Frame type vertical graphite boat

Abstract

The utility model provides a frame type vertical graphite boat, which comprises a plurality of boat pieces which are parallel at intervals, a connecting rod for connecting the plurality of boat pieces in series and a frame for supporting and connecting the plurality of boat pieces, and a hoisting structure is arranged at the top of the frame. According to the graphite boat, the boat pieces are supported and connected through the frame, so that the gravity of the boat pieces can be dispersed on the frame, and the frame can be hoisted by arranging the hoisting structure on the frame, so that the graphite boat formed by the plurality of boat pieces can be hoisted, the graphite boat is not in direct contact with equipment, the graphite boat is prevented from being directly stressed, and the service life of the graphite boat is prolonged. And abnormal problems caused by deformation of the graphite boat are prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD coating, and specifically relates to a frame-type vertical graphite boat. Background Art

[0002] As a graphite boat for carrying solar cell wafers, it is widely used in PECVD equipment for solar cell production. Currently, the traditional methods are horizontal layout and vertical layout, that is, the quartz tube is placed horizontally or vertically, and the graphite boat is placed on the support mechanism inside the quartz tube. In the graphite boat structure, it includes multiple graphite sheets, and the multiple graphite sheets are arranged at intervals in a way that the polarities of two adjacent graphite sheets are opposite. The silicon wafer is placed at the silicon wafer clamping point of the graphite boat and fits with the boat sheet.

[0003] In the prior art, the graphite boat usually works in a high-temperature environment of 400 - 500 °C, and has problems such as large thermal deformation. When directly placed in the equipment, the graphite boat sheets are deformed more under the action of gravity and other abnormal problems. Content of the Utility Model

[0004] The utility model aims to solve the above technical problems in the prior art and proposes a frame-type vertical graphite boat.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model proposes a frame-type vertical graphite boat, including: multiple boat sheets arranged in parallel at intervals, a connecting rod connecting the multiple boat sheets in series, a frame supporting and connecting the multiple boat sheets, and a hoisting structure provided at the top of the frame.

[0007] Further, the multiple boat sheets include a first boat sheet and a second boat sheet. A first connecting portion extends upward at a position near one side edge at the upper end of the first boat sheet, and a first connecting portion extends upward at a position near the other side edge at the upper end of the second boat sheet. The first boat sheet and the second boat sheet are arranged alternately, and a connecting boat block group is provided between the first connecting portions.

[0008] Further, a second connecting portion extends downward at a position near one side edge at the lower end of the first boat sheet, and a second connecting portion extends downward at a position near the other side edge at the lower end of the second boat sheet. A second connecting boat block group is provided between the second connecting portions.

[0009] In the first embodiment, the connecting boat block group includes: an electrode connecting block for electrode introduction and a frame connecting block with a connecting groove for connecting the frame. The electrode connecting block and the frame connecting block are alternately arranged between the first connecting portions.

[0010] The lifting structure includes: a connecting main beam, with a plurality of connecting feet extending from both sides of the connecting main beam and being clamped into the connecting grooves of the frame connecting blocks; a lifting part, arranged on the connecting main beam; and the connecting rod passing through the connecting boat block group and the connecting feet.

[0011] The frame includes: a plurality of limiting pieces, with the plurality of limiting pieces respectively pasted on the outer sides of the upper, middle and lower ends of the outermost boat pieces; a plurality of vertically arranged reinforcing rods, with each reinforcing rod simultaneously connecting the outer limiting pieces close to the ends on the outer sides of the upper, middle and lower ends of the boat pieces; part of the connecting rod passing through the reinforcing rods, the limiting pieces, the connecting boat block group and the connecting feet, and part of the connecting rod passing through the limiting pieces, the connecting boat block group and the connecting feet.

[0012] In the second embodiment, the side surface of the first connecting part is concave in a hook shape. The frame includes: an outer frame, with support beams respectively arranged on the front side and the back side of the upper ends of the plurality of boat pieces at the upper part and the lower part thereof; and two first positioning structure members, passing through the concave parts on the side surfaces of each first connecting part and having both ends lapped on the support beams.

[0013] The outer frame specifically includes: a pair of rectangular frames, respectively surrounding the left and right sides of the plurality of boat pieces, and the top of the rectangular frame forms the lifting structure; and a plurality of the support beams, with both ends respectively connected to the upper, middle and lower parts of the two rectangular frames.

[0014] Furthermore, a third positioning structure member with an installation hole is also arranged on the support beam located in the middle.

