Vacuum evaporation feeding device

Abstract

The utility model provides a vacuum evaporation feeding device. The vacuum evaporation feeding device is provided with an evaporation cavity with three open cavities; the vacuum cavity is hermetically communicated with one of the three openings of the evaporation cavity and forms a cavity body with a vacuum environment inside; the material tank is connected with another opening of the three openings of the evaporation cavity in a sealing manner and is used for supplying a liquid raw material for coating stored in the material tank to the evaporation cavity through a pipeline; the vacuum electrode assembly is connected with the remaining opening of the three openings of the evaporation cavity and can seal the opening in a detachable mode; the heating sheet is arranged in the evaporation cavity and is electrically connected with the vacuum electrode assembly; and the evaporation dish assembly is configured in the evaporation cavity in a manner of accommodating the liquid raw material from the charging bucket, is configured above the heating sheet in a manner of being in surface contact with the heating sheet, and is electrically connected with the vacuum electrode assembly. According to the utility model, the coating material can enter a vacuum environment in a liquid form and is evaporated in the vacuum environment.

Description

Technical Field

[0001] The present invention belongs to the field of vacuum coating, and particularly relates to a vacuum evaporation feeding device. Background Art

[0002] Vacuum coating is an important aspect in the field of vacuum applications. It refers to a method of heating a metal or non-metal material under high vacuum conditions to evaporate it and condense it on the surface of the workpiece to form a thin film. Currently, vacuum coating technologies are generally divided into physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology, and the methods of vacuum coating mainly include vacuum evaporation coating, vacuum sputtering coating, vacuum ion plating, vacuum beam deposition, chemical vapor deposition, etc. Among them, except for chemical vapor deposition, various coating processes require a specific vacuum environment and an evaporation source or target to convert the raw materials for film evaporation into gas.

[0003] Specifically, as Figure 3 shown, heating sheets are wrapped around a sealed evaporation material tank containing raw materials, and the raw materials in the material tank under a low-pressure environment are heated by the heating sheets to evaporate into a gaseous state. Then, the gaseous raw materials are supplied to a vacuum chamber (i.e., the space where the coating process is carried out) in a vacuum environment through a pipeline. At the same time, the flow rate of the gaseous raw materials is detected and controlled by a flow meter controller provided on the pipeline. A main valve and a switch control valve are respectively provided on the pipeline upstream and downstream of the flow meter controller to cooperate in controlling the flow rate. In addition, in order to prevent the raw materials from condensing, heating sheets are usually also wrapped around the pipeline between the switch control valve and the vacuum chamber.

[0004] It can be seen that liquid raw materials need to be first converted into a gaseous state to realize the vacuum coating process, and the prior art usually evaporates in a non-vacuum environment and then enters the vacuum environment in a gaseous form. However, this process method (1) requires a relatively precise flow controller, with a high cost, and the manufacturing cost of the sealed evaporation tank is also high; (2) it is necessary to perform heating, heat preservation, and pressure maintenance on the external evaporation tank in advance for a long time (up to one day or longer), and the power cannot be easily cut off (turn off the heating), otherwise it is necessary to preheat for one day before use, which is extremely inconvenient in actual use; (3) in order to avoid condensation during the transportation of gaseous materials, the transportation pipeline also needs to be wrapped with heating sheets, which is not very friendly to pipeline layout and further increases the cost; (4) the structure of the evaporation dish assembly is preferably a hemisphere, which can increase the evaporation area, reduce the accumulation of materials in the evaporation dish, promote evaporation, and optimize the device configuration and volume. Summary of the Invention

[0005] Problems to be Solved by the Utility Model:

[0006] Aiming at the above problems, the purpose of the present utility model is to provide a vacuum evaporation feeding device that can enable the coating material to enter the vacuum environment in a liquid state and complete evaporation in the vacuum environment.

