Self-cleaning gas filtering device and cleaning system

Abstract

The utility model provides a self-cleaning gas filtering device and a cleaning system. The self-cleaning gas filtering device comprises a filtering mechanism, a self-cleaning mechanism and a detection mechanism, the filtering mechanism is composed of a shell and a filter element, the shell is provided with an air inlet end and an air outlet end, and a plurality of through holes are formed in the filter element and communicated with the air inlet end and the air outlet end. The self-cleaning mechanism comprises a driving device and a brush, and the brush moves around the filter element to realize self-cleaning of the filter element. The detection mechanism comprises a flow meter, a control module and a feedback module and is used for monitoring the filtering effect of the filter element. According to the device and the system, the filter element can be automatically cleaned under the condition that equipment does not need to be disassembled, and the reduction of the filtering effect and equipment faults caused by blockage of the filter element are avoided. A real-time feedback mechanism of the detection mechanism can ensure the self-cleaning effect, the problem of blockage of the filter element can be found and treated in time, and the device has the advantages of being high in automation degree, flexible to operate, accurate to control, high in response speed, high in filtering quality, capable of achieving real-time detection and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of self-cleaning equipment, in particular to a self-cleaning gas filtering device and a cleaning system. Background Art

[0002] During the current processing of a Hydride Vapor Phase Epitaxy (HVPE) system, there is a significant technical challenge in the gas emission link. When growing high-quality semiconductor materials, the system inevitably generates gases containing impurities such as adhered ammonium chloride powder. If these impurities are directly discharged without treatment, they will cause serious environmental pollution. Therefore, these gases must be purified through a filtration system. However, existing filtration technologies have obvious deficiencies in addressing this problem.

[0003] During the HVPE processing, due to their special physical properties, impurities such as ammonium chloride powder are extremely likely to adhere to the filter element of the filter, resulting in a rapid decline in the filtration efficiency of the filter element. To maintain the normal operation of the filtration system, the filter element needs to be disassembled, assembled, and cleaned regularly. Such frequent maintenance operations not only consume a large amount of manpower and material resources but also reduce the continuous operation ability of the production line and affect the equipment utilization rate.

[0004] More seriously, when the impurities on the filter element accumulate to a certain extent and cause the filter element to be completely blocked, conventional cleaning methods can no longer restore the filtration function of the filter element, and only a new filter element can be replaced. Due to the lack of effective real-time monitoring means currently, the judgment of filter element blockage mainly relies on the detection of the tail gas after filtration. This method often fails to detect problems in a timely manner, resulting in the filtration system running in an ineffective filtration state for a long time and even possibly causing damage to the filtration equipment. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the problem that it is difficult to handle the blockage of the filter element in the prior art, and provide a self-cleaning gas filtering device and a cleaning system.

[0006] To solve the above technical problems, the present utility model provides a self-cleaning gas filtration device, which includes: a filtration mechanism, the filtration mechanism includes a housing and a filter element, wherein, an air inlet end and an air outlet end are respectively provided on the housing, the filter element is connected inside the housing, and both ends thereof are respectively communicated with the air inlet end and the air outlet end, the gas to be filtered enters the inside of the housing from the air inlet end, and after flowing through the filter element, it is discharged from the air outlet end, and a plurality of through holes are provided on the surface of the filter element; a self-cleaning mechanism, the self-cleaning mechanism includes a driving device and a brush, the driving device and the brush are respectively connected to the housing, wherein, the brush is arranged inside the housing, and it moves around the filter element through the driving device and contacts the filter element; a detection mechanism, the detection mechanism includes a flow meter, a control module and a feedback module, the flow meter is arranged in the air outlet end, and the flow meter and the feedback module are respectively connected to the control module in a signal manner.

[0007] In an embodiment of the present utility model, the feedback module includes a cleaning module and an alarm module, the cleaning module and the alarm module are respectively connected to the control module in a signal manner, wherein, when the detection value of the flow meter reaches a first preset range, it drives the cleaning module to respond through the control module; when the detection value of the flow meter reaches a second preset range, it drives the alarm module to respond through the control module, wherein, the second preset range < the first preset range.

[0008] In an embodiment of the present utility model, the self-cleaning mechanism further includes a magnet, the magnet is arranged inside the housing and is connected to the brush, the driving device is set as a magnetic driving device, the magnetic driving device is connected to the outside of the housing, and the magnet moves around the filter element through the driving device to drive the brush, wherein, the magnet is rotatably connected to the housing, and its side wall is spaced from the housing.

