Furnace body, pouring device of furnace body and coating equipment

Abstract

The utility model relates to the technical field of coating, provides a furnace body, a pouring device of the furnace body and coating equipment, and solves the problems that the service life of a common quartz round tube structure is short, and the use cost is increased. The furnace body comprises a cavity and a furnace door, the cavity is made of a metal material and is provided with an inner cavity, and the inner cavity is used for containing at least one workpiece carrier; the pouring layer is located on the outer side of the cavity, and the density of the pouring layer is smaller than that of the cavity. The cavity is made of metal materials, the furnace body can have better firmness, the pouring layer is located outside the cavity, the effect of bearing atmospheric pressure can be achieved, the structural strength of the furnace body is further guaranteed, the service life of the furnace body can be effectively prolonged, the replacement and maintenance frequency is reduced, and then the use cost is reduced. In addition, as the density of the pouring layer is smaller than that of the cavity, the overall weight can be reduced, installation and use are more convenient, the metal consumption can be reduced, and the use cost is further reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of film coating technology, and in particular to a furnace body, a casting device for the furnace body, and film coating equipment. Background Art

[0002] In the manufacturing process of semiconductors and solar cells, furnace equipment plays a vital role, among which furnaces with quartz round tube structures are particularly common. The inner cavity of these quartz furnace tubes is designed as the core reaction space of the silicon wafer processing process, providing the necessary environment for chemical reactions and heat treatments. However, due to the physical properties of quartz materials such as fragility, the application of quartz materials is also accompanied by certain limitations. Specifically, the service life of quartz furnace tubes is limited by their material properties and can usually maintain a stable use period of about 3 months. After that, they may need to be replaced due to wear, breakage, etc., which undoubtedly increases the use cost and maintenance burden in the production process. Utility Model Content

[0003] In view of this, the embodiments of the present disclosure provide a furnace body, a casting device for the furnace body, and a coating device to solve the problems of short service life and increased use cost of the quartz round tube structure commonly found in conventional technologies.

[0004] The first aspect of the present disclosure provides a furnace body, comprising: a cavity, the cavity is made of metal, the cavity has an inner chamber, the inner chamber is used to accommodate at least one workpiece carrier; a casting layer, located on the outside of the cavity, the density of the casting layer is less than the density of the cavity.

[0005] In one embodiment, it further includes: a reinforcement structure fixedly arranged on the outside of the cavity, and the reinforcement structure is embedded in the casting layer.

[0006] In one embodiment, the reinforcement structure includes: at least one first reinforcement plate, which is vertically fixed to the outer wall of the cavity, and the first reinforcement plate extends in a straight line; and / or, at least one second reinforcement plate, the second reinforcement plate is an annular plate, and one axial end of the second reinforcement plate is vertically fixed to the outer wall of one side of the cavity; and / or, at least one third reinforcement plate, the third reinforcement plate includes a plurality of constituent plates connected in sequence, adjacent constituent plates are cross-arranged, and the constituent plates are vertically fixed to one side of the cavity; when the reinforcement structure includes at least one of the first reinforcement plates, the reinforcement structure also includes: at least one fourth reinforcement plate, which is vertically fixed to at least one of the first reinforcement plates, and is located on the side of the connected first reinforcement plate away from the cavity; at least one of the first reinforcement plate, the second reinforcement plate, the third reinforcement plate and the fourth reinforcement plate is provided with a through hole.

[0007] In one embodiment, a plurality of the first reinforcing plates are provided on at least one outer wall side of the cavity, and among the plurality of the first reinforcing plates located on the same outer wall side of the cavity, at least two of the first reinforcing plates are arranged in a crossed manner.

[0008] In one embodiment, the cavity includes: two first side walls arranged in parallel at intervals; two second side walls arranged in parallel at intervals, and both of the two second side walls are perpendicularly connected to the two first side walls; a third side wall perpendicular to the first side wall and the second side wall and respectively connected to the first side wall and the second side wall; the cavity has a process port located on a side of the cavity opposite to the third side wall, and the process port is communicated with the inner cavity; the casting layer includes a plurality of enclosing plates respectively attached to the two first side walls, the two second side walls and the third side wall in parallel.

[0009] In one embodiment, it further includes: a furnace door located on the side of the process port of the cavity and detachably connected to the cavity; a furnace port flange located outside the process port, the furnace port flange is fixedly connected to the cavity and is in contact and cooperation with one end of the casting layer close to the process port; wherein, the furnace door is detachably connected to the cavity through the furnace port flange.

[0010] In one embodiment, it further includes at least one of the following structures: an air extraction pipe penetrating through the casting layer, one end of the air extraction pipe is fixedly connected to the cavity, the other end of the air extraction pipe extends to the outside of the casting layer, and the air extraction pipe is communicated with the inner cavity; an observation window provided on one side of the cavity; a heating element located inside the cavity and / or between the cavity and the casting layer; an inner reinforcing rib located inside the cavity and fixedly connected to the cavity; at least a pair of radio frequency electrodes provided on the cavity; a water cooling device, the water cooling device includes a water cooling pipe provided on the cavity and / or the furnace door; a sealing ring provided between the cavity and the furnace door; a reflection structure fixedly provided on the inner wall of the cavity.

