Anti-crystallization water spraying device of semiconductor grinding machine

Abstract

The utility model discloses an anti-crystallization water spraying device of a semiconductor grinding machine, which consists of a base, a base bracket, a handle, a cross pan head screw, an O-shaped ring, an inner connecting pipe, a slotted flat-end set screw, a ceramic bead, a spherical pipe, a connecting nut, a tail connecting pipe and an atomizing nozzle. The multi-angle rotation of the water spraying device is realized by arranging the spherical pipe and the atomizing nozzle, so that water is sprayed to a chip at all angles to remove polishing liquid, the free disassembly of the water spraying device can be realized by arranging the detachable base bracket, the installation is convenient, and the equipment cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor grinding, in particular to an anti-crystallization water spraying device for a semiconductor grinding machine. Background Technique

[0002] There is an important process in chip manufacturing called Chemical Mechanical Polishing, abbreviated as CMP. CMP injects a special liquid called polishing liquid between the wafer and the polishing pad. There are two main components in the polishing liquid: one is an etching solvent, which can chemically corrode the surface of the wafer; the other is fine abrasive particles, which can physically grind the surface of the wafer. However, since the polishing liquid will crystallize after spraying and cause inconvenience in subsequent processes, it is necessary to remove the polishing liquid.

[0003] The existing method for removing the polishing liquid is only to spray water on the chip surface through a fixed nozzle. Since the nozzle is fixedly connected to the water outlet pipe and cannot rotate, there will be dead corners when the nozzle sprays on the chip, and the residual polishing liquid cannot be removed. Moreover, in the prior art, the nozzle is generally fixed at the water pipe of the grinding machine and cannot be disassembled, resulting in high use costs. Content of the Utility Model

[0004] The purpose of the utility model is to provide an anti-crystallization water spraying device for a semiconductor grinding machine, which can solve the problem that in the prior art, the nozzle is fixedly connected, and there will be dead corners when the nozzle cannot rotate and spray on the chip, and the residual polishing liquid cannot be removed.

[0005] To solve the above problems, the utility model provides an anti-crystallization water spraying device for a semiconductor grinding machine, including: a cuboid base, a base bracket, a handle, an inner connecting pipe, a connecting nut, a tail connecting pipe, and an atomizing nozzle. Four screw limiting holes and a water passing port are provided on the outer surface of the lower side of the base. The base bracket is composed of two mutually perpendicular metal sheets. One metal sheet is provided with a base limiting hole with the same position and size as the screw limiting hole. The base limiting hole is spirally and fixedly connected to the lower side of the base through a cross-recessed pan head screw. The other metal sheet is provided with a fixing screw hole for the base bracket;

[0006] A handle limiting hole is provided on the outer surface of the left side of the base. The handle is provided with a threaded limiting post. The handle is spirally connected to the handle limiting hole on the outer surface of the left side of the base through the threaded limiting post;

[0007] The front outer surface of the base is provided with a pipe screw hole having the same diameter as the inner pipe. A double-layer O-ring is provided along the periphery of the hole. One end of the inner pipe is provided with a hollow threaded column. The pipe screw hole is rotationally connected to the hollow threaded column through the O-ring. A slotted flat-end set screw is provided on the pipe wall of the inner pipe. A ceramic bead is slidably provided at the opening of the slotted flat-end set screw and the pipe wall. The upper and lower pipe walls of the inner pipe are rotationally connected through the ceramic bead. The outer wall of the other end of the inner pipe is provided with a thread, and the inner wall is a tapered opening. The diameter of the tapered opening is larger than the diameter of the spherical part of the spherical pipe. The spherical part of the spherical pipe is slidably sleeved in the tapered opening. The connecting nut is cylindrical. A helix is provided in the wall of the larger opening end of the connecting nut. The connecting nut is helically connected to the thread on the outer wall of the other end of the inner pipe through the thread. The diameter of the other end of the connecting nut is smaller than the diameter of the spherical part of the spherical pipe. One end of the spherical pipe is provided with a cylindrical hollow threaded pipe. The diameter of the hollow threaded pipe is the same as the diameter of the other end of the connecting nut. The tail pipe is provided with a double-thread nested hole. The spherical pipe passes through the other end of the connecting nut through the hollow threaded pipe and is screwed and connected to one of the double-thread nested holes in the tail pipe. A hollow spiral column is provided below the atomizing nozzle. The atomizing nozzle is screwed and connected to the other hole of the double-thread nested hole in the tail pipe through the hollow spiral column. The atomizing nozzle is composed of three-layer cylindrical metal parts. The metal parts include: a bottom-layer metal circular fixing plate, a middle-layer metal hexagonal screw thread, and a top-layer metal circular atomizing water spray head. The atomizing water spray head is screwed and connected to the fixing plate through the screw thread.