[0009] In an embodiment of the present utility model, the inside of the housing is divided into an installation space and a gas buffer space, in the height direction of the housing, the installation space is arranged above the gas buffer space, the filter element is arranged in the installation space, one end thereof is communicated with the air inlet end, and the other end is communicated with the gas buffer space, the air inlet end is arranged corresponding to the gas buffer space, and after the gas to be filtered accumulates in the gas buffer space through the air inlet end, it uniformly enters the filter element from bottom to top.

[0010] In an embodiment of the present utility model, the housing includes a side wall, a first sealing assembly, and a second sealing assembly. The first sealing assembly and the second sealing assembly are respectively connected to two ends of the side wall. Among them, the first sealing assembly and a part of the side wall jointly enclose the installation space, and the second sealing assembly and a part of the side wall jointly enclose the receiving space. Among them, the first sealing assembly includes a top plate and at least one first connecting member, and the top plate is detachably connected to the side wall through the first connecting member; the second sealing assembly includes a bottom plate and at least one second connecting member, and the bottom plate is detachably connected to the side wall through the second connecting member.

[0011] In an embodiment of the present utility model, the side wall includes a main body portion and a stop portion. Among them, both the installation space and the buffer space are arranged inside the main body portion, and the stop portion encloses the receiving space. In the height direction of the side wall, the receiving space is communicated with the buffer space and is located below the buffer space. The projected area of the receiving space in the height direction of the device is not less than the projected area of the buffer space in the same direction.

[0012] In an embodiment of the present utility model, the self-cleaning mechanism further includes a dust collection box. The dust collection box is arranged in the receiving space, and the opening of the dust collection box faces the buffer space. The dust collection box is supported by the bottom plate and abuts against the stop portion.

[0013] In an embodiment of the present utility model, the self-cleaning mechanism further includes a connecting component. The connecting component is rotatably connected inside the housing, and the brush is slidably connected to the connecting component and rotates synchronously with the connecting component so as to move around the filter element.

[0014] In an embodiment of the present utility model, the filter element is concentrically arranged with the exhaust end, and a plurality of through holes are evenly spaced on the surface of the filter element. In the height direction of the device, the extending length of the brush is not less than the height of the filter element.

[0015] In an embodiment of the present utility model, it further includes a central control mechanism. The central control mechanism includes a power supply, and the power supply is connected to the driving device through a wire. When the power supply supplies power, the driving device drives the brush to move.

[0016] The present utility model also provides a cleaning system, which includes the above-mentioned self-cleaning gas filtering device.

[0017] The above technical solution of the present utility model has the following advantages compared with the prior art:

[0018] The self-cleaning gas filtration device and cleaning system described in the present utility model filter gas through a filtration mechanism, and then the self-cleaning mechanism realizes a comprehensive cleaning treatment of the filter element without disassembling and assembling the equipment, avoiding problems such as reduced filtration effect, poor gas conduction, and even device failure caused by filter element blockage. Most importantly, after the filtration operation, the detection mechanism can detect the gas transmission capacity of the device of the present application after self-cleaning through the gas flow rate at the exhaust end. Thus, when the cleaning treatment effect of the self-cleaning mechanism does not meet the standard, the detection mechanism can give a timely feedback, and further achieve the purpose of secondary cleaning or maintenance and replacement of the blocked filter element. In addition, based on the above structure, compared with the existing conventional filtration equipment, the present application has the advantages of high automation, flexible operation, precise control, fast response speed, high filtration quality, and real-time detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to specific embodiments of the present utility model in conjunction with the drawings.

[0020] Figure 1 is a three-dimensional structural schematic diagram of the self-cleaning gas filtration device in a preferred embodiment of the present utility model;

[0021] Figure 2 is Figure 1 a sectional structural schematic diagram taken along line A-A of the self-cleaning gas filtration device shown;

[0022] Figure 3 is Figure 1 a structural schematic diagram of the self-cleaning mechanism, flowmeter, and part of the filtration mechanism in the self-cleaning gas filtration device shown;

[0023] Figure 4 is Figure 3 a bottom view of the self-cleaning mechanism, flowmeter, and part of the filtration mechanism in the self-cleaning gas filtration device shown;

[0024] Figure 5 is Figure 3 a schematic diagram of the internal structure of the self-cleaning mechanism, flowmeter, and part of the filtration mechanism in the self-cleaning gas filtration device shown;

[0025] Figure 6 is Figure 1 a signal connection diagram of the self-cleaning gas filtration device shown.

