass through the bracket assembly provided by the present utility model. Three wire clamping holes 420 are provided at the top of the support rod and are respectively used for clamping the Z-axis air pipe 5 in the Z-axis air-bearing support structure, the Z-axis cable 7 in the Z-axis moving component, and the Y-axis air pipe 6 in the Y-axis air-bearing support structure. The influence of the tension during the movement of the cable and the air pipe is minimized, which is conducive to ensuring the high precision of the overall platform.

[0050] The respective movements of the X-axis component, Y-axis component, and Z-axis component are all driven by their respective motors and feedback information through the grating system, and their respective movements do not interfere with each other. If the linkage of the three axes is to be achieved, the linkage control of the three axes can be realized through the algorithm control of the controller.

[0051] In another embodiment, a wire clamping member 430 is provided in each wire clamping hole 420. Each wire clamping member 430 includes: a detachable outer frame 431 adapted to the inner wall of the wire clamping hole 420, and an arc-shaped structure 432 with both ends provided on the opposite surfaces of the outer frame 431. A groove 433 is provided on the outer periphery of each outer frame 431, and an elastic member 434 is embedded in the groove 433. The elastic member 434 is adapted to the inner wall of the wire clamping hole 420; a rollable ball 435 is embedded on the inner wall of each arc-shaped structure 432.

[0052] In the above embodiment, as Figure 11 and 12 shown, a wire clamping member 430 is provided in each wire clamping hole 420. By adapting the arc-shaped structure 432 to the circular cross-section of the cable or air pipe, the friction between the cable or air pipe and the wire clamping member 430 is reduced. By embedding a rollable ball 435 in the arc-shaped structure 432, when the three-axis moving platform moves, the cable and the air pipe move along with the corresponding moving parts, and the smoothness of the movement of the cable and the air pipe is improved by the rollable ball 435. When clamping the Z-axis air pipe 5, Z-axis cable 7, and Y-axis air pipe 6, first, the wire clamping member 430 is clamped to the inner wall of the wire clamping hole 420 through the elastic member 434. After one end of the Z-axis air pipe 5 is connected to the Z-axis moving part end and the other end is connected to the air source end, one end of the Z-axis cable 7 is connected to the linear motor in the Z-axis moving part and the other end is connected to the power supply, and one end of the Y-axis air pipe 6 is connected to the Y-axis moving part end and the other end is connected to the air source end, the Z-axis air pipe 5, Z-axis cable 7, and Y-axis air pipe 6 are respectively arranged in the corresponding arc-shaped structures 432, and then the wire clamping member 432, together with the wire clamping hole 420 and the arranged Z-axis air pipe 5, Z-axis cable 7, and Y-axis air pipe 6, is fixed to the support rod 410 by screws.

[0053] In another embodiment, the bracket assembly 4 further includes a base 400 provided on the workbench and a magnet block 440 provided at the bottom of the base 400 and magnetically attracted to the workbench. An insertion groove 401 for inserting the support rod 410 is provided at the top of the base 400.

[0054] In the above embodiment, as Figure 8 and 9As shown, a fixing groove 402 is provided at the bottom of the base 400 of the bracket assembly 4, and the magnet block 440 is fixed in the fixing groove 402. The bracket assembly 4 can be magnetically attracted to the workbench through the magnet block 440, improving the stability of the bracket assembly 4. By inserting the support rod 410 into the insertion groove 401, the stability of the support rod 410 is improved.

[0055] In another embodiment, an X-axis air pipe joint 120 is provided on the X-axis moving member, an X-axis air pipe guide seat 130 and an X-axis cable guide seat 140 are provided on the X-axis fixing member. One end of the X-axis air pipe 110 in the X-axis air floating support structure is connected to the X-axis air pipe joint, and the other end is guided and fixed through the air pipe guide seat; an X-axis junction box 150 is provided on the X-axis moving member, and one end of the X-axis cable in the X-axis moving member is led out from the joint of the X-axis junction box, and the other end is guided and fixed through the X-axis cable guide seat provided on the X-axis fixing member.

[0056] In the above embodiment, as Figure 2 and 3 shown, and in the patent "Large-load Precision Air-floating Linear Platform", an X-axis air pipe joint (corresponding to the air pipe joint in the patent) is provided on the X-axis moving member to load air flow into the porous throttle air-floating block and the small-hole throttle. An X-axis air pipe guide seat and an X-axis cable guide seat are provided on the X-axis fixing member (wherein, both the X-axis air pipe guide seat and the X-axis cable guide seat correspond to the dust-free drag chain in the patent, and the X-axis air pipe and the X-axis cable are both passed through it), which are used to pass through the X-axis air pipe 110 and the X-axis cable for providing power and signals to the X-axis moving member, so that the X-axis air pipe 110 and the X-axis cable are neatly managed and arranged, realizing the low-friction following movement of the X-axis air pipe 110 and the X-axis cable.