[0011] In one embodiment, the material of the casting layer includes a metal fiber non-fired casting material.

[0012] The second aspect of the present disclosure provides a pouring device configured to pour the furnace body as described in the first aspect. Wherein, the pouring device includes: a vibrating bottom plate for fixedly connecting with the cavity of the furnace body; a plurality of side plates respectively arranged at intervals with the cavity, and the adjacent side plates are detachably connected; a fixing member detachably connected with the vibrating bottom plate and fixedly connected with at least part of the plurality of side plates; a top plate arranged opposite to the vibrating bottom plate and detachably connected with the plurality of side plates; wherein, the vibrating bottom plate, the side plates and the top plate enclose a pouring space with the cavity, and the pouring space is used for pouring the pouring layer of the furnace body.

[0013] In one embodiment, it further includes: at least one handle fixedly connected with the side plate or the top plate.

[0014] In one embodiment, when the furnace body includes an air extraction pipe, the top plate includes a first plate body and a second plate body arranged opposite to each other. The first plate body is provided with a first avoidance groove, and the second plate body is provided with a second avoidance groove. The first avoidance groove and the second avoidance groove are combined to form an avoidance hole for the air extraction pipe to pass through.

[0015] The third aspect of the present disclosure provides a coating device, including: a workpiece carrier for carrying a workpiece to be processed; and the furnace body as described in the first aspect, and the inner cavity of the furnace body is used to receive the workpiece carrier.

[0016] According to the furnace body, the pouring device of the furnace body and the coating device provided by the embodiments of the present disclosure, the cavity is made of a metal material, which can make the furnace body have better firmness. The pouring layer is located outside the cavity and can play a role in bearing the atmospheric pressure, further ensuring the structural strength of the furnace body. Therefore, the present disclosure can effectively extend the service life of the furnace body, reduce the frequency of replacement and maintenance, and thus reduce the use cost. In addition, since the density of the pouring layer in the present disclosure is less than the density of the cavity, the overall weight can be reduced, making installation and use more convenient, and the metal consumption can also be reduced, further reducing the use cost. Description of the Drawings

[0017] By describing the embodiments of the present disclosure in more detail in conjunction with the drawings, the above and other objects, features and advantages of the present disclosure will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present disclosure, and constitute a part of the specification. They are used to explain the present disclosure together with the embodiments of the present disclosure, and do not constitute a limitation to the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 is an exploded view of a furnace body provided by an embodiment of the present disclosure.

[0019] Figure 2It is a schematic diagram of the back structure of the cavity in a furnace body provided by an embodiment of the present disclosure.

[0020] Figure 3 It is a cross-sectional view of a furnace body provided by an embodiment of the present disclosure;

[0021] Figure 4 It is an exploded view of the matching structure of a pouring device and a furnace body provided by an embodiment of the present disclosure.

[0022] Figure 5 It is a schematic diagram of the matching structure of a pouring device and a furnace body from one perspective provided by an embodiment of the present disclosure.

[0023] Figure 6 It is a schematic diagram of the matching structure of a pouring device and a furnace body from another perspective provided by an embodiment of the present disclosure.

[0024] Figure 7 It is a flowchart of a pouring method provided by an embodiment of the present disclosure.

[0025] Reference numerals:

[0026] 110, cavity; 111, heating element; 112, reflection structure; 120, pouring layer; 130, first reinforcing plate; 131, through hole; 140, second reinforcing plate; 150, third reinforcing plate; 160, fourth reinforcing plate; 170, C-shaped reinforcing member; 180, exhaust pipe; 190, furnace mouth flange; 200, vibrating bottom plate; 300, side plate; 301, handle; 400, fixing member; 500, top plate; 501, first plate body; 502, second plate body; 503, first avoidance groove; 504, second avoidance groove. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.

[0028] Next, in conjunction with Figures 1 to 6 A furnace body provided by an embodiment of the present disclosure will be described in detail. The dotted lines in the figure represent the occluded lines.

[0029] In conjunction with Figures 1 to 3, embodiments of the present disclosure provide a furnace body, which includes a cavity 110 and a casting layer 120. The cavity 110 is made of a metal material. The cavity 110 has an inner cavity for accommodating at least one workpiece carrier. The workpiece carrier can be a graphite boat, a quartz boat, or a crystal boat, or it can be in the form of a combination of a quartz boat and a graphite boat plus a boat support, etc. Specific limitations are not made here. The process carrier is used to carry the workpiece to be processed, and the workpiece to be processed can be a silicon wafer, a wafer, etc. Specific limitations are not made here. The casting layer 120 is located outside the cavity 110, and the density of the casting layer 120 is less than that of the cavity 110.

[0030] In this embodiment, the metal material used for the cavity 110 includes stainless steel. When evacuating, a negative pressure is formed in the inner cavity, and the metal material of the cavity 110 can ensure that it will not deform due to the negative pressure.