[0026] Description of the reference numerals in the drawings: 100, filtration mechanism; 110, housing; 111, intake end; 112, exhaust end; 120, filter element; 130, first sealing assembly; 140, second sealing assembly; 150, installation space; 160, buffer space; 170, receiving space; 200, self-cleaning mechanism; 210, connecting assembly; 220, brush; 230, magnet; 240, driving device; 250, dust collection box; 300, flowmeter. Detailed implementation manners

[0027] The present utility model will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments given are not intended to limit the present utility model.

[0028] This application provides a self-cleaning gas filtration device, which includes: a filtration mechanism, the filtration mechanism includes a housing and a filter element, an intake end and an exhaust end are respectively provided on the housing, the filter element is connected inside the housing, and both ends thereof are respectively communicated with the intake end and the exhaust end, the gas to be filtered enters the inside of the housing from the intake end, and after flowing through the filter element, it is discharged from the exhaust end, and a plurality of through holes are provided on the surface of the filter element; a self-cleaning mechanism, the self-cleaning mechanism includes a driving device and a brush, the driving device and the brush are respectively connected to the housing, wherein the brush is arranged inside the housing, and it moves around the filter element through the driving device and contacts the filter element; a detection mechanism, the detection mechanism includes a flowmeter, a control module and a feedback module, the flowmeter is arranged in the exhaust end, and the flowmeter and the feedback module are respectively connected to the control module in a signal manner.

[0029] This application can be used for the adsorption and filtration of impurity gases containing ammonium chloride powder, etc. generated in a hydride vapor phase epitaxy system (HVPE), and can perform self-cleaning after the filtration process is completed. This self-cleaning function allows the device to automatically brush and dredge the filter element after the filtration process is completed. This process does not require the operator to repeatedly disassemble the device, greatly simplifies the maintenance procedure, and reduces the maintenance cost. Through this self-cleaning mechanism, this application effectively avoids the accumulation of adhesive impurities on the surface and mesh holes of the filter element, which is a common problem in traditional filtration systems, often leading to blockage of the filter element, thereby affecting the filtration efficiency and equipment performance.

[0030] Further, the filtration system is used to perform the main filtration function, and the housing therein is connected to the exhaust gas output end of the HVPE system, used to collect and buffer the exhaust gas, and guide it to the inside of the filter element. After the filter element processes it, the processed gas is directly discharged from the degassing end out of the housing, thereby realizing the gas circulation operation process.

[0031] Furthermore, the interior of the shell is divided into an installation space and a gas buffer space. In the height direction of the shell, the installation space is arranged above the gas buffer space, and the filter element is arranged in the installation space, one end of which is connected to the air inlet end, and the other end is connected to the gas buffer space, and the air inlet end is arranged corresponding to the gas buffer space. Based on this structural arrangement, the waste gas to be treated will preferentially enter the gas buffer space through the air inlet end. In this space, the gas with unstable flow and flow rate will be buffered and homogenized in the gas buffer space, so that the gas can enter the filter element in a more stable state. This buffering and homogenization process not only protects the filter element from the direct impact of high-speed airflow, reduces the wear and clogging risks of the filter element, but also improves the filtering efficiency of the filter element and ensures the stability of the filtering effect. Specifically, the design of the filter element being arranged at the top of the shell enables the filter element to capture impurities in the gas more efficiently, and also enhances the operational stability of the equipment and its adaptability under different working conditions.

[0032] Furthermore, the shell includes a side wall, a first sealing component and a second sealing component, the first sealing component and the second sealing component are respectively connected to both ends of the side wall, wherein the first sealing component and part of the side wall together enclose the installation space, and the second sealing component and part of the side wall together enclose the receiving space, wherein the first sealing component includes a top plate and at least one first connecting member, the top plate is detachably connected to the side wall through the first connecting member; the second sealing component includes a bottom plate and at least one second connecting member, the bottom plate is detachably connected to the side wall through the second connecting member. This modular design allows damaged or aged components inside to be replaced individually without having to replace the entire shell, thereby improving maintenance efficiency while reducing material waste. The utility model does not impose specific restrictions on the actual shape of the shell.

