2D and 3D visual inspection mechanism for chip DB and gold wire WB

Abstract

The utility model relates to a visual inspection mechanism, and discloses a 2D and 3D visual inspection mechanism for a chip DB and a gold thread WB, the visual inspection mechanism comprises a visual inspection station (31) and a tray conveying station (32), the tray conveying station (32) is provided with a tray conveying mechanism (5), and the tray conveying mechanism (5) comprises a tray conveying track (51). A 2D visual detection camera (33) and a 3D visual detection camera (34) are arranged at the visual detection station (31), the two tray suction plates (8) can move up and down and are used for sucking trays on the tray conveying track (51), the tray suction plates (8) corresponding to the 2D visual detection camera (33) are made of transparent materials, and a backlight source is arranged below the tray suction plates (8). According to the utility model, through the arrangement of the charging tray suction plate, the stability and the position accuracy of a detected piece in the detection process can be effectively ensured.

Description

Technical Field

[0001] The utility model relates to the field of vision detection, in particular to a 2D and 3D vision detection mechanism for chip DB and wire bond WB. Background Technique

[0002] DB is the abbreviation of "Die Bond", which means die bonding. Die bonding is to bond the die to the Lead Frame, which can be understood as bonding the chip to the PCB board or other substrates through glue. WB is the abbreviation of "Wire Bond", which means wire bonding. Wire bonding is to connect wires on the die, which can be understood as connecting the chip and the PCB through gold wires or aluminum wires by equipment. These are two processes in the front-end of semiconductor packaging and testing.

[0003] DB and WB need to be tested to determine whether the products are qualified. In the prior art, automated detection for DB and WB is provided. For example, the patent application document with the application publication number CN 113075231 A discloses an automated intelligent detection method and system for chip DB and wire bond WB, which can use artificial intelligence methods to simulate the operations of detection personnel to achieve automatic movement, automatic data collection, and automatic measurement results.

[0004] For the most important detection mechanism part in this type of detection system, the stability of the detected parts and the accuracy of their positions during the detection process will directly affect the detection results. Therefore, how to ensure the stability and accurate position of the detected parts during the detection process is a technical problem to be solved urgently. Content of the Utility Model

[0005] Aiming at the problem of how to improve the stability and accuracy of the detected parts during the vision detection process of chip DB and wire bond WB, the utility model provides a 2D and 3D vision detection mechanism for chip DB and wire bond WB.

[0006] To solve the above technical problems, the utility model is solved by the following technical solutions:

[0007] A 2D and 3D vision detection mechanism for chip DB and wire bond WB includes a vision detection station and a tray conveying station. A tray conveying mechanism is provided at the tray conveying station. The tray conveying mechanism includes a tray conveying track. At the vision detection station, a 2D vision detection camera and a 3D vision detection camera are arranged in sequence along the conveying direction of the tray conveying track. The mechanism further includes two tray suction plates that can move up and down and are used to adsorb the trays on the tray conveying track. The two tray suction plates are both arranged below the tray conveying track and are respectively corresponding to the 2D vision detection camera and the 3D vision detection camera. The tray suction plate corresponding to the 2D vision detection camera is made of a transparent material and a backlight source is provided below it.

[0008] Preferably, a 2D camera adjustment mechanism and a 3D camera adjustment mechanism for adjusting the positions of the 2D vision detection camera and the 3D vision detection camera are further provided at the vision detection station. The 2D camera adjustment mechanism and the 3D camera adjustment mechanism include a 2D camera linear motor module and a 3D camera linear motor module that can respectively move the 2D vision detection camera and the 3D vision detection camera in the length and width directions of the tray conveying track in the horizontal plane. The 2D camera adjustment mechanism and the 3D camera adjustment mechanism can adjust the positions of the 2D vision detection camera and the 3D vision detection camera, enabling better detection of the materials on the tray.