[0031] Optionally, the furnace body further includes inner reinforcing ribs. The inner reinforcing ribs are located inside the cavity 110 and are fixedly connected to the cavity 110. The inner reinforcing ribs can be made of, for example, silicon carbide or 310s stainless steel. The inner reinforcing ribs can support the cavity 110 to prevent the cavity from deforming. By setting the reinforcing ribs, the thickness of the cavity 110 can be minimized as much as possible on the premise of ensuring the structure of the furnace body, thereby reducing the metal consumption, reducing the overall weight of the furnace body, and reducing costs.

[0032] In this embodiment, the casting layer 120 is a layer structure cast on the outside of the cavity 110. The casting layer 120 can bear the atmospheric pressure, which is beneficial to ensuring the structural strength and adapting to the strength requirements of different furnace body sizes. And the casting layer 120 can withstand a relatively high temperature. By setting the casting layer 120, it is also beneficial to reduce the thickness of the cavity 110, reduce the metal consumption, thereby reducing the overall weight of the furnace body (the density of the casting layer 120 is less than the density of the metal material of the cavity 110), and reducing costs. In addition, it is also possible to replace the traditional welding processing technology by casting, reduce the processing difficulty, and shorten the processing time.

[0033] Optionally, the material of the casting layer 120 includes a metal fiber non-fired casting material. The metal fibers therein include copper fibers or steel fibers, etc. The metal fibers in the metal fiber non-fired casting material can be metal fibers of a single material, or can include a combination of two or more materials of metal fibers. In addition, specific composition components and ratios of the casting layer 120 are not limited here and can be flexibly adjusted according to requirements. The metal fibers can enhance the performance of the casting material and improve the abilities of anti-impact, anti-wear, and anti-thermal shock, etc. The metal fiber non-fired casting material combines the advantages of conventional refractory castables and metal fibers, making the casting layer 120 have the advantages of high strength and toughness, excellent anti-thermal shock performance, anti-impact and anti-wear, and convenient construction.

[0034] In some embodiments of the present disclosure, the cavity includes a first side wall, a second side wall, and a third side wall. There are two first side walls arranged in parallel at intervals; there are two second side walls arranged in parallel at intervals, and both of the two second side walls are perpendicularly connected to the two first side walls; the third side wall is perpendicular to the first side wall and the second side wall and is respectively connected to the first side wall and the second side wall; the cavity has a process port, the process port is located on the side of the cavity opposite to the third side wall, and the process port communicates with the inner cavity. The casting layer includes a plurality of enclosing plates that are respectively parallel and attached to the two first side walls, the two second side walls, and the third side wall.

[0035] The first side wall, the second side wall, and the third side wall are all rectangular. The first side wall, the second side wall, and the third side wall are perpendicular to each other pairwise, and the connection positions between the first side wall, the second side wall, and the third side wall are all the edge positions of the first side wall, the second side wall, and the third side wall. Among the plurality of enclosing plates of the casting layer, two of the enclosing plates are parallel and attached to the outside of the first side wall, the other two enclosing plates are parallel and attached to the outside of the two second side walls, and the other enclosing plate is parallel and attached to the outside of the third side wall. The adjacent enclosing plates are connected to each other. Such a structure can make both the cavity 110 and the casting layer 120 in the form of a rectangular box structure, and the overall furnace body presents a rectangular cavity structure form. Therefore, under the same site conditions, the furnace body has a larger number of arrangements or a larger volume compared with the conventional quartz round tube structure. Thus, it can better meet the demand for capacity improvement. Moreover, the structure form of the metal cavity 110 combined with the casting layer 120, on the one hand, has good structural strength and can well meet the demand for strength improvement due to the increase in size. On the other hand, it is suitable for wide application because of its low production and use cost.

[0036] The inner cavity can be set to any shape as needed, such as rectangular, cylindrical, etc. Preferably, the shape of the inner cavity is rectangular to adapt to the outer shape of the furnace body, which can not only have a larger cavity space but also make the thickness of the multiple peripheral walls included in the furnace body more uniform.

[0037] The cavity 110 is provided with a process port that penetrates through the casting layer 120 and communicates with the inner cavity. The process port is located on the side of the cavity 110 opposite to the third side wall, and through the process port, it is convenient to realize the entry and exit of the workpiece carrier and / or the product into and out of the inner cavity.

[0038] In some embodiments of the present disclosure, the furnace body further includes a strengthening structure. The strengthening structure is located outside the cavity 110 and is fixedly connected to the cavity 110. The strengthening structure is embedded in the casting layer 120. The above-mentioned strengthening structure being embedded in the casting layer 120 means that after the casting layer 120 is cast and formed, the strengthening structure is wrapped by the casting material of the casting layer 120.

[0039] The reinforcing mechanism is made of metal material, and the reinforcing structure is welded and fixed to the cavity 110 . The reinforcing structure can increase the deformation resistance of the cavity 110 , and can increase the connection strength between the casting layer 120 and the cavity 110 , so that the casting layer 120 is more firmly attached to the cavity 110 .