[0033] Further, the side wall includes a main body portion and a stop portion. Among them, the installation space and the buffer space are both arranged within the main body portion. The stop portion encloses a receiving space. In the height direction of the side wall, the receiving space communicates with the buffer space and is located below the buffer space. The projected area of the receiving space in the height direction of the device is not less than the projected area of the buffer space in the same direction. Among them, the main body portion is a cylindrical structure, and the stop portion is arranged as a cylindrical structure with a cross-sectional diameter larger than that of the main body portion. It is fixedly connected to the main body portion and is actually integrally arranged. Specifically, in this embodiment, the design of the stop portion is to facilitate the collection of waste dust at the cleaning location for subsequent unified recycling and treatment. In order to improve the collection efficiency and ensure that the waste dust can completely enter the receiving space under the action of gravity, it is necessary to expand the receiving area of the receiving space. More importantly, in view of the gas recovery characteristic of this application, in order to avoid the convolution of the waste dust in the receiving space caused by the relatively fast gas flow rate near the air inlet end, the air inlet end and the buffer space are arranged above the receiving space, thereby avoiding mutual interference between the two to achieve the optimal waste recycling and gas transmission process. During actual use, after sequential filtration, the waste can enter the receiving space by means of static sedimentation. After its recovery, the next filtration process can be carried out.

[0034] Further, the dust collection box is arranged in the receiving space, and the opening of the dust collection box faces the buffer space. The dust collection box is supported on the bottom plate and abuts against the stop portion. After the filtration is completed, the operator can take out the dust collection box by disassembling the second sealing component, improving the convenience of waste recycling.

[0035] Further, the self-cleaning mechanism further includes a connecting component. The connecting component is rotatably connected inside the housing. The brush is slidably connected to the connecting component and rotates synchronously with the connecting component so as to move around the filter element. In this application, the setting of the connecting component can, on the one hand, provide a connecting platform for the brush, and on the other hand, also guide the movement process of the brush. Specifically, the connecting component in this application can preferably be a turntable bearing, thereby improving the flexibility of the magnet movement. In different embodiments, the connecting piece can be configured as other structures with connection and guiding functions, and the present utility model does not make specific limitations thereto.

[0036] Further, in order to improve the controllability and movement accuracy of the brush during movement, in the present application, it is preferably that the driving device and the brush are controlled electromagnetically. Correspondingly, the self-cleaning mechanism further includes a magnet, the magnet is connected inside the housing, the driving device is connected outside the housing, the magnet moves around the filter element through the driving device, and the brush is connected to the magnet. Similarly, the driving device can be set as an electromagnetic driving device, specifically preferably a motor magnet ring device, which can obtain alternating current in the internal coil after being powered on, thereby driving the internal magnet to move. Based on this, the connecting component in the present application is also provided with a fixing hole for connecting the magnet. During actual operation, a corresponding brush and a magnet are respectively detachably connected to a fixing hole.

[0037] Further, the top end of the magnet is rotatably connected to the housing. In order to reduce the mechanical friction between the magnet and the housing, its side wall is spaced from the side wall of the housing, thereby improving the flexibility of the magnet during movement.

[0038] Further, the present application further includes a central control mechanism, the central control mechanism includes a power supply, the power supply is connected to the driving device through a wire, and when the power supply supplies power, the driving device drives the brush to move. During actual operation, after the central control mechanism controls the power supply to supply power, the magnetic force driving device will generate a corresponding magnetic field to drive the magnet to drive the brush to rotate; correspondingly, after the central control mechanism controls the power supply to cut off the power, the brush stops moving, and after it stands still to settle impurities, the filtered impurities can be recovered and processed to complete a conventional filtration and cleaning process.

[0039] Further, the filter element and the exhaust end are concentrically arranged, and a plurality of the through holes are evenly spaced on the surface of the filter element. The plurality of through holes evenly arranged on the surface of the filter element in the present application can increase the surface area of the filter element, so that when the gas flows through the filter element, it can more effectively intercept impurities. At the same time, the design of these holes also helps to reduce the resistance when the gas flows through the filter element, thereby reducing the pressure drop, thereby maintaining the overall pressure balance of the system and prolonging the service life of the filter element. Most importantly, based on the above through holes, the internal environment of the filter element can cooperate with the brush to achieve the treatment of avoiding impurities to realize the self-cleaning function.

[0040] Further, the self-cleaning mechanism in this embodiment is used to brush and clean the surface of the filter element. It brushes the impurities adhering to the filter element through a brush that moves around the surface of the filter element. Based on this, the length of the brush in this application needs to extend to abut against the surface of the filter element. At the same time, in the height direction of this device, the extended length of the brush is not less than the height of the filter element, thereby achieving the full coverage effect of the brush on the filter element. In this application, the brush is preferably a hard-textured board brush. During the actual operation process, the number of brushes can be set according to actual usage requirements, and the present utility model does not make specific restrictions on this.