[0057] In another embodiment, a Y-axis junction box 230 is provided on the Y-axis moving member, and one end of the Y-axis cable 220 in the Y-axis moving member is led out from the connection head 240 of the Y-axis junction box, and the other end extends to the X-axis fixing member for sorting and arranging.

[0058] In the above embodiment, as Figure 4As shown, in the patent "Precision Air-Floating Linear Stage", one end of the Y-axis cable 220 is led out from the connection head 240 (corresponding to the connection head in the patent "Precision Air-Floating Linear Stage") of the Y-axis junction box 230 (corresponding to the junction box in the patent "Precision Air-Floating Linear Stage"), and the other end extends to the X-axis fixing member. The X-axis air pipe and the X-axis cable are both arranged and fixed in a dust-free drag chain. The cable of the grating reading head passes through the wire groove provided on the Y-axis fixing member (corresponding to the base in the patent "Large-Load Precision Air-Floating Linear Stage") and penetrates into the Y-axis junction box 230, and is connected to its corresponding connection head, so that the cable of the linear motor (Y-axis cable 220) and the cable of the grating reading head are fixed during the operation of the Y-axis moving member, optimizing the layout of the cables, which can avoid the cables affecting the operation of the Y-axis moving member (corresponding to the air-floating slide in the patent), and is beneficial to further improving the operation accuracy and positioning accuracy.

[0059] In another embodiment, an X-axis load plate 100 is provided on the top of the X-axis moving member; 8 pairs of first fixed mounting holes 8 are provided at corresponding positions on the X-axis load plate 100 and the Y-axis fixing member 200, and the X-axis load plate is fixedly connected to the Y-axis fixing member 200 by screws passing through the paired first fixed mounting holes 8.

[0060] In the above embodiment, as Figure 6 shown, in the patents "Large-Load Precision Air-Floating Linear Stage" and "Precision Air-Floating Linear Stage", an X-axis load plate 100 (corresponding to the top plate in the patent "Large-Load Precision Air-Floating Linear Stage") is provided on the X-axis moving member. 8 first fixed mounting holes 8 are provided on the X-axis load plate 100, and 8 first fixed mounting holes 8 are also provided at corresponding positions on the Y-axis fixing member 200 (corresponding to the base in the patent "Precision Air-Floating Linear Stage"). The X-axis load plate 100 is fixedly connected to the Y-axis fixing member 200 by screws passing through 8 pairs of corresponding first fixed mounting holes 8 to realize the connection between the X-axis assembly and the Y-axis assembly.

[0061] In another embodiment, a Y-axis load plate 210 is provided on the top of the Y-axis moving member; 12 pairs of second fixed mounting holes 9 are provided at corresponding positions on the Z-axis fixing member 300 and the Y-axis load plate 210, and the Y-axis load plate 210 is fixedly connected to the Z-axis fixing member 300 by screws passing through the paired second fixed mounting holes 9.

[0062] In the above embodiment, as Figure 7As shown, in the patents "Precision Air-Floating Linear Stage" and "High-Precision Vertical-Motion Air-Floating Stage", 12 second fixed mounting holes 9 are provided on the Y-axis load plate 210 (corresponding to the top plate of the air-floating slide 3 in the patent "Precision Air-Floating Linear Stage"), and 12 second fixed mounting holes 9 are also provided at corresponding positions on the Z-axis fixing member 300 (corresponding to the fixed base in the patent "High-Precision Vertical-Motion Air-Floating Stage"). The Y-axis load plate 210 and the Z-axis fixing member 300 are fixedly connected by screws passing through 12 pairs of corresponding second fixed mounting holes 9 to realize the connection of the Y-axis assembly and the Z-axis assembly.

[0063] In another embodiment, the bottom of the base 400 is an octagonal structure, and 4 third fixed mounting holes 450 are symmetrically provided at the bottom of the base 400. The 4 third fixed mounting holes 450 penetrate through the base 400. When the bracket assembly 4 cannot be magnetically fixed to the workbench by the magnet block 440, screws can be used to pass through the 4 fixed mounting holes to fixedly install the workbench, thereby ensuring the stability of the bracket assembly 4.

