Progressive load loading device

Abstract

The utility model discloses a progressive load loading device, which is used for measuring the thickness of a deformable bending material, and comprises a fixed seat, a sensor fixed at the center of the top surface of the fixed seat, and an external structure connected and fixed at the bottom surface of the fixed seat; the plurality of elastic reset pieces are uniformly distributed and fixed on the front surface of the fixed seat by taking the sensor as the center; the plurality of guide pieces penetrate through the elastic reset pieces in a one-to-one correspondence manner, and the height of the guide pieces is smaller than or equal to that of the sensors; the contact pad is fixed on the top of the elastic reset piece, and the top surface of the contact pad can form surface contact with the deformable bending material to be measured. According to the utility model, progressive load loading can be carried out on the bent material, and inaccurate measurement or damage to the material caused by distortion of the elastic reset piece in the progressive load loading process can be avoided. Moreover, compared with the prior art, the material measuring device has longer service life, so that the material measuring cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a progressive load loading device for measuring the thickness of deformable and bendable materials. Background Art

[0002] During the semiconductor production process, it is necessary to measure the thickness of materials. When measuring the thickness of materials in the form of deformable and bendable objects, it is necessary to accurately measure the material thickness and avoid rigid damage to the material caused by external stress.

[0003] In the prior art, when measuring the thickness of materials in the form of deformable and bendable objects, an external force is applied to the material, and the material is slowly brought into surface contact with the back plate, and the thickness is measured after the material is slowly forced into a straight state. In this process, great care must be taken to avoid damaging the material by applying too much force. Therefore, elastic members are usually used to resist the material, and the force is gradually increased (progressive load loading) to avoid rigid damage to the material.

[0004] In actual use, it is an extremely difficult process to measure the thickness through a sensor after the material is completely stopped and formed into a straight state. When a conventional spring is used as the elastic member, the spring is prone to distortion due to uneven force, resulting in inaccurate measurement or even material damage. Especially during the repeated use of the spring, the spring fatigue is uneven and it is more likely to be distorted, resulting in inaccurate measurement or even increasing the risk of material damage.

[0005] There is also a solution in the industry to use a precise opposed distance measuring sensor to measure the thickness of materials, but it is not applicable to materials with specular reflection. Summary of the Utility Model

[0006] A series of simplified concepts are introduced in the summary of the utility model. These simplified concepts are simplified from the prior art in this field and will be further described in detail in the specific implementation part. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0007] The technical problem to be solved by the utility model is to provide a progressive load loading device for measuring the thickness of deformable and bendable materials.

[0008] To solve the above technical problem, the utility model provides a progressive load loading device for measuring the thickness of deformable and bendable materials, including:

[0009] A fixed seat 1, with a sensor 2 fixedly installed at the center of its top surface, and its bottom surface is used to connect and fix an external structure;

[0010] A plurality of elastic reset members 3 are evenly distributed and fixed on the front surface of the fixed seat 1 with the sensor 2 as the center;

[0011] A plurality of guide members 4 are respectively installed in each of the elastic reset members 3, and the height of the guide member 4 is less than or equal to the height of the sensor 2;

[0012] A contact pad 5 is fixed on the top of the elastic reset member 3, and its top surface can form a surface contact with the deformable and bendable material to be measured.

[0013] Preferably, further improve the progressive load loading device, and the contact pad 5 does not deform under pressure at normal temperature.

[0014] Preferably, further improve the progressive load loading device, and the contact pad 5 is made of polyether ether ketone material.

[0015] Preferably, further improve the progressive load loading device, and the contact pad 5 is formed into a cylinder.

[0016] Preferably, further improve the progressive load loading device, and a chamfer is formed at the top edge of the contact pad 5, and the chamfer can avoid hard damage to the material during contact.

[0017] Preferably, further improve the progressive load loading device, and further include:

[0018] An external connecting member, which forms the fixed seat 1 and is used to connect an external structure.

[0019] Preferably, further improve the progressive load loading device, and further include:

[0020] A flexible elastic pre-tightening member 6 is arranged in the elastic reset member 3 around the guide member 4, one end of which is connected to the bottom surface of the fixed contact pad 5, and the other end of which is connected to the top surface of the fixed seat 1;

[0021] When installed in place, the elastic reset member 3 is pre-compressed, the elastic reset member 3 pulls the flexible elastic pre-tightening member 6 upward, and the flexible elastic pre-tightening member is in a stretched state and pulls the contact pad 5 downward;

[0022] At the same time, the elastic reset member 3 pushes the contact pad 5 upward to make the contact pad 5 form a pre-tightening and keep upright.

[0023] Preferably, further improve the progressive load loading device, and the number of the elastic reset members 3 is 4.