[0015] Furthermore, the frame further includes: a plurality of second positioning structure members, with the second positioning structure members supporting the bottoms of the plurality of boat pieces and lapping on the support beam located at the bottom.

[0016] Furthermore, silicon wafer clamping points are arranged on other side edges of the silicon wafer insertion area on the boat piece except for the silicon wafer insertion side. Among them, there are at least two silicon wafer clamping points located below the rectangular groove, and the line connecting the two silicon wafer clamping points forms an angle with the horizontal line, so that the silicon wafer inserted between the silicon wafer clamping points is inclined.

[0017] Compared with the prior art, in the present utility model, since the boat pieces are supported and connected by the frame, the gravity of the boat pieces can be dispersed on the frame, and then by arranging a lifting structure on the frame, the frame can be lifted, so that the graphite boat composed of multiple boat pieces can be lifted, preventing the graphite boat from directly contacting the equipment, thereby avoiding the direct force on the graphite boat and preventing abnormal problems caused by the deformation of the graphite boat. Description of the Drawings

[0018] To more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the attached drawings required for use in the embodiments or the description of the prior art. Obviously, the attached drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can also be obtained based on these attached drawings.

[0019] Figure 1 Schematic three-dimensional structure diagram of the first embodiment of the present utility model;

[0020] Figure 2 Schematic front structure diagram of the first embodiment of the present utility model;

[0021] Figure 3 Schematic side structure diagram of the first embodiment of the present utility model;

[0022] Figure 4 Schematic three-dimensional structure diagram of the second embodiment of the present utility model;

[0023] Figure 5 Schematic front structure diagram of the second embodiment of the present utility model;

[0024] Figure 6 Schematic side structure diagram of the second embodiment of the present utility model;

[0025] Figure 7 Schematic three-dimensional structure diagram of the graphite boat in the second embodiment of the present utility model;

[0026] Figure 8 Schematic partial structure diagram of the double-boat inserting silicon wafers in the embodiments of the present utility model;

[0027] Figure 9 Schematic partial structure diagram of the single-boat inserting silicon wafers in the embodiments of the present utility model;

[0028] 1. Boat piece; 11. Rectangular groove; 12. First connecting part; 13. Second connecting part; 121. Hook groove; 2. Silicon wafer clamping point; 3. Connecting rod; 31. Nut; 4. Silicon wafer; 5. Frame; 51. Limiting piece; 52. Reinforcing rod; 53. Lifting part; 54. Connecting support leg; 56. Connecting main beam; 571. Rectangular frame; 572. Support beam; 581. First positioning structure member; 582. Second positioning structure member; 583. Third positioning structure member;

[0029] 61. Electrode connection block; 62. Frame connection block; 63. Boat piece connection block. Detailed implementation manners

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0031] The principle and structure of the present utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0032] Existing vertical graphite boats usually work in a high-temperature environment of 400 - 500 °C, with large thermal deformation. When directly placed in the equipment, under the action of gravity, the graphite boat plates have even greater deformation and abnormal problems such as high frequency.

[0033] In response to this, as Figure 1 、 4 shown, the present utility model proposes a frame-type vertical graphite boat, which specifically includes: multiple boat plates 1, connecting rods 3, and a frame 5. The boat plates 1 are in the shape of rectangular sheets and are erected; multiple boat plates 1 are spaced and parallel, and are connected in series by multiple connecting rods 3; the frame 5 is arranged on the periphery of the multiple boat plates 1, and supports and connects the whole formed by the multiple boat plates 1, and a lifting structure is provided at the top of the frame 5, and the multiple boat plates 1 can be directly lifted through the lifting structure.

[0034] Since the boat plates 1 are supported and connected by the frame 5, the gravity of the boat plates 1 can be dispersed on the frame 5, and then by providing a lifting structure on the frame 5, the frame 5 can be lifted, so that the graphite boat composed of multiple boat plates 1 can be lifted, without directly contacting the equipment, thus avoiding the direct force on the graphite boat and preventing abnormal problems caused by the deformation of the graphite boat.

