Purification table

Abstract

The utility model provides a purification table, the purification table comprises a bearing module for bearing a process boat, the bearing module comprises a base, a first fan and a second fan, the outer surface of the base comprises a main body supporting surface and a boat foot supporting surface which are distributed along the horizontal direction, and the boat foot supporting surface is arranged at the end part of the main body supporting surface; the main body supporting surface is used for bearing a boat main body; the boat foot supporting surface is used for bearing boat feet; the first fan is used for driving air to flow right above the main body supporting surface so as to cool the boat main body; and the second fan is used for driving air to flow over the boat foot supporting surface so as to cool the boat foot. The purification table can cool the boat main body and the boat feet, and the overall cooling efficiency of the purification table on the process boat is high.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell production, in particular to a purification table. Background Art

[0002] In the manufacturing process of photovoltaic cells, after a process boat (the process boat can be a graphite boat, a quartz boat, etc.) loaded with silicon wafers undergoes certain high-temperature process treatments, it needs to be temporarily placed on a purification table for cooling. After the process boat and the silicon wafers are cooled to a certain temperature, they enter the next process. The purification table is usually provided with a fan, and the fan drives air to flow through the surface of the process boat, thereby cooling the process boat and the silicon wafers. With the increasing demand for production capacity, the requirement for the cooling efficiency of the process boat is also gradually increasing, and there is still a need for improvement and room for improvement in the cooling efficiency of the purification table for the process boat. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this reason, the utility model provides a purification table with relatively high cooling efficiency for the process boat.

[0004] The purification table according to an embodiment of the utility model includes a carrying module for carrying the process boat. The process boat includes a boat body and boat feet, and the boat feet are connected to the ends of the boat body. The boat body is used to accommodate silicon wafers. The carrying module includes: a base, the outer surface of the base includes a main body support surface and a boat foot support surface distributed in the horizontal direction, both the main body support surface and the boat foot support surface face upward, the boat foot support surface is arranged at the end of the main body support surface, the main body support surface is used to carry the boat body, and the boat foot support surface is used to carry the boat feet; a first fan for driving air to flow above the main body support surface to cool the boat body; and a second fan for driving air to flow above the boat foot support surface to cool the boat feet.

[0005] The purification table according to an embodiment of the utility model has at least the following beneficial effects: The purification table in the prior art is only provided with a fan corresponding to the boat body. The air flow generated by the fan mainly passes through the boat body and cools the boat body, and it is difficult for the air flow to cool the boat feet, resulting in low overall cooling efficiency of the purification table for the process boat. For the purification table of the utility model, the air flow generated by the first fan can cool the boat body, and the air flow generated by the second fan can cool the boat feet. The purification table of the utility model can cool both the boat body and the boat feet, and has relatively high cooling efficiency for the process boat.

[0006] According to some embodiments of the present utility model, the main body support surface is provided with a first air outlet, the first air outlet is arranged upward, the first fan is installed inside the base, and the first fan is used to drive air to flow out from the first air outlet.

[0007] According to some embodiments of the present utility model, the first fan includes a first air inlet, the first air inlet is arranged downward, the carrier module further includes a cooling unit, the cooling unit is connected to the base, the cooling unit is located below the first air inlet, the first fan is used to drive air to flow through the cooling unit, the first air inlet and the first air outlet in sequence, and the cooling unit is used to cool the air flowing through the outer surface of the cooling unit.

[0008] According to some embodiments of the present utility model, the cooling unit includes a cooling pipe, and a flow channel for allowing a cooling medium to flow is formed inside the cooling pipe.

[0009] According to some embodiments of the present utility model, the arrangement direction of the main body support surface and the boat foot support surface is the first horizontal direction, the second fan and the boat foot support surface are distributed along the second horizontal direction, the second fan and the main body support surface are offset from each other, the second horizontal direction is perpendicular to the first horizontal direction, the second fan includes a second air outlet and a second air inlet, and the second fan is used to drive air to flow through the second air inlet and the second air outlet in sequence; wherein, the orientation of the second air outlet is parallel to the second horizontal direction, and the second air outlet is located on the side of the second fan close to the boat foot support surface; or, the orientation of the second air inlet is parallel to the second horizontal direction, and the second air inlet is located on the side of the second fan close to the boat foot support surface.

[0010] According to some embodiments of the present utility model, the carrier module further includes a column, the bottom end of the column is connected to the base, and the second fan is fixed to the side of the column.

