On-line full-inspection sheet resistance tester with automatic calibration function

Abstract

The utility model discloses an on-line full-inspection sheet resistance tester with an automatic calibration function. The tester comprises a calibration bin, a jacking mechanism, a sheet resistance induction device, a detection part and a general industrial personal computer, wherein the detection part is located at the uppermost part, a calibration bin is arranged under the detection part, a gap is formed between the detection part and the calibration bin, and the calibration bin is provided with an openable bin top cover. The jacking mechanism is located below the calibration bin and fixedly connected with the bottom of the calibration bin through a jacking supporting rod. And the general control industrial personal computer exchanges information with the calibration bin, the jacking mechanism, the sheet resistance sensing device and the detection component through data transmission lines. Due to the design of the automatic calibration process, manual participation is not needed in the testing process, and the situation that the calibration piece is damaged due to manual taking and placing and the placing position is deviated is avoided. In the storage and use process, the calibration piece is located in the calibration bin, so that the temperature and humidity required by the calibration piece are guaranteed to the maximum extent, and the change of the value of the calibration piece caused by the change of environmental factors is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of sheet resistance testing, in particular to an online full-inspection sheet resistance tester with automatic calibration. Background Art

[0002] The detection methods of an online sheet resistance tester are divided into full inspection and sampling inspection. Full inspection means detecting all the test pieces to be measured, while sampling inspection means randomly selecting a part of the test pieces to be measured for detection. For a full-inspection sheet resistance tester, a laser is used for non-contact detection. After being used for a period of time, the power and frequency of the laser may drift, resulting in a change in the optical voltage of the test piece. Moreover, factors such as changes in the detection environment and changes in the test distance between the laser and the test piece will affect the test results, ultimately leading to an offset in the measured value. Therefore, after the full-inspection sheet resistance tester runs for a period of time, it needs to be calibrated.

[0003] Currently, the calibration process of the online sheet resistance tester is complex and requires manual participation each time. The operator regularly removes the test piece from the belt and takes the test piece to an offline four-probe (offline sheet resistance tester) for testing. If a deviation is found between the online sheet resistance tester and the offline sheet resistance tester, at this time, the coefficient needs to be modified on the online sheet resistance tester. Manual operation is likely to cause contamination on the surface of the test piece, and the surface of the test piece may also be scratched due to factors such as friction during the placement process. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an online full-inspection sheet resistance tester with automatic calibration to solve problems such as position deviation, easy damage to the calibration piece, difficult control of temperature and humidity, and long operation time existing in the manual calibration process of the full-inspection sheet resistance tester.

[0005] To solve the above problems, the utility model provides an online full-inspection sheet resistance tester with automatic calibration, which is characterized in that the online full-inspection sheet resistance tester with automatic calibration includes a calibration chamber, a jacking mechanism, a sheet resistance sensing device, a detection component, and a main control industrial computer.

[0006] Among them, the detection component is located at the topmost. The calibration chamber is arranged directly below the detection component. There is a gap between the detection component and the calibration chamber. The calibration chamber is provided with an openable chamber top cover. The jacking mechanism is located below the calibration chamber and is fixedly connected to the bottom of the calibration chamber through a jacking support rod.

[0007] Further, the chamber top cover at the top of the calibration chamber opens and closes the calibration chamber in a horizontal sliding manner.

[0008] Further, a calibration piece is detachably arranged in the center of the calibration chamber, and a temperature sensor and a humidity sensor are fixedly arranged around the calibration piece.

[0009] A number of semiconductor refrigeration chips are fixedly arranged on the side wall and / or bottom inside the calibration bin, and the side of the semiconductor refrigeration chip that fits with the side wall and / or bottom inside the calibration bin is made of semiconductor of the same material.

[0010] A number of dehumidification holes are arranged on the side wall of the calibration bin, and the dehumidification holes are connected to a dehumidification compressor through pipes.

[0011] Furthermore, the sheet resistance induction device is located beside the calibration bin and is used to detect whether there is a component to be tested directly above the calibration bin.

[0012] Furthermore, the jacking mechanism drives the jacking support rod through a motor, wherein the jacking support rod is a ball screw, and the jacking support rod is driven by a jacking motor to control the rising and falling of the calibration bin.

[0013] Furthermore, the general control industrial computer exchanges information with the calibration bin, the jacking mechanism, the sheet resistance induction device, and the detection component through a data transmission line; the general control industrial computer receives the signals transmitted by the calibration bin, the jacking mechanism, the sheet resistance induction device, and the detection component, and processes the signals inside the industrial computer; at the same time, it sends control signals to the calibration bin, the jacking mechanism, the sheet resistance induction device, and the detection component.

