High-precision optical surface height fine adjustment device for photoetching machine
By using high-precision planetary bearing rollers and inclined height adjustment devices in the lithography machine, the problem of insufficient accuracy of optical surface adjustment of existing lithography machines is solved, and high-precision adjustment of optical surface height of lithography machines is achieved, which significantly improves exposure accuracy and stability.
Patent Information
- Application Number
- CN202421737594.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-22
- Publication Date
- 2025-06-20
- Estimated Expiration
- 2034-07-22
AI Technical Summary
The optical surface height adjustment method of existing lithography machines cannot achieve micron-level accuracy, resulting in the improvement of exposure accuracy and stability.
High-precision planetary bearing rollers are used as the adjustment device. Through the coordination of the input screw and the adjustment seat, the micron-level accuracy height adjustment between the upper and lower platforms is achieved, and the adjustment accuracy in the vertical direction is improved by tilting settings.
It realizes high-precision adjustment of the optical surface height of the lithography machine, can achieve an accuracy of 0.0005mm, adapt to scenes with a load of 800㎏, and significantly improves the accuracy and stability of exposure.
Smart Images
Figure CN223006379U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of precision adjustment instruments, in particular to a high-precision fine-tuning device for the height of the optical surface of a lithography machine. Background Technique
[0002] The optical surface of a lithography machine refers to the optical elements used in the lithography process, including lenses, mirrors, gratings, etc. These optical elements play functions such as focusing, condensing, and diffraction in the lithography machine, helping to precisely control the light beam of the light source to achieve the exposure of the photoresist plate. The quality of the optical surface of the lithography machine directly affects the exposure quality and resolution. Therefore, in the design and use process of the lithography machine, it is necessary to very precisely adjust the height and angle of the optical surface to ensure the accuracy and stability of the exposure.
[0003] Several common methods for adjusting the height of the optical surface of a lithography machine include manual adjustment and automatic adjustment, etc. Among them, manual adjustment is to adjust the position of the optical element through manual devices such as knobs and screws to make it reach the required height. Automatic adjustment means that the lithography machine usually is equipped with electric or pneumatic automatic adjustment devices, which can achieve the automatic height adjustment of the optical element through computer control or preset parameters. These adjustment means cannot reach the micron-level precision, resulting in the accuracy and stability of the exposure of the optical element needing to be improved. Content of the Utility Model
[0004] Aiming at the existing problems, the utility model provides a high-precision fine-tuning device for the height of the optical surface of a lithography machine.
[0005] To achieve the above technical purpose, the technical solution adopted by the utility model is:
[0006] A high-precision fine-tuning device for the optical surface height of a lithography machine, comprising an upper platform and a lower platform. A lithography machine optical surface is installed on the upper platform. The lower surface of the upper platform is placed in contact with the upper surface of the lower platform. An upper installation groove is provided on the lower surface of the upper platform, and a lower installation groove is installed on the lower platform. The upper installation groove and the lower installation groove are aligned and combined to form a fine-tuning device installation groove. A planetary adjustment device is installed in the fine-tuning device installation groove. The planetary adjustment device includes an input screw rod, a positioning seat, planetary bearing rollers, an adjustment seat, and a roller seat. The positioning seat is fixedly installed in the upper installation groove, and the adjustment seat is fixedly installed in the lower installation groove. One end of the input screw rod is limited on the positioning seat, and at the same time, the other end of the input screw rod passes through the lower installation groove. The input screw rod can rotate relative to the positioning seat. A first threaded body is provided in the middle section of the input screw rod. The number of planetary bearing rollers is several. The planetary bearing rollers are arranged in a ring around the middle section of the input screw rod. The ring structure formed by the planetary bearing rollers is coaxial with the input screw rod. Threads are provided on the surface of each planetary bearing roller, and the threads of each planetary bearing roller are engaged and matched with the first threaded body of the input screw rod. Both ends of the planetary bearing roller are positioned on the roller seat, and the roller seat is fixedly connected to the positioning seat. The planetary bearing roller can rotate relative to the roller seat. The adjustment seat is a ring structure, and a second threaded body is provided on the inner ring surface of the adjustment seat. Each planetary bearing roller is simultaneously threadedly engaged with the second threaded body of the adjustment seat. The planetary adjustment device is inclined with respect to the contact surfaces of the upper platform and the lower platform.
[0007] To optimize the technical solution, the further improvements taken include:
[0008] The inclination angle of the above-mentioned planetary adjustment device with respect to the contact surfaces of the upper platform and the lower platform is between 15° and 80°.