[0040] Optionally, the reinforcement structure includes at least one first reinforcement plate 130, the first reinforcement plate 130 is vertically fixed to the outer wall of the cavity 110, and the first reinforcement plate 130 extends in a straight line. Specifically, the first reinforcement plate 130 is a rectangular plate, the width direction of the first reinforcement plate 130 is perpendicular to the outer wall of the connected cavity 110, and the length direction of the first reinforcement plate 130 is parallel to the outer wall of the connected cavity 110.

[0041] Optionally, at least one side outer wall of the cavity 110 is provided with a plurality of first reinforcing plates 130, and among the plurality of first reinforcing plates 130 located on the same side outer wall of the cavity 110, at least two first reinforcing plates 130 are cross-arranged. For example, on one side wall of the cavity 110, at least one first reinforcing plate 130 is arranged along a diagonal direction of the side wall, and at least one first reinforcing plate 130 is arranged along another diagonal direction of the side wall, or at least one first reinforcing plate 130 is parallel to two parallel side lines of the side wall, and at least one first reinforcing plate 130 is parallel to the other two parallel side lines of the side wall. By cross-arranging the first reinforcing plates 130, a good relative movement limit can be formed for the cavity 110 and the casting layer 120 in any direction parallel to the side wall of the cavity 110 connected to the first reinforcing plates 130.

[0042] Further, in the case where the reinforcement structure includes at least one first reinforcement plate 130, the reinforcement structure also includes at least one fourth reinforcement plate 160, which is vertically fixed to at least one first reinforcement plate 130 and is located on the side of the connected first reinforcement plate 130 away from the cavity 110. The shape of the fourth reinforcement plate 160 includes one or a combination of two or more of a rectangle, a triangle, a circle or other shapes, which are not specifically limited here. The fourth reinforcement plate 160 can be used to limit the enclosure and the cavity 110 in a direction perpendicular to the fourth reinforcement plate 160, which is conducive to maintaining a good fit between the casting layer 120 and the cavity 110.

[0043] Optionally, at least one second reinforcing plate 140 is provided on at least one outer wall side of the cavity 110. The second reinforcing plate 140 is an annular plate, and one axial end of the second reinforcing plate 140 is perpendicularly fixed to the outer wall side of the cavity 110. The axial direction of the second reinforcing plate 140 is perpendicular to the outer wall of the cavity 110 to which the second reinforcing plate 140 is connected, and one end thereof is fixedly connected to the outer wall of the cavity 110. Preferably, the second reinforcing plate 140 is provided on the side of the cavity 110 facing away from the process port. The second reinforcing plate 140 can form a limit in any direction along the radial direction of the second reinforcing plate 140 between the cavity 110 and the casting layer 120, avoiding relative sliding in any direction parallel to the side wall between the side wall of the cavity 110 connected to the second reinforcing plate 140 and the corresponding surrounding plate. Moreover, the annular plate structure of the second reinforcing plate 140 is also beneficial for arranging components such as the air extraction pipe 180 passing through the surrounding plate at the internal position of the annular plate, avoiding damage to the overall strength of the casting layer 120 caused by arranging components such as the air extraction pipe 180.

[0044] Optionally, at least one third reinforcing plate 150 is provided on at least one outer wall side of the cavity 110. The third reinforcing plate 150 includes a plurality of constituent plates connected in sequence, and the adjacent constituent plates are arranged in a crosswise manner. The constituent plates are perpendicularly fixed to one side of the cavity 110. The third reinforcing plate 150 as a whole forms a multi-segmented bending structure. Through the third reinforcing plate 150, good limits can be formed on the casting layer 120 and the cavity 110 in any crosswise direction of the constituent plates, avoiding relative movement between the casting layer 120 and the cavity 110.

[0045] Optionally, at least one C-shaped reinforcing member 170 is provided on at least one outer wall side of the cavity 110. The C-shaped reinforcing member 170 extends linearly, and its cross-sectional shape is C-shaped. The C-shaped reinforcing member 170 includes two parallel side plates 300 and a vertical plate parallel to the side plates 300 and connected between the two side plates 300. One of the side plates 300 is fixedly attached to the outer wall side of the cavity 110, and the vertical plate is perpendicular to the outer wall side of the cavity 110. Through the C-shaped reinforcing member 170, limits can be formed on the cavity 110 and the casting layer 120 in the crosswise direction of the side plates 300 and in the crosswise direction of the vertical plate.

[0046] In some embodiments of the present disclosure, the reinforcing structure includes a first reinforcing plate 130, a second reinforcing plate 140, a third reinforcing plate 150, and a fourth reinforcing plate 160, and at least one of the first reinforcing plate 130, the second reinforcing plate 140, the third reinforcing plate 150, and the fourth reinforcing plate 160 is provided with a through hole 131. The through hole 131 can increase the fluidity during the pouring process of the pouring layer 120, and cause a part of the pouring layer 120 to solidify in the through hole 131, increasing the connection strength between the pouring layer 120 and the reinforcing structure. Alternatively, metal limits (such as steel fibers or copper fibers, etc.) can be added in the through hole 131 to increase the connection strength between the pouring layer 120 and the reinforcing structure after the pouring layer 120 solidifies. When the reinforcing structure further includes a C-shaped reinforcing member 170, optionally, the C-shaped reinforcing member 170 is provided with a through hole 131.