[0035] As Figure 7 shown, in a specific embodiment, the multiple boat plates 1 include a first boat plate and a second boat plate, and the first boat plate and the second boat plate are divided by the vertical center line; wherein, a first connecting portion 12 extends out at a position on the upper end of the first boat plate close to one side edge (i.e., the left side of the vertical center line), and a first connecting portion 12 extends out at a position on the upper end of the second boat plate close to the other side edge (i.e., the right side of the vertical center line), and the first boat plate and the second boat plate are arranged alternately, so that the first connecting portions 12 of the first boat plates are all located on the left side of the vertical center line and are spaced in sequence, and the first connecting portions 12 of the second boat plates are all located on the right side of the vertical center line and are spaced in sequence, and a connecting boat block group is arranged in the gap between the first connecting portions.

[0036] In a further embodiment, a second connecting portion 13 extends from a position on one side of the lower end of the first boat piece, and a second connecting portion 13 extends from a position on the other side of the lower end of the second boat piece. A second connecting boat block group 63 is provided between the second connecting portions 13, that is, both the upper and lower ends of the boat piece 1 are electrically connected through the connecting boat block group. The connecting blocks of the connecting boat block group are specifically graphite blocks.

[0037] Specifically, the above-mentioned connecting portion and the boat piece 1 are integrally formed, that is, the whole is a sheet.

[0038] Specifically, the first boat piece and the second boat piece can substantially be two identical boat pieces 1. The front of the first boat piece faces forward, and the back of the second boat piece faces forward, so that one of the first connecting portions at the top of two adjacent boat pieces 1 is on the left and the other connecting portion is on the right.

[0039] The specific framework includes two embodiments, as follows:

[0040] As Figures 1 to 3 shown, in the first embodiment, the connecting boat block group specifically includes: an electrode connecting block 61 and a framework connecting block 62. An electrode introduction groove is provided in the middle of the top surface of the electrode connecting block 61, and a connecting groove formed by downward depression is provided in the middle of the top surface of the framework connecting block 62, and the electrode connecting block 61 and the framework connecting block 62 are arranged alternately; for example, the gaps between multiple first connecting portions are sequentially divided into a first gap, a second gap, a third gap, a fourth gap, etc. The first gap installs the framework connecting block 62, the second gap installs the electrode connecting block 61, the third gap installs the framework connecting block 62 again, and the fourth gap installs the electrode connecting block 61 to disperse the force as much as possible.

[0041] Specifically, the hoisting structure of the framework 5 includes: a connecting main beam 56 and a hoisting portion 53. A plurality of connecting support feet 54 extend from both sides of the connecting main beam 56, and each connecting support foot 54 is snapped into the connecting groove of the framework connecting block 62; the hoisting portion 53 is vertically arranged on the connecting main beam 56, and the hoisting portion 53 can specifically be in a T shape for convenient subsequent hanging and hoisting. The connecting rod 3 located at the upper end passes through the connecting boat block group, and at the same time passes through the connecting boat block group and the connecting support feet 54. Through the connecting rod 3 and the lock nuts 31 and gaskets (specifically, elastic gaskets can be selected) located at both ends of the connecting rod 3, the boat piece 1, the connecting boat block group, and the connecting support feet 54 are locked to each other.

[0042] Specifically, the frame 5 includes: multiple limiting pieces 51 and multiple reinforcing rods 52. The multiple limiting pieces 51 are respectively abutted against the outer sides of the upper, middle, and lower ends of the frontmost and rearmost boat pieces 1; there are multiple vertically arranged reinforcing rods 52, and each reinforcing rod 52 is simultaneously connected to the outer sides near the ends of the limiting pieces 51 located at the upper, middle, and lower ends of the boat piece 1; the connecting rods 3 on the left and right sides pass through the reinforcing rods 52, the limiting pieces 51, the connecting boat block group, and the connecting support feet 54 located between the reinforcing rods 52 and the limiting pieces 51. Another part of the connecting rods 3 is located in the middle of the limiting pieces 51, and this part of the connecting rods 3 passes through the limiting pieces 51, the connecting boat block group, and the connecting support feet 54 for limiting; there is also a part located in the middle area of the boat piece where no limiting pieces 51 and reinforcing rods 52 are provided, and it only passes through multiple boat pieces 1 to play the role of connecting the boat pieces 1.

[0043] The limiting piece 51 can be specifically divided into an upper limiting piece, a middle limiting piece, and a lower limiting piece, which are respectively arranged at the upper end, the middle, and the lower end. Among them, the upper limiting piece is wider than the middle limiting piece and the lower limiting piece.

[0044] In addition, the connecting boat block group further includes an outer connecting block, which is located at the position between the outermost limiting piece and the second first connecting part counted from the outside inwards. Since half of the upper part of the outermost boat piece has no first connecting part, an additional outer connecting part is added for connection.