[0009] A ring sleeve is fixed in the middle of the above-mentioned input screw rod, and a first threaded body is provided on the outer surface of the ring sleeve. The ring sleeve is threadedly engaged with each planetary bearing roller through the first threaded body.
[0010] The above-mentioned upper installation groove is provided with a positioning seat limit shoulder. The upper surface of the ring sleeve is in contact and cooperation with the lower surface of the positioning seat, and the ring sleeve can rotate relative to the positioning seat. The upper surface of the positioning seat is fixed on the lower surface of the positioning seat limit shoulder. The upper surface of the positioning seat and the lower surface of the positioning seat limit shoulder are both perpendicular to the axis of the input screw rod.
[0011] Several fixing bolts are provided on the upper end surface of the above-mentioned positioning seat, and several screw holes are provided on the positioning seat limit shoulder. The fixing bolts are inserted into the screw holes to fixedly connect the positioning seat and the positioning seat limit shoulder.
[0012] The above-mentioned lower installation groove is provided with an adjusting seat limiting shoulder. The lower surface of the adjusting seat abuts against the upper surface of the adjusting seat limiting shoulder. Both the lower surface of the adjusting seat and the upper surface of the adjusting seat limiting shoulder are perpendicular to the axis of the input screw rod. A number of limiting rods are provided on the adjusting seat. The axis of the limiting rods is parallel to the axis of the input screw rod. The adjusting seat limiting shoulder is provided with a number of limiting holes. The limiting rods are inserted into the limiting holes to limit the cooperation between the adjusting seat and the adjusting seat limiting shoulder. And the limiting method is that the adjusting seat can move along the axis direction of the input screw rod and cannot rotate around the axis of the input screw rod.
[0013] The lower end of the above-mentioned lower installation groove communicates with an adjusting channel. The lower end of the adjusting channel opens on the side or bottom surface of the lower platform. The lower end of the input screw rod extends into the adjusting channel. The lower end of the input screw rod is provided with a docking notch for docking with the motor shaft head of an external adjusting motor. The motor shaft head of the adjusting motor is used to drive the input screw rod to rotate. The rotation of the input screw rod is converted into the displacement of the adjusting seat along the axis direction of the input screw rod through the planetary bearing rollers.
[0014] The lower end of the above-mentioned input screw rod is fitted with a plugging nut which can be screwed onto the input screw rod for fixation, occupying the docking position between the motor shaft head of the adjusting motor and the input screw rod, so that the motor shaft head of the adjusting motor cannot be docked with the input screw rod.
[0015] A number of fine adjustment device installation grooves are provided between the above-mentioned upper platform and the lower platform. Correspondingly, a planetary adjustment device is installed in each fine adjustment device installation groove, and a number of planetary adjustment devices share one adjusting motor.
[0016] The above-mentioned planetary adjustment device is made of non-magnetic material.
[0017] Compared with the prior art, the utility model has the following beneficial effects:
[0018] 1. The utility model uses planetary bearing rollers with very high precision to adjust the distance between the upper platform and the lower platform. In order to further improve the adjustment precision of the upper platform, the utility model inclines the planetary adjustment device, so that the movement of the adjusting seat along the input screw rod direction is converted into the component displacements in the vertical direction and the horizontal direction. Since the moving distance in the vertical direction is shorter, the inclined planetary adjustment device can adjust more precisely in the vertical direction.
[0019] 2. The planetary adjustment device has the advantages of high bearing capacity and small external dimensions, can bear radial force and can also bear axial force. Compared with the traditional force transmission structure, the external dimensions are greatly reduced and the bearing capacity is greatly improved, so that it can be applied to a structure with a smaller volume and a larger load, and the number of rollers can be configured according to different loads to improve the bearing capacity. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1Schematic diagram of the upper platform and the lower platform;
[0021] Figure 2 Schematic diagram of the upper platform;
[0022] Figure 3 Schematic diagram of the lower platform;
[0023] Figure 4 Schematic diagram of the planetary adjustment device;
[0024] Figure 5 Schematic diagram of the planetary adjustment device installed in the fine adjustment device installation groove;
[0025] Figure 6 Schematic diagram of the internal structure of the planetary adjustment device;
[0026] Figure 7 Schematic diagram of the fine adjustment device installation groove.