[0047] In some embodiments of the present disclosure, the furnace body further includes an exhaust pipe 180. The exhaust pipe 180 penetrates through the pouring layer 120. One end of the exhaust pipe 180 is fixedly connected to the cavity 110, and the other end of the exhaust pipe 180 extends to the outside of the pouring layer 120. The exhaust pipe 180 is communicated with the inner cavity. The exhaust pipe 180 can be used as a channel for forming a negative pressure condition in the inner cavity. Optionally, a flange is provided at the end of the exhaust pipe 180 facing away from the cavity 110, which facilitates the connection of a vacuum pump, etc. And the flange can also limit the pouring layer 120, increasing the connection strength between the pouring layer 120 and the cavity 110.

[0048] Optionally, the exhaust pipe 180 is arranged inside the second reinforcing plate 140, and the axis of the exhaust pipe 180 coincides with the axis of the second reinforcing plate 140.

[0049] In some embodiments of the present disclosure, the furnace body further includes a furnace door. The furnace door is located on the process port side of the cavity 110 and is detachably connected to the cavity 110. The process port can be opened and closed through the furnace door.

[0050] In some embodiments of the present disclosure, the furnace body further includes a furnace port flange 190. The furnace port flange 190 is located outside the process port. The furnace port flange 190 is fixedly connected to the cavity 110 and is in contact and cooperation with one end of the pouring layer 120 close to the process port. Among them, the furnace door is detachably connected to the cavity 110 through the furnace port flange 190. On the one hand, the furnace port flange 190 can facilitate the connection between the furnace door and the cavity 110. On the other hand, the furnace port flange 190 can limit the pouring layer 120, increasing the connection strength between the pouring layer 120 and the cavity 110. On the other hand, the furnace port flange 190 can also be used as a baffle during the pouring of the pouring layer 120, facilitating the pouring operation.

[0051] Optionally, the furnace body further includes an observation window. The observation window is arranged on one side of the cavity 110, and through the observation window, it is convenient to observe the situation in the inner cavity from the outside of the cavity 110.

[0052] Optionally, as Figure 3 shown, the furnace body further includes a heating element 111, and the heating element 111 can be a heating wire, a heating plate, etc. The heating element 111 is located inside the cavity 110 and / or between the cavity 110 and the casting layer 120. By means of the heating element 111, the temperature of the inner cavity can be adjusted to meet the temperature requirements of different processes.

[0053] Optionally, the furnace body further includes at least a pair of radio frequency electrodes, and the at least a pair of radio frequency electrodes are arranged in the cavity 110. Process gas can be dissociated into plasma under the action of the radio frequency electrodes, so as to deposit a thin film on the surface of the substrate and realize the coating process of the substrate.

[0054] Optionally, the furnace body further includes a water cooling device, and the water cooling device includes a water cooling pipe. The water cooling pipe is arranged in the cavity 110 and / or the furnace door. For example, the water cooling pipe is arranged on the inner wall of the cavity 110 or between the cavity 110 and the casting layer 120, or the water cooling pipe is arranged inside the furnace door. Further, the water cooling device further includes a water pump, and the water pump is connected to the water cooling pipe. By means of the water cooling device, rapid cooling can be facilitated or overheating of the outside of the furnace body can be prevented.

[0055] Optionally, the furnace body further includes a sealing ring, and the sealing ring is arranged between the cavity 110 and the furnace door. The sealing ring can be flexibly determined according to the shape of the process port and the furnace door. For example, when the process port is a rectangular opening, the sealing ring can adopt a rectangular ring structure. By means of the sealing ring, the sealing performance between the cavity 110 and the furnace door can be increased, and the process gas in the inner cavity can be prevented from flowing out from the connection position between the cavity 110 and the furnace door.

[0056] Optionally, as Figure 3 shown, the cavity further includes a reflection structure 112, and the reflection structure 112 is fixedly arranged on the inner wall of the cavity 110. The reflection structure 112 is used for reflecting heat radiation back to the workpiece carrier, thereby reducing heat loss and improving the heating effect. Optionally, the reflection structure 112 is a plate body, arranged on the side of the heating element 111 close to the casting layer 120. The surface of the reflection structure 112 facing the inner cavity is smooth to form a mirror structure, so as to achieve a better reflection effect. Moreover, the reflection structure 112 can be made of a metal material, such as stainless steel material, and has a longer service life.