[0041] Further, after the self-cleaning operation process is completed, the detection mechanism can detect the degree of self-cleaning to ensure that the filter element can be used normally. Specifically, this application evaluates whether the filter element meets the cleaning standard through the gas flow rate at the exhaust end. The flowmeter transmits its detection result to the control module, which is analyzed and processed by the control module. If the internal flow rate at the exhaust end still cannot reach the preset parameter due to the blockage of the filter element, at this time, the control module will transmit this information to the feedback module to achieve the purpose of reminding and warning, indicating that manual intervention is required at this time.

[0042] Further, the feedback module includes a cleaning module and an alarm module. The cleaning module and the alarm module are respectively connected to the control module in a signal manner. Among them, when the detection value of the flowmeter reaches the first preset range, it drives the cleaning module to respond through the control module; when the detection value of the flowmeter reaches the second preset range, it drives the alarm module to respond through the control module, where the second preset range < the first preset range. Among them, the first preset range is the lowest standard for the filter element to achieve normal filtration and gas conduction. When the exhaust end flow rate can reach the first preset range and above, it means that the filter element after self-cleaning treatment can continue to perform filtration operations without manual replacement or adjustment; when the exhaust end flow rate can reach between the first preset range and the second preset range, it means that the filter element after self-cleaning treatment still has a blockage situation and needs to be cleaned again in a short time; when the exhaust end flow rate can reach below the second preset range, it proves that the inside of the filter element is in a highly blocked state and it has lost the effect of filtering and conducting gas. At this time, the filter element needs to be disassembled or replaced to ensure the service life of the device, thereby overcoming the problem that it is difficult to handle the blockage of the filter element in a timely manner. Among them, the first preset range and the second preset range in this application need to be preset according to actual usage requirements.

[0043] Embodiment 1

[0044] See Figure 1 and Figure 2 As shown, a self-cleaning gas filtration device is provided in this embodiment, which includes:

[0045] Filter mechanism 100, the filter mechanism 100 includes a housing 110 and a filter element 120. Among them, an air inlet end 111 and an exhaust end 112 are respectively provided on the housing 110. The filter element 120 is connected inside the housing 110, and its two ends are respectively communicated with the air inlet end 111 and the exhaust end 112. The gas to be filtered enters the inside of the housing 110 from the air inlet end 111, and after flowing through the filter element 120, it is discharged from the exhaust end. A plurality of through holes are provided on the surface of the filter element 120. Among them, the inside of the housing 110 is divided into an installation space and a gas buffer space. In the height direction of the housing 110, the installation space is arranged above the gas buffer space. The filter element 120 is arranged in the installation space, one end of which is communicated with the air inlet end 111, and the other end is communicated with the gas buffer space. The air inlet end 111 is arranged corresponding to the gas buffer space. Based on this structural setting, the waste gas to be treated will first enter the gas buffer space through the air inlet end 111. In this space, the gas with unstable flow rate and velocity will be buffered and homogenized in the gas buffer space, so that the gas can enter the filter element 120 in a more stable state. This buffering and homogenization process not only protects the filter element 120 from the direct impact of high-speed air flow, reduces the risk of wear and blockage of the filter element 120, but also improves the filtration efficiency of the filter element 120 and ensures the stability of the filtration effect. Specifically, the design of arranging the filter element 120 at the top of the housing 110 enables the filter element 120 to capture impurities in the gas more efficiently, and also enhances the operation stability of the equipment and its adaptability under different working conditions.

[0046] In this embodiment, the housing 110 includes a side wall, a first sealing assembly 130, and a second sealing assembly 140. The first sealing assembly 130 and the second sealing assembly 140 are respectively connected to two ends of the side wall. Among them, the first sealing assembly 130 and a part of the side wall jointly enclose the installation space, and the second sealing assembly 140 and a part of the side wall jointly enclose the receiving space. Among them, the first sealing assembly 130 includes a top plate and at least one first connecting member, and the top plate is detachably connected to the side wall through the first connecting member; the second sealing assembly 140 includes a bottom plate and at least one second connecting member, and the bottom plate is detachably connected to the side wall through the second connecting member. This modular design allows individual replacement of damaged or aged components inside without having to replace the entire housing 110, improving the maintenance efficiency while reducing material waste. The present utility model does not specifically limit the actual shape of the housing 110. Specifically, in this embodiment, both the first connecting member and the second connecting member are preferably bolts, and both the top plate and the bottom plate are detachably connected by a plurality of bolts arranged around their edges. Based on this detachable connection structure, the time for disassembling and assembling this device and the potential for installation errors can be reduced, effectively improving the equipment operation rate, and at the same time achieving the purpose of simplifying the installation and debugging process under the premise of reducing the installation accuracy requirements.

