Device for detecting outline of scribing knife

Abstract

The utility model discloses a device for detecting the outline of a dicing blade, and the device comprises a pedestal which is provided with a visual mechanism which is used for positioning a dicing blade and detecting the surface of the dicing blade; the measuring mechanism comprises a measuring needle, and the measuring needle slides on the surface of the scribing knife so as to detect the outline of the scribing knife; and the moving mechanism drives the measuring mechanism to be close to or far away from the visual mechanism. The scribing knife detection device has the beneficial effects that the scribing knife is subjected to contour detection by arranging the visual mechanism and the measuring mechanism, the visual mechanism positions the scribing knife during detection, and the blade supporting column and the pressing block are arranged in the measuring mechanism, so that the scribing knife can be prevented from tilting during detection, the detection effect is improved, and the detection efficiency is improved. And magnetic connection is arranged between the blade supporting frame and the pressing block, so that the dicing blade can be prevented from moving during detection, the magnetic connection is convenient to take and place, and the detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of scribing tool detection, in particular to a device for detecting the contour of a scribing tool. Background Technique

[0002] With the continuous development of the domestic semiconductor industry and the continuous increase in product demand, as well as the continuous expansion of domestic chip manufacturing capabilities and the continuous improvement of packaging and testing capabilities, it has also brought more demands for scribing tools. Therefore, scribing tools have a huge global and domestic market capacity, rapid growth, and great market potential.

[0003] A profilometer is an instrument that can depict the waviness and roughness of a workpiece surface and give its numerical value, using a precision air-bearing guide as a linear reference. A profilometer is a two-coordinate measuring instrument. The sensor of the instrument slides uniformly relative to the surface of the workpiece to be measured. The stylus of the sensor senses the geometric changes of the measured surface, samples in the X and Z directions respectively, and converts them into electrical signals. These electrical signals are amplified and processed, and then converted into digital signals and stored in the memory of the computer system. The measurement result is the actual contour curve and is output through a display.

[0004] Currently, the existing scribing tool contour detection device directly places the blade on the workbench, and makes the stylus contact the workpiece by moving the operating rod, and slides uniformly on the surface of the scribing tool to be measured. During the operation process, due to the increase in the thickness of the electroplated blade of the scribing tool, protrusions are generated on the surface of the workpiece. During the sliding process of the stylus, it is easy to drive the blade, causing the blade to slip, resulting in inaccurate measurement of the scribing tool contour and a high rejection rate. Therefore, a new solution needs to be designed for improvement. Content of the Utility Model

[0005] The purpose of the utility model is to provide a device for detecting the contour of a scribing tool to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A device for detecting the contour of a scribing tool, including a base, and provided on the base are:

[0007] A vision mechanism for positioning the scribing blade and detecting the surface of the scribing tool;

[0008] A measuring mechanism, the measuring mechanism includes a measuring needle, and the contour of the scribing tool is detected by sliding the measuring needle on the surface of the scribing tool;

[0009] A moving mechanism for driving the measuring mechanism to approach or move away from the vision mechanism.

[0010] Preferably, the vision mechanism includes a camera bracket, a camera and a light source. The bracket is vertically set on the base. The camera lens is installed downward at the top of the bracket, and the light source is installed below the camera.

[0011] Preferably, the moving mechanism includes a mounting table, on which a slide rail is provided, and a slider is slidably provided on the slide rail.

[0012] Preferably, a limiting plate is provided on one side of the mounting table.

[0013] Preferably, a bearing table is mounted on the slider, and side plates are provided on both sides of the bearing table.

[0014] Preferably, the measuring mechanism further includes a measuring plate, on which a blade support column and a pressing block are provided. The scribing knife is connected to the blade support column, and the pressing block is provided on the scribing knife.

[0015] Preferably, the support column includes a lower cylinder and an upper cylinder, and the upper cylinder is connected to the central hole of the scribing knife.

[0016] Preferably, the blade support column and the pressing block are magnetically connected.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows: the present utility model detects the contour of the scribing knife through the visual mechanism and the measuring mechanism. The visual mechanism positions the scribing knife during detection, and a blade support column and a pressing block are arranged in the measuring mechanism. The scribing knife can be prevented from tilting during detection, improving the detection effect. Moreover, a magnetic connection is arranged between the blade support column and the pressing block, which can prevent the scribing knife from moving during detection, and the magnetic connection is convenient for taking and placing, improving the detection efficiency. Description of the Drawings

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is a schematic structural diagram of the moving mechanism of the present utility model;

[0020] Figure 3 is a schematic structural diagram of the measuring mechanism of the present utility model.

