Tray support and extension equipment

Abstract

The utility model provides a tray support and extension equipment, the tray support comprises a support column and a support arm, the support arm is arranged on the support column to support a tray, the support column comprises a first main body part connected with a driving device, and the first main body part is arranged on the support arm. A second main body part connected with the supporting arm is arranged on the upper surface of the first main body part, at least one connecting part is arranged on the upper surface of the second main body part, and the side face of the connecting part is perpendicular to the upper surface of the second main body part. According to the embodiment of the utility model, the supporting stress surface and the rotating stress surface can be structurally separated, and meanwhile, the roundness of the supporting surface and the processing of a non-circular structure are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of epitaxial manufacturing devices, and more specifically, to a tray support and an epitaxial device. Background Art

[0002] Since the temperature of the epitaxial process is very high, the components in the epitaxial device are usually made of quartz material, and the aforementioned components include the tray support. In the epitaxial device, the tray support supports the tray from below. In addition, the tray support also has the function of driving the tray to lift and rotate.

[0003] In the related art, the tray support includes two parts, a support column and a support arm. Among them, the lower end of the support column is connected to a rotation and lifting mechanism, and the upper end of the support column and the support arm are coupled to drive the support arm to lift and rotate; the end of the support arm supports the tray, so as to finally transfer the lifting and rotating motion to the tray.

[0004] Here, the support and lifting functions are usually realized through the conical surface on the support column. However, since quartz is relatively fragile, the roundness of the conical surface is very important. If the roundness is not good, it will cause the support column and the support arm not to be tightly attached, which is very likely to cause the quartz to break during use. In addition, the lack of tight attachment between the support column and the support arm is also likely to cause the tray to move unevenly, thereby reducing the quality of the epitaxial film. In the manufacturing of the conical surface, turning is usually used to form a perfect circular surface. On the other hand, since the rotational motion needs to be transferred from the support column to the support arm, a non-circular structure needs to be set on the conical surface so that these two parts can engage with each other. However, turning cannot achieve the processing of non-circular structures, and milling is generally used to achieve it. However, the circular surface formed by milling cannot achieve better roundness. Therefore, there is a contradiction in the processing method of the connection part between the support column and the support arm, which puts higher requirements on the processing method of the quartz tray support. Summary of the Utility Model

[0005] In view of this, the utility model aims to provide a tray support and an epitaxial device to solve the technical problem of difficult processing of the tray support in the related art.

[0006] One aspect of the utility model provides a tray support, including a support column and a support arm. The support arm is arranged on the support column to support the tray. The support column includes a first main body part connected to a driving device, a second main body part connected to the support arm is arranged on the upper surface of the first main body part, and at least one connecting part is arranged on the upper surface of the second main body part. The side surface of the connecting part is perpendicular to the upper surface of the second main body part.

[0007] In some embodiments, the support arm includes a central portion and a plurality of arm portions radiating outward from the central portion, and the plurality of arm portions are spaced apart from each other.

[0008] In some embodiments, the arm portion is a rod-shaped member with a variable cross-section, and the cross-sectional area of the arm portion is larger at a position closer to the central portion.

[0009] In some embodiments, the central portion is provided with a cavity for accommodating the second main body portion and a recess for accommodating the connecting portion. The cavity and the recess communicate with each other in the extending direction of the support column, and the side surface of the connecting portion is in close fit with the inner wall of the recess.

[0010] In some embodiments, the first main body portion has a cylindrical shape, and the second main body portion has a frustum shape.

[0011] In some embodiments, the first main body portion, the second main body portion, and the connecting portion are integrally formed by machining. The first main body portion and the second main body portion are formed by turning, and the connecting portion is formed by milling.

[0012] In some embodiments, there are a plurality of connecting portions, and the plurality of connecting portions are arranged on the upper surface of the second main body portion in a predetermined manner.

[0013] In some embodiments, the connecting portion has a columnar structure.

[0014] In some embodiments, the connecting portion is a cuboid or a cube, and its cross-section is a rectangle or a square, or the cross-section of the connecting portion is one of a cross shape, a semi-circular shape, and a 3 / 4 circular shape.

[0015] On the other hand, the present utility model also provides an epitaxial device, which includes an epitaxial chamber, a tray located inside the epitaxial chamber, and a tray support partially located inside the epitaxial chamber. The tray support is used to support the tray, the tray is used to support a wafer, and the tray support is the tray support disclosed in the present utility model.

[0016] The embodiments of the present utility model can structurally separate the support stress surface and the rotation stress surface, and at the same time ensure the roundness of the support surface and the processing of non-circular structures.