[0011] According to some embodiments of the present utility model, the base includes an edge support portion, the outer surface of the edge support portion includes the boat foot support surface, the carrier module further includes a support beam, one end of the support beam is fixedly connected to the column, and the other end of the support beam is fixedly connected to the edge support portion.

[0012] According to some embodiments of the present utility model, the carrying module further includes a connection structure. The support beam is fixedly connected to the column through the connection structure. The connection structure includes: a first assembly block fixed to the side of the column, the first assembly block being provided with a groove; a second assembly block fixed to the support beam, the second assembly block being disposed in the groove; and a fastener, the fastener being detachable, the fastener passing through the first assembly block and the second assembly block, and the fastener fixing the first assembly block and the second assembly block.

[0013] According to some embodiments of the present utility model, the purification table further includes a box body, the carrying module is fixed inside the box body, and a plurality of the carrying modules are distributed in the vertical direction.

[0014] According to some embodiments of the present utility model, the purification table further includes an exhaust fan connected to the top of the box body, the exhaust fan being used to discharge the air inside the box body to the outside of the box body; the second fan includes a second air inlet exposed from the side of the box body, the second fan being used to convey the air outside the box body to the inside of the box body.

[0015] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Description of the Drawings

[0016] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0017] Figure 1 is a schematic diagram of a process boat according to an embodiment of the present utility model;

[0018] Figure 2 is Figure 1 an enlarged view of area A in

[0019] Figure 3 is a schematic diagram of a purification table according to an embodiment of the present utility model;

[0020] Figure 4 is a perspective view of the carrying module;

[0021] Figure 5 is a top view of the carrying module;

[0022] Figure 6 is an exploded view of the carrying module;

[0023] Figure 7 is a schematic diagram of the carrying module and the process boat;

[0024] Figure 8 Schematic diagrams of a cantilever beam, a column, and a connection structure.

[0025] Reference numerals:

[0026] 100 - Process boat, 101 - Boat main body, 102 - Boat foot, 103 - Exposed hole, 104 - Boat piece, 105 - Gap, 106 - Protrusion, 107 - Opening part, 108 - Connection part, 109 - Connection block;

[0027] 200 - Purification table, 201 - Carrying module, 202 - Second fan, 203 - Box body, 204 - Exhaust fan, 205 - Base, 206 - Column, 207 - Main body support surface, 208 - Boat foot support surface, 209 - Second air inlet, 210 - First air outlet, 211 - Support beam, 212 - Central support part, 213 - Edge support part, 214 - First fan, 215 - Frame, 216 - Cooling unit, 217 - Cooling pipe, 218 - Water receiving tray, 219 - Fan mounting plate, 220 - First assembly block, 221 - Groove, 222 - Second assembly block, 223 - Fastener. Detailed implementation manners

[0028] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0029] In the description of the present invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0030] In the description of the present invention, the meaning of "several" is more than one, the meaning of "multiple" is more than two, "greater than", "less than", "exceeding", etc. are understood as not including the number itself, and "above", "below", "within", etc. are understood as including the number itself. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0031] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0032] To facilitate the introduction of the purification table 200 of the present utility model, the process boat 100 that the purification table 200 needs to carry will be introduced first below. Figure 1 A process boat 100 is shown. The process boat 100 can be a graphite boat, a quartz boat, etc. The process boat 100 includes a boat body 101 and boat feet 102. The boat body 101 is used to accommodate silicon wafers, and the boat feet 102 are connected to the ends of the boat body 101, and the boat feet 102 and the boat body 101 are distributed in the horizontal direction. As Figure 2 shown, the boat body 101 includes a connecting block 109 and a plurality of mutually stacked boat plates 104. A gap 105 is formed between two adjacent boat plates 104. If the process boat 100 is a graphite boat, the boat plates 104 are made of graphite; if the process boat 100 is a quartz boat, the boat plates 104 are made of quartz. As Figure 2 shown, the boat plate 104 includes an opening part 107 and a connecting part 108. The connecting part 108 is connected to the end of the opening part 107. The opening parts 107 are mutually stacked to form the boat body 101. The connecting parts 108 are connected through the connecting block 109. The connecting block 109 and the mutually stacked connecting parts 108 together form the boat feet 102. The opening part 107 is provided with an exposed hole 103 and a protrusion 106. The exposed hole 103 is a through hole, and the protrusion 106 is arranged on the periphery of the exposed hole 103. The silicon wafer is not shown in the drawings. The shape of the exposed hole 103 matches the shape of the silicon wafer, and both the exposed hole 103 and the silicon wafer are rectangular. When the silicon wafer is connected to the boat plate 104, the silicon wafer is arranged at the exposed hole 103 and covers the exposed hole 103, and a part of the silicon wafer is exposed from the exposed hole 103. The exposed part of the silicon wafer can be processed (such as coated). The protrusion 106 abuts against the outer edge of the silicon wafer, and the protrusion 106 fixes the silicon wafer to prevent the silicon wafer from falling. More specifically, for Figure 2 the three protrusions 106 shown, the left protrusion 106 abuts against the left edge of the silicon wafer, the right protrusion 106 abuts against the right edge of the silicon wafer, and the bottom protrusion 106 abuts against the bottom edge of the silicon wafer.