[0007] Technical means for solving the problem:

[0008] The utility model provides a vacuum evaporation feeding device, which comprises: an evaporation chamber formed as a chamber with three openings; a vacuum chamber hermetically communicated with one of the three openings of the evaporation chamber and formed as a chamber with a vacuum environment inside; a material tank hermetically connected to another one of the three openings of the evaporation chamber and supplying the liquid raw material for film coating stored inside to the evaporation chamber through a pipeline; a vacuum electrode assembly connected to the remaining one of the three openings of the evaporation chamber and closing the opening in a detachable form; a heating sheet arranged inside the evaporation chamber and electrically connected to the vacuum electrode assembly; and an evaporation dish assembly arranged inside the evaporation chamber in a form capable of accommodating the liquid raw material from the material tank, arranged above the heating sheet in a form of surface contact with the heating sheet, and electrically connected to the vacuum electrode assembly.

[0009] Alternatively, in the utility model, the three openings of the evaporation chamber are respectively an upper opening located above the evaporation chamber and a first opening and a second opening located on the side of the evaporation chamber. Among them, the upper opening is hermetically connected to the material tank via a pipeline, the first opening is hermetically communicated with the vacuum chamber, and the second opening is detachably closed by the vacuum electrode assembly.

[0010] Alternatively, in the utility model, the material tank is located above the evaporation chamber and stores the liquid raw material for film coating; the material tank is hermetically connected to the upper opening of the three openings of the evaporation chamber through a feed pipe and a feed valve.

[0011] Alternatively, in the utility model, one end of the feed pipe extends into the evaporation chamber, and the other end is located outside the evaporation chamber. The other end of the feed pipe is connected to the feed valve, and the feed valve is connected to the material tank.

[0012] Alternatively, in the utility model, the vacuum electrode assembly includes an insulating blind plate, a plurality of inner core columns and a plurality of outer core columns. Among them, a plurality of through holes are pre-opened on the insulating blind plate, and the plurality of core columns penetrate through these through holes in a specified quantity and form. The part of the core column located inside the evaporation chamber forms the inner core column, and correspondingly, the part located outside the evaporation chamber forms the outer core column.

[0013] Alternatively, in the present utility model, five core columns are inserted through the insulating blind plate, thereby forming five inner core columns located in the evaporation chamber and five outer core columns located outside the evaporation chamber. Among them, one of the five inner core columns is made longer than the other four, and the longer inner core column is abutted or fixedly connected to the evaporating dish assembly, and any two of the other four inner core columns are electrically connected to the heating sheet.

[0014] Alternatively, in the present utility model, the heating sheet is disposed on the outer bottom surface and outer side surface of the evaporating dish assembly or only on the outer bottom surface, and is closely attached to the evaporating dish assembly.

[0015] Alternatively, in the present utility model, the evaporating dish assembly includes an evaporating dish and a hemisphere. The evaporating dish is formed in a cuboid shape with an open upper part, and the hemisphere is disposed inside the evaporating dish in a form where its cross-section is attached to the inner bottom surface of the evaporating dish. Moreover, the evaporating dish is located below the pipeline of the material barrel, and the hemisphere is located directly below the pipeline of the material barrel.

[0016] Alternatively, in the present utility model, a temperature sensor is disposed between the evaporating dish assembly and the heating sheet, and the temperature sensor is electrically connected to the vacuum electrode assembly.

[0017] Alternatively, in the present utility model, the outside of the evaporation chamber is wrapped with a heating sheet and a temperature sensor, but the temperature setting should not be too high.

[0018] Effects of the utility model:

[0019] The present utility model can provide a vacuum evaporation feeding device, which can enable the coating material to enter the vacuum environment in a liquid state and complete evaporation in the vacuum environment. Specifically, (1) by adopting a liquid inlet valve similar to a drip valve to control the number of drops, the amount of feeding is controlled, and the dripping situation can be visually observed, which is convenient for inspection, and the cost is lower than that of a flow controller; (2) there are no excessive requirements for the material tank, which is simple and low in cost; (3) the evaporating dish can reach the working state only after being heated for a few minutes, which is convenient, fast, and effective, without excessive prior preparation or excessive waiting. Description of the drawings

[0020] Figure 1 is a schematic structural diagram of a vacuum evaporation feeding device according to an embodiment;

[0021] Figure 2 is Figure 1 an exploded view of the components in the evaporation chamber shown;

