Crystal wafer chamfering device

Abstract

The utility model discloses a chamfering device for a crystal wafer. The chamfering device comprises a base station and a top plate, the lifting mechanism is used for lifting the top plate; the fixing mechanism is used for fixing the crystal wafer; the chamfering mechanism is used for chamfering the crystal wafer; wherein the fixing mechanism comprises two sets of swing arms arranged at the bottom of the base table, clamping blocks are arranged at the upper ends of the two sets of swing arms, the two sets of clamping blocks are correspondingly arranged, and notches for the swing arms to move are formed in the base table; the chamfering mechanism comprises a chamfering grinding wheel rotationally installed at the bottom of the top plate and a motor fixedly installed at the bottom of the top plate, and the chamfering grinding wheel is driven by the motor and located over the middle of the two clamping blocks. The movable plate with the driving teeth is driven by the air cylinder to sequentially drive the large gear and the small gear, so that the swing arm is driven to enable the two clamping blocks to clamp and fix a crystal wafer and then conduct chamfering operation, the clamping and fixing capacity is high, and the precision and stability of chamfering machining of the crystal wafer are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal wafer processing equipment, in particular to a crystal wafer chamfering device. Background Technique

[0002] Crystal wafers, especially silicon crystal wafers, are key raw materials in semiconductor manufacturing. A silicon crystal wafer is a thin slice of high-purity crystalline silicon, also known as a substrate or a wafer. As a substrate for microelectronic devices, the silicon crystal wafer is particularly useful in constructing electronic circuits due to its conductivity and economy.

[0003] The crystal wafer chamfering device is mainly used to chamfer the edge of the crystal wafer to remove the sharp edge, which helps to improve the reliability and safety of the device. After retrieval, the Chinese patent application number is: CN201510064241.7, which discloses a crystal wafer chamfering device, including a workbench, a wafer fixing component and a grinding component. Among them, the above workbench is an L-shaped support structure, which is composed of a horizontal support block and a vertical support block; the above wafer fixing component is arranged on the horizontal support block, and the wafer to be processed is placed on the wafer fixing component and pushed horizontally to the vertical support block; the above grinding component is arranged on the vertical support block, and the grinding component drives the grinding wheel to move vertically along the vertical support block so as to push the grinding wheel to the wafer to be processed to grind and chamfer the wafer. The invention has a simple structure, is convenient and fast to operate, has high processing accuracy and high production efficiency.

[0004] In the above technical solution, the suction cup is used as the fixing component for fixing the crystal wafer. However, in actual use, the suction cup cannot provide a large enough adsorption force. When the crystal wafer contacts the high-speed rotating grinding wheel, the crystal wafer is prone to deflection and displacement, and even directly thrown out of the processing area, making the processing of the crystal wafer unstable and inconvenient. Therefore, we need to propose a crystal wafer chamfering device. Content of the Utility Model

[0005] The purpose of the utility model is to provide a crystal wafer chamfering device, which has a simple structure and is convenient to use. The moving plate with driving teeth is driven by a cylinder to drive the large and small gears in sequence, so as to drive the swing arm to clamp and fix the crystal wafer with two clamping blocks and then perform chamfering operations. It has a strong clamping and fixing ability, thereby improving the accuracy and stability of crystal wafer chamfering processing, and ensuring the quality of crystal wafer chamfering processing, so as to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A crystal wafer chamfering device, comprising:

[0008] A base and a top plate;

[0009] Lifting mechanism for lifting the top plate;

[0010] Fixing mechanism for fixing the crystal wafer;

[0011] And chamfering mechanism for chamfering the crystal wafer;

[0012] Among them, the fixing mechanism includes two groups of swing arms arranged at the bottom of the base, clamping blocks are arranged at the upper ends of the two groups of swing arms, the two groups of clamping blocks are arranged correspondingly, and a notch for the swing arms to move is formed on the base;

[0013] The chamfering mechanism includes a chamfering grinding wheel rotatably installed at the bottom of the top plate and a motor fixedly installed at the bottom of the top plate. The chamfering grinding wheel is driven by the motor, and the chamfering grinding wheel is directly above the middle of the two groups of clamping blocks.

[0014] Preferably, the lifting mechanism includes four groups of electric push rods, the electric push rods are symmetrically installed at the bottom of the base, and the four groups of electric push rods are set synchronously.

[0015] Preferably, the top plate is installed with a grinding wheel base through fixing screws, the grinding wheel is rotatably installed on the grinding wheel base, and the output shaft of the motor is fixedly connected to a rotating shaft on one side of the grinding wheel through a coupling.

[0016] Preferably, a support plate is arranged at the bottom of the base, a first shaft rod and a second shaft rod are respectively installed on the support plate, and both the first shaft rod and the second shaft rod are rotatably installed on the same side of the support plate through bearings.

[0017] Preferably, the two groups of swing arms are respectively fixedly welded to the first shaft rod and the second shaft rod, a large gear is arranged at the end of the first shaft rod, a small gear is arranged at the end of the second shaft rod, and the large gear and the small gear are meshed.