[0033] Figure 3 A purification table 200 according to an embodiment of the present utility model is shown. The purification table 200 includes a loading module 201, and the loading module 201 is used to carry the process boat 100 and cool the process boat 100. The structure of the loading module 201 is as Figures 4 to 7 shown. The loading module 201 includes a base 205, a first fan 214 and a second fan 202. As Figure 4 and Figure 5As shown, the outer surface of the base 205 includes a main body support surface 207 and a boat foot support surface 208. The main body support surface 207 and the boat foot support surface 208 are distributed in the horizontal direction, and the boat foot support surface 208 is provided at the end of the main body support surface 207. For example, in Figure 4 and Figure 5 , the first horizontal direction is the left - right direction, and the main body support surface 207 and the boat foot support surface 208 are distributed in the first horizontal direction. Both the main body support surface 207 and the boat foot support surface 208 face upward. As Figure 7 shown, the boat foot support surface 208 is used to carry the boat main body 101, and the boat foot support surface 208 is used to carry the boat feet 102. The main body support surface 207 and the boat foot support surface 208 can be connected to each other or spaced apart from each other. The first fan 214 is used to drive air to flow above the main body support surface 207, thereby cooling the boat main body 101. The second fan 202 is used to drive air to flow above the boat foot support surface 208, thereby cooling the boat feet 102.

[0034] In the prior art, the purification table only has a fan corresponding to the boat main body 101. The air flow generated by the fan mainly passes through the boat main body 101 and cools the boat main body 101. It is difficult for the air flow to cool the boat feet 102, resulting in a low overall cooling efficiency of the purification table for the process boat 100. For the purification table 200 of the present utility model, the air flow generated by the first fan 214 can cool the boat main body 101, and the air flow generated by the second fan 202 can cool the boat feet 102. The purification table 200 of the present utility model can cool both the boat main body 101 and the boat feet 102, and the purification table 200 has a high cooling efficiency for the process boat 100.

[0035] As Figure 4 shown, in some embodiments, the main body support surface 207 is provided with a first air outlet 210, and the first air outlet 210 faces upward. The first fan 214 is installed inside the base 205, and the first fan 214 is used to drive air to flow out from the first air outlet 210. As Figure 6As shown, the base 205 includes a frame 215 and a blower mounting plate 219. The top surface of the blower mounting plate 219 is the main body support surface 207, and the first blower 214 is installed at the bottom of the blower mounting plate 219. After the blower mounting plate 219 is connected to the top of the frame 215, the first blower 214 will be surrounded by the frame 215, so that the first blower 214 is located inside the base 205. The airflow generated by the first blower 214 can pass through the gap 105 between the boat blades 104 from bottom to top, thereby cooling the boat blades 104 and the silicon wafers on both sides of the gap 105. Since the first blower 214 is installed inside the base 205, the structural compactness of the carrier module 201 is relatively high, and the space occupied by a single carrier module 201 is small. In addition, since the airflow generated by the first blower 214 can pass through the gap 105 between the boat blades 104 from bottom to top, the resistance of the boat blades 104 to the airflow generated by the first blower 214 is small, and the contact area between the airflow and the boat blades 104 is large, which is beneficial to improving the cooling effect of the first blower 214 on the boat body 101.

[0036] It should be noted that the first blower 214 does not necessarily need to be installed inside the base 205. In some other embodiments not shown, in order to enable the airflow generated by the first blower 214 to flow above the main body support surface 207, the first blower 214 can also be hoisted above the main body support surface 207, and the first blower 214 blows downward to cool the boat body 101. Or, the first blower 214 and the main body support surface 207 can also be distributed in the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction. The second horizontal direction can be the front-rear direction. The first blower 214 can be arranged directly in front of the main body support surface 207 and blow backward, or the first blower 214 can be arranged directly behind the main body support surface 207 and blow forward.