[0047] In this embodiment, to improve the up-and-down circulation fluidity, the side wall of the housing 110 is preferably a cylindrical barrel, which includes a main body part and a stop part. Among them, both the installation space and the buffer space are arranged inside the main body part, and the stop part encloses the receiving space. In the height direction of the side wall, the receiving space is communicated with the buffer space and is located below the buffer space. The projected area of the receiving space in the height direction of this device is not less than the projected area of the buffer space in the same direction. Among them, the main body part is a cylindrical structure, and the stop part is arranged as a cylindrical structure with a cross-sectional diameter larger than that of the main body part, and it is fixedly connected to the main body part and is actually integrally arranged. Specifically, in this embodiment, the design of the stop part is to facilitate the collection of waste dust at the cleaning area for subsequent unified recycling and treatment. In order to improve the collection efficiency and ensure that the waste dust can completely enter the receiving space under the action of gravity, it is necessary to expand the receiving area of the receiving space. More importantly, in view of the characteristic of gas recovery in this application, in order to avoid the convolution of the waste dust in the receiving space caused by the relatively fast gas flow rate near the air inlet end 111, this application arranges the air inlet end 111 and the buffer space above the receiving space, thereby avoiding mutual interference between the two to achieve the optimal waste recycling and gas transmission process. During actual use, after sequential filtration, the waste can enter the receiving space by means of static sedimentation, and after its recovery, it can enter the next filtration process.

[0048] Specifically, the dust collection box 250 in this embodiment is disposed in the receiving space, and the opening of the dust collection box faces the buffer space. The dust collection box 250 is supported on the bottom plate and abuts against the stop portion. After the filtration is completed, the operator can take out the dust collection box 250 by disassembling the second sealing component 140, improving the convenience of waste recycling.

[0049] See Figures 2 to 5 As shown, this embodiment further includes a self-cleaning mechanism 200. The self-cleaning mechanism 200 includes a driving device 240 and a brush 220. The driving device 240 and the brush 220 are respectively connected to the housing 110. Among them, the brush 220 is disposed inside the housing 110 and moves around the filter element 120 through the driving device 240 and contacts the filter element 120.

[0050] This embodiment includes a self-cleaning mechanism 200 for brushing and cleaning the filter element 120. The self-cleaning mechanism 200 further includes a connecting component 210. The connecting component 210 is rotatably connected inside the housing 110. The brush 220 is connected to the connecting component 210 and rotates synchronously with the connecting component 210 to move around the filter element 120. In this application, the setting of the connecting component 210 can, on the one hand, provide a connecting platform for the brush 220, and on the other hand, guide the moving process of the brush 220. Specifically, the connecting component 210 in this application can preferably be a turntable bearing, thereby improving the moving flexibility of the magnet 230. In different embodiments, the connecting piece can be configured as other structures with connection and guiding functions, and the present invention does not make specific limitations thereto.

[0051] In this embodiment, in order to improve the controllability and movement accuracy of the brush 220 during the movement process, in this application, the driving device 240 and the brush 220 are preferably controlled electromagnetically. Correspondingly, the self-cleaning mechanism 200 further includes a magnet 230. The magnet 230 is connected inside the housing 110. The driving device 240 is connected outside the housing 110. The magnet 230 moves around the filter element 120 through the driving device 240. The brush 220 is connected to the magnet 230. Similarly, the driving device 240 can be set as an electromagnetic driving device 240, specifically preferably a motor magnet ring device, which can obtain alternating current in the internal coil after being powered on, thereby driving the internal magnet 230 to move. Based on this, this embodiment can run the whole process sealed through non-contact transmission, not only reducing human intervention, but also being beneficial to maintaining the vacuum degree.

[0052] Further, see Figure 3 and Figure 4As shown, in order to reduce the mechanical friction between the magnet 230 and the housing 110, the top end of the magnet 230 is rotatably connected to the housing 110, and its side wall is spaced from the side wall of the housing 110, thereby improving the flexibility of the magnet 230 during movement, reducing the friction and wear caused by mechanical contact, and greatly extending the service life of the device.