[0024] The working principle and technical effect of the present utility model are as follows;

[0025] Reference Figure 1As shown, when measuring the material thickness, the contact pad of the elastic reset member of the present invention is brought into contact with the bent part of the material. Then, it is possible to choose to gradually apply pressure in the reverse direction to the bent position of the material, or apply pressure to the fixed seat to push the present invention towards the material. In either case, the elastic reset member is compressed. Taking the spring as an example, as the compression amount increases, the elastic force gradually increases. During the compression process of the spring, it is guided by the guide member to avoid distortion until the material is stressed to form a straight state. For example, the bent part of the material can be pressed by a robot, or the material can be pressed against the back plate to press the material, thereby making the material form a straight state, and then the sensor is activated to measure the material thickness.

[0026] The present invention can perform progressive load loading on the bent material, avoiding measurement inaccuracies or damage to the material caused by the distortion of the elastic reset member during the progressive load loading process. Moreover, the present invention has a longer service life compared with the prior art, thereby reducing the material measurement cost. Brief Description of the Drawings

[0027] The drawings of the present invention are intended to show the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the present invention, supplementing the description in the specification. However, the drawings of the present invention are schematic diagrams not drawn to scale, and thus may not be able to accurately reflect the precise structure or performance characteristics of any given embodiment. The drawings of the present invention should not be construed as limiting or restricting the scope of the numerical values or properties covered by the exemplary embodiments according to the present invention. The following further describes the present invention in detail in conjunction with the drawings and specific embodiments:

[0028] Figure 1 It is a reference diagram of the usage state of the present invention.

[0029] Figure 2 It is a schematic diagram of the overall structure of the present invention.

[0030] Figure 3 It is a schematic diagram of the arrangement of the flexible elastic preloading member in the third embodiment of the present invention.

[0031] Description of the Reference Numerals in the Drawings

[0032] Fixed seat 1

[0033] Sensor 2

[0034] Elastic reset member 3

[0035] Multiple guide members 4

[0036] Contact pad 5

[0037] Flexible elastic preloading member 6

[0038] Robot pressing arm 7

[0039] Material to be measured8. DETAILED DESCRIPTION

[0040] The following is an explanation of the implementation of the present utility model through specific specific embodiments. Those skilled in the art can fully understand other advantages and technical effects of the present utility model from the contents disclosed in this specification. The utility model can also be implemented or applied through different specific implementations, and the details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without deviating from the general design concept of the utility model. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present utility model can be implemented in a variety of different forms and should not be interpreted as being limited to the specific embodiments described here. It should be understood that these embodiments are provided to make the disclosure of the present utility model thorough and complete, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "coupled" to another element, the element can be directly connected or coupled to another element, or there can be an intermediate element. The difference is that when an element is referred to as "directly connected" or "directly coupled" to another element, there is no intermediate element. In all figures, the same figure mark always represents the same element

[0041] First embodiment;

[0042] refer to Figure 2 As shown, the utility model provides a progressive load loading device, which is used for measuring the thickness of deformable and bendable materials, and is characterized by comprising:

[0043] A fixing seat 1, the center of the top surface of which is used to fix the sensor 2, and the bottom surface of which is used to connect and fix the external structure; the shape of the fixing seat 1 is not limited, but is preferably disc-shaped;

[0044] Sensor 2 is a contact displacement sensor: including inductive, capacitive, potentiometer and Hall displacement sensors, which are usually used for contact thickness measurement. In order to continuously measure the thickness of moving materials, a rolling contact can be installed on the movable end of the displacement sensor to reduce wear; Figure 2 The middle sensor and elastic reset piece are not installed, and only the reserved installation hole is shown at the sensor position;

[0045] A plurality of elastic reset members 3 are evenly distributed and fixed on the front side of the fixing base 1 with the sensor 2 as the center;

[0046] A plurality of guide members 4 are installed in the elastic reset members 3 one by one; the height of the guide members 4 is less than or equal to the height of the sensor 2;

[0047] The contact pad 5 is fixed on the top of the elastic reset member 3, and its top surface can form a surface contact with the deformable and bendable material to be measured; the contact pad 5 does not deform under pressure at normal temperature.

[0048] Preferably, the contact pad 5 is made of polyetheretherketone material to avoid static electricity.