[0027] Names of the marks in the figure: upper platform 1, lower platform 2, upper installation groove 3, positioning seat limit shoulder 31, lower installation groove 4, adjustment seat limit shoulder 41, adjustment channel 42, planetary adjustment device 5, input lead screw 51, docking notch 51a, plugging nut 51b, positioning seat 52, planetary bearing roller 53, adjustment seat 54, roller seat 55, annular sleeve 56, fixing bolt 57, limit rod 58. Detailed implementation manners
[0028] In order to make the objectives, technical solutions and advantages of the present application clearer and more understandable, the present application will be described and explained below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. Based on the embodiments provided by the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present application.
[0029] Obviously, the accompanying drawings in the following description are only some examples or embodiments of the present application. For those of ordinary skill in the art, without creative efforts, the present application can also be applied to other similar scenarios based on these drawings. In addition, it can also be understood that although the efforts made in this development process may be complex and time-consuming, for those of ordinary skill in the art related to the content disclosed in the present application, some design, manufacturing or production changes based on the technical content disclosed in the present application are only conventional technical means and should not be understood that the content disclosed in the present application is insufficient.
[0030] References to "embodiments" in this application mean that the specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of this application. The phrase does not necessarily refer to the same embodiment when it appears in various places in the specification, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application can be combined with other embodiments without conflict.
[0031] Unless otherwise defined, the technical terms or scientific terms involved in this application shall have the ordinary meaning understood by those of ordinary skill in the technical field to which this application belongs. The words "a", "an", "one kind", "the" and the like involved in this application do not indicate a limitation in quantity and can represent a singular or plural number. The terms "include", "comprise", "have" and any variations thereof involved in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product or device that includes a series of steps or units (units) is not limited to the listed steps or units, but may further include steps or units not listed, or may further include other steps or units inherent to these processes, methods, products or devices. The words "connect", "be connected", "couple" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "a plurality of" / "several" involved in this application means two or more. "And / or" describes the association relationship of associated objects and indicates that three relationships may exist. For example, "A and / or B" may mean: A exists alone, A and B exist simultaneously, and B exists alone. The character " / " generally indicates that the associated objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific order for the objects.
[0032] As Figures 1-7 shown, the high-precision optical surface height fine-tuning device of the present utility model includes three main structures: an upper platform 1, a lower platform 2, and a planetary adjustment device 5. A lithography optical surface is installed on the upper platform 1. The lower platform 2 is a fixed platform, and the upper platform 1 can move up and down and horizontally relative to the lower platform 2.
[0033] A fine-tuning device installation groove is provided between the upper platform 1 and the lower platform 2, and the planetary adjustment device 5 is installed in the fine-tuning device installation groove. There are 6 - 8 fine-tuning device installation grooves, which are distributed in the middle positions or four corners of the sides of the upper platform 1 and the lower platform 2. Figure 5 The figure shows the state diagram inside one of the fine-tuning device installation grooves.
[0034] Half of the fine-tuning device installation groove is in the upper platform 1 and half is in the lower platform 2. The half in the upper platform 1 is the upper installation groove 3, and the half in the lower platform 2 is the lower installation groove 4. The upper installation groove 3 has a positioning seat limit shoulder 31 for fixing the positioning seat 52, and the lower installation groove 4 has an adjustment seat limit shoulder 41 for positioning the adjustment seat 54. The lower installation groove 4 is also provided with an adjustment channel 42, which is for facilitating the motor shaft head of the adjustment motor to extend and connect with the lower end of the input lead screw 51 to make the input lead screw 51 rotate.
[0035] Since the planetary adjustment device 5 is integrally installed in the fine-tuning device installation groove inside the upper platform 1 and the lower platform 2, it is not easily affected by the outside, has good protection, long service life, and the accuracy is not affected by external factors.