[0018] Preferably, a cylinder is fixedly installed on one side of the support plate, the end of the telescopic rod of the cylinder is connected with a moving plate, a driving tooth is arranged in the middle of the top of the moving plate, and the driving tooth is meshed with the large gear.

[0019] Preferably, a guide sleeve is connected to the other side of the support plate, and the moving plate is slidably inserted into the inside of the guide sleeve.

[0020] Compared with the prior art, the beneficial effects of the present utility model are:

[0021] The utility model fixes a crystal wafer by arranging a base and a top plate, and arranging a fixing mechanism including a swing arm and a clamping block on the base, arranging a chamfering mechanism including a chamfering grinding wheel and a motor on the top plate, and lifting the top plate by an electric push rod on the base. The device has a simple structure and is convenient to use. The moving plate with driving teeth is driven by a cylinder to drive a large gear and a small gear in sequence, so as to drive the swing arm to clamp and fix the crystal wafer by two clamping blocks and then perform chamfering operation. It has a strong clamping and fixing ability, thereby improving the accuracy and stability of the chamfering process of the crystal wafer and ensuring the quality of the chamfering process of the crystal wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of the utility model;

[0023] Figure 2 is a schematic structural diagram of the chamfering mechanism of the utility model;

[0024] Figure 3 is a schematic structural diagram of the support plate of the utility model;

[0025] Figure 4 is a schematic structural diagram of the fixing mechanism of the utility model.

[0026] In the figure: 1, base; 2, top plate; 3, electric push rod; 4, grinding wheel seat; 5, chamfering grinding wheel; 6, motor; 7, support plate; 8, cylinder; 9, moving plate; 10, driving teeth; 11, first shaft; 12, second shaft; 13, large gear; 14, small gear; 15, swing arm; 16, clamping block; 17, notch; 18, guide sleeve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0028] Please refer to Figures 1-4 , the present utility model provides a technical solution:

[0029] A crystal wafer chamfering device, comprising:

[0030] a base 1 and a top plate 2;

[0031] Fixing mechanism for fixing a crystal wafer; wherein, the fixing mechanism includes two groups of swing arms 15 arranged at the bottom of the base 1, clamping blocks 16 are arranged at the upper ends of the two groups of swing arms 15, the two groups of clamping blocks 16 are arranged correspondingly, and a notch 17 for the swing arms 15 to move is formed on the base 1; a support plate 7 is arranged at the bottom of the base 1, a first shaft rod 11 and a second shaft rod 12 are respectively installed on the support plate 7, and both the first shaft rod 11 and the second shaft rod 12 are rotatably installed on the same side of the support plate 7 through bearings. The two groups of swing arms 15 are respectively fixedly welded to the first shaft rod 11 and the second shaft rod 12, a large gear 13 is arranged at the end of the first shaft rod 11, a small gear 14 is arranged at the end of the second shaft rod 12, and the large gear 13 and the small gear 14 are meshed. A cylinder 8 is fixedly installed on one side of the support plate 7, the end of the telescopic rod of the cylinder 8 is connected with a moving plate 9, a driving tooth 10 is arranged in the middle of the top of the moving plate 9, and the driving tooth 10 and the large gear 13 are meshed.

[0032] During actual use, by starting the cylinder 8 to drive the moving plate 9 to move, since the driving tooth 10 on the moving plate 9 is meshed with the large gear 13, and the large gear 13 is meshed with the small gear 14, the large and small gears 14 can be driven to rotate. At this time, the swing arms 15 on the first shaft rod 11 and the second shaft rod 12 can rotate closer or farther away, so as to drive the clamping blocks 16 to clamp or loosen the crystal wafer, thus playing a good fixing role. When chamfering one side of the crystal wafer is completed, the crystal wafer is loosened, the side is changed, and then clamping and chamfering are carried out again.

[0033] Please refer to Figures 3-4 :

[0034] And a chamfering mechanism for chamfering the crystal wafer;

[0035] The chamfering mechanism includes a chamfering grinding wheel 5 rotatably installed at the bottom of the top plate 2 and a motor 6 fixedly installed at the bottom of the top plate 2. The chamfering grinding wheel 5 is driven by the motor 6, and the chamfering grinding wheel 5 is located directly above the middle of the two groups of clamping blocks 16. The top plate 2 is installed with a grinding wheel base 4 through fixing screws, the grinding wheel is rotatably installed on the grinding wheel base 4, and the output shaft of the motor 6 is fixedly connected to the rotating shaft on one side of the grinding wheel through a coupling.

[0036] A lifting mechanism for lifting the top plate 2; the lifting mechanism includes four groups of electric push rods 3, the electric push rods 3 are symmetrically installed at the bottom of the base 1, and the four groups of electric push rods 3 are set synchronously.

[0037] During actual use, after the crystal wafer is fixed by the fixing mechanism, the motor 6 is started to drive the chamfering grinding wheel 5 to rotate, and the electric push rods 3 are started to lower the height of the top plate 2 until the chamfering grinding wheel 5 contacts the edge of the crystal wafer, so as to carry out chamfering operation. The depth of chamfering can also be adjusted through the lifting mechanism.

