High-capacity high-pressure-resistant liquid storage tank

Abstract

The utility model provides a large-capacity high pressure-resistant liquid storage tank, which relates to the technical field of liquid storage tanks and comprises a first tank body, a second tank body and a third tank body, the first tank body comprises a first liquid storage tank and a first base, the second tank body comprises a second liquid storage tank and a second base, and the third tank body comprises a third liquid storage tank and a third base. At the moment, the first tank body or the third tank body can be pulled towards the two sides, so that the first tank body or the third tank body is separated from the screw rod, a standby tank body can be mounted on the screw rod, and the first tank body or the third tank body is mounted on the screw rod; the standby tank body is installed between the first tank body and the second tank body or between the third tank body and the second tank body, the nut is installed on the screw rod, and an air inlet pipe of the standby tank body is communicated with air inlet pipes of the first tank body and the second tank body through a three-way connector or communicated with the third tank body and the second tank body through a three-way connector. The tank body is expanded, and the defect that the tank body cannot be quickly and simply expanded is overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid storage tanks, in particular to a large-capacity and high-pressure-resistant liquid storage tank. Background Art

[0002] In the semiconductor manufacturing process, such as cleaning, etching, lithography, ion implantation and other process steps, many liquid chemicals and pure water are used. The storage, mixing or reaction of these liquids all require the use of liquid storage tanks. In the semiconductor manufacturing process, the liquid storage tank is not only a container for storing chemicals and pure water, but also plays multiple functions, such as circulating supply, mixing modulation, temperature control, emergency discharge, buffer storage, etc. These functions are crucial for ensuring the stability of the semiconductor manufacturing process and product quality.

[0003] However, when the tank body of the existing liquid storage tank is expanded, separate pipeline layout and connection are required, and it cannot be expanded quickly and simply, which will greatly increase the cost during development. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the defect that it cannot be expanded quickly and simply in the prior art, and to propose a large-capacity and high-pressure-resistant liquid storage tank.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme: A large-capacity and high-pressure-resistant liquid storage tank, including a first tank body, a second tank body, and a third tank body. The first tank body includes a first liquid storage tank and a first base. The second tank body includes a second liquid storage tank and a second base. The third tank body includes a third liquid storage tank and a third base. Tank covers are provided at the tops of the first liquid storage tank, the second liquid storage tank, and the third liquid storage tank. Air inlet pipes are provided at the tops of the three tank covers. A liquid inlet pipe is provided at the top of the tank cover on the top of the second liquid storage tank. A liquid outlet pipe is provided at the bottom of the second base. Four screw rods are provided at the bottoms of the first liquid storage tank, the second liquid storage tank, and the third liquid storage tank. Two interfaces are provided on the surface of the second base. Sealing gaskets are provided inside the two interfaces. Connecting pipes are provided on the surfaces of the first base and the second base. A side pipe is provided on one side of the third tank body. A support is provided on one side of the side pipe. Five liquid level detection sensors are provided on the surface of the support.

[0006] Preferably, the first liquid storage tank is installed in the recess of the first base through the thread at the bottom and welded to the top surface of the first base. The second liquid storage tank is installed in the recess of the second base through the thread at the bottom and welded to the top surface of the second base. The third liquid storage tank is installed in the recess of the third base through the thread at the bottom and welded to the top surface of the third base.

[0007] Preferably, the second base is established in the middle of the first base and the third base. The two interfaces are evenly established on the surfaces on both sides of the second base, and the connecting pipes of the first base and the third base are both installed in the interfaces of the second base. The two sealing gaskets are evenly established between the two connecting pipes and the interfaces.

[0008] Preferably, the four screws are evenly established in groups of two on both sides of the first base, the second base and the third base. The four screws penetrate through the first base, the second base and the third base, and the first base, the second base and the third base are connected together by the screws.

[0009] Preferably, the three tank covers are installed on the tops of the first liquid storage tank, the second liquid storage tank and the third liquid storage tank through the threads on the bottom surface.