[0053] Further, referring to Figure 6 As shown, the present application further includes a central control mechanism, the central control mechanism includes a power supply, and the power supply is connected to the driving device 240 through a wire. When the power supply supplies power, the driving device 240 drives the brush 220 to move. During actual operation, after the central control mechanism controls the power supply to supply power, the magnetic drive device 240 generates a corresponding magnetic field to drive the magnet 230 to drive the brush 220 to rotate; correspondingly, after the central control mechanism controls the power supply to cut off the power, the brush 220 stops moving, and after it stands still to settle impurities, the filtered impurities can be recycled to complete a conventional filtration and cleaning process.

[0054] In this embodiment, the filter element 120 is concentrically arranged with the exhaust end 112, and a plurality of the through holes are evenly spaced on the surface of the filter element 120. The plurality of through holes evenly arranged on the surface of the filter element 120 in the present application can increase the surface area of the filter element 120, so that impurities can be intercepted more effectively when the gas flows through the filter element 120. At the same time, the design of these holes also helps to reduce the resistance when the gas flows through the filter element 120, thereby reducing the pressure drop, maintaining the overall pressure balance of the system, and extending the service life of the filter element 120. Most importantly, based on the above through holes, the internal environment of the filter element 120 can cooperate with the brush 220 to avoid impurity treatment to achieve a self-cleaning function.

[0055] In this embodiment, the length of the brush 220 needs to extend to abut against the surface of the filter element 120. At the same time, in the height direction of the device, the extension length of the brush 220 exceeds the height of the filter element 120, thereby achieving a full coverage effect of the brush 220 on the filter element 120. In the present application, the brush 220 is preferably a hard board brush, so that its cleaning effect is better.

[0056] Referring to Figure 6As shown in the figure, the present embodiment includes a detection mechanism, which includes a flow meter 300, a control module, and a feedback module. The flow meter 300 is disposed in the exhaust end 112, and the flow meter 300 and the feedback module are respectively connected to the control module in a signal manner. In this embodiment, after the self-cleaning operation process is completed, the detection mechanism can detect the self-cleaning degree to ensure that the filter element 120 can be used normally. Specifically, in this application, the gas flow rate at the exhaust end 112 is used to evaluate whether the filter element 120 meets the cleaning standard. The flow meter 300 transmits its detection result to the control module, which is analyzed and processed by the control module. If the internal flow rate at the exhaust end 112 still cannot reach the preset parameter due to the blockage of the filter element 120, at this time, the control module will transmit this information to the feedback module to achieve the purpose of reminding and warning, indicating that manual intervention is required at this time.

[0057] Among them, the feedback module includes a cleaning module and an alarm module. The cleaning module and the alarm module are respectively connected to the control module in a signal manner. Among them, when the detection value of the flow meter 300 reaches the first preset range, it drives the cleaning module to respond through the control module; when the detection value of the flow meter 300 reaches the second preset range, it drives the alarm module to respond through the control module, where the second preset range < the first preset range. In this embodiment, when the flow rate at the exhaust end 112 can reach the first preset range or above, it means that the filter element 120 after self-cleaning treatment can continue to perform the filtering operation without manual replacement or adjustment; when the flow rate at the exhaust end 112 can reach between the first preset range and the second preset range, it indicates that the filter element 120 after self-cleaning treatment still has a blockage situation and needs to be cleaned again in a short time; when the flow rate at the exhaust end 112 can reach below the second preset range, it proves that the inside of the filter element 120 is in a highly blocked state and it has lost the effect of guiding gas for filtration. At this time, the filter element 120 needs to be disassembled or replaced to ensure the service life of the device, thereby overcoming the problem that it is difficult to handle the blockage of the filter element 120 in a timely manner.

[0058] Embodiment 2

[0059] This embodiment provides a cleaning system, which includes at least one self-cleaning gas filtering device according to Embodiment 1.

[0060] In summary, for the self-cleaning gas filtration device and cleaning system of the present utility model, gas filtration is carried out through the filtration mechanism 100. Then, through the self-cleaning mechanism 200, comprehensive cleaning of the filter element 120 can be achieved without disassembling and assembling the equipment, avoiding problems such as reduced filtration effect, poor gas conduction, and even device failure caused by the blockage of the filter element 120. Most importantly, the detection mechanism can detect the device after self-cleaning through the flow rate at the exhaust end 112. Thus, in the case of unqualified cleaning treatment, timely feedback can be given, and further, the purpose of timely overhaul and replacement of the blocked filter element 120 can be achieved. Based on the above structure, compared with the existing conventional filtration equipment, this application has the advantages of high automation, flexible operation, precise control, fast response speed, high filtration quality, and real-time detection.