[0064] One of the best embodiments of the present invention is:

[0065] As Figures 1 to 12 , a three-axis motion stage for femtosecond laser processing, comprising:

[0066] An X-axis assembly 1, which includes an X-axis fixing member, an X-axis moving member, and an X-axis air-floating support structure provided between the X-axis fixing member and the X-axis moving member;

[0067] A Y-axis assembly 2, which includes a Y-axis fixing member 200 provided on the X-axis moving member, a Y-axis moving member, and a Y-axis air-floating support structure provided between the Y-axis fixing member 200 and the Y-axis moving member;

[0068] A Z-axis assembly 3, which includes a Z-axis fixing member 300 provided on the Y-axis moving member, a Z-axis moving member, and a Z-axis air-floating support structure provided between the Z-axis fixing member 300 and the Z-axis moving member; wherein, a workpiece mounting hole is provided on the Z-axis moving member 300 for mounting a workpiece 10 to be processed;

[0069] A bracket assembly 4, which includes a vertical rod 410 provided on the workbench and three wire buckling holes 420 provided at the top of the rod 410. The three wire buckling holes 420 are respectively used for buckling the Z-axis air pipe 5 in the Z-axis air-floating support structure, the Z-axis cable 7 in the Z-axis moving member, and the Y-axis air pipe 6 in the Y-axis air-floating support structure;

[0070] Each wire buckling hole 420 is provided with a wire buckling member 430. Each wire buckling member 430 includes a detachable outer frame 431 adapted to the inner wall of the wire buckling hole 420, and arc-shaped structures 432 provided at both ends on the opposite surfaces of the outer frame 431. A groove 433 is provided on the outer periphery of each outer frame 431, and an elastic member 434 is embedded in the groove 433. The elastic member 434 is adapted to the inner wall of the wire buckling hole 420; a rollable ball 435 is embedded on the inner wall of each arc-shaped structure 432;

[0071] The support assembly 4 further includes a base 400 provided on the workbench and a magnet block 440 provided at the bottom of the base 400 and magnetically attracted to the workbench. An insertion slot 401 for inserting the support rod 410 is provided at the top of the base 400;

[0072] Among them, the structure of the X-axis assembly is the same as the overall structure in the patent named "Large-load Precision Air-bearing Linear Stage", the structure of the Y-axis assembly is the same as the overall structure in the patent named "Precision Air-bearing Linear Stage", and the structure of the Z-axis assembly is the same as the overall structure in the patent named "High-precision Vertical Motion Air-bearing Stage". An X-axis load plate 100 is provided at the top of the X-axis moving part; 8 pairs of first fixed mounting holes 8 are provided at corresponding positions on the X-axis load plate 100 and the Y-axis fixed part 200. The X-axis load plate and the Y-axis fixed part 200 are fixedly connected by screws passing through the paired first fixed mounting holes 8 to realize the connection between the X-axis assembly and the Y-axis assembly; a Y-axis load plate 210 is provided at the top of the Y-axis moving part; 12 pairs of second fixed mounting holes 9 are provided at corresponding positions on the Z-axis fixed part 300 and the Y-axis load plate 210. The Y-axis load plate 210 and the Z-axis fixed part 300 are fixedly connected by screws passing through the paired second fixed mounting holes 9 to realize the connection between the Y-axis assembly and the Z-axis assembly.

[0073] The operation steps of the three-axis motion stage for femtosecond laser processing in this embodiment are as follows:

[0074] 1) The X-axis load plate and the Y-axis fixed part 200 are fixedly connected by screws passing through the paired first fixed mounting holes 8 to realize the connection between the X-axis assembly and the Y-axis assembly. The Y-axis load plate 210 and the Z-axis fixed part 300 are fixedly connected by screws passing through the paired second fixed mounting holes 9 to realize the connection between the Y-axis assembly and the Z-axis assembly;

[0075] 2) One end of the X-axis air pipe 110 in the X-axis air-bearing support structure is connected to the X-axis air pipe joint, and the other end is guided and fixed through the air pipe guide seat on the X-axis fixed part; one end of the X-axis cable in the X-axis moving part is led out from the joint of the X-axis junction box, and the other end is guided and fixed through the X-axis cable guide seat provided on the X-axis fixed part;

[0076] 3) Export one end of the Y-axis cable 220 from the connector of the Y-axis junction box, and extend the other end to the X-axis fixture for arrangement.

[0077] 4) Snap the wire clamping member 430 onto the inner wall of the wire clamping hole 420 through the elastic member 434. After one end of the Z-axis air pipe 5 is connected to the Z-axis moving part end and the other end is connected to the air source end, and one end of the Z-axis cable 7 is connected to the linear motor in the Z-axis moving part and the other end is connected to the power supply, and one end of the Y-axis air pipe 6 is connected to the Y-axis moving part end and the other end is connected to the air source end, arrange the Z-axis air pipe 5, the Z-axis cable 7, and the Y-axis air pipe 6 in the corresponding arc-shaped structure 432 respectively. Then, fix the wire clamping member 432 together with the wire clamping hole 420 and the arranged Z-axis air pipe 5, Z-axis cable 7, and Y-axis air pipe 6 onto the support rod 410 through screws.