[0017] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given, and in conjunction with the accompanying drawings, the detailed description is as follows. Description of the Drawings

[0018] In the accompanying drawings, which are not necessarily drawn to scale, the same reference numerals may describe similar components in different views. The same reference numerals with alphabetic suffixes or different alphabetic suffixes may represent different instances of similar components. The drawings generally illustrate various embodiments by way of example and not limitation, and together with the description and the claims are used to explain the disclosed embodiments. Where appropriate, the same reference numerals are used throughout the drawings to refer to the same or similar parts. Such embodiments are illustrative and not intended to be an exhaustive or exclusive embodiment of the device or method. The accompanying drawings described herein are used to provide a further understanding of the present utility model and form a part of this application. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation of the present utility model. In the drawings:

[0019] Figure 1 is a schematic diagram of the force on the existing support column structure;

[0020] Figure 2 is a schematic diagram of the connection between the support column and the support arm in an embodiment of the present utility model;

[0021] Figure 3 is a schematic diagram of the structure of the support column in the tray bracket provided by the present utility model;

[0022] Figure 4 is a schematic diagram of the force on the support column and the support arm in the tray bracket provided by the present utility model.

[0023] Among them, the above-mentioned drawings include the following reference numerals:

[0024] 1 - support column; 11 - first main body part; 12 - second main body part; 13 -; connecting part; 2 - support arm; 21 - central part; 22 - arm part; 23 - cavity; 24 - recess; 3 - key. Detailed embodiments

[0025] Next, specific embodiments of the present utility model will be described in detail with reference to the accompanying drawings, but this is not a limitation of the present utility model.

[0026] It should be understood that various modifications can be made to the embodiments disclosed herein. Therefore, the above description should not be regarded as a limitation, but only as an example of the embodiments. Those skilled in the art will think of other modifications within the scope and spirit of the present utility model.

[0027] The accompanying drawings included in the description and forming a part of the description illustrate embodiments of the present utility model and, together with the general description of the present utility model given above and the detailed description of the embodiments given below, are used to explain the principles of the present utility model.

[0028] These and other features of the present utility model will become apparent from the following description of the preferred forms of the embodiments given as non-limiting examples with reference to the accompanying drawings.

[0029] It should also be understood that although the present utility model has been described with reference to some specific examples, those skilled in the art can surely implement many other equivalent forms of the present utility model, which have the features as described in the claims and thus are all within the protection scope defined thereby.

[0030] When combined with the accompanying drawings, the above and other aspects, features and advantages of the present utility model will become more apparent in view of the following detailed description.

[0031] Specific embodiments of the present utility model will be described hereinafter with reference to the accompanying drawings; however, it should be understood that the disclosed embodiments are only examples of the present utility model, which can be implemented in various ways. Well-known and / or repetitive functions and structures are not described in detail to avoid obscuring the present utility model with unnecessary or redundant details. Therefore, the specific structural and functional details disclosed herein are not intended to be limiting, but are merely used as a basis and representative basis for the claims to teach those skilled in the art to use the present utility model in substantially any suitable detailed structure in various ways.

[0032] It should be noted that the terms "first", "second", etc. in the description and claims of the present utility model and in the above-mentioned drawings are used to distinguish similar objects and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances so that the embodiments of the present utility model described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0033] This specification may use the phrases "in one embodiment", "in another embodiment", "in yet another embodiment" or "in other embodiments", which may each refer to one or more of the same or different embodiments according to the present utility model.

[0034] As Figure 1As shown, in the related art of the epitaxial process, a support column 1 is connected to a support arm 2, and the support arm 2 supports a tray. A wafer is placed on the tray. The support arm 2 rotates together with the support column. In the related art, the support column 1 has a conical surface, and a key 3 is radially outwardly protruded on the conical surface to fix the support arm. In this way, when the support column 1 rotates, the key here plays a main role in transmitting motion, and the conical surface can also have a certain transmission effect in the form of friction. The supporting force of the support column 1 on the support arm 2 mainly comes from the conical surface. For the above structure, the conical surface and the protruding key structure on the support column 1 need to first form the conical surface by turning during manufacturing, then weld the protruding key on the conical surface, and then obtain the support column with the key by milling.

[0035] The supporting part of the support column 1, that is, the supporting force-receiving surface B, and the rotating part, that is, the rotating force-receiving surface A, are not completely separated in structure and function, resulting in continuous error introduction in the entire processing process: after turning the rotating force-receiving surface A, the key needs to be welded to the support column 1, and the welding will cause deformation at the upper end of the support column 1, thereby introducing errors; after welding, the support column 1 is re-clamped to mill out the key 3, and further errors will be introduced due to positioning deviations in the two clamps.

[0036] The above problems will all lead to a decrease in the matching degree between the surface of the support column 1 and the surface of the support arm 2, that is, the contact surfaces are not adapted to each other. For example, if the gap between the contact surfaces is too small, the cooperation between the support column 1 and the support arm 2 will not be in place; if the gap between the contact surfaces is too large, relative movement will occur between the support column 1 and the support arm 2, resulting in looseness, and then the movement of the tray will be unstable, and finally the wafer placed in the tray will swing up and down, resulting in poor film formation quality on the wafer.