[0061] Obviously, the above embodiments are merely examples for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom still fall within the protection scope of the present utility model.

Claims

1. A self-cleaning gas filter device, characterized in that: include: A filter mechanism, the filter mechanism comprising a housing and a filter element, wherein the housing is provided with an air inlet end and an air outlet end, the filter element is connected to the interior of the housing, and its two ends are respectively connected with the air inlet end and the air outlet end, the gas to be filtered enters the interior of the housing from the air inlet end, and is discharged from the air outlet end after passing through the filter element, and a plurality of through holes are provided on the surface of the filter element; A self-cleaning mechanism, the self-cleaning mechanism comprising a driving device and a brush, the driving device and the brush are respectively connected to the housing, wherein the brush is arranged inside the housing, moves around the filter element through the driving device, and contacts the filter element; The detection mechanism includes a flow meter, a control module and a feedback module. The flow meter is arranged in the exhaust end. The flow meter and the feedback module are respectively connected to the control module by signals.

2. The self-cleaning gas filter device according to claim 1, characterized in that: The feedback module includes a cleaning module and an alarm module, and the cleaning module and the alarm module are respectively connected to the control module by signals, wherein: When the detection value of the flow meter reaches a first preset range, it drives the cleaning module to respond through the control module; When the detection value of the flow meter reaches a second preset range, it drives the alarm module to respond through the control module, wherein the second preset range is smaller than the first preset range.

3. The self-cleaning gas filter device according to claim 1, characterized in that: The self-cleaning mechanism also includes a magnet, which is arranged inside the shell and connected to the brush. The driving device is configured as a magnetic driving device, and the magnetic driving device is connected to the outside of the shell. The magnet moves around the filter element through the driving device to drive the brush, wherein one end of the magnet is rotatably connected to the shell and is spaced apart from the shell.

4. The self-cleaning gas filter device according to claim 1, characterized in that: The interior of the shell is divided into an installation space and a gas cache space. In the height direction of the shell, the installation space is arranged above the gas cache space. The filter element is arranged in the installation space, one end of which is connected to the air inlet end, and the other end is connected to the gas cache space. The air inlet end is arranged corresponding to the gas cache space. After the filtered gas passes through the air inlet end and accumulates in the gas cache space, it enters the filter element from bottom to top.

5. The self-cleaning gas filter device according to claim 4, characterized in that: The shell includes a side wall, a first sealing component and a second sealing component, the first sealing component and the second sealing component are respectively connected to both ends of the side wall, wherein the first sealing component and a part of the side wall together enclose the installation space, and the second sealing component and a part of the side wall together enclose a receiving space, wherein the first sealing component includes a top plate and at least one first connecting member, the top plate is detachably connected to the side wall through the first connecting member; the second sealing component includes a bottom plate and at least one second connecting member, the bottom plate is detachably connected to the side wall through the second connecting member.

6. The self-cleaning gas filter device according to claim 5, characterized in that: The side wall includes a main body and a stopper, wherein the installation space and the cache space are both arranged in the main body, and the stopper encloses a receiving space. In the height direction of the side wall, the receiving space is connected with the cache space and is located below the cache space. The projection area of ​​the receiving space in the height direction of the device is not less than the projection area of ​​the cache space in the same direction.

7. The self-cleaning gas filter device according to claim 6, characterized in that: The self-cleaning mechanism also includes a dust box, which is arranged in the receiving space, and the dust collection and opening are arranged toward the buffer space. The dust box is supported on the bottom plate and abuts against the stopper.

8. The self-cleaning gas filter device according to claim 1, characterized in that: The self-cleaning mechanism also includes a connecting component, which is rotatably connected to the inside of the shell, and the brush is slidably connected to the connecting component and rotates synchronously with the connecting component so as to move around the filter element.

9. The self-cleaning gas filter device according to claim 1, characterized in that: The filter element is concentrically arranged with the exhaust end, and a plurality of through holes are evenly spaced and arranged on the surface of the filter element. In the height direction of the filter element, the extension length of the brush is not less than the height of the filter element.

10. The self-cleaning gas filter device according to claim 1, characterized in that: It also includes a central control mechanism, which includes a power supply. The power supply is connected to the driving device through a wire. When the power supply is powered, the driving device drives the brush to move.

11. A cleaning system, characterized in that: A self-cleaning gas filter device comprising any one of claims 1 to 10.

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