[0037] The first blower 214 includes a blower housing, a motor and an impeller. The motor and the impeller are arranged inside the blower housing, and the motor is used to drive the impeller to rotate, thereby generating airflow. The blower housing is connected to the bottom of the blower mounting plate 219. The blower housing includes a first air inlet (not shown), and the first air inlet is located at the bottom of the blower housing and faces downward. As Figure 6As shown, the carrier module 201 includes a cooling unit 216. The cooling unit 216 is connected to the base 205 (for example, the cooling unit 216 is connected to the bottom of the frame 215), and the cooling unit 216 is located below the first air inlet. The first fan 214 is used to drive air to flow through the cooling unit 216, the first air inlet, and the first air outlet 210 in sequence, and this air flows from bottom to top. The cooling unit 216 is used to cool the air flowing through the outer surface of the cooling unit 216. When the cooling unit 216 is provided, the air flow blown out from the first air outlet 210 has a lower temperature (compared with the case where the cooling unit 216 is not provided), and the purification table 200 has a better cooling effect on the boat body 101.

[0038] As Figure 6 shown, the cooling unit 216 may include cooling pipes 217, and a flow channel for allowing a cooling medium to flow is formed inside the cooling pipes 217. The cooling medium may be water, a refrigerant, or other low-temperature fluids. When the cooling medium flows in the flow channel, it can absorb the heat of the external air, thereby cooling the air flowing through the outer surface of the cooling unit 216. In some other embodiments, the cooling unit 216 may also be set as a thermoelectric cooler. A plurality of cooling pipes 217 may be provided, and there are gaps (not specifically shown) between two adjacent cooling pipes 217, and air can pass through the gaps when flowing from bottom to top.

[0039] As Figure 6 shown, the carrier module 201 further includes a water receiving tray 218, and the water receiving tray 218 is connected to the bottom of the cooling unit 216. When air flows through the outer surface of the cooling unit 216, water vapor in the air may condense, thereby forming water droplets on the outer surface of the cooling unit 216. After the water droplets fall, they will enter the water receiving tray 218 and will not directly drip onto the ground or the bottom wall of the box body 203. Moreover, when the purification table 200 is provided with multiple layers of carrier modules 201, the water receiving tray 218 can also prevent the condensed water droplets from dripping onto the lower-layer carrier module 201 or the lower-layer process boat 100. It should be noted that the water receiving tray 218 is suspended below the cooling unit 216, and there is a gap between the edge of the water receiving tray 218 and the bottom of the cooling unit 216, and air can pass through this gap, and the water receiving tray 218 will not completely block the air from flowing through the cooling unit 216 from bottom to top.

[0040] As Figure 4 shown, the second fan 202 and the boat foot support surface 208 are distributed along the second horizontal direction. Specifically, in Figure 4Among them, the second horizontal direction is the front - rear direction, and the second fan 202 is located in front of the foot support surface 208. The second fan 202 is offset from the main body support surface 207, that is, the second fan 202 and the main body support surface 207 are distributed along the first horizontal direction. The second fan 202 also includes a fan housing, a motor, and an impeller. The fan housing includes a second air outlet (not shown) and a second air inlet 209. The second fan 202 is used to drive air to flow through the second air inlet 209 and the second air outlet in sequence. The second air outlet is not shown in the drawings. In this embodiment, the orientation of the second air outlet is parallel to the second horizontal direction, and the second air outlet is located on the side of the second fan 202 close to the foot support surface 208. Specifically, taking Figure 4 as an example, the second air outlet is located at the rear side of the second fan 202 and is set to face backward, and the second air inlet 209 is located at the front side of the second fan 202 and is set to face forward. The air blown out from the second air outlet flows through the foot 102 successively, thereby realizing the cooling of the foot 102. In this embodiment, the second fan 202 is arranged on the side of the foot support surface 208 instead of inside the base 205, which is beneficial to reducing the assembly difficulty of the load - bearing module 201.

[0041] When the second fan 202 is located on the side of the foot support surface 208, in order to facilitate the fixing of the second fan 202, the second load - bearing module 201 further includes a column 206 (as Figure 4 shown), the bottom end of the column 206 is connected to the base 205, and the second fan 202 is fixed to the side of the column 206.