[0022] Figure 3 is a schematic structural diagram of a prior art vacuum evaporation feeding device;

[0023] Symbolic Explanation:

[0024] 1 - Vacuum chamber; 2 - Material tank; 3 - Feed valve; 4 - Feed pipe; 5 - Evaporation chamber; 6 - Vacuum electrode; 6.1 - Inner core column; 6.2 - Outer core column; 7 - Temperature sensor; 8 - Heating sheet; 9 - Evaporating dish assembly; 9.1 - Evaporating dish; 9.2 - Hemisphere. Specific Embodiment

[0025] The following further describes the present utility model in conjunction with the following embodiments. It should be understood that the following embodiments are only used to illustrate the present utility model and not to limit the present utility model. The same or corresponding reference numerals in the figures represent the same components, and repeated descriptions are omitted. Generally, the components of the embodiments of the present utility model described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the present utility model claimed, but merely represents the selected embodiments of the present utility model.

[0026] Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present utility model. For example, in the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "installation", "connection", and "connection" should be understood in a broad sense. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] As Figure 1As shown in the figure, the present utility model provides a vacuum evaporation feeding device, comprising: an evaporation chamber 5, which is formed as a cavity with three openings; a vacuum chamber 1, which is connected to one of the three openings of the evaporation chamber 5 and is formed as a cavity with a vacuum environment inside; a material tank 2, which is connected to another one of the three openings of the evaporation chamber 5 and supplies the liquid raw material for coating stored inside to the evaporation chamber 5 through a pipeline (feed pipe 4); a vacuum electrode assembly 6, which is connected to yet another one of the three openings of the evaporation chamber 5 and closes the opening in a detachable form; a heating sheet 8, which is disposed inside the evaporation chamber 5 and is electrically connected to the vacuum electrode assembly 6; and an evaporation dish assembly 9, which is disposed inside the evaporation chamber 5 in a form capable of accommodating the liquid raw material from the material tank 2, is disposed above the heating sheet 8 in a form of surface contact with the heating sheet 8, and is electrically connected to the vacuum electrode assembly 6.

[0028] In this embodiment, the evaporation chamber 5 is a cavity for evaporating the liquid raw material into a gaseous raw material, and is formed as a cavity with three openings, and the three openings are respectively an upper opening located above the evaporation chamber 5 and a first opening and a second opening located on the side of the evaporation chamber 5. Specifically, as Figure 1 shown, the upper opening is hermetically connected to the material tank 2 described in detail later via the feed pipe 4 and the feed valve 3, etc., the first opening is hermetically connected to the vacuum chamber 1 described in detail later, and the second opening is closed by the vacuum electrode assembly 6 described in detail later. Moreover, the three openings may be respectively clamp (KF) interfaces, but are not limited thereto, as long as they are quick connectors applicable to the vacuum system, and the three openings may also adopt different interfaces respectively.

[0029] In this embodiment, the vacuum chamber 1 is a cavity for carrying out the coating reaction, and its inside is formed as a vacuum environment. Since the vacuum chamber 1 is hermetically connected to the first opening among the three openings of the evaporation chamber 5, the inside of the evaporation chamber 5 is naturally also formed as a vacuum environment. In addition, it should be stated that in this embodiment, the vacuum environment is not an absolute vacuum environment that is difficult to achieve in reality, but a quasi-vacuum environment that can be achieved in industrial production or a low-pressure environment to a certain extent that meets the production requirements.