[0057] Combined with Figures 4 to 6, embodiments of the present disclosure further provide a pouring device configured to pour the above-mentioned furnace body. The pouring device includes a vibrating bottom plate 200, a plurality of side plates 300, a fixing member 400, and a top plate 500. Among them, the vibrating bottom plate 200 is used for fixedly connecting with the cavity 110, specifically for fixedly connecting with the side of the cavity 110 of the furnace body where the process port is provided. The plurality of side plates 300 are respectively arranged at intervals with the cavity 110 and are perpendicular to the vibrating bottom plate 200, and the adjacent side plates 300 are detachably connected. The fixing member 400 is detachably connected to the vibrating bottom plate 200 and is fixedly connected to at least part of the plurality of side plates 300. The top plate 500 is arranged opposite to the vibrating bottom plate 200 and is detachably connected to the plurality of side plates 300. Among them, the vibrating bottom plate 200, the side plates 300, and the top plate 500 enclose a pouring space for pouring the pouring layer 120 of the furnace body, and the pouring layer 120 of the furnace body is poured and formed within the pouring space.

[0058] Optionally, the vibrating bottom plate 200 and the top plate 500 are horizontally arranged, the top plate 500 is located above the vibrating bottom plate 200 and forms a gap with the vibrating bottom plate 200. There are 4 vertically arranged side plates 300, and the 4 side plates 300 and the vibrating bottom plate 200 enclose a box-shaped structure with an upper opening. Each adjacent two side plates 300 are detachably connected through structures such as threaded members and clamping members. The 4 side plates 300 are respectively parallel and opposite to the two first side walls and the two second side walls of the cavity 110. The top plate 500 is lapped and matched with the tops of the 4 side plates 300, and the top plate 500 is parallel and opposite to the third side wall of the cavity 110.

[0059] Optionally, the fixing member 400 is provided with an oblong hole, and the fixing member 400 and the vibrating bottom plate 200 are detachably connected through at least one threaded member passing through the oblong hole, and / or the fixing member 400 and the side plate 300 are detachably connected through at least one threaded member passing through the oblong hole, thereby facilitating fine adjustment of the position of the side plate 300.

[0060] Optionally, there are two relatively arranged fixing members 400, and the two fixing members 400 are respectively connected to two relatively arranged side plates 300 in a one-to-one correspondence.

[0061] Optionally, lapping grooves are provided on both sides of the side plate 300. Among the adjacent side plates 300, one side of one side plate 300 is located within the lapping groove of the other side plate, so that the connection between the adjacent side plates 300 is tighter, avoiding the situation that the pouring material flows out from the joint position, and facilitating maintaining the vertical state of each side plate 300.

[0062] In some embodiments of the present disclosure, the pouring device further includes at least one handle 301, and the at least one handle 301 is fixedly connected to the side plate 300 or the top plate 500.

[0063] Optionally, the pouring device includes a plurality of handles 301, and at least one handle 301 is respectively connected to the top plate 500 and the plurality of side plates 300. The handle 301 is disposed on the side of the side plate 300 or the top plate 500 facing away from the metal cavity, and the installation or disassembly operation of the side plate 300 or the top plate 500 can be facilitated through the handle 301.

[0064] Optionally, the handle 301 is rotatably connected to the top plate 500 or the side plate 300, so that the handle 301 can be easily folded to be parallel to the connected side plate 300 or top plate 500.

[0065] In some embodiments of the present disclosure, when the furnace body includes an exhaust pipe 180, the top plate 500 includes a first plate body 501 and a second plate body 502 disposed opposite to each other. The first plate body 501 is provided with a first avoidance groove 503, and the second plate body 502 is provided with a second avoidance groove 504. The first avoidance groove 503 and the second avoidance groove 504 are combined to form an avoidance hole for the exhaust pipe 180 to pass through. When the top plate 500 is installed above the side plate 300, the inner wall of the avoidance hole is attached to the side wall of the exhaust pipe 180.

[0066] Optionally, the first plate body 501 and the second plate body 502 are symmetrically arranged, and the first avoidance groove 503 and the second avoidance groove 504 are symmetrically arranged, thereby reducing the production difficulty of the top plate 500 and improving the convenience of use.

[0067] The following combines Figure 7 to describe the pouring method of this embodiment, and this pouring method can be referred to in combination with the above-mentioned pouring device.

[0068] The pouring method provided by the embodiments of the present disclosure is applied to the above-mentioned pouring device, and the pouring method includes:

[0069] S100. Fix the cavity 110 to the vibrating bottom plate 200. Specifically, make the process port of the cavity 110 face downward, and make the side of the process port of the cavity 110 fit with the vibrating bottom plate 200, and connect the furnace mouth flange 190 and the vibrating bottom plate 200 through bolts to realize the fixed connection between one side of the process port of the cavity 110 and the vibrating bottom plate 200.

[0070] S200. Fix a plurality of side plates 300 to the vibrating bottom plate 200 through the fixing member 400. When fixing, keep the fixing member 400 on the side of the plurality of side plates 300 facing away from the cavity 110, and maintain that the plurality of side plates 300 are respectively parallel to the side walls of the corresponding cavity 110.

[0071] S300. Connect adjacent side plates 300. Fix the adjacent side plates 300 through structures such as bolts to ensure that the joint between the adjacent side plates 300 does not cause the pouring material to flow out, and ensure that each side plate 300 is in a vertical state.