[0010] Preferably, the inlet pipe is installed on the top surface of the tank cover through a direct joint, and the inlet pipes are connected to each other through a tee joint. The inlet liquid pipe is installed on the top surface of the tank cover at the top of the second liquid storage tank through a direct joint, and the outlet liquid pipe is installed on the bottom surface of the second base through a direct joint.

[0011] Preferably, one end of the bypass pipe is installed on the top surface of the tank cover at the top of the third liquid storage tank through an elbow joint, and the other end of the bypass pipe is installed on the surface of the third base through an elbow joint. Two brackets are provided on one side of the third liquid storage tank, and the brackets are welded to the surface of the third liquid storage tank. The bypass pipe is installed on the surface of the bracket and fixed with a fixing frame. The three liquid level detection sensors are installed vertically on the surface of the bracket and fixed with fixing bolts.

[0012] Beneficial effects

[0013] In the present utility model, the first liquid storage tank, the second liquid storage tank and the third liquid storage tank are all installed in the recesses of the first base, the second base and the third base through the threads at the bottom and welded to the top surfaces of the first base, the second base and the third base. The connecting pipes of the first base and the third base are both installed in the interfaces of the second base, and gaskets are provided in the middle of the two connecting pipes and the interfaces for sealing, so that the first tank body, the second tank body and the third tank body are connected through the cooperation of the bottom connecting pipes and the interfaces. The first base, the second base and the third base are connected together by four screws, and both ends of the four screws are fixed with two nuts, so that the first base, the second base and the third base are tightly connected together. The intake pipes on the top surfaces of the tank covers installed at the tops of the first tank body, the second tank body and the third tank body are connected together by three-way joints. In this way, when expansion is needed, only the nuts on one side or both sides of the four screws need to be removed, and the three-way joint of the intake pipe on the top surface of the tank cover needs to be removed. At this time, the first tank body or the third tank body can be pulled to both sides, so that the first tank body or the third tank body is separated from the screw. At this time, the spare tank body can be installed on the screw, and the first tank body or the third tank body can be installed back on the screw, so that the spare tank body is installed between the first tank body and the second tank body or installed between the third tank body and the second tank body, and the nuts are installed back on the screw. The intake pipe of the spare tank body is connected to the intake pipes of the first tank body and the second tank body through a three-way joint or connected to the intake pipes of the third tank body and the second tank body through a three-way joint, so that the tank body is expanded, solving the drawback of being unable to expand quickly and simply. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 Isometric view of the present utility model;

[0015] Figure 2 Rear view of the present utility model;

[0016] Figure 3 Bottom view of the present utility model;

[0017] Figure 4 For the present utility model Figure 3 Cross-sectional view;

[0018] Figure 5 Partial isometric view of the present utility model;

[0019] Figure 6 Partial bottom view of the present utility model.

[0020] LEGEND DESCRIPTION:

[0021] 1. First tank body; 101. First liquid storage tank; 102. First base; 2. Second tank body; 201. Second liquid storage tank; 202. Second base; 3. Third tank body; 301. Third liquid storage tank; 302. Third base; 4. Side pipe; 5. Liquid level detection sensor; 6. Bracket; 7. Tank cover; 8. Liquid outlet pipe; 9. Liquid inlet pipe; 10. Air inlet pipe; 11. Screw; 12. Sealing gasket; 13. Interface; 14. Connecting pipe. Detailed implementation mode

[0022] In order to make the technical means, creative features, achieved purposes and effects realized by the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments and the drawings. However, the following embodiments are only the preferred embodiments of the present utility model and not all of them. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work all fall within the protection scope of the present utility model.