[0030] In this embodiment, the material tank 2 is located above the evaporation chamber 5 and stores the liquid raw material for film coating. The material tank 2 is hermetically connected to the upper opening among the three openings of the evaporation chamber 5 through a feed pipe 4 and a feed valve 3. Specifically, the feed pipe 4 can be configured as a structure in which a pipe and a clamp interface are integrated. Thus, the clamp interface of the feed pipe 4 is hermetically connected to the upper opening of the evaporation chamber 5, and one end of the pipe port of the feed pipe 4 (i.e., the liquid outlet port) extends into the evaporation chamber 5, and the other end is located outside the evaporation chamber 5. Moreover, the other end of the feed pipe 4 located outside the evaporation chamber 5 is connected to the feed valve 3 through a transition pipe and a joint, and the feed valve 3 is connected to the material tank 2 through a transition pipe and a joint. Thus, the liquid raw material for film coating stored in the material tank 2 is supplied to the evaporation chamber 5 via the transition pipe, the feed valve 3, the transition pipe, and the feed pipe 4. Moreover, the feed valve 3 is a valve capable of controlling the liquid flow rate and flow volume. For example, it can be an electromagnetic valve or a mechanical valve, and no specific limitation is made. The feed pipe 4 is formed in a structure similar to a dropper, for example.

[0031] In this embodiment, the vacuum electrode assembly 6 is used to achieve the conductive connection between the vacuum and the outside world and is hermetically connected to the second opening among the three openings of the evaporation chamber 5 in a detachable form. It includes an insulating blind plate 6.3, a plurality of inner core columns 6.1, and a plurality of outer core columns 6.2. Specifically, as Figure 2 shown, the insulating blind plate 6.3 is formed in a disc shape, and a plurality of through holes are pre-opened thereon. A plurality of core columns penetrate through these through holes in a specified quantity and form. The part of the core column located inside the evaporation chamber 5 forms the inner core column 6.1. Correspondingly, the part located outside the evaporation chamber 5 forms the outer core column 6.2. In this embodiment, five core columns are inserted through the insulating blind plate 6.3 of the vacuum electrode assembly 6. After installation, the five inner core columns 6.1 are inside the evaporation chamber 5, and the corresponding five outer core columns 6.2 are outside the evaporation chamber 5.

[0032] More specifically, among the five inner core columns 6.1, one of the inner core columns 6.1 is made longer than the other four inner core columns 6.1. The longest inner core column 6.1 abuts against or is fixedly connected to the evaporating dish assembly 9 described in detail later, so as to place the evaporating dish assembly 9 at a predetermined position or take it out. Therefore, the length of the longest inner core column 6.1 is not specifically limited, as long as it is longer than the other four inner core columns 6.1 and can push the evaporating dish assembly 9 to a specified position when closing the second opening of the evaporation chamber 5. Also, the other four inner core columns 6.1 are respectively connected in pairs to two wires of the heating sheet 8 and the temperature sensor 7 described in detail later, and the corresponding outer core columns 6.2 are respectively externally connected to a power supply, etc. In addition, the outer core column 6.2 corresponding to the longest inner core column 6.1 does not need to be connected to other entities. In addition, the insulating blind plate 6.3 has different structures according to different installation methods. For example, it can be a clamp-type ceramic insulating blind plate, or it can also be a flange-type metal blind plate. An insulating material is provided in the through hole penetrated by the core column, so that the core column is not electrically connected to the blind plate. In this embodiment, the insulating blind plate 6.3 is preferably a clamp-type ceramic insulating blind plate. Thus, when maintaining or repairing, the insulating blind plate 6.3 can be directly disassembled to replace internal components, which is simple and fast.

[0033] In this embodiment, the heating sheet 8 is arranged inside the evaporation chamber 5. More specifically, the heating sheet 8 is arranged on the outer bottom surface of the evaporating dish assembly 9 (specifically, the evaporating dish 9.1) and is in close contact with the evaporating dish assembly 9. In addition, the heating sheet 8 can also be arranged to cover and fit its outer side surface. Also, as mentioned above, the two wires of the heating sheet 8 are electrically connected to the two inner core columns 6.1 of the vacuum electrode assembly 6, and the corresponding two outer core columns 6.2 are connected to a circuit outside the evaporation chamber 5. In addition, the heating sheet 8 can adopt a conventional structure in the art, as long as it can achieve the necessary functions, there is no special limitation.