[0009] Preferably, the tray conveying mechanism includes a fixed conveying frame and a movable conveying frame that can move towards or away from the fixed conveying frame. The fixed conveying frame and the movable conveying frame respectively include a fixed track plate and a movable track plate. The fixed track plate and the movable track plate are arranged in parallel, and the upper ends of the opposite side surfaces are both constructed with tray edge supporting platforms. The tray edge supporting platforms on the fixed track plate and the tray edge supporting platforms on the movable track plate together constitute the tray conveying track. The fixed track plate and the movable track plate can move relative to each other, thereby enabling it to be applicable to the conveying and detection of trays with different widths.

[0010] Preferably, track guiding plates are provided at both the inlet and outlet ends of the tray conveying track on the fixed track plate and the movable track plate. The side surface of the track guiding plate is constructed with a tray edge upper limiting platform arranged above the tray edge supporting platform. The lower end surfaces of the tray edge supporting platform and the tray edge upper limiting platform together constitute the tray edge guiding groove; the lower end surface of the tray edge upper limiting platform includes a horizontal limiting surface parallel to the tray edge supporting platform and an inclined guiding surface provided at the starting end of the horizontal limiting surface. The setting of the inclined guiding surface can accurately guide the pushed tray onto the tray edge supporting platform.

[0011] Preferably, the tray conveying mechanism further includes a movable gripper that can move along the length direction of the tray conveying track and is used for clamping the edge of the tray. The movable gripper includes two clamping plates that can move relative to each other. On the one hand, the movable gripper realizes the transportation of the tray between the two detection positions, and on the other hand, it also has the function of clamping and pushing the detected tray into the empty tray.

[0012] Preferably, an inkjet positioning mechanism is provided at the tray conveying track. The inkjet positioning mechanism includes an inkjet positioning frame. An inkjet positioning plate is installed on the inkjet positioning frame and can block and position the tray on the tray conveying track. The inkjet positioning plate can move up and down in the height direction of the tray conveying track to the upper part or the lower part of the tray. The inkjet positioning frame includes a positioning frame bottom plate and a positioning plate support provided on the positioning frame bottom plate. The positioning plate support is slidably provided on the positioning frame bottom plate in the width direction of the tray conveying track, and the inkjet positioning plate is provided on the positioning plate support. The setting of the inkjet positioning plate can effectively position the tray on the tray conveying track, enabling it to reach the accurate inkjet position, and then achieving more accurate inkjet positioning.

[0013] Preferably, a tray support assembly is further provided on the positioning plate support. The tray support assembly includes a tray support rod that can support the bottom of the tray on the tray conveying track. The length direction of the tray support rod is arranged along the length direction of the tray conveying track, and the upper end surface of the tray support rod is an arc surface. The setting of the tray support rod can support the middle part of the tray and prevent inaccurate detection results caused by the middle part of the tray being sunken during the tray detection process. The arc surface setting of the tray support rod makes it in line contact with the tray, which can effectively prevent the tray support rod from scratching the tray.

[0014] Preferably, the inkjet positioning plate is configured as a U-shaped plate with an open upper end. The inkjet positioning plate is arranged below the tray support rod and can move upward to a position where the tray support rod is inside the inkjet positioning plate.

[0015] Preferably, a bracket limit plate is fixed on the positioning frame bottom plate. A long slot of the limit plate is provided on the bracket limit plate along the width direction of the track. A plurality of bolt holes spaced apart and cooperating with the long slot are provided on the positioning plate support, and a fastening wrench for relatively fixing and limiting the positioning plate support and the bracket limit plate is provided at the bolt holes.

[0016] The present utility model has significant technical effects due to the adoption of the above technical solutions:

[0017] Under the action of the tray suction plate, the tray of the present utility model can ensure that the tray is completely fixed and flat without deformation during the detection process, and then can effectively ensure the stability and position accuracy of the detected part during the detection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the tray detection mechanism in Embodiment 1 of the present utility model.