[0045] As Figures 4 to 7 shown, in the second embodiment, the side surface of the first connecting part is concavely formed into a hook shape to form a hook groove 121, that is, one side surface of each first connecting part of the first boat piece forms a hook groove 121, and the other side surface of each first connecting part of the second boat piece forms a hook groove 121, which is equivalent to hook grooves 121 being provided on both sides of the tops of multiple boat pieces 1. At the same time, an electrode connecting block 61 is arranged between two adjacent first connecting parts, and is connected and locked in series through a connecting rod and a nut passing through the first connecting part and the electrode connecting block.

[0046] The frame 5 includes: an outer frame and a first positioning structural member 581. Support beams 572 are respectively arranged at the front side and the back side of the upper and lower parts of the outer frame at the upper ends of multiple boat pieces 1; two first positioning structural members 581 pass through the hook grooves 121 on the side surfaces of each first connecting part, and both ends are lapped on the support beams 572, so that the connecting parts of each boat piece 1 are hung on the first positioning structural member 581 and are simultaneously limited between the two first positioning structural members 581.

[0047] The outer frame specifically includes: a pair of rectangular frames 571 and multiple support beams 572. The pair of rectangular frames 571 respectively surround the left and right sides of multiple boat plates 1, and a hoisting structure is formed at the top of the rectangular frame 571, and a base is formed at the bottom, that is, it can be hoisted or directly placed; the multiple support beams 572 are respectively connected to the upper, middle, and lower parts of the front columns of the two rectangular frames 571, and the upper, middle, and lower parts of the rear columns of the two rectangular frames 571.

[0048] Among them, a third positioning structure member 583 with an installation hole is further provided on the support beam 572 located in the middle, which is convenient for subsequent positioning and installation.

[0049] In a further embodiment, the frame 5 further includes: multiple second positioning structure members 582. The second positioning structure members 582 support the bottoms of the multiple boat plates 1 and overlap on the support beams 572 located at the bottom, that is, the bottoms of the boat plates 1 pass through the second positioning structure members 582.

[0050] The first positioning structure member 581 and the second positioning structure member 582 are specifically strip-shaped, and both ends are threadedly connected to the support beam 572, which is convenient for disassembly.

[0051] The specific cross-sectional shape of the first positioning structure member 581 can be adapted to the hook groove on the side of the first connecting portion, and the specific cross-sectional shape of the second positioning structure member 582 can be adapted to the shape of the bottom of the silicon wafer 4 and the side of the second connecting portion, so as to avoid stress concentration of the boat plate 1 at a certain point.

[0052] In a preferred embodiment, the connecting rod can be made of a non-conductive (insulating) material such as ceramic; the reinforcing rod can be made of a conductive material, but insulation isolation should be done well, that is, it does not contact the graphite boat, or an insulating material such as ceramic is added for isolation treatment.

[0053] As Figure 1 、 8 shown, in a specific embodiment, multiple rectangular grooves are arranged along the vertical direction (length direction) of the boat plate 1. Each rectangular groove position of each boat plate corresponds to a silicon wafer insertion area where one silicon wafer can be inserted; silicon wafer clamping points 2 are provided on the outer periphery of the rectangular groove 11. Specifically, silicon wafer clamping points 2 are provided on three sides, and the remaining one side is the insertion side or the extraction side; when the silicon wafer 4 is inserted from the insertion side, the silicon wafer is limited by the silicon wafer clamping points on its three sides, so that it fits and covers the rectangular groove 11; and there are at least two silicon wafer clamping points 2 below the rectangular groove 11, and the connection line between these two silicon wafer clamping points has an included angle a with the horizontal line, so that the inserted silicon wafer is inclined, and when the silicon wafer is taken out from the insertion side, it needs to be taken out along an obliquely upward direction.

[0054] Further, as Figure 8As shown, two vertical rows of rectangular slots corresponding to the silicon wafer insertion areas are provided on each boat piece, and both sides of the boat piece are the insertion sides of the silicon wafers. At the same height, two silicon wafers are inserted from both sides of the boat piece towards the vertical midline of the boat piece.

[0055] In other embodiments, such as Figure 9 As shown, the boat piece is a single boat, and only one vertical row of rectangular slots is provided on each boat piece.

[0056] In a specific embodiment, the value range of the included angle a is from 2° to 6°.

[0057] In a preferred embodiment, the angle of the included angle a is specifically 3°.