[0037] An embodiment of the present invention provides a tray support. The tray support is applicable to an epitaxial device. The epitaxial device includes an epitaxial chamber and a tray located inside the epitaxial chamber. At least part of the tray support is located inside the epitaxial chamber. The tray support is used to support the tray, and the tray is used to support a wafer.

[0038] As Figures 2 - 4 As shown, the tray support includes a support column 1 and a support arm 2. The support arm 2 is arranged on the support column 1 to support a tray (not shown in the figure). Here, when the support column 1 rotates at a high speed, it can drive the support arm 2 to rotate and finally drive the tray to rotate together. Here, both the support column 1 and the support arm 2 are made of quartz material.

[0039] The support arm 2 here includes a central part 21 and a plurality of arm parts 22 radiating outward from the central part 21. The plurality of arm parts 22 are arranged at intervals from each other. In addition, the length of the arm part 22 is determined based on the size of the tray. Here, the tray is supported by the plurality of arm parts 22.

[0040] Further, the arm part 22 is a rod-shaped member with a variable cross-section, and the cross-sectional area of the arm part 22 at a position closer to the central part 21 is larger. This setting method can make the overall moment of inertia of the support arm smaller on the basis of meeting the strength, so that the motion responsiveness of the support arm is better.

[0041] Further, the support column 1 includes a first main body part 11 connected to the driving device. A second main body part 12 connected to the support arm 2 is arranged on the upper surface of the first main body part 11. At least one connecting part 13 is arranged on the upper surface of the second main body part 12, and the side surface of the connecting part 13 is perpendicular to the upper surface of the second main body part 12.

[0042] Specifically, the support column 1 includes a first main body part 11. The first main body part 11 is connected to an external driving device (not shown in the figure), and the support column 1 is rotated by the driving device. The first main body part 11 here serves as the main body of the support column 1, and it can adopt a cylindrical shape. The first main body part 11 can be manufactured by, for example, turning to ensure the roundness of, for example, the cylindrical outer surface.

[0043] Further, a second main body part 12 is arranged on the upper surface of the first main body part 11. The second main body part 12 can adopt a frustum shape. The support column 1 is connected to the support arm 2 through the second main body part 12. Here, the second main body part 12 and the first main body part 11 can be integrally processed by, for example, turning.

[0044] Further, at least one connecting part 13 is arranged on the upper surface of the second main body part 12. Here, the connecting part 13 protrudes from the upper surface of the second main body part 12, and the side surface of the connecting part 13 is perpendicular to the upper surface of the second main body part 12. The connecting part 13 here preferably adopts a columnar structure, and its side surfaces are all vertical surfaces relative to the upper surface of the second main body part 12 without inclined surfaces, so that the side surfaces of the connecting part 13 do not participate in the supporting force of the second main body part 12. Of course, the connecting part 13 here can also be formed by connecting multiple sections of structures, and the side surfaces of each section of structure are perpendicular to the upper surface of the second main body part 12. The connecting part 13 here can be integrally manufactured by milling after turning the first main body part 11 and the second main body part 12.

[0045] In order to achieve the rotation of the support column 1 driving the support arm 2, the support column 1 is connected to the support arm 2 through the second main body portion 12 and the connecting portion 13. For this purpose, a cavity 23 for accommodating the second main body portion 12 and a recess 24 for accommodating the connecting portion 13 are provided in the central portion 21 of the support arm 2, and the cavity 23 and the recess 24 communicate with each other in the extending direction of the support column 1. The shape of the recess 24 here matches the shape of the connecting portion 13. In one embodiment, the side surface of the connecting portion 13 is in close fit with the inner wall of the recess 24.

[0046] Specifically, on the central portion 21 of the support arm 2 here, the cavity 23 is provided, for example, by turning, and the inner wall of the cavity 23 is preferably in close fit with the outer surface of the second main body portion 12. The recess 24 is provided at the bottom of the cavity 23 to accommodate the connecting portion 13.

[0047] Further, there may be a plurality of the connecting portions 13 here. The plurality of connecting portions 13 are arranged on the upper surface of the second main body portion 12 in a predetermined manner. For example, 3 connecting portions 13 may be provided, and the 3 connecting portions 13 form a triangular arrangement. By providing the plurality of connecting portions 13, the connection between the support column 1 and the support arm 2 is made more stable. It should be understood that the recess 24 is provided corresponding to the aforementioned connecting portion 13.