[0008] In a preferred embodiment, 28 ceramic beads are provided at the opening of the slotted flat-end set screw.

[0009] In a preferred embodiment, a concave strip-shaped anti-slip structure is provided around the connecting nut.

[0010] In a preferred embodiment, the water outlet of the atomizing water spray head is in a cross shape.

[0011] In a preferred embodiment, an arrow mark is provided below the base to indicate the water outlet direction.

[0012] In a preferred embodiment, the middle of the handle is in a concave anti-slip structure.

[0013] In a preferred embodiment, the O-ring is made of rubber material.

[0014] The beneficial effects of the present utility model are as follows: The present utility model can realize the multi-angle rotation of the water spraying device through the spherical pipe and the atomizing nozzle, and spray water at various angles of the chip to remove the polishing liquid. It can realize the free disassembly of the water spraying device, facilitate installation, and reduce the equipment cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;

[0016] Figure 2Schematic diagram of the bottom view of the present utility model;

[0017] Figure 3 Schematic diagram of the three-dimensional structure of the base of the present utility model;

[0018] Figure 4 Schematic diagram of the three-dimensional structure of the inner connecting pipe of the present utility model;

[0019] Figure 5 Schematic diagram of the three-dimensional structure of the spherical tube of the present utility model;

[0020] Figure 6 Schematic diagram of the three-dimensional structure of the tail connecting pipe of the present utility model;

[0021] Figure 7 Schematic diagram of the three-dimensional structure of the atomizing nozzle of the present utility model;

[0022] Figure 8 Schematic diagram of the three-dimensional structure of the handle of the present utility model;

[0023] Legend: 1. Base; 101. Screw limit hole; 102. Water passing hole; 103. Handle limit hole; 104. Pipe screw hole; 2. Base bracket; 3. Handle; 301. Thread limit post; 4. Cross recessed pan head screw; 5. O-ring; 6. Inner connecting pipe; 601. Hollow threaded column; 7. Slotted cheese head set screw; 8. Ceramic bead; 9. Spherical tube; 901. Cylindrical hollow threaded tube; 10. Connecting nut; 11. Tail connecting pipe; 111. Double-pass threaded nested hole; 12. Atomizing nozzle; 121. Hollow spiral column; 122. Fixed plate; 123. Screw thread; 124. Atomizing water spray head. Detailed implementation manners

[0024] Combined with the description in the attached Figure 1-8The specific use method of the utility model in actual work is specifically introduced. The utility model sets a base bracket, fixes the base fixing screw hole at the center of the other end of the base bracket to the chip production environment through bolts, and selects a suitable installation angle according to the chip position and the mechanical structure of the on-site device. The water outlet is connected to the water outlet below the base 1, and the water flow switch is realized by the handle 3 on the left side of the base 1. The base is spirally connected to one end of the inner pipe 6 through the spiral interface above, and the water flows through the water outlet to the inner pipe 6. A slotted flat-end set screw 7 is provided on the pipe wall of the inner pipe 6. The slotted flat-end set screw fixes the base 1 and the inner pipe 6 to prevent the base from being separated from the inner pipe due to excessive water pressure. A load-bearing channel is provided on the inner side of the opening of the slotted flat-end set screw 7 and passes through the pipe wall of the inner pipe 6. A freely movable ceramic bead 8 is installed in the load-bearing channel. The ceramic bead 8 blocks the high-pressure water flow and diverts it into multiple water flow branches with lower water pressure. The water flows through the inner pipe 6 to the other end of the inner pipe 6. The opening at the other end of the inner pipe 6 is a conical opening with a diameter larger than that of the spherical tube 9. The conical opening allows the spherical part of the spherical tube 9 to be freely embedded in the conical opening, and the circular part of the spherical tube is sleeved on the conical opening through the connecting nut 10. The mouth of the spherical tube 9 is prevented from being pressed out by excessive water pressure. Since the circular part of the spherical tube 9 is movably connected in the conical opening, the spherical tube 9 can rotate freely under the pressure generated by the water flow. A cylindrical hollow threaded tube 901 is provided at the other end of the spherical tube 9. Since the tail pipe adopts a double-pass threaded nesting hole 111, the cylindrical hollow threaded tube 901 is connected to a channel of the double-pass threaded nesting hole 111 by screwing. The other end of the double-pass threaded nesting hole 111 is connected to an atomizing nozzle 12 with a spiral column by a spiral connection. The atomizing nozzle is composed of a three-layer metal body, namely a bottom metal circular fixing plate 122, a middle metal hexagonal screw buckle 123, and a top metal circular atomizing water spray head 124. The screw buckle 123 is connected to the atomizing water spray head 124 through a track sliding connection. When the screw buckle 123 is stationary, the atomizing water spray head 124 will start to rotate due to the water pressure generated by the water flow.