[0014] Furthermore, a conveyor belt is arranged between the calibration bin and the detection component, and the square resistance sheets to be tested are placed at intervals on the conveyor belt.

[0015] Furthermore, the detection component is a laser.

[0016] Furthermore, the general control industrial computer further includes an input device for inputting data or issuing commands to the general control industrial computer; the general control industrial computer further includes a display device for displaying part of the information of the automatic calibration on-line full inspection sheet resistance tester.

[0017] Furthermore, a top cover driving motor is arranged inside the calibration bin, and the top cover driving motor is movably connected to the top cover through a gear.

[0018] The beneficial effect of the automatic calibration online full-inspection square resistance tester provided by the utility model is that: compared with the prior art, due to the design of the automatic calibration process, no manual participation is required during the test process, thus avoiding damage to the calibration piece due to manual placement and deviation in the placement position. During storage and use, the calibration piece is located in the calibration bin, thus maximizing the temperature and humidity required by the calibration piece, reducing changes in the calibration piece value due to changes in environmental factors. During the automatic calibration process, the issuance of commands, acquisition of information, processing and display are all performed automatically, reducing the impact of manual operations, thereby improving calibration efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is the side view of the automatic calibration online full-check square resistance tester;

[0020] Figure 2 It is the flow chart of the automatic calibration online full-check square resistance tester.

[0021] Icon: Reference numerals: 1-calibration bin, 11-bin cover, 2-lifting mechanism, 21-lifting support rod, 3-square resistance sensing device, 4-detection component. DETAILED DESCRIPTION

[0022] In order to better understand the purpose, structure and function of the utility model, the following Figures 1 to 2 , the utility model is further described in detail for an automatic calibration online full-detection square resistance tester.

[0023] like Figure 1 As shown, an automatic calibration online full-inspection square resistance tester according to an embodiment of the utility model comprises a calibration chamber 1, a lifting mechanism 2, a square resistance sensing device 3, a detection component 4 and a master control industrial computer.

[0024] In this tester, the top is the detection component 4, which uses a laser. During detection, the laser emits pulse light to the device under test through a laser probe. The laser sensor obtains the surface photovoltage of the device under test based on the reflected pulse light generated by the device under test, and then obtains the square resistance of the device under test through parameter fitting.

[0025] Directly below the detection component 4, a calibration chamber 1 is provided, and a calibration sheet is detachably provided inside the calibration chamber 1, so that the calibration sheet can be removed when needed. The calibration sheet is certified by an authoritative organization and is used to calibrate the full-scale square resistance tester. According to the use standard of the calibration sheet, the calibration sheet value needs to be constant during use and storage, so a constant temperature and humidity environment within a certain range needs to be maintained in the calibration chamber 1.

[0026] In order to achieve a constant temperature in the calibration chamber 1, not only is a temperature sensor fixedly arranged around the calibration piece in the calibration chamber 1, but also a semiconductor refrigerating sheet is provided on the side wall and / or the bottom inside the calibration chamber 1. The semiconductor refrigerating sheet utilizes the Peltier effect of semiconductor materials. One side is an N-type semiconductor and the other side is a P-type semiconductor. When direct current passes through an electric couple formed by two different semiconductor materials connected in series, heat can be absorbed and released at the two ends of the electric couple respectively, so as to achieve the effect of refrigeration on one side and heating on the other side. According to the characteristics of the semiconductor refrigerating sheet, when arranging the semiconductor refrigerating sheet, the side with the same semiconductor material needs to be attached to the side wall and / or the bottom inside the calibration chamber 1; when it is necessary to switch from the refrigeration state to the heating state, the polarity of the direct current is changed to achieve the switching between the refrigeration and heating states on the semiconductor refrigerating sheet; after the semiconductor refrigerating sheet is attached to the side wall and / or the bottom inside the calibration chamber 1, the heat on the attached side of the semiconductor refrigerating sheet can be effectively released to the external air through the chamber wall and the chamber bottom of the calibration chamber 1, promoting the temperature inside to be more rapid and efficient.

[0027] In addition to maintaining a constant temperature in the calibration chamber 1, it is also necessary to maintain a constant humidity in the calibration chamber 1. For this purpose, a humidity sensor is fixedly arranged around the calibration piece to detect the humidity situation inside the calibration chamber 1. Moreover, a number of dehumidification holes are provided on the inner side wall of the calibration chamber 1, and a dehumidification compressor is configured on the outer surface of the calibration chamber 1. A ventilation duct is configured between the dehumidification compressor and the dehumidification holes. When the constant humidity device works, the air inside the calibration chamber 1 is extracted through the duct, and after being processed by the constant humidity device, the air with a standard humidity is conveyed back into the calibration chamber 1 through the duct, so as to keep the humidity inside the calibration chamber 1 within the range required by the calibration piece.