[0072] S400. Add casting material between the side plates 300 and the cavity 110. During the addition of the casting material, methods such as stirring and vibration can be used to ensure the uniformity of casting and prevent the occurrence of air bubbles.

[0073] S500. Install the top plate 500 on the plurality of side plates 300. Optionally, to ensure the stable position of the top plate 500, the step of installing the top plate 500 on the plurality of side plates 300 includes: placing the top plate 500 on the upper ends of the plurality of side plates 300 and fixing the top plate 500 to the plurality of side plates 300 respectively. When the furnace body includes the exhaust pipe 180, the step of installing the top plate 500 on the plurality of side plates 300 includes: installing the top plate 500 on the plurality of side plates 300 such that the first plate body 501 and the second plate body 502 in the top plate 500 are respectively disposed on both sides of the exhaust pipe 180, and the inner walls of the first avoidance groove 503 of the first plate body 501 and the inner walls of the second avoidance groove 504 of the second plate body 502 are respectively in contact with the side walls of the exhaust pipe 180.

[0074] S600. Apply a vibration force to the vibration bottom plate 200 for vibration operation. Specifically, a vibration force can be applied to the vibration bottom plate 200 through a vibration motor for vibration operation. Through the vibration operation, the fluidity can be improved, pores can be removed, the structural strength of the casting layer 120 can be increased, and the surface of the casting layer 120 can be made flat.

[0075] S700. After the casting material between the side plates 300 and the cavity 110 solidifies to form the casting layer 120, remove the top plate 500 and the side plates 300 and disconnect the connection between the cavity 110 and the vibration bottom plate 200.

[0076] In the above steps, there is no sequence between step S200 and step S300. The plurality of side plates 300 can be connected to each other first, and then the plurality of side plates 300 can be fixed to the vibration bottom plate 200 through the fixing member 400, or some or all of the side plates 300 can be fixed to the vibration bottom plate 200 through the fixing member 400 first, and then the plurality of side plates 300 can be connected to each other.

[0077] In some embodiments of the present disclosure, before step S400, adding casting material between the side plates 300 and the cavity 110, it further includes:

[0078] S301. Coat a release agent on the surface of at least one of the side plates 300 and the top plate 500. Optionally, coat the release agent on the side of the side plates 300 and the top plate 500 close to the cavity 110 respectively. This can facilitate the demolding operation after the casting layer 120 solidifies and forms.

[0079] An embodiment of the present disclosure further provides a coating device, which includes a process carrier and the above-mentioned furnace body. The process carrier is used to carry the workpiece to be processed, and the inner cavity of the cavity 110 in the furnace body is used to accommodate the process carrier. The coating device further includes a gas source cabinet. The gas source cabinet is connected to the cavity 110 and is used to provide reaction gas for the inner cavity of the cavity 110.

[0080] In this embodiment, the gas source cabinet can be fixedly connected to the furnace body or separately arranged from the furnace body.

[0081] Optionally, the gas source cabinet includes a control panel, a connecting pipeline and a pump body. The control panel is electrically connected to the pump body, and the operation of the pump body can be controlled through the control panel. The pump body is communicated with the inner cavity through the connecting pipeline. Among them, the pump body can be arranged inside the cabinet of the gas source cabinet or outside the cabinet of the gas source cabinet, and no specific limitation is made here.

[0082] Since the coating device of this embodiment includes the above-mentioned furnace body, the coating device includes all technical features and technical effects of the furnace body, which will not be elaborated here.

[0083] The coating device of this embodiment can be a PECVD device (Plasma Enhanced Chemical Vapor Deposition), a cross-section passivation device (Passivation Equipment for Cross-Sections), an LPCVD device (Low Pressure Chemical Vapor Deposition), an ALD device (Atomic Layer Deposition), etc.

[0084] The phrases "an embodiment" and "embodiment" mentioned in the specification indicate that the described embodiment may include specific features, structures or characteristics, but not necessarily every embodiment includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when combining an embodiment to describe a specific feature, structure or characteristic, it is within the knowledge scope of those skilled in the art to implement such a feature, structure or characteristic in combination with other embodiments, whether explicitly or implicitly described.

[0085] It should be understood that the terms "on", "above", and "over" in this disclosure should be interpreted in the broadest manner, such that "on" not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above" or "over" not only includes the meaning of "above" or "over something", but may also include the meaning of "above" or "over something" with no intermediate features or layers therebetween (i.e., directly on something).

[0086] In addition, for ease of description, spatial relative terms may be used in this document, such as "below", "beneath", "under", "above", "over", etc., to describe the relationship of one component or feature to another component or feature as shown in the figures. Spatial relative terms are intended to encompass different orientations of a component in use or operation other than the orientation shown in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatial relative descriptors used in this document may be interpreted accordingly.

[0087] It should be noted that in this document, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0088] The above are only the preferred embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent replacements, etc. made within the spirit and principles of this disclosure shall be included within the protection scope of this disclosure.