[0021] In the figure: 1, base; 2, visual mechanism; 21, bracket; 22, camera; 23, light source; 3, measuring mechanism; 31, measuring needle; 32, measuring plate; 33, blade support column; 331, lower cylinder; 332, upper cylinder; 34, pressing block; 4, scribing knife; 5, moving mechanism; 51, mounting table; 52, slide rail; 53, slider; 54, limiting plate; 55, bearing table; 56, side plate. Detailed Embodiments

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0023] Please refer to Figure 1 , the present utility model provides a technical solution: a device for detecting the contour of a dicing blade, including a base 1, on which a vision mechanism 2 is provided for positioning the dicing blade 4 and detecting the surface of the dicing blade; a measuring mechanism 3, the measuring mechanism 3 includes a measuring needle 31, and the contour of the dicing blade 4 is detected by sliding the measuring needle 31 on the surface of the dicing blade 4; a moving mechanism 5 for driving the measuring mechanism 3 to approach or move away from the vision mechanism 1.

[0024] In an embodiment of the present utility model, the vision mechanism 2 includes a camera bracket 21, a camera 22 and a light source 23. The camera 22 is a CCD camera. The bracket 21 is vertically installed on the base 1. The lens of the camera 22 is installed downward at the top of the bracket 21, and the light source 23 is installed below the camera 22.

[0025] In an embodiment of the present utility model, the moving mechanism 5 includes a mounting table 51, on which a slide rail 52 is provided, and a slider 53 slides on the slide rail 52. Further, a limit plate 54 is provided on one side of the mounting table 51, and the limit plate 54 is in an inverted L shape. Further, a carrier table 55 is installed on the slider 52, and side plates 56 are provided on both sides of the carrier table 55.

[0026] In an embodiment of the present utility model, the measuring mechanism 3 further includes a measuring plate 32, on which a blade support column 33 is provided, and the dicing blade 4 is connected to the blade support column 33. The measuring mechanism 3 is installed on the moving mechanism 5. Specifically, the measuring plate 32 is arranged on the carrier table 55, and the two side plates 56 reinforce on both sides of the measuring plate 32. The measuring needle 31 is arranged on the limit plate 54 through a multi-axis rotating arm.

[0027] In an embodiment of the present utility model, the blade support column 33 includes a lower cylinder 331 and an upper cylinder 332. The dicing blade 4 is sleeved on the upper cylinder 332, and a pressing block 34 is provided on the dicing blade 4. In this way, when the measuring needle 31 measures the dicing blade 4, the dicing blade 4 will not be lifted or moved due to downward pressure, thus affecting the measurement result. Magnets are provided inside both the upper cylinder 332 and the pressing block 34, and they are magnetically connected to each other.

[0028] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A device for detecting the contour of a dicing blade, comprising a base, characterized in that: The base is provided with: A visual mechanism for positioning the dicing blade and detecting the dicing blade surface; A measuring mechanism, the measuring mechanism comprising a measuring needle, by which the measuring needle slides on the surface of the dicing blade to detect the contour of the dicing blade; The moving mechanism drives the measuring mechanism to approach or move away from the visual mechanism.

2. A device for detecting the contour of a dicing blade according to claim 1, characterized in that: The visual mechanism includes a camera bracket, a camera and a light source. The bracket is vertically set up on a base, the camera lens is downwardly mounted on the top of the bracket, and the light source is mounted on the lower side of the camera.

3. A device for detecting the contour of a dicing blade according to claim 2, characterized in that: The moving mechanism comprises a mounting platform, a slide rail is arranged on the mounting platform, and a slider is slidably arranged on the slide rail.

4. The device for detecting the contour of a dicing blade according to claim 3, characterized in that: A limiting plate is provided on one side of the mounting platform.

5. The device for detecting the contour of a dicing blade according to claim 4, characterized in that: A bearing platform is installed on the sliding block, and side plates are arranged on both sides of the bearing platform.

6. The device for detecting the contour of a dicing blade according to claim 5, characterized in that: The measuring mechanism also includes a measuring plate, on which a blade support column and a pressure block are provided. The dicing knife is connected to the blade support column, and the pressure block is provided on the dicing knife.

7. The device for detecting the contour of a dicing blade according to claim 6, characterized in that: The support column includes a lower cylinder and an upper cylinder, and the upper cylinder is connected to the center hole of the dicing knife.

8. The device for detecting the contour of a dicing blade according to claim 7, characterized in that: The blade support column is magnetically connected to the pressing block.

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