[0058] By increasing the inclination of a small angle, it will neither increase the difficulty of inserting the silicon wafers nor reduce the positioning effect after the silicon wafers are placed.

[0059] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0060] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that for the convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0061] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description. Without contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present utility model; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0062] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper...", etc. can be used here to describe the spatial positional relationship between a device or feature shown in the drawings and other devices or features. It should be understood that the spatial relative terms are intended to cover different orientations in use or operation in addition to the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned as "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0063] In addition, it should be noted that using words such as "first", "second", etc. to limit components is only for the convenience of distinguishing the corresponding components. Without additional statement, the above words have no special meaning. Therefore, it should not be construed as a limitation on the protection scope of the present utility model.

[0064] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A frame-type vertical graphite boat, comprising: A plurality of boat plates are arranged in parallel at intervals, and a connecting rod connecting the plurality of boat plates in series is characterized in that it also includes a frame supporting and connecting the plurality of boat plates, and a hoisting structure is provided on the top of the frame.

2. The frame-type vertical graphite boat according to claim 1, characterized in that: The multiple boat pieces include a first boat piece and a second boat piece, wherein the upper end of the first boat piece extends upwardly from a first connecting portion close to one side edge, and the upper end of the second boat piece extends upwardly from the first connecting portion close to the other side edge, and the first boat pieces and the second boat pieces are arranged alternately, and a connecting boat block group is provided between the first connecting portions.

3. The frame type vertical graphite boat according to claim 2, characterized in that: The lower end of the first boat piece extends downwardly from a second connection portion close to one side edge, and the lower end of the second boat piece extends downwardly from a second connection portion close to the other side edge, and a second connection boat block group is arranged between the second connection portions.

4. The frame type vertical graphite boat according to claim 2, characterized in that: The connecting boat block set includes: an electrode connecting block for introducing an electrode and a frame connecting block with a connecting groove for connecting a frame, and the electrode connecting blocks and the frame connecting blocks are alternately arranged between the first connecting parts.

5. The frame type vertical graphite boat according to claim 4, characterized in that: The hoisting structure includes: a connecting main beam, a plurality of connecting legs extending from both sides of the connecting main beam and snapping into the connecting grooves of the frame connecting block; a hoisting part arranged on the connecting main beam; and the connecting rod passing through the connecting boat block group and the connecting legs.

6. The frame type vertical graphite boat according to claim 5, characterized in that: The frame includes: a plurality of limit plates, which are respectively attached to the outer sides of the upper end, middle part and lower end of the outermost boat piece; a plurality of vertically arranged reinforcing rods, each of which is simultaneously connected to the outer sides of the outer limit plates located at the upper end, middle part and lower end of the boat piece near the end; some of the connecting rods pass through the reinforcing rods and the limit plates, the connecting boat block group and the connecting legs, and some of the connecting rods pass through the limit plates, the connecting boat block group and the connecting legs.

7. The frame type vertical graphite boat according to claim 2 or 3, characterized in that: The side surface of the first connecting portion is concave in a hook shape, and the frame includes: an outer frame, the upper and lower parts of which are located at the front and back sides of the upper ends of the multiple boat plates, and support beams are respectively arranged; two first positioning structural members, which pass through the concave parts of the side surfaces of each first connecting portion, and the two ends are overlapped on the support beams.

8. The frame type vertical graphite boat according to claim 7, characterized in that: The outer frame specifically includes: a pair of rectangular frames, which surround the left and right sides of the plurality of boat plates respectively, and the top of the rectangular frames forms the hoisting structure; and a plurality of support beams, whose ends are respectively connected to the upper, middle and lower parts of the two rectangular frames.

9. The frame type vertical graphite boat according to claim 8, characterized in that: A third positioning structure with a mounting hole is also provided on the support beam located in the middle.

10. The frame type vertical graphite boat according to claim 8, characterized in that: The frame further comprises: a plurality of second positioning structures, which are supported on the bottom of the plurality of boat pieces and overlapped on the support beams located at the bottom.

11. The frame type vertical graphite boat according to claim 1, characterized in that: The silicon wafer insertion area on the boat wafer is provided with silicon wafer clamping points on all sides except the silicon wafer insertion side, wherein there are at least two silicon wafer clamping points located below the rectangular groove, and the line connecting the two silicon wafer clamping points forms an angle with the horizontal line, so that the silicon wafer inserted between the silicon wafer clamping points is tilted.

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