[0078] 5) Fix the workpiece 10 in the mounting hole on the Z-axis moving part, turn on the femtosecond laser 13, and perform femtosecond laser processing through the mutual cooperation of the scanning galvanometer 11, the control device, and the relevant lens group 12. Through steps 2), 3), and 4), the X-axis air pipe, X-axis cable, Y-axis air pipe, Y-axis cable, Z-axis air pipe, and Z-axis cable are managed in an orderly and convenient manner, minimizing the tension impact during the movement of the cables and air pipes, which is beneficial to ensuring the high precision of the overall platform.

[0079] Although the embodiments of the present utility model have been disclosed as above, it is not limited to the applications listed in the specification and embodiments. It can be fully applied to various fields suitable for the present utility model. For those familiar with the field, additional modifications can be easily achieved. Therefore, without departing from the general concept defined by the claims and the equivalent scope, the present utility model is not limited to the specific details and the illustrated and described examples here.

Claims

1. A three-axis motion table for femtosecond laser processing, characterized in that: include: An X-axis assembly includes an X-axis fixed component, an X-axis moving component, and an X-axis air-floating support structure disposed between the X-axis fixed component and the X-axis moving component; The Y-axis assembly comprises a Y-axis fixed component arranged on the X-axis moving component, a Y-axis moving component, and a Y-axis air-floating support structure arranged between the Y-axis fixed component and the Y-axis moving component; A Z-axis assembly, comprising a Z-axis fixed component arranged on a Y-axis moving component, a Z-axis moving component, and a Z-axis air-floating support structure arranged between the Z-axis fixed component and the Z-axis moving component; wherein the Z-axis moving component is provided with a workpiece mounting hole, which is used to mount the workpiece to be processed; The bracket assembly includes a support rod vertically arranged on the workbench and three buckle wire holes arranged on the top of the support rod, and the three buckle wire holes are respectively used to buckle the Z-axis air pipe in the Z-axis air floating support structure, the Z-axis cable in the Z-axis moving component, and the Y-axis air pipe in the Y-axis air floating support structure.

2. The three-axis motion table for femtosecond laser processing according to claim 1, characterized in that: A thread fastening piece is provided in each thread fastening hole, and each thread fastening piece includes: a detachable outer frame adapted to the inner wall of the thread fastening hole, and arc structures with two ends arranged on opposite surfaces of the outer frame. A groove is provided on the outer periphery of each outer frame, and an elastic piece is embedded in the groove, and the elastic piece is adapted to the inner wall of the thread fastening hole; a rollable ball is embedded on the inner wall of each arc structure.

3. The three-axis motion table for femtosecond laser processing according to claim 1, characterized in that: The bracket assembly also includes a base arranged on the workbench and a magnet block arranged at the bottom of the base and magnetically attracted to the workbench. The top of the base is provided with an insertion groove for the support rod to be inserted.

4. The three-axis motion table for femtosecond laser processing according to claim 1, characterized in that: An X-axis air pipe joint is provided on the X-axis moving component, an X-axis air pipe guide seat and an X-axis cable guide seat are provided on the X-axis fixed component, one end of the X-axis air pipe in the X-axis air floating support structure is connected to the X-axis air pipe joint, and the other end is guided and fixed by the air pipe guide seat; an X-axis junction box is provided on the X-axis moving component, one end of the X-axis cable in the X-axis moving component is led out from the joint of the X-axis junction box, and the other end is guided and fixed by the X-axis cable guide seat provided on the X-axis fixed component.

5. The three-axis motion table for femtosecond laser processing according to claim 4, characterized in that: The Y-axis moving component is provided with a Y-axis junction box, one end of the Y-axis cable in the Y-axis moving component is led out from the connector of the Y-axis junction box, and the other end extends to the X-axis fixing part for arrangement.

6. The three-axis motion table for femtosecond laser processing according to claim 1, characterized in that: An X-axis load plate is provided on the top of the X-axis moving component; 8 pairs of first fixed mounting holes are provided at corresponding positions on the X-axis load plate and the Y-axis fixed component, and the X-axis load plate is fixedly connected to the Y-axis fixed component by screws passing through the paired first fixed mounting holes.

7. The three-axis motion table for femtosecond laser processing according to claim 1, characterized in that: A Y-axis load plate is provided on the top of the Y-axis moving component; 12 pairs of second fixed mounting holes are provided at corresponding positions on the Z-axis fixed component and the Y-axis load plate, and the Y-axis load plate is fixedly connected to the Z-axis fixed component by screws passing through the paired second fixed mounting holes.

8. The three-axis motion table for femtosecond laser processing according to claim 3, characterized in that: The bottom of the base is an octagonal structure, and four third fixing holes are symmetrically arranged on the bottom of the base.

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