[0042] In some other embodiments not shown in the drawings, the second fan 202 can also be set such that the orientation of the second air inlet 209 is parallel to the second horizontal direction, and the second air inlet 209 is located on the side of the second fan 202 close to the foot support surface 208. For example, the second air outlet is located at the front side of the second fan 202 and is set to face forward, and the second air inlet 209 is located at the rear side of the second fan 202 and is set to face backward. After the second fan 202 is started, the air flow first passes through the foot 102 and then passes through the second fan 202, and this setting can also achieve the cooling of the foot 102.

[0043] Or, in some other embodiments not shown in the drawings, the second air outlet is set to face upward and is arranged on the foot support surface 208, and the air blown out by the second fan 202 flows upward from the foot support surface 208, thereby flowing through the foot 102. Or, the second fan 202 can be suspended above the foot support surface 208, the second air outlet is set to face downward, and the air blown out by the second fan 202 flows downward to flow through the foot 102.

[0044] In some embodiments, the base 205 includes a central support portion 212 and an edge support portion 213. The outer surface of the central support portion 212 includes the above-mentioned main body support surface 207, and the outer surface of the edge support portion 213 includes the above-mentioned boat foot support surface 208. In this embodiment, the fan mounting plate 219 is the central support portion 212 (as Figure 6 shown), and the shape of the edge support portion 213 is as Figure 8 shown. As Figure 8 shown, the carrier module 201 further includes a support beam 211, and the support beam 211 can be arranged as a cantilever beam. The support beam is horizontal and the column 206 is vertical. One end of the support beam 211 is fixedly connected to the column 206, and the other end of the support beam 211 is fixedly connected to the edge support portion 213. The support beam 211 and the edge support portion 213 can be fixed by screws or by welding. The provision of the support beam 211 is beneficial to improving the strength and stiffness of the carrier module 201 and enhancing the load-bearing capacity of the carrier module 201 for the process boat 100. In addition, in order to improve the strength and stiffness of the carrier module 201, the support beam 211, the base 205 and the column 206 can all be made of steel.

[0045] The carrier module 201 further includes a connection structure, and the support beam 211 is fixedly connected to the column 206 through the connection structure. In Figure 8 , in order to conveniently show the groove 221, the connection structure is in a disassembled state. As Figure 8 shown, the connection structure includes a first assembly block 220, a second assembly block 222 and a fastener 223. The first assembly block 220 is fixed to the side of the column 206, and the first assembly block 220 is provided with a groove 221. The second assembly block 222 is fixedly connected to the support beam 211, and the second assembly block 222 is arranged in the groove 221. The fastener 223 is detachable. The fastener 223 passes through the first assembly block 220 and the second assembly block 222, and the fastener 223 fixes the first assembly block 220 and the second assembly block 222. The fastener 223 can be arranged as a screw, a bolt, a pin, etc. The fixed connection between the second assembly block 222 and the support beam 211 can also be realized by the fastener 223, or the second assembly block 222 and the support beam 211 can also be fixed by welding. The groove 221 on the first assembly block 220 has the function of positioning the second assembly block 222, thereby improving the assembly convenience of the first assembly block 220 and the second assembly block 222.

[0046] As Figure 3 shown, in some embodiments, the cleaning table 200 further includes a box body 203. The carrier module 201 is fixed inside the box body 203, and there are multiple carrier modules 201, and the multiple carrier modules 201 are distributed in the vertical direction. It should be noted that, in order to show the carrier module 201 inside the box body 203, Figure 3The box body 203 in it omits the side plate on its rear side. In the actual use scenario, the box body 203 is not open. The box body 203 can prevent the carrier module 201 and the process boat 100 from being directly exposed to the external environment and prevent the process boat 100 and the silicon wafers from being polluted by dust and particulate matter in the environment. Setting multiple carrier modules 201 can increase the total number of process boats 100 that the purification table 200 can carry. In addition, since the multiple carrier modules 201 are distributed in the vertical direction and the air blown by the first blower 214 flows from bottom to top, the flow directions of the airflows of the respective carrier modules 201 are highly consistent, and the mutual interference between the airflows of the respective carrier modules 201 is less. This is beneficial to improving the cooling effect of the first blower 214 on the boat body 101.