[0019] Figure 2 is Figure 1 a schematic structural diagram of the 2D camera adjustment mechanism in

[0020] Figure 3 is Figure 1Schematic diagram of the structure of the 3D camera adjustment mechanism in

[0021] Figure 4 is Figure 1 Schematic diagram of the structure of the tray conveying mechanism in

[0022] Figure 5 is Figure 4 Partial enlarged view of the fixed conveying frame or the movable conveying frame in

[0023] Figure 6 is Figure 5 Schematic diagram of the structure of the track guide plate in

[0024] Figure 7 is Figure 1 Schematic diagram of the structure of the jaw driving mechanism in

[0025] Figure 8 is Figure 1 Schematic diagram of the structure of the inkjet positioning mechanism in Detailed implementation manners

[0026] The present utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0027] Embodiment 1

[0028] This embodiment provides a 2D and 3D vision detection mechanism for chip DB and wire bonding WB, as Figures 1 - 8 shown, including a vision detection station 31 and a tray conveying station 32.

[0029] Among them, a 2D vision detection camera 33 and a 3D vision detection camera 34 are sequentially arranged at the vision detection station 31 along the conveying direction of the tray conveying track 51. There are also two tray suction plates 8 that can move up and down and are used to adsorb the trays on the tray conveying track 51. Both of the two tray suction plates 8 are arranged below the tray conveying track 51 and are respectively arranged corresponding to the 2D vision detection camera 33 and the 3D vision detection camera 34. The tray suction plate 8 corresponding to the 2D vision detection camera 33 is made of a transparent material and a backlight is arranged below it. There is also an inkjet printer 35 arranged at the 3D vision detection camera 34 and located on the 3D camera linear motor module 304 for dot-inking and marking defective products.

[0030] A backlight is arranged at the lower part of the tray suction plate 8, so that the backlight shines from below the product, which can make the photographing of the 2D vision detection camera 33 clearer and the result more accurate. The backlight has a good detection effect on the hollowed materials, and can make the hollowed edge clearer. In addition, a ring light source is also arranged below the 2D vision detection camera 33, which can effectively eliminate the shadow generated by the backlight installation connecting piece.

[0031] At the visual inspection station 31, there are also a 2D camera adjustment mechanism 301 and a 3D camera adjustment mechanism 302 for adjusting the positions of the 2D vision inspection camera 33 and the 3D vision inspection camera 34 respectively. The 2D camera adjustment mechanism 301 and the 3D camera adjustment mechanism 302 include a 2D camera linear motor module 303 and a 3D camera linear motor module 304 that can respectively enable the 2D vision inspection camera 33 and the 3D vision inspection camera 34 to move along the length and width directions of the tray conveying track 51 in the horizontal plane.

[0032] At the tray conveying station 32, there is a tray conveying mechanism 5. The tray conveying mechanism 5 includes a tray conveying track 51, and the tray loading position 15 and the tray unloading position 16 are respectively located at the inlet and outlet ends of the tray conveying track 51.

[0033] Among them, the tray conveying mechanism 5 includes a fixed conveying frame 501 and a movable conveying frame 502 that can move towards or away from the fixed conveying frame 501. In order to realize the movement of the movable conveying frame 502, there is also a conveying frame driving mechanism. The conveying frame driving mechanism includes a conveying frame driving motor 516, a conveying frame driving lead screw 517 connected to the conveying frame driving motor 516, and a driving frame 518 connected to the conveying frame driving lead screw 517. The driving frame 518 is fixed on the movable conveying frame 502.

[0034] To further ensure the movement stability of the movable conveying frame 502, the movable conveying frame 502 also includes two movable support plates 519 arranged at both ends of the movable track plate 504 and used for supporting the movable track plate 504. The conveying frame driving mechanism also includes a support plate track 520 arranged under the movable support plate 519 for the movable support plate 519 to slide and a driving frame track 521 arranged under the driving frame 518 for the driving frame 518 to slide.

[0035] The fixed conveying frame 501 and the movable conveying frame 502 respectively include a fixed track plate 503 and a movable track plate 504. The fixed track plate 503 and the movable track plate 504 are arranged in parallel, and the upper ends of the opposite sides are both constructed with tray edge support platforms 505. The tray edge support platforms 505 on the fixed track plate 503 and the tray edge support platforms 505 on the movable track plate 504 together constitute the tray conveying track 51.