[0036] The planetary adjustment device 5 includes an input lead screw 51, a positioning seat 52, planetary bearing rollers 53, an adjustment seat 54, a roller seat 55, an annular sleeve 56, a fixing bolt 57, and a limit rod 58. The middle part of the input lead screw 51 fixes the annular sleeve 56. The outer surface of the annular sleeve 56 is provided with a first thread body, and the annular sleeve 56 is in threaded cooperation with each planetary bearing roller 53 through the first thread body. The upper surface of the annular sleeve 56 is in contact and cooperation with the lower surface of the positioning seat 52 and the annular sleeve 56 can rotate relative to the positioning seat 52. The upper surface of the positioning seat 52 is fixed on the lower surface of the positioning seat limit shoulder 31, and both the upper surface of the positioning seat 52 and the lower surface of the positioning seat limit shoulder 31 are perpendicular to the axis of the input lead screw 51. One end of the input lead screw 51 is limited on the positioning seat 52, and at the same time the other end of the input lead screw 51 extends into the adjustment channel 42. The number of planetary bearing rollers 53 is several, which are arranged in a ring around the annular sleeve 56 and are simultaneously engaged with the first thread body on the surface of the annular sleeve 56. Both ends of the planetary bearing roller 53 are positioned on the roller seat 55, and the roller seat 55 is fixedly connected with the positioning seat 52. The planetary bearing roller 53 can rotate relative to the roller seat 55. The adjustment seat 54 is a ring-shaped structure. The inner ring surface of the adjustment seat 54 is provided with a second thread body, and each planetary bearing roller 53 is simultaneously in threaded cooperation with the second thread body of the adjustment seat 54. The positioning seat 52 is fixed on the positioning seat limit shoulder 31 through the fixing bolt 57, and the adjustment seat 54 is in limit cooperation with the adjustment seat limit shoulder 41 through the limit rod 58. The inclination angle of the contact surface of the planetary adjustment device 5 relative to the upper platform 1 and the lower platform 2 is between 15° and 80°. The selection of the angle needs to be determined according to the horizontal movable range of the upper platform 1. If the movable range is large, an installation method with a small inclination angle is selected. If the movable range is small, an installation method with a large inclination angle is selected.
[0037] The operation method for adjusting the height between the upper platform 1 and the lower platform 2 is:
[0038] Insert the motor shaft head of the adjustment motor into the docking slot 51a of the input lead screw 51 through the adjustment channel 42, and then rotate the input lead screw 51. The input lead screw 51 drives the planetary bearing roller 53 to rotate, and the planetary bearing roller 53 drives the adjustment seat 54 to move along the axial direction of the input lead screw 51. Since the adjustment seat 54 is fixedly connected to the lower platform 2 and the positioning seat 52 is connected to the upper platform 1, the movement of the adjustment seat 54 causes the upper platform 1 and the lower platform 2 to move along the axial direction of the input lead screw 51. This movement can be decomposed into a horizontal movement and a vertical movement, and the vertical movement is the adjustment of the height of the upper platform 1.
[0039] The core advantage of the planetary adjustment device 5 of the present utility model is that the adjustment accuracy is very high, which can reach 0.0005 mm in principle. It can be adjusted manually, and can adapt to the scenario with a load of 800 kg.
[0040] Some parameters of the planetary adjustment device 5 are as follows: lead: 0.05 mm; stroke: 4 mm; adjustment accuracy: ±0.001 mm
[0041] The planetary adjustment device 5 needs to use non-magnetic materials, and SUS316 is preferably considered in principle.
[0042] The above is only the preferred embodiment of the present utility model. The protection scope of the present utility model is not limited to the above embodiments. All technical solutions within the idea of the present utility model belong to the protection scope of the present utility model. It should be pointed out that for those of ordinary skill in the art, several improvements and modifications made without departing from the principle of the present utility model should be regarded as the protection scope of the present utility model.
Claims
1. A high-precision photolithography optical surface height fine-tuning device, comprising an upper platform (1) and a lower platform (2), wherein the upper platform (1) is provided with a photolithography optical surface, and the lower surface of the upper platform (1) is placed in contact with the upper surface of the lower platform (2), wherein: The lower surface of the upper platform (1) is provided with an upper mounting groove (3), and the lower platform is provided with a lower mounting groove (4). The upper mounting groove (3) and the lower mounting groove (4) are aligned and combined to form a fine-tuning device mounting groove. A planetary adjustment device (5) is installed in the fine-tuning device mounting groove. The planetary adjustment device (5) comprises an input screw (51), a positioning seat (52), a planetary bearing roller (53), an adjustment seat (54) and a roller seat (55). The positioning seat (52) is fixedly installed in the upper mounting groove (3), and the adjustment seat (54) is fixedly installed in the lower mounting groove (4). One end of the input screw (51) is limited on the positioning seat (52), and the other end of the input screw (51) passes through the lower mounting groove (4). The input screw (51) can rotate relative to the positioning seat (52). The middle section of the input screw (51) is provided with a first threaded body. The planetary bearing roller (53) is provided with a first threaded body. The number of (53) is several, the planetary bearing rollers (53) are arranged in an annular shape around the middle section of the input screw (51), the annular structure formed by the planetary bearing rollers (53) is coaxial with the input screw (51), the surface of each planetary bearing roller (53) is provided with a thread, the thread of each planetary bearing roller (53) is engaged with the first thread body of the input screw (51), the two ends of the planetary bearing roller (53) are positioned on the roller seat (55), the roller seat (55) is fixedly connected to the positioning seat (52), the planetary bearing roller (53) can rotate relative to the roller seat (55), the adjustment seat (54) is an annular structure, the inner ring surface of the adjustment seat (54) is provided with a second thread body, each planetary bearing roller (53) is simultaneously threadedly engaged with the second thread body of the adjustment seat (54), and the planetary adjustment device (5) is arranged to be inclined relative to the contact surface of the upper platform (1) and the lower platform (2).