[0034] In this embodiment, the evaporating dish assembly 9 is arranged inside the evaporation chamber 5 in a form that can accommodate the liquid raw material from the material tank 2, and is arranged above the heating sheet 8 in a form of surface contact with the heating sheet 8, and is electrically connected to the vacuum electrode assembly 6. As Figure 2 shown, the evaporating dish assembly 9 includes an evaporating dish 9.1 and a hemisphere 9.2. Among them, the evaporating dish 9.1 is formed in a rectangular parallelepiped shape with an open top, and can accommodate a certain volume of liquid. The hemisphere 9.2 is arranged inside the evaporating dish 9.1 in a form that its cross section fits the inner bottom surface of the evaporating dish 9.1. At the same time, the evaporating dish 9.1 is located below the feed pipe 4, and the hemisphere 9.2 is located directly below the feed pipe 4, that is, the hemisphere 9.2 is directly opposite to the liquid outlet port of the feed pipe 4 in the evaporation chamber 5. Also, in this embodiment, the evaporating dish assembly 9 is preferably placed horizontally, and the hemisphere 9.2 is preferably arranged at the central position of the evaporating dish 9.1. Moreover, the materials of the evaporating dish 9.1 and the hemisphere 9.2 can be metal materials with excellent thermal conductivity, such as preferably brass, etc.

[0035] In this embodiment, a temperature sensor 7 is provided between the evaporating dish assembly 9 and the heating sheet 8. In this embodiment, the temperature sensor 7 can be installed at the bottom of the evaporating dish 9.1 by means of threaded connection or the like, or it can be a cylindrical light column and buried between the evaporating dish 9.1 and the heating sheet 8. The specific method is not limited. The wire of the temperature sensor 7 is electrically connected to the other two inner core columns 6.1 in the vacuum electrode assembly 6, and the corresponding two outer core columns 6.2 are connected to the circuit outside the evaporation chamber 5.

[0036] In addition, a heating sheet and a supporting temperature sensor can also be wrapped outside the evaporation chamber 5. Thus, it helps the evaporation process and promotes the gaseous raw material to enter the vacuum chamber 1, but the temperature setting does not need to be too high.

[0037] Hereinafter, the working mode of the vacuum evaporation feeding device will be described in combination with the above structure. The liquid raw material in the material tank 2 flows through the feeding pipe 4 in a specified amount under the control of the feeding valve 3 and then enters the evaporation chamber 5 which has the same vacuum environment as the vacuum chamber 1. The liquid raw material drips from the liquid outlet port of the feeding pipe 4 onto the spherical surface of the hemisphere 9.2 in the evaporating dish 9.1 of the evaporating dish assembly 9, and then diffuses around along the spherical surface and flows to the inner bottom surface of the evaporating dish 9.1. Under the monitoring of the temperature sensor 7, the evaporating dish 9.1 and the hemisphere 9.2 that have been heated to the set temperature by the heating sheet 8 evaporate the liquid raw material attached to their respective surfaces into gaseous raw materials, and finally diffuse into the vacuum chamber 1 to perform the expected vacuum coating process.

[0038] Thus, it can be seen that the vacuum evaporation feeding device according to the present invention can make the coating material enter the vacuum environment in a liquid form and complete evaporation in the vacuum environment, greatly simplifying the device structure and reducing the production and manufacturing cost compared with the prior art. Moreover, the present invention omits the flow controller and controls the feeding amount and feeding speed by controlling the number of drops of the feeding pipe through the feeding valve. It can not only visually confirm the dropping situation, making the observation and inspection simple and easy to operate, but also further reduce the cost. Moreover, the present invention does not need to heat and keep warm the material tank, so there are not many requirements for the material, structure, etc. of the material tank, such as no need for pressure resistance, heat insulation, etc. Thus, the cost is further reduced. Moreover, the evaporating dish assembly adopts the shape of the evaporating dish and the hemisphere in cooperation, greatly increasing the heating area in a very simple way, and it can be heated to the required working state in only a few minutes, which is convenient and fast, without too much advance preparation and waiting. Therefore, the vacuum evaporation feeding device according to the present invention is very beneficial in industrial production and application.