[0028] In the present utility model, a closable bin top cover 11 is provided at the top of the calibration bin 1. When it is necessary to calibrate the on-line full inspection sheet resistance tester using the calibration sheet in the calibration bin 1, the bin top cover 11 will automatically open, exposing the calibration sheet inside the calibration bin 1, thereby realizing the calibration of the on-line full inspection sheet resistance tester. To improve efficiency and accuracy, the bin top cover 11 is designed to open and close automatically. A bin top cover drive motor is provided inside the calibration bin 1, and the bin top cover is movably connected to the bin top cover drive motor through a gear. When the calibration bin 1 needs to open the bin top cover 11, the bin top cover drive motor will drive the gear, driving the bin top cover to move horizontally from the original position to the outside of the calibration bin 1, thereby opening the calibration bin 1 and exposing the calibration sheet. After the calibration of the full inspection sheet resistance tester is completed and when it is necessary to close the calibration bin 1, the bin top cover drive motor drives the gear, driving the bin top cover 11 to move horizontally towards the calibration bin 1, and the bin top cover 11 will move to the original position before the calibration bin 1 is opened. In this way, the calibration sheet inside the calibration bin 1 can be in a compliant environment, maintaining the stability of the calibration value of the calibration sheet, so that when subsequent calibration is carried out, the state of the calibration sheet meets the calibration standard.

[0029] A jacking mechanism 2 is further provided below the calibration bin 1, wherein a jacking rod 21 is provided at the bottom of the calibration bin 1. One end of the jacking rod 21 is fixedly connected to the calibration bin 1, and the other end is connected to a jacking motor directly below the calibration bin 1.

[0030] In an embodiment of the present utility model, the jacking rod 21 uses a ball screw.

[0031] When it is necessary to calibrate the full inspection sheet resistance tester, the jacking motor will drive the jacking rod 21 to rise towards the detection component 4 and stop within a reasonable range below the detection component 4, so that the detection component 4 can use the calibration sheet inside the calibration bin 1 for calibration. When the calibration is completed, the jacking motor will drive the jacking rod 21 to move away from the detection component 4, so that the calibration bin 1 will not affect the measured part during the test of the full inspection sheet resistance tester.

[0032] In the present utility model, a master control industrial computer is provided. The master control industrial computer communicates with the calibration bin 1, the jacking mechanism 2, the sheet resistance induction device 3, and the detection component 4 through data transmission lines. During use, the master control industrial computer will automatically calibrate the full inspection sheet resistance tester regularly according to the date set by the system.

[0033] As Figure 2As shown in the figure, during the automatic calibration process, the main control industrial computer will first pause the operation of the conveyor belt of the device under test and detect the signal of the sheet resistance induction device 3. Since the sheet resistance induction device 3 is set near the calibration chamber 1, when the sheet resistance induction device 3 fails to sense that there is a device under test directly above, there is also no device under test directly above the calibration chamber 1, and the calibration chamber 1 is directly exposed under the detection component 4, meeting the requirements for calibration. If the main control industrial computer receives the signal from the sheet resistance induction device 3 indicating that there is still a device under test directly above, the main control industrial computer will send a command to make the conveyor belt of the device under test run for a certain distance, so that there is no device under test above the sheet resistance induction device 3 and the calibration chamber 1.

[0034] After the main control industrial computer receives the signal from the sheet resistance induction device 3 that no device under test is detected, it will send an open cover command to the calibration chamber 1, causing the chamber top cover 11 of the calibration chamber 1 to open, and the calibration sheet is exposed under the detection component 4. Subsequently, the main control industrial computer sends a command to the jacking mechanism 2 to drive the jacking rod 21 to move upward, jacking up the calibration chamber 1 so that the calibration chamber 1 is located in a suitable area under the detection component 4. When the calibration chamber 1 reaches the predetermined area under the detection component 4, the main control industrial computer starts the automatic calibration of the full inspection sheet resistance tester. After the main control industrial computer sends a test command to the full inspection sheet resistance tester, the full inspection sheet resistance tester will return the test result, which is recorded as R 测 , and the main control industrial computer will calculate according to the formula K 新 = R 标 / R 测 * K 旧 , where R 标 is the calibration value of the calibration sheet, and K 旧 is the calibration coefficient obtained during the previous test saved in the main control industrial computer currently. After calculation, the obtained K 新 is the new calibration coefficient obtained from this test. The main control industrial computer will overwrite the value of K 新 with K 旧 . After replacing the value of K 新 with the value of K 旧 , the main control industrial computer will conduct another test to compare whether the resistance value obtained from the second test is the same as the calibration value of the calibration sheet. If they are the same, the test ends. If there is a deviation in the test result, the calibration process will be executed again. Because during the test process, the test result obtained for the test piece is multiplied by the calibration coefficient to eliminate the internal error of the sheet resistance test.