[0036] On the fixed track plate 503 and the movable track plate 504 and at the inlet and outlet ends of the tray conveying track 51, there are track guiding plates 506. On the side of the track guiding plate 506, there is a tray edge upper limiting table 507 arranged above the tray edge supporting table 505. The lower end surfaces of the tray edge supporting table 505 and the tray edge upper limiting table 507 together form a tray edge guiding groove 508; the lower end surface of the tray edge upper limiting table 507 includes a horizontal limiting surface 509 parallel to the tray edge supporting table 505 and an inclined guiding surface 510 arranged at the starting end of the horizontal limiting surface 509.

[0037] Under the action of the track guiding plate 506, the pushed tray can be accurately guided onto the tray edge supporting table 505, and under the combined action of the track guiding plate 506 and the tray suction plate 8, it can be ensured that the tray is completely fixed and flat without deformation during the detection process, guaranteeing the accuracy of the detection result.

[0038] The tray conveying mechanism 5 further includes a plurality of moving jaws 52 that can move along the length direction of the tray conveying track 51 and are used to clamp the edge part of the tray. The moving jaw 52 includes two clamping plates 511 that can move relative to each other. The moving jaw 52 near the tray receiving position 16 constitutes a second tray pushing mechanism.

[0039] The moving jaw 52 clamps and transports the tray to different detection stations on the tray conveying track 51. After the detection is completed, the moving jaw 52 pushes the detected products one by one into the empty tray. After the tray is filled, it is transported to the blanking mechanism 12 by the tray gripping mechanism 104 in the tray transport rack 14 of the blanking mechanism 12 for further transportation to subsequent stations.

[0040] In this embodiment, the moving jaw 52 is arranged on the side of the fixed conveying frame 501 and further includes a jaw driving mechanism. The jaw driving mechanism includes a jaw linear motor module 512 whose length direction is arranged along the length direction of the tray conveying track 51. A jaw mounting seat 513 is installed on the jaw linear motor module 512. There are two relatively arranged clamping plate mounting arms 514 on the jaw mounting seat 513 and a mounting arm driving cylinder 515 that can drive the clamping plate mounting arm 514 to move along the width direction of the tray conveying track 51. The two clamping plates 511 are respectively installed on the two clamping plate mounting arms 514 and the two clamping plate mounting arms 514 can move towards or away from each other. The specific movement driving method can adopt a conventional two-way motor or two-way cylinder drive.

[0041] When a defect is detected, an inkjet mark needs to be made on the defective product. Since the chip is small, the positioning requirement is precise, and the material is very thin, when the jaw drags the material over, there may be relative sliding between the jaw and the material. Relying solely on the walking distance of the moving jaw 52 along the X-axis for positioning is inaccurate. Therefore, an inkjet positioning mechanism 7 is designed.

[0042] In this embodiment, an inkjet positioning mechanism 7 is provided at the tray conveying track 51 and is located below the dotting machine 35. The inkjet positioning mechanism 7 includes an inkjet positioning frame 71. An inkjet positioning plate 701 capable of blocking and positioning the tray on the tray conveying track 51 is installed on the inkjet positioning frame 71. The inkjet positioning plate 701 can move up and down in the height direction of the tray conveying track 51 to the upper part or the lower part of the tray. The inkjet positioning frame 71 includes a positioning frame bottom plate 702 and a positioning plate support 703 provided on the positioning frame bottom plate 702. The positioning plate support 703 is slidably arranged on the positioning frame bottom plate 702 in the width direction of the tray conveying track 51. The inkjet positioning plate 701 is arranged on the positioning plate support 703. A vertically arranged fixed plate driving cylinder 704 is fixed on the positioning plate support 703, and the inkjet positioning plate 701 is connected to the piston rod of the fixed plate driving cylinder 704.

[0043] A tray support assembly is further provided on the positioning plate support 703. The tray support assembly includes a tray support rod 522 capable of supporting the bottom of the tray on the tray conveying track 51. The length direction of the tray support rod 522 is arranged along the length direction of the tray conveying track 51, and the upper end surface of the tray support rod 522 is an arc surface.