[0025] Combination Figure 1 The spherical tube 9 rotates in the vertical direction in the connecting nut, thereby driving the tail pipe 11 and the atomizing nozzle 12 to rotate in a circle with the cylindrical hollow threaded tube 901 as the center, which is equivalent to the nozzle spraying water in the vertical direction. On this basis, the atomizing nozzle will also rotate under the action of water pressure. Figure 1 The rotation of the atomizing water spray head is equivalent to the rotation in the horizontal direction, so the utility model realizes water spray coverage in both the horizontal and vertical directions.

[0026] The foregoing has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments, and what is described in the above embodiments and the specification is only to illustrate the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A water spray device for preventing crystallization of a semiconductor grinding machine, characterized in that: include: A rectangular parallelepiped base (1), a base bracket (2), a handle (3), an inner pipe (6), a connecting nut (10), a tail pipe (11), and an atomizing nozzle (12); the outer surface of the lower side of the base (1) is provided with four screw limiting holes (101) and a water outlet (102); the base bracket (2) is composed of two mutually perpendicular metal sheets, one of the metal sheets is provided with a base limiting hole having the same position and size as the screw limiting hole (101); the base limiting hole is used to screw the base bracket (2) to the lower side of the base (1) via a cross pan head screw (4); and the other metal sheet is provided with a base bracket fixing screw hole; The left outer surface of the base (1) is provided with a handle limiting hole (103), the handle (3) is provided with a threaded limiting column (301), and the handle (3) is screwed to the handle limiting hole (103) on the left outer surface of the base (1) through the threaded limiting column (301); The front outer surface of the base (1) is provided with a pipe screw hole (104) having the same diameter as the pipe of the inner pipe (6); a double-layer O-ring (5) is provided along the outer periphery of the pipe screw hole (104); a hollow threaded column (601) is provided at one end of the inner pipe (6); the pipe screw hole (104) is rotatably connected to the hollow threaded column (601) through the O-ring (5); a slotted flat-end set screw (7) is provided on the pipe wall of the inner pipe (6); a ceramic bead (8) is slidably provided at the opening between the slotted flat-end set screw (7) and the pipe wall; The upper and lower tube walls of the inner tube (6) are rotatably connected via a ceramic bead (8); a thread is provided on the outer wall of the tube opening at the other end of the inner tube (6); the inner wall is a conical opening; the diameter of the conical opening is larger than the diameter of the spherical tube (9); the spherical part of the spherical tube (9) is slidably fitted into the conical opening; the connecting nut (10) is cylindrical; a spiral is provided in the wall of the end with the larger opening of the connecting nut (10); the connecting nut (10) is spirally connected to the thread of the outer wall of the other end of the inner tube (6) via a thread; the other end of the connecting nut (10) is The diameter of the end of the spherical tube (9) is smaller than the diameter of the sphere of the spherical tube (9); a cylindrical hollow threaded tube (901) is provided at one end of the spherical tube (9); the diameter of the hollow threaded tube (901) is the same as the diameter of the other end of the connecting nut (10); the tail connecting tube (11) is provided with a double-threaded nesting hole (111); the spherical tube (9) passes through the other end of the connecting nut (10) through the hollow threaded tube (901) and is screwed to one of the double-threaded nesting holes (111) in the tail connecting tube (11); and a hollow threaded hole (111) is provided below the atomizing nozzle (12). The atomizing nozzle (12) is connected to another hole of the double-threaded nested hole (111) in the tail pipe (11) by screwing the hollow spiral column (121). The atomizing nozzle (12) is composed of three layers of columnar metal parts, and the metal parts include: a bottom metal part circular fixed disk (122), a middle metal part hexagonal screw buckle (123), and a top metal part circular atomizing water spray head (124). The atomizing water spray head (124) is screwed to the fixed disk (122) by the screw buckle (123).

2. The semiconductor grinding machine anti-crystallization water spraying device according to claim 1, characterized in that: 28 ceramic beads (8) are arranged at the opening of the slotted flat-end set screw (7).

3. The semiconductor grinding machine anti-crystallization water spraying device according to claim 1, characterized in that: The connection nut (10) is provided with a concave strip-shaped anti-slip structure around its periphery.

4. The semiconductor grinding machine anti-crystallization water spraying device according to claim 1, characterized in that: The water outlet of the atomizing water spray head (124) is in a cross shape.

5. The semiconductor grinding machine anti-crystallization water spraying device according to claim 1, characterized in that: An arrow mark is provided below the base (1) to mark the water outlet direction.

6. The semiconductor grinding machine anti-crystallization water spraying device according to claim 1, characterized in that: The middle of the handle (3) is a concave anti-slip structure.

7. The anti-crystallization water spraying device for a semiconductor grinding machine according to claim 1, characterized in that: The O-ring (5) is made of rubber material.

Images