[0047] As Figure 3 shown, in some embodiments, the purification table 200 further includes an exhaust fan 204. The exhaust fan 204 is connected to the top of the box body 203, and the exhaust fan 204 is used to discharge the air inside the box body 203 to the outside of the box body 203. After the air flows through the outer surface of the process boat 100, the process boat 100 is cooled, and the temperature of the air rises. The exhaust fan 204 is used to discharge this hot air outside the box body 203, so as to finally transfer the heat of the process boat 100 to the external environment. The second air inlet 209 of the second blower 202 is exposed from the side of the box body 203. For example, in this embodiment, the second air inlet 209 is exposed from the front side of the box body 203 to the outside of the box body 203. The second blower 202 is used to transport the air outside the box body 203 into the inside of the box body 203 to balance the internal and external air pressures of the box body 203. The second blower 202 is used to send external air into the inside of the box body 203 and to cool the boat feet 102. The purification table 200 does not need to be additionally provided with a blower for driving air into the box body 203, which is beneficial to reducing the cost of the purification table 200.

[0048] In the description of the present invention, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

Claims

1. A clean bench, characterized in that: The invention comprises a carrying module for carrying a process boat, wherein the process boat comprises a boat body and a boat foot, wherein the boat foot is connected to the end of the boat body, and the boat body is used to accommodate silicon wafers. The carrying module comprises: A base, wherein the outer surface of the base includes a main body support surface and a boat foot support surface distributed in a horizontal direction, the main body support surface and the boat foot support surface are both arranged upward, the boat foot support surface is arranged at the end of the main body support surface, the main body support surface is used to support the boat body, and the boat foot support surface is used to support the boat foot; a first fan, the first fan being used to drive air to flow directly above the main body support surface, thereby cooling the boat body; The second fan drives air to flow directly above the boat foot support surface, thereby cooling the boat foot.

2. The clean bench according to claim 1, characterized in that: The main body support surface is provided with a first air outlet, the first air outlet is arranged upward, the first fan is installed inside the base, and the first fan is used to drive air to flow out from the first air outlet.

3. The clean bench according to claim 2, characterized in that: The first fan includes a first air inlet, which is arranged downward. The supporting module also includes a cooling unit, which is connected to the base and is located below the first air inlet. The first fan is used to drive air to flow through the cooling unit, the first air inlet and the first air outlet in sequence, and the cooling unit is used to cool the air flowing through the outer surface of the cooling unit.

4. The clean bench according to claim 3, characterized in that: The cooling unit includes a cooling pipe, and a flow channel for a cooling medium to flow is formed inside the cooling pipe.

5. The clean bench according to claim 1, characterized in that: The arrangement direction of the main body support surface and the boat foot support surface is a first horizontal direction, the second fan and the boat foot support surface are distributed along a second horizontal direction, the second fan and the main body support surface are staggered, the second horizontal direction is perpendicular to the first horizontal direction, the second fan includes a second air outlet and a second air inlet, and the second fan is used to drive air to flow through the second air inlet and the second air outlet in sequence; Wherein, the direction of the second air outlet is parallel to the second horizontal direction, and the second air outlet is located on a side of the second fan close to the boat foot support surface; Alternatively, the direction of the second air inlet is parallel to the second horizontal direction, and the second air inlet is located on a side of the second fan close to the boat foot supporting surface.

6. The clean bench according to claim 5, characterized in that: The bearing module further comprises a column, the bottom end of which is connected to the base, and the second fan is fixed to the side of the column.

7. The clean bench according to claim 6, characterized in that: The base includes an edge support portion, the outer surface of the edge support portion includes the boat foot support surface, and the load-bearing module also includes a support beam, one end of the support beam is fixedly connected to the column, and the other end of the support beam is fixedly connected to the edge support portion.

8. The clean bench according to claim 7, characterized in that: The bearing module further includes a connection structure, through which the support beam is fixedly connected to the column, and the connection structure includes: A first assembly block, the first assembly block is fixed to a side of the column, and the first assembly block is provided with a groove; a second assembly block, the second assembly block being fixed to the support beam, the second assembly block being disposed in the groove; A fastener is detachable, passes through the first assembly block and the second assembly block, and fixes the first assembly block and the second assembly block.

9. The clean bench according to any one of claims 1 to 8, characterized in that: The clean bench further comprises a box body, the bearing module is fixed inside the box body, a plurality of the bearing modules are provided, and the plurality of the bearing modules are distributed along a vertical direction.

10. The clean bench according to claim 9, characterized in that: The clean bench also includes an exhaust fan, which is connected to the top of the box and is used to exhaust the air in the box to the outside of the box; The second fan includes a second air inlet, the second air inlet is exposed from the side of the box, and the second fan is used to transport air outside the box to the inside of the box.

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