[0044] The inkjet positioning plate 701 is configured as a U-shaped plate with an open upper end. The inkjet positioning plate 701 is arranged below the tray support rod 522 and can move upward to a position where the tray support rod 522 is inside the inkjet positioning plate 701. The U-shaped plate configuration of the inkjet positioning plate 701 can prevent the tray support rod 522 from blocking the inkjet positioning plate 701 when the inkjet positioning plate 701 moves upward.

[0045] A support limiting plate 705 is fixed on the positioning frame bottom plate 702. A limiting plate long groove 706 arranged along the track width direction is provided on the support limiting plate 705. A plurality of bolt holes 707 arranged at intervals and cooperating with the long groove are provided on the positioning plate support 703. A fastening wrench 708 for relatively fixing and limiting the positioning plate support 703 and the support limiting plate 705 is provided at the bolt holes 707.

[0046] Positioning frame fixing plates 709 are further provided at both ends of the positioning frame bottom plate 702. Fixing plate long grooves 710 vertically arranged for adjusting the installation height of the positioning frame fixing plates 709 are provided on the positioning frame fixing plates 709.

[0047] During the working process of the inkjet positioning mechanism 7, after adjusting the width of the tray conveying track 51, by loosening the fastening wrench 708, the entire positioning plate bracket 703 moves relative to the positioning frame bottom plate 702 to the middle position of the tray conveying track 51. At this time, the inkjet positioning plate 701 and the tray support rod 522 are centered in the tray conveying track 51. Since the tray is relatively thin and has a certain flexibility, the tray support rod 522 supports the middle of the tray, which can prevent the middle of the tray from being concave and deformed during the tray detection process. The upper surface of the tray support rod 522 is configured as an arc surface, which can make the contact between the tray support rod 522 and the lower surface of the tray a line contact, reducing the risk of potential scratching of the product.

[0048] When the product inspection is completed and defective products are found, the inkjet positioning plate 701 is lifted. When the material moves into place, it is blocked in the middle by the inkjet positioning plate 701. The sensor in the inkjet positioning plate 701 detects the position, realizing that the flow direction is hard-limited, ensuring the inkjet accuracy during this process; after the defective part is inkjet-completed, the inkjet positioning plate 701 descends, and the product is transported to the next station.

[0049] In this embodiment, the movement process, movement position, etc. of the movement mechanism are accurately detected through position sensors. For example, displacement sensors are set in the corresponding transmission mechanism or movement mechanism, and the installation position of the displacement sensor is adjusted according to actual needs. The position detection principle is a conventional detection method.

[0050] During the working process of the entire vision detection system in this embodiment, the tray to be detected loaded with materials on the tray conveying track 51 is transported to the 2D vision detection station below the 2D vision detection camera 33 for 2D detection; after the 2D detection is completed, it is then transported to the 3D vision detection station below the 3D vision detection camera 34 for 3D detection;

[0051] After the vision detection is completed, if it is a NG product, it is marked with ink at the NG position by the dot ink machine 35 and then transported to the blanking station; if it is a qualified product, it is directly transported to the blanking station.

[0052] It is easy to understand that those skilled in the art can combine, split, recombine, etc. the embodiments of the present application based on one or several embodiments provided by the present application to obtain other embodiments, and these embodiments do not exceed the protection scope of the present application.

[0053] In summary, the above are only the preferred embodiments of the present invention, and all equivalent changes and modifications made according to the scope of the patent application of the present invention shall fall within the scope covered by the patent of the present invention.

Claims

1. A 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB, comprising a visual inspection station (31) and a tray conveying station (32), wherein a tray conveying mechanism (5) is provided at the tray conveying station (32), characterized in that: The tray conveying mechanism (5) comprises a tray conveying track (51), a 2D visual inspection camera (33) and a 3D visual inspection camera (34) are sequentially arranged at a visual inspection station (31) along the conveying direction of the tray conveying track (51), and also comprises two tray suction plates (8) capable of moving up and down and used for adsorbing the trays on the tray conveying track (51), the two tray suction plates (8) are both arranged below the tray conveying track (51) and are respectively arranged corresponding to the 2D visual inspection camera (33) and the 3D visual inspection camera (34), and the tray suction plate (8) corresponding to the 2D visual inspection camera (33) is made of a transparent material and is provided with a backlight source below.

2. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 1, characterized in that: A 2D camera adjustment mechanism (301) and a 3D camera adjustment mechanism (302) are also provided at the visual inspection station (31) for adjusting the positions of the 2D visual inspection camera (33) and the 3D visual inspection camera (34), respectively. The 2D camera adjustment mechanism (301) and the 3D camera adjustment mechanism (302) include a 2D camera linear motor module (303) and a 3D camera linear motor module (304) that can respectively enable the 2D visual inspection camera (33) and the 3D visual inspection camera (34) to move in a horizontal plane along the length and width directions of the tray conveying track (51).

3. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 1, characterized in that: The tray conveying mechanism (5) comprises a fixed conveying frame (501) and a movable conveying frame (502) capable of moving toward or away from the fixed conveying frame (501); the fixed conveying frame (501) and the movable conveying frame (502) respectively comprise a fixed track plate (503) and a movable track plate (504); the fixed track plate (503) and the movable track plate (504) are arranged in parallel and the upper ends of the opposite sides are both configured with a tray edge support (505); the tray edge support (505) on the fixed track plate (503) and the tray edge support (505) on the movable track plate (504) together constitute a tray conveying track (51).

4. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 3, characterized in that: Track guide plates (506) are provided on the fixed track plate (503) and the movable track plate (504) and at the inlet and outlet ends of the tray conveying track (51); the side of the track guide plate (506) is provided with a tray edge upper limit platform (507) arranged above the tray edge support platform (505); the tray edge support platform (505) and the lower end surface of the tray edge upper limit platform (507) together form a tray edge guide groove (508); the lower end surface of the tray edge upper limit platform (507) includes a horizontal limit surface (509) parallel to the tray edge support platform (505) and an inclined guide surface (510) arranged at the starting end of the horizontal limit surface (509).

5. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 3, characterized in that: The tray conveying mechanism (5) further comprises a movable clamping jaw (52) capable of moving along the length direction of the tray conveying track (51) and used for clamping the edge of the tray. The movable clamping jaw (52) comprises two clamping plates (511) capable of relative movement.

6. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 1, characterized in that: An inkjet positioning mechanism (7) is provided at the tray conveying track (51), the inkjet positioning mechanism (7) comprising an inkjet positioning frame (71), an inkjet positioning plate (701) being mounted on the inkjet positioning frame (71) and being capable of blocking and positioning the tray on the tray conveying track (51), the inkjet positioning plate (701) being capable of moving up and down along the height direction of the tray conveying track (51) to the upper part or the lower part of the tray; the inkjet positioning frame (71) comprising a positioning frame bottom plate (702) and a positioning plate bracket (703) arranged on the positioning frame bottom plate (702), the positioning plate bracket (703) being slidably arranged on the positioning frame bottom plate (702) along the width direction of the tray conveying track (51), and the inkjet positioning plate (701) being arranged on the positioning plate bracket (703).

7. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 6, characterized in that: A material tray support assembly is also provided on the positioning plate bracket (703), and the material tray support assembly comprises a material tray support rod (522) capable of supporting the bottom of the material tray on the material tray conveying track (51); the length direction of the material tray support rod (522) is arranged along the length direction of the material tray conveying track (51), and the upper end surface of the material tray support rod (522) is an arc surface.

8. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 6, characterized in that: The inkjet positioning plate (701) is constructed in the shape of a U-shaped plate with an open upper end. The inkjet positioning plate (701) is arranged below the material tray support rod (522) and can move upwards until the material tray support rod (522) is located inside the inkjet positioning plate (701).

9. The 2D and 3D visual inspection mechanism for a chip DB and a gold wire WB according to claim 6, characterized in that: A bracket limiting plate (705) is fixed on the positioning frame bottom plate (702); the bracket limiting plate (705) is provided with a limiting plate long groove (706) arranged along the width direction of the track; the positioning plate bracket (703) is provided with a plurality of bolt holes (707) arranged at intervals and matched with the long groove; and a tightening wrench (708) for achieving relative fixed limiting of the positioning plate bracket (703) and the bracket limiting plate (705) is provided at the bolt hole (707).

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