[0048] In one embodiment, the connecting portion 13 may be in the shape of a cuboid or a cube, so that the cross-section of the connecting portion 13 is a rectangle or a square. Among them, when the connecting portion 13 adopts a cuboid-shaped structure, the vertical side surface of the cuboid contacts the inner wall of the recess 24, so it will not play a supporting role, and thus even if there is an error in processing, it can avoid being broken by irregular stress for a long time. The vertical side surface of the cuboid here can be used as the rotating stress surface A during rotation and will not be subjected to supporting stress. In another embodiment, the connecting portion 13 may also be composed of a plurality of cuboids with different sizes, and the side surface of each cuboid is perpendicular to the side surface of the second main body portion 12. Through the above structure, the supporting stress surface that needs to be turned and the rotating stress surface that needs to be milled can be physically separated, thus avoiding the conflict of the above processing procedures.

[0049] Based on the above stress characteristics, as Figure 4As shown, various structures can also be formed based on different rotational stress-bearing surfaces A of the connecting portion 13, so that the cross-section of the connecting portion 13 forms various shapes. For example, the cross-section of the connecting portion 13 can be triangular, cross-shaped, semi-circular, 3 / 4 circular, etc. The specific shape is determined by the processing difficulty and stress analysis. For example, when more rotational stress-bearing surfaces A are required, a columnar structure with a cross-shaped cross-section can be used; when fewer rotational stress-bearing surfaces are required, a columnar structure with a triangular or semi-circular cross-section can be used, and such columnar structures are also simpler to process.

[0050] The second embodiment of the present invention provides an epitaxial device, which includes an epitaxial chamber, a tray located inside the epitaxial chamber, and a tray support partially located inside the epitaxial chamber. The tray support is used to support the tray, the tray is used to support a wafer, and the tray support is the tray support described in any one of the above embodiments.

[0051] The embodiment of the present invention can structurally separate the support stress-bearing surface and the rotational stress-bearing surface, and at the same time ensure the roundness of the support surface and the processing of non-circular structures.

[0052] In the above embodiments of the present invention, the descriptions of each embodiment have their own emphases. For parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0053] For the sake of convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper" etc. can be used here to describe the spatial position relationship between a device or feature shown in the figure and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the figure. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways, rotated 90 degrees or in other orientations, and corresponding interpretations are made for the spatial relative descriptions used here.

[0054] In addition to the above, it should be noted that the "one embodiment", "another embodiment", "embodiment", etc. mentioned in this specification refer to the specific features, structures or characteristics described in connection with that embodiment being included in at least one embodiment generally described in this application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in connection with any one embodiment, it is intended that the implementation of such feature, structure or characteristic in connection with other embodiments also falls within the scope of the present utility model.

[0055] In the above embodiments, the descriptions of each embodiment have their own emphases. For the parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0056] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A tray support, characterized in that: It includes a support column and a support arm, wherein the support arm is arranged on the support column to support a tray, the support column includes a first main body connected to a driving device, a second main body connected to the support arm is arranged on the upper surface of the first main body, at least one connecting portion is arranged on the upper surface of the second main body, and a side surface of the connecting portion is perpendicular to the upper surface of the second main body, the support arm includes a central portion and a plurality of arm portions radiating outward from the central portion, the central portion is provided with a cavity for accommodating the second main body portion and a recess for accommodating the connecting portion, the cavity and the recess are connected to each other along the extension direction of the support column, and the plurality of arm portions are arranged at intervals from each other.

2. The tray support according to claim 1, characterized in that: The arm portion is a rod-shaped member with a variable cross-section, and the cross-sectional area of ​​the arm portion increases as it is closer to the center portion.

3. The tray support according to claim 1, characterized in that: The side surface of the connecting portion is tightly fitted with the inner wall of the recess.

4. The tray support according to claim 1, characterized in that: The first main body is in a cylindrical shape, and the second main body is in a truncated cone shape.

5. The tray support according to claim 1, characterized in that: The first main body portion, the second main body portion and the connecting portion are formed by integral processing. The first main body portion and the second main body portion are formed by turning, and the connecting portion is formed by milling.

6. The tray support according to claim 1, characterized in that: There are a plurality of the connection parts, and the plurality of the connection parts are arranged on the upper surface of the second main body in a predetermined manner.

7. The tray support according to claim 1, characterized in that: The connecting portion adopts a columnar structure.

8. The tray support according to claim 7, characterized in that: The connecting portion is a cuboid or a cube, and its cross section is a rectangle or a square, or the cross section of the connecting portion is one of a cross, a semicircle and a 3 / 4 circle.

9. An epitaxial device, comprising an epitaxial chamber, a tray located inside the epitaxial chamber, and a tray support partially located inside the epitaxial chamber, the tray support is used to support the tray, and the tray is used to support a wafer, characterized in that: The tray bracket is a tray bracket according to any one of claims 1-8.

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