[0023] The specific embodiments of the present utility model will be described below in conjunction with the drawings. Specific Embodiment 1:

[0025] Refer to Figures 1-6, a large-capacity and high-voltage liquid storage tank, comprising a first tank body 1, a second tank body 2, and a third tank body 3. The first tank body 1 includes a first liquid storage tank 101 and a first base 102. The second tank body 2 includes a second liquid storage tank 201 and a second base 202. The third tank body 3 includes a third liquid storage tank 301 and a third base 302. Tank covers 7 are provided at the tops of the first liquid storage tank 101, the second liquid storage tank 201, and the third liquid storage tank 301. Air inlet pipes 10 are provided at the tops of the three tank covers 7. A liquid inlet pipe 9 is provided at the top of the tank cover 7 on the top of the second base 202. A liquid outlet pipe 8 is provided at the bottom of the second base 202. Four screw rods 11 are provided at the bottoms of the first liquid storage tank 101, the second liquid storage tank 201, and the third liquid storage tank 301. Two interfaces 13 are provided on the surface of the second base 202. Sealing gaskets 12 are provided inside the two interfaces 13. Connecting pipes 14 are provided on the surfaces of the first base 102 and the second base 201. A side pipe 4 is provided on one side of the third tank body 3. A support 6 is provided on one side of the side pipe 4. Five liquid level detection sensors 5 are provided on the surface of the support 6. The first liquid storage tank 101 is installed in the recess of the first base 102 through the thread at the bottom and welded to the top surface of the first base 102. The second liquid storage tank 201 is installed in the recess of the second base 202 through the thread at the bottom and welded to the top surface of the second base 202. The third liquid storage tank 301 is installed in the recess of the third base 302 through the thread at the bottom and welded to the top surface of the third base 302. The second base 202 is set between the first base 101 and the third base 302. The two interfaces 13 are evenly provided on the surfaces on both sides of the second base 202. And the connecting pipe 14 of the first base 102 and the connecting pipe 14 of the third base 302 are both installed in the interface 13 of the second base 202. The two sealing gaskets 12 are evenly provided between the two connecting pipes 14 and the interfaces 13. The four screw rods 11 are evenly provided in groups of two on both sides of the first base 102, the second base 202, and the third base 302. The four screw rods 11 all penetrate through the first base 102, the second base 202, and the third base 302. The first base 102, the second base 202, and the third base 302 are connected together through the screw rods 11. The three tank covers 7 are installed at the tops of the first liquid storage tank 101, the second liquid storage tank 201, and the third liquid storage tank 301 through the thread on the bottom surface. The air inlet pipes 10 are installed on the top surface of the tank cover 7 through direct joints. And the air inlet pipes 10 are connected to each other through a tee joint. The liquid inlet pipe 9 is installed on the top surface of the tank cover 7 on the top of the second liquid storage tank 201 through a direct joint. The liquid outlet pipe 8 is installed on the bottom surface of the second base 202 through a direct joint. One end of the side pipe 4 is installed on the top surface of the tank cover 7 on the top of the third liquid storage tank 301 through an elbow joint. And the other end of the side pipe 4 is installed on the surface of the third base 302 through an elbow joint. Two supports 6 are provided on one side of the third liquid storage tank 301. And the supports 6 are both welded to the surface of the third liquid storage tank 301. The side pipe 4 is installed on the surface of the support 6 and fixed with a fixing frame.Five liquid level detection sensors 5 are vertically installed on the surface of the bracket 6 and fixed with fixing bolts.