2. The high-precision optical surface height fine-tuning device of claim 1, characterized in that: The inclination angle of the planetary adjustment device (5) relative to the contact surface of the upper platform (1) and the lower platform (2) is between 15° and 80°.
3. The high-precision optical surface height fine-tuning device of claim 2, characterized in that: An annular sleeve (56) is fixed in the middle of the input screw rod (51), a first threaded body is arranged on the outer surface of the annular sleeve (56), and the annular sleeve (56) is threadably matched with each planetary bearing roller (53) through the first threaded body.
4. The high-precision optical surface height fine-tuning device of claim 3, characterized in that: The upper mounting groove (3) is provided with a positioning seat limiting shoulder (31), the upper surface of the annular sleeve (56) is in contact with the lower surface of the positioning seat (52) and the annular sleeve (56) can rotate relative to the positioning seat (52), the upper surface of the positioning seat (52) is fixed on the lower surface of the positioning seat limiting shoulder (31), and the upper surface of the positioning seat (52) and the lower surface of the positioning seat limiting shoulder (31) are both perpendicular to the axis of the input screw rod (51).
5. The high-precision optical surface height fine-tuning device of claim 4, characterized in that: The upper end surface of the positioning seat (52) is provided with a plurality of fixing bolts (57), and the positioning seat limiting shoulder (31) is provided with a plurality of screw holes. The fixing bolts (57) are inserted into the screw holes to fix the positioning seat (52) and the positioning seat limiting shoulder (31) in connection.
6. The high-precision optical surface height fine-tuning device of claim 5, characterized in that: The lower mounting groove (4) is provided with an adjustment seat limiting shoulder (41), the lower surface of the adjustment seat (54) is in contact with the upper surface of the adjustment seat limiting shoulder (41), the lower surface of the adjustment seat (54) and the upper surface of the adjustment seat limiting shoulder (41) are both perpendicular to the axis of the input screw rod (51), a plurality of limiting rods (58) are provided on the adjustment seat (54), the axis of the limiting rods (58) is parallel to the axis of the input screw rod (51), the adjustment seat limiting shoulder (41) is provided with a plurality of limiting holes, the limiting rods (58) are inserted into the limiting holes, so that the adjustment seat (54) and the adjustment seat limiting shoulder (41) are limitedly matched, and the limiting method is: the adjustment seat (54) can move along the axis of the input screw rod (51) and cannot rotate around the axis of the input screw rod (51).
7. The high-precision optical surface height fine-tuning device of claim 6, characterized in that: The lower end of the lower mounting groove (4) is connected to an adjustment channel (42), the lower end of the adjustment channel (42) is opened on the side or bottom surface of the lower platform (2), the lower end of the input screw rod (51) extends into the adjustment channel (42), the lower end of the input screw rod (51) is provided with a docking notch (51a), the docking notch (51a) is used to dock with the motor shaft head of an external adjustment motor, the motor shaft head of the adjustment motor is used to drive the input screw rod (51) to rotate, and the rotation of the input screw rod (51) is converted into the displacement of the adjustment seat (54) along the axial direction of the input screw rod (51) through the planetary bearing roller (53).
8. The high-precision optical surface height fine-tuning device of claim 7, characterized in that: The lower end of the input screw rod (51) is matched with a blocking nut (51b), and the blocking nut (51b) can be screwed on the input screw rod (51) to be fixed, occupying the docking position between the motor shaft head of the adjustment motor and the input screw rod (51), so that the motor shaft head of the adjustment motor cannot dock with the input screw rod (51).
9. The high-precision optical surface height fine-tuning device of claim 1, characterized in that: A plurality of fine-tuning device installation slots are arranged between the upper platform (1) and the lower platform (2), and correspondingly, a planetary adjustment device (5) is installed in each fine-tuning device installation slot, and a plurality of planetary adjustment devices (5) share one adjustment motor.
10. The high-precision optical surface height fine-tuning device of claim 1, characterized in that: The planetary adjustment device (5) is made of non-magnetic material.