[0038] It has a simple structure and is easy to use. The cylinder 8 drives the moving plate 9 with the driving teeth 10 to drive the large and small gears 14 in sequence, thereby driving the swing arm 15 to clamp and fix the crystal wafer with the two clamping blocks 16, and then chamfering operation is carried out. It has a strong clamping and fixing ability, thereby improving the accuracy and stability of the crystal wafer chamfering process and ensuring the quality of the crystal wafer chamfering process.

[0039] Among them, four groups of electric push rods 3 are synchronously set, and the model used is LX600. Its corresponding parameters are: rated power ≤ 55W, voltage 24V, stroke 30 - 500mm, speed 5 - 30mm / s, maximum load force 6000N, with built-in limit switch;

[0040] The model of the motor 6 used is GM15BYS, and the corresponding parameters are: voltage 5V, wire resistance 300Ω ± 10%, step angle 18°, starting response frequency 900PPSmin, introduced torque 6gf-cm min;

[0041] The model of the cylinder 8 used is SC32, and its parameters are as follows: the diameter of the piston rod is 12mm, the external thread of the piston rod is M10 * 1.25, the thread of the air inlet hole is 1 / 8 1 minute, the thrust is 28KG, the working pressure range is 1 - 9Kgf / cm2, the working speed range is 50 - 800mm / s, and the stroke is 400mm.

[0042] In addition, please refer to Figure 4 :

[0043] On the other side of the support plate 7, a guide sleeve 18 is connected, and the moving plate 9 is slidably inserted into the inside of the guide sleeve 18.

[0044] The setting of the guide sleeve 18 on the support plate 7 can guide and limit the moving plate 9, so that the moving plate 9 always remains on the same straight line during the displacement process, improving the stability during the use of the equipment.

[0045] Among them, in order to ensure the convenience of the application, a control panel can be installed on the top plate 2 to control and coordinate the work of each component. The control method is controlled by a PLC controller built in the control panel. The control circuit of the PLC controller can be realized by simple programming by those skilled in the art, which belongs to the common knowledge in the art. And this application document is mainly used to protect the mechanical device, so the control method and circuit connection will not be explained in detail in this application document.

[0046] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A crystal plate chamfering device, characterized in that: include: A base (1) and a top plate (2); A lifting mechanism for lifting the top plate (2); A fixing mechanism for fixing the crystal piece; and a chamfering mechanism for chamfering the crystal sheet; The fixing mechanism comprises two groups of swing arms (15) arranged at the bottom of the base (1), the upper ends of the two groups of swing arms (15) are provided with clamping blocks (16), the two groups of clamping blocks (16) are arranged correspondingly, and the base (1) is provided with a notch (17) for the swing arms (15) to move; The chamfering mechanism comprises a chamfering grinding wheel (5) rotatably mounted on the bottom of the top plate (2) and a motor (6) fixedly mounted on the bottom of the top plate (2), wherein the chamfering grinding wheel (5) is driven by the motor (6) and is located directly above the middle of the two groups of clamping blocks (16).

2. A crystal plate chamfering device according to claim 1, characterized in that: The lifting mechanism comprises four groups of electric push rods (3), which are symmetrically mounted on the bottom of the base (1), and the four groups of electric push rods (3) are synchronously arranged.

3. A crystal plate chamfering device according to claim 1, characterized in that: The top plate (2) is mounted with a grinding wheel seat (4) via fixing screws, and the grinding wheel is rotatably mounted on the grinding wheel seat (4).

4. A crystal plate chamfering device according to claim 3, characterized in that: The output shaft of the motor (6) is fixedly connected to a rotating shaft on one side of the grinding wheel through a coupling.

5. The crystal plate chamfering device according to claim 1, characterized in that: A support plate (7) is provided at the bottom of the base (1), and a first shaft rod (11) and a second shaft rod (12) are respectively mounted on the support plate (7), and the first shaft rod (11) and the second shaft rod (12) are both rotatably mounted on the same side of the support plate (7) via bearings.

6. A crystal plate chamfering device according to claim 5, characterized in that: The two groups of swing arms (15) are respectively fixedly welded to a first shaft (11) and a second shaft (12); a large gear (13) is arranged at the end of the first shaft (11), and a small gear (14) is arranged at the end of the second shaft (12); the large gear (13) and the small gear (14) are meshed.

7. A crystal plate chamfering device according to claim 6, characterized in that: A cylinder (8) is fixedly mounted on one side of the support plate (7); the end of the telescopic rod of the cylinder (8) is connected to a movable plate (9); a driving tooth (10) is arranged at the middle section of the top of the movable plate (9); and the driving tooth (10) and the large gear (13) are meshed.

8. The crystal plate chamfering device according to claim 7, characterized in that: The other side of the support plate (7) is connected to a guide sleeve (18), and the movable plate (9) is slidably inserted into the interior of the guide sleeve (18).

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