[0026] The first liquid storage tank 101 is rotationally installed in the recess on the top surface of the first base 102 through the threads at the bottom and welded to the top surface of the first base 102. The second liquid storage tank 201 is rotationally installed in the recess on the top surface of the second base 202 through the threads at the bottom and welded to the top surface of the second base 202. The third liquid storage tank 301 is rotationally installed in the recess on the top surface of the third base 302 through the threads at the bottom and welded to the top surface of the third base 302. And the three tank covers 7 are rotationally installed at the threaded parts at the tops of the first liquid storage tank 101, the second liquid storage tank 201, and the third liquid storage tank 301 through the threads on the bottom surface, so that the tank covers 7 are installed through the cooperation of the threads. The connecting pipes 14 of the first base 102 and the connecting pipes 14 of the third base 302 are both installed in the interfaces 13 of the second base 202, so that the first base 102, the second base 202, and the third base 302 can be connected for liquid communication. Sealing gaskets 12 are provided in the middle between the two connecting pipes 14 and the connections with the interfaces 13 to ensure that no liquid leaks out when the liquid flows between the first base 102, the second base 202, and the third base 302, so that the first tank body 1, the second tank body 2, and the third tank body 3 are connected through the cooperation of the bottom connecting pipes 14 and the interfaces 13. The first base 102, the second base 202, and the third base 302 are connected together by four screw rods 11. The four screw rods 11 are evenly installed in the through holes on both sides of the surfaces of the first base 102, the second base 202, and the third base 302 in groups of two and penetrate through the first base 102, the second base 202, and the third base 302. And both ends of the four screw rods 11 are fixed with two nuts, so that the first base 102, the second base 202, and the third base 302 are tightly connected together. The three inlet pipes 10 are installed on the top surfaces of the tank covers 7 at the tops of the first tank body 1, the second tank body 2, and the third tank body 3 through direct joints, and three-way joints are installed at the tops of the three inlet pipes 10. Each two three-way joints are connected by a connecting pipe 14, so that the three inlet pipes 10 are connected. In this way, when the inert gas passes through the three-way joints at the tops of the first tank body 1 and the third tank body 3, it will be transported to another three-way joint through the connecting pipe 14 connected to the three-way joint, realizing the gas connection. In this way, when expansion is needed, only the nuts on one side or both sides of the four screw rods 11 need to be removed, and the three-way joints of the inlet pipes 10 on the top surfaces of the tank covers 7 need to be removed. At this time, the first tank body 1 or the third tank body 3 can be pulled to both sides, so that the first tank body 1 or the third tank body 3 is separated from the screw rods 11. At this time, the spare tank body can be installed on the screw rods 11. One side of the surface of the base of the spare tank body is provided with a connecting pipe 14, and the other side is provided with an interface 13. A sealing gasket 12 is also provided in the interface 13 of the spare base. When the connecting pipe 14 of the spare base is installed on the interface 13 of the second base 202, the first tank body 1 or the third tank body 3 can be installed back on the screw rods 11.Install the connecting pipe 14 of the first base 102 or the third base 302 on the interface 13 of the spare base to enable the liquid to flow into the spare tank, so that the spare tank is installed between the first tank 1 and the second tank 2 or installed between the third tank 3 and the second tank 2. Then install the nut back on the screw 11 to tightly fix and connect all the tanks together. Next, connect the air inlet pipe 10 of the top cover 7 of the spare tank to the air inlet pipes 10 of the first tank 1 and the second tank 2 through a three-way joint or connect it to the third tank 3 and the second tank 2 through a three-way joint to expand the tank. When in use, the liquid enters the second liquid storage tank 201 through the liquid inlet pipe 9 on the top surface of the top cover 7 of the second liquid storage tank 201. The liquid inlet pipe 9 is installed on the top cover 7 through a direct joint. When the liquid enters the second liquid storage tank 201, the liquid flows through the channels of the second base 202 into the first liquid storage tank 101 and the third liquid storage tank 301. Since the first tank 1, the second tank 2, and the third tank 3 are connected, the liquid levels inside the first tank 1, the second tank 2, and the third tank 3 will be leveled by the pressure. Since there are two brackets 6 on the surface of the third liquid storage tank 301, the brackets 6 are welded on the surface of the third liquid storage tank 301, and the side pipe 4 is installed on the surface of one of the brackets 6. There are five liquid level detection sensors 5 in the middle of the other bracket 6. The five liquid level detection sensors 5 are evenly installed vertically in the middle of the bracket 6. The side pipe 4 is fixed on the bracket 6 through a fixing frame. The liquid level detection sensors 5 are fixed on the bracket 6 with fixing bolts. The five liquid level detection sensors 5 all abut against the side pipe 4, and the five liquid level detection sensors 5 are all connected to an external power supply. When the liquid enters the third liquid storage tank 301, since one end of the side pipe 4 is installed on the third base 302 through an elbow joint, and the other end of the side pipe 4 is installed on the top cover 7 of the third liquid storage tank 301 through an elbow joint, part of the liquid will flow into the side pipe 4 through the elbow joint when flowing into the third base 302. At this time, the liquid level detection sensor 5 will emit ultrasonic pulses. When the wave pulse encounters the liquid surface, it will be reflected back to the sensor. The main board of the liquid level detection sensor 5 processes these signals and transmits them to the control panel, enabling the operator to detect the height of the liquid inside the tank through the operation panel. During the liquid storage process, the inert gas enters the interiors of the three tanks through the air inlet pipes 10 of the top covers 7 of the first tank 1, the second tank 2, and the third tank 3. The inert gas keeps the chemical liquid or pure water from contacting the air, preventing possible oxidation reactions when the chemical liquid or pure water contacts the oxygen in the air. Such oxidation reactions may change the chemical properties of the liquid medicine and affect its effect on semiconductor processing, or various particles and gases in the air, such as dust, bacteria, sulfide gases, etc. These particles and gases may adhere to the semiconductor surface, resulting in defects or contamination, seriously affecting the performance and reliability of the semiconductor. When the liquid in the storage tank is needed, the liquid can be discharged through the liquid outlet pipe 8 of the second base 202.The liquid outlet pipe 8 is installed on the bottom surface of the second base 202 through a direct joint. Specific Embodiment Two:

[0028] Referring to Figures 1-6 , for a large-capacity and high-pressure-resistant liquid storage tank, further based on the basic structure in Specific Embodiment One, clamping blocks can be provided on the surfaces of both sides of the second base 202, and clamping grooves can be provided on the surfaces of the first base 102 and the third base 302. The clamping grooves of the first base 102 and the third base 302 are both established on the side close to the second base 202. In this way, when installing, the first base 102 and the third base 302 can be installed into the clamping grooves of the second base 202 through the clamping blocks, realizing precise alignment and fixation.

[0029] In summary:

[0030] 1. The first liquid storage tank 101, the second liquid storage tank 201, and the third liquid storage tank 301 are all installed in the recesses of the first base 102, the second base 202, and the third base 302 through the threads at the bottom and welded to the top surfaces of the first base 102, the second base 202, and the third base 302. The connecting pipes 14 of the first base 102 and the connecting pipes 14 of the third base 302 are all installed in the interfaces 13 of the second base 202. Sealing gaskets 12 are provided in the middle of the two connecting pipes 14 and the interfaces 13 they are connected to for sealing, so that the first tank body 1, the second tank body 2, and the third tank body 3 are connected through the cooperation of the bottom connecting pipes 14 and the interfaces 13. The first base 102, the second base 202, and the third base 302 are connected together by four screw rods 11, and both ends of the four screw rods 11 are fixed with two nuts, so that the first base 102, the second base 202, and the third base 302 are tightly connected together. The intake pipes 10 on the top surfaces of the tank covers 7 installed at the tops of the first tank body 1, the second tank body 2, and the third tank body 3 are all connected together by three-way joints. In this way, when expansion is needed, only the nuts on one side or both sides of the four screw rods 11 need to be removed, and the three-way joints of the intake pipes 10 on the top surfaces of the tank covers 7 are removed. At this time, the first tank body 1 or the third tank body 3 can be pulled to both sides, so that the first tank body 1 or the third tank body 3 is separated from the screw rods 11. At this time, the spare tank body can be installed on the screw rods 11, and the first tank body 1 or the third tank body 3 can be installed back on the screw rods 11, so that the spare tank body is installed between the first tank body 1 and the second tank body 2 or installed between the third tank body 3 and the second tank body 2, and the nuts are installed back on the screw rods 11. Then, the intake pipe 10 of the spare tank body is connected to the intake pipes 10 of the first tank body 1 and the second tank body 2 through a three-way joint or connected to the intake pipes 10 of the third tank body 3 and the second tank body 2 through a three-way joint, so that the tank body is expanded, solving the disadvantage of being unable to expand quickly and simply.