Claims

1. A furnace body, characterized in that: include: A cavity, wherein the cavity is made of metal and has an inner chamber, and the inner chamber is used to receive at least one workpiece carrier; The casting layer is located outside the cavity, and the density of the casting layer is lower than the density of the cavity.

2. The furnace body according to claim 1, characterized in that: Also includes: The reinforcement structure is fixedly arranged on the outside of the cavity, and the reinforcement structure is embedded in the casting layer.

3. The furnace body according to claim 2, characterized in that: The reinforcement structure comprises: At least one first reinforcing plate, fixed vertically to the outer wall of the cavity, the first reinforcing plate extending in a straight line; and / or, at least one second reinforcing plate, wherein the second reinforcing plate is an annular plate, and one axial end of the second reinforcing plate is vertically fixed to an outer wall of one side of the cavity; and / or, at least one third reinforcing plate, the third reinforcing plate comprising a plurality of sequentially connected constituent plates, adjacent constituent plates being cross-arranged, and the constituent plates being vertically fixed to one side of the cavity; In the case where the reinforcement structure includes at least one first reinforcement plate, the reinforcement structure further includes: at least one fourth reinforcing plate, fixed vertically to at least one of the first reinforcing plates and located on a side of the connected first reinforcing plates away from the cavity; At least one of the first reinforcing plate, the second reinforcing plate, the third reinforcing plate, and the fourth reinforcing plate is provided with a through hole.

4. The furnace body according to claim 3, characterized in that: A plurality of the first reinforcing plates are disposed on at least one side outer wall of the cavity, and among the plurality of the first reinforcing plates on the same side outer wall of the cavity, at least two of the first reinforcing plates are cross-arranged.

5. The furnace body according to any one of claims 1 to 4, characterized in that: The cavity comprises: A first side wall, wherein two first side walls are arranged in parallel and at intervals; A second side wall, wherein two second side walls are arranged in parallel and spaced apart from each other, and the two second side walls are vertically connected to the two first side walls; A third side wall, perpendicular to the first side wall and the second side wall, and connected to the first side wall and the second side wall respectively; The cavity has a process port, the process port is located on a side of the cavity opposite to the third side wall, and the process port is connected to the inner chamber; The casting layer includes a plurality of enclosure panels respectively parallel to the two first side walls, the two second side walls and the third side wall.

6. The furnace body according to claim 5, characterized in that: Also includes: A furnace door, located at one side of the process port of the cavity and detachably connected to the cavity; A furnace mouth flange is located outside the process port, the furnace mouth flange is fixedly connected to the cavity, and is in contact with and fits with an end of the casting layer close to the process port; Wherein, the furnace door is detachably connected to the cavity through the furnace mouth flange.

7. The furnace body according to claim 6, characterized in that: Also includes at least one of the following structures: An air extraction pipe is provided through the casting layer, one end of the air extraction pipe is fixedly connected to the cavity, the other end of the air extraction pipe extends to the outside of the casting layer, and the air extraction pipe is communicated with the inner chamber; An observation window is provided on one side of the cavity; A heating element, located inside the cavity and / or between the cavity and the casting layer; An inner reinforcing rib, located inside the cavity and fixedly connected to the cavity; at least one pair of radio frequency electrodes, disposed in the cavity; A water cooling device, the water cooling device comprising a water cooling pipe, the water cooling pipe being arranged in the cavity and / or the furnace door; A sealing ring, disposed between the cavity and the furnace door; The reflective structure is fixedly arranged on the inner wall of the cavity.

8. The furnace body according to any one of claims 1 to 4, characterized in that: The material of the casting layer includes metal fiber unfired casting material.

9. A pouring device, characterized in that: The furnace body according to any one of claims 1 to 8 is configured to be poured, wherein the pouring device comprises: A vibration bottom plate, used for being fixedly connected to the cavity of the furnace body; A plurality of side panels are respectively arranged at intervals from the cavity, and adjacent side panels are detachably connected; A fixing member, detachably connected to the vibration base plate, and fixedly connected to at least part of the plurality of side plates; A top plate, arranged opposite to the vibration bottom plate and detachably connected to the plurality of side plates; The vibrating bottom plate, the side plate, the top plate and the cavity form a pouring space, and the pouring space is used for pouring the pouring layer of the furnace body.

10. The pouring device according to claim 9, characterized in that: Also includes: At least one handle is fixedly connected to the side panel or the top panel.

11. The pouring device according to claim 9, characterized in that: When the furnace body includes an exhaust pipe, the top plate includes a first plate body and a second plate body arranged opposite to each other, the first plate body is provided with a first avoidance groove, the second plate body is provided with a second avoidance groove, and the first avoidance groove and the second avoidance groove are combined to form an avoidance hole for the exhaust pipe to pass through.

12. A coating device, characterized in that: include: Workpiece A carrier, used for carrying a workpiece to be processed; as well as The furnace body according to any one of claims 1 to 8, wherein the inner chamber of the furnace body is used to receive a workpiece carrier.

Images