[0035] When the calibration has been carried out more than the set number of times and there is still a deviation in the test result, it indicates that there is an abnormality in the calibration sheet or the detection component 4. The main control industrial computer will send a prompt through the display device to prompt the operator to check.

[0036] Within the set number of times, if the test result is the same as the value of the calibration chip, the master industrial control computer will end the current calibration. The master industrial control computer sends a command to drive the jacking rod 21 to move downward, and lower the calibration chamber 1 so that the calibration chamber 1 returns to the position before jacking up. Next, the master industrial control computer sends a command to the calibration chamber 1 to drive the chamber top cover 11 back to the calibration chamber 1.

[0037] When calibration is not being performed, the inside of the calibration chamber 1 needs to be maintained in an environment within a standard temperature range (e.g., 25°C - 35°C) and a standard humidity range. The master industrial control computer will detect the detection status of the temperature sensor and humidity sensor inside the calibration chamber 1. When the master industrial control computer detects that the temperature inside the calibration chamber 1 is not within the standard temperature range, it will control the semiconductor refrigeration chip for refrigeration or heating to maintain the temperature inside the calibration chamber within the calibration range. When the master industrial control computer detects that the humidity inside the calibration chamber 1 is not within the standard temperature range, it will control the humidity constant equipment to maintain the humidity inside the calibration chamber within the calibration range.

[0038] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An automatic calibration online full-check square resistance tester, characterized in that: It comprises a calibration chamber (1), a lifting mechanism (2), a square resistance sensing device (3), a detection component (4) and a master control industrial computer; The calibration bin (1) is arranged directly below the detection component (4), with a gap between the detection component (4) and the calibration bin (1), and an openable bin cover (11) is arranged on the top of the calibration bin (1); the lifting mechanism (2) is located below the calibration bin (1) and is fixedly connected to the bottom of the calibration bin (1) via a lifting support rod (21).

2. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: The bin top cover (11) opens and closes the calibration bin (1) by means of horizontal sliding.

3. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: A calibration sheet is arranged in the center of the calibration chamber (1), and a temperature sensor and a humidity sensor are fixedly arranged around the calibration sheet; A plurality of semiconductor cooling sheets are fixedly arranged on the side walls and / or the bottom of the calibration bin (1), and the side of the semiconductor cooling sheet that is in contact with the side walls and / or the bottom of the calibration bin (1) is a semiconductor made of the same material; A plurality of dehumidification holes are arranged on the side wall of the calibration bin (1), and the dehumidification hole pipes are connected to a dehumidification compressor.

4. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: The square resistance sensing device (3) is located next to the calibration chamber (1) and is used to detect whether there is a component to be measured directly above the calibration chamber (1).

5. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: The lifting mechanism (2) drives the lifting support rod (21) through a motor, wherein the lifting support rod (21) is a ball screw, and the lifting motor drives the lifting support rod (21), thereby controlling the lifting and falling of the calibration bin (1).

6. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: The master control industrial computer exchanges information with the calibration bin (1), the lifting mechanism (2), the square resistance sensing device (3), and the detection component (4) through a data transmission line; The master control industrial computer receives signals transmitted from the calibration bin (1), the lifting mechanism (2), the square resistance sensing device (3), and the detection component (4), and processes the signals inside the industrial computer; and at the same time, sends control signals to the calibration bin (1), the lifting mechanism (2), the square resistance sensing device (3), and the detection component (4).

7. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: A test piece conveyor belt is provided between the calibration bin (1) and the detection component (4), and square resistance pieces to be tested are placed at intervals on the conveyor belt.

8. The automatic calibration online full-check square resistance tester according to claim 1 is characterized in that: The detection component (4) is a laser.

9. The automatic calibration online full-check square resistance tester according to claim 1, characterized in that: The master control industrial computer also includes an input device for inputting data or issuing commands to the master control industrial computer; the master control industrial computer also includes a display device for displaying partial information of the automatically calibrated online full-inspection square resistance tester.

10. The automatic calibration online full-check square resistance tester according to claim 1, characterized in that: A top cover driving motor is arranged inside the calibration chamber (1), wherein the top cover driving motor is movably connected to the top cover via gears.

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