[0031] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may also include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is less than that of the second feature.

[0032] The foregoing has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present utility model and are not used to limit the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will also have various changes and improvements, and all these changes and improvements fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A large-capacity, high-pressure liquid storage tank, comprising a first tank body (1), a second tank body (2), and a third tank body (3), characterized in that: The first tank body (1) comprises a first liquid storage tank (101) and a first base (102); the second tank body (2) comprises a second liquid storage tank (201) and a second base (202); the third tank body (3) comprises a third liquid storage tank (301) and a third base (302); the first liquid storage tank (101), the second liquid storage tank (201) and the third liquid storage tank (301) are each provided with a tank cover (7) on the top; the tops of the three tank covers (7) are each provided with an air inlet pipe (10); the top of the tank cover (7) on the top of the second liquid storage tank (201) is provided with a liquid inlet pipe (9); the second base (202 ) is provided with a liquid outlet pipe (8) at the bottom, four screws (11) are provided at the bottom of the first liquid storage tank (101), the second liquid storage tank (201) and the third liquid storage tank (301), two interfaces (13) are provided on the surface of the second base (202), and sealing pads (12) are provided inside the two interfaces (13), connecting pipes (14) are provided on the surfaces of the first base (102) and the second base (202), a side pipe (4) is provided on one side of the third tank body (3), a bracket (6) is provided on one side of the side pipe (4), and three liquid level detection sensors (5) are provided on the surface of the bracket (6).

2. A large-capacity and high-pressure liquid storage tank according to claim 1, characterized in that: The first liquid storage tank (101) is installed in the recess of the first base (102) through the bottom thread and welded to the top surface of the first base (102), the second liquid storage tank (201) is installed in the recess of the second base (202) through the bottom thread and welded to the top surface of the second base (202), and the third liquid storage tank (301) is installed in the recess of the third base (302) through the bottom thread and welded to the top surface of the third base (302).

3. A large-capacity and high-pressure liquid storage tank according to claim 1, characterized in that: The second base (202) is set in the middle of the first base (102) and the third base (302), the two interfaces (13) are evenly set on the surfaces of both sides of the second base (202), and the connecting tube (14) of the first base (102) and the connecting tube (14) of the third base (302) are both installed in the interface (13) of the second base (202), and the two sealing gaskets (12) are evenly set in the middle of the two connecting tubes (14) and the interface (13).

4. A large-capacity and high-pressure liquid storage tank according to claim 1, characterized in that: The four screw rods (11) are evenly arranged in groups of two on both sides of the first base (102), the second base (202) and the third base (302); the four screw rods (11) all penetrate the first base (102), the second base (202) and the third base (302); the first base (102), the second base (202) and the third base (302) are connected together by the screw rods (11).

5. The large-capacity and high-pressure liquid storage tank according to claim 1 is characterized in that: The three tank covers (7) are installed on the top of the first liquid storage tank (101), the second liquid storage tank (201) and the third liquid storage tank (301) through the threads on the lower surface.

6. A large-capacity and high-pressure liquid storage tank according to claim 1, characterized in that: The air inlet pipe (10) is installed on the top surface of the tank cover (7) through a direct joint, and the air inlet pipes (10) are connected to each other through a three-way joint. The liquid inlet pipe (9) is installed on the top surface of the tank cover (7) at the top of the second liquid storage tank (201) through a direct joint, and the liquid outlet pipe (8) is installed on the bottom surface of the second base (202) through a direct joint.

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