[0049] Second embodiment;

[0050] Continue to refer to Figure 2 As shown, the present invention provides a progressive load loading device for measuring the thickness of a deformable and bendable material, which is characterized in that it includes:

[0051] The fixed seat 1 has a sensor 2 fixed at the center of its top surface, and its bottom surface is used to connect and fix the external structure; the fixed seat 1 is formed into a regular hexagonal disk shape, and the diameter of the exemplary regular hexagonal disk shape is 25 mm and the height is 10 mm;

[0052] The sensor 2 is a contact displacement sensor: including inductive, capacitive, potentiometric and Hall displacement sensors, which are usually used for contact thickness measurement. In order to continuously measure the thickness of the moving material, a rolling contact can be installed on the movable end of the displacement sensor to reduce wear;

[0053] A plurality of elastic reset members 3, in this embodiment, springs are selected, and the diameter of the exemplary springs is uniformly distributed around the sensor 2 and fixed on the front surface of the fixed seat 1;

[0054] A plurality of guide members 4 are respectively inserted into each elastic reset member 3; the height of the guide member 4 is less than or equal to the height of the sensor 2;

[0055] The contact pad 5 is fixed on the top of the elastic reset member 3, and its top surface can form a surface contact with the deformable and bendable material to be measured; the contact pad 5 does not deform under pressure at normal temperature.

[0056] Preferably, the contact pad 5 is made of polyetheretherketone material to avoid static electricity.

[0057] Preferably, the contact pad 5 is formed into a cylinder, and a chamfer is formed at the top edge of the contact pad 5.

[0058] To further improve the second embodiment, it further includes an external connecting member, which forms the fixed seat 1 and is used to connect the external structure.

[0059] Third embodiment;

[0060] Refer to Figure 3 As shown, the third embodiment of the present invention is a further improvement based on the above first embodiment or second embodiment. The same parts will not be repeated, and it further includes:

[0061] The flexible elastic pre-tightening member 6, such as multiple elastic ropes, is arranged around the guiding member 4 in the elastic resetting member 3. One end of the flexible elastic pre-tightening member 6 is connected to the bottom surface of the fixed contact pad 5, and the other end is connected to the top surface of the fixed seat 1;

[0062] When installed in place, the flexible elastic pre-tightening member 6 is in a stretched state, pulling down the contact pad 5, and the contact pad 5 presses down the elastic resetting member 3;

[0063] At the same time, the elastic resetting member 3 pushes up the contact pad 5 to make the contact pad 5 form a pre-tightening and remain upright.

[0064] Optionally, the number of the elastic resetting members 3 is four.

[0065] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. It will also be understood that terms such as those defined in a general dictionary should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and should not be interpreted in an ideal or overly formal sense unless expressly defined herein.

[0066] The above has described the present utility model in detail through specific embodiments and examples, but these do not constitute a limitation to the present utility model. Without departing from the principle of the present utility model, those skilled in the art can also make many modifications and improvements, which should also be regarded as the protection scope of the present utility model.

Claims

1. A progressive load loading device for measuring the thickness of deformable and bendable materials, characterized in that: include: A fixing seat (1), the center of the top surface of which fixes the sensor (2), and the bottom surface of which is used to connect and fix an external structure; A plurality of elastic reset members (3) are evenly distributed and fixed on the front side of the fixing seat (1) with the sensor (2) as the center; A plurality of guide members (4) are installed in the elastic reset members (3) in a one-to-one correspondence, and the height of the guide members (4) is less than or equal to the height of the sensor (2); The contact pad (5) is fixed on the top of the elastic reset member (3), and its top surface can form surface contact with the deformable and bendable material to be measured.

2. The progressive load applying device according to claim 1, characterized in that: The contact pad (5) does not deform under pressure at room temperature.

3. The progressive load applying device according to claim 2, characterized in that: The contact pad (5) is made of polyetheretherketone material.

4. The progressive load applying device according to claim 2, characterized in that: The contact pad (5) is formed as a cylinder.

5. The progressive load applying device according to claim 4, characterized in that: The top edge of the contact pad (5) is formed with a chamfer.

6. The progressive load applying device according to claim 1, characterized in that: Also includes: An external connecting piece forms a fixing seat (1) for connecting to an external structure.

7. The progressive load applying device according to any one of claims 1 to 6, characterized in that: Also includes: A flexible elastic pre-tightening member (6) is arranged in the elastic reset member (3) and around the guide member (4), one end of which is connected to the bottom surface of the fixed contact pad (5) and the other end of which is connected to the top surface of the fixed fixing seat (1); When installed in place, the elastic reset member (3) is pre-compressed, the elastic reset member (3) pulls the flexible elastic pre-tightening member (6) upwards, and the flexible elastic pre-tightening member is in a stretched state and pulls the contact pad (5); At the same time, the elastic reset member (3) pushes up the contact pad (5), so that the contact pad (5) is pre-tightened and remains upright.

8. The progressive load applying device according to any one of claims 1 to 6, characterized in that: The number of elastic reset members (3) is 4.

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