[0039] The above specific embodiments have further elaborated on the purpose, technical solution, and beneficial effects of the present utility model. It should be understood that the above is only one specific embodiment of the present utility model and is not limited to the protection scope of the present utility model. Without departing from the gist of the basic features of the present utility model, the present utility model can be embodied in various forms. Therefore, the embodiments in the present utility model are for illustration rather than limitation. Since the scope of the present utility model is defined by the claims rather than the specification, and all changes falling within the scope defined by the claims or the equivalent scope of the defined scope should be understood to be included in the claims. Any modifications, equivalent replacements, improvements, etc., made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A vacuum evaporation feeding device, characterized in that: have: an evaporation chamber formed as a chamber having three openings; A vacuum chamber, which is sealed and connected to one of the three openings of the evaporation chamber and forms a chamber with a vacuum environment inside; A material tank, which is sealed and connected to another opening of the three openings of the evaporation chamber, and supplies the liquid raw material for coating stored inside to the evaporation chamber through a pipeline; a vacuum electrode assembly connected to the remaining one of the three openings of the evaporation chamber and sealing the opening in a detachable manner; A heating plate, which is disposed inside the evaporation chamber and electrically connected to the vacuum electrode assembly; as well as The evaporating dish assembly is arranged inside the evaporating chamber in a form capable of accommodating the liquid raw material from the material tank, and is arranged above the heating plate in a form of surface contact with the heating plate, and is electrically connected to the vacuum electrode assembly.

2. The vacuum evaporation feeding device according to claim 1, characterized in that: The three openings of the evaporation chamber are an upper opening located above the evaporation chamber and a first opening and a second opening located on the side of the evaporation chamber, wherein the upper opening is sealedly connected to the material tank via a pipeline, the first opening is sealedly connected to the vacuum chamber, and the second opening is detachably closed by the vacuum electrode assembly.

3. The vacuum evaporation feeding device according to claim 1, characterized in that: The material tank is located above the evaporation chamber, and stores liquid raw materials for coating; The material tank is sealedly connected to the upper opening among the three openings of the evaporation chamber through a feed pipe and a feed valve.

4. The vacuum evaporation feeding device according to claim 3, characterized in that: One end of the feed pipe extends into the evaporation chamber, and the other end is located outside the evaporation chamber. The other end of the feed pipe is connected to the feed valve, and the feed valve is connected to the material tank.

5. The vacuum evaporation feeding device according to claim 1, characterized in that: The vacuum electrode assembly comprises an insulating blind plate, a plurality of inner core columns and a plurality of outer core columns, wherein: The insulating blind plate is pre-opened with a plurality of through holes, and a plurality of core columns penetrate the through holes in a specified number and shape. The portion of the core column located inside the evaporation chamber forms the inner core column, and correspondingly, the portion located outside the evaporation chamber forms the outer core column.

6. The vacuum evaporation feeding device according to claim 5, characterized in that: Five core columns are inserted through the insulating blind plate, thereby forming five inner core columns located in the evaporation chamber and five outer core columns located outside the evaporation chamber, wherein one of the five inner core columns is longer than the other four, and the longer inner core column among the five inner core columns is abutted against or fixedly connected to the evaporation dish assembly, and any two of the other four inner core columns are electrically connected to the heating plate.

7. The vacuum evaporation feeding device according to claim 1, characterized in that: The heating plate is arranged on the outer bottom surface and the outer side surface or only the outer bottom surface of the evaporating dish assembly, and is closely attached to the evaporating dish assembly.

8. The vacuum evaporation feeding device according to claim 1, characterized in that: The evaporating dish assembly includes an evaporating dish and a hemisphere. The evaporating dish is formed in a rectangular parallelepiped with an upper portion open. The hemisphere is arranged inside the evaporating dish in a form in which a cross section thereof is fitted with an inner bottom surface of the evaporating dish. The evaporating dish is located below the pipeline of the material tank, and the hemisphere is located directly below the pipeline of the material tank.

9. The vacuum evaporation feeding device according to claim 1, characterized in that: A temperature sensor is arranged between the evaporating dish assembly and the heating plate, and the temperature sensor is electrically connected to the vacuum electrode assembly.

10. The vacuum evaporation feeding device according to claim 1, characterized in that: A heating plate and a temperature sensor are wrapped on the outside of the evaporation chamber, but the temperature setting does not need to be too high.

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