Film thickness measuring and sampling equipment

Abstract

The utility model discloses a film thickness measuring and sampling device, which relates to the technical field of thickness measuring devices, and adopts the technical scheme that the film thickness measuring and sampling device comprises a film measuring device, the film measuring device comprises a base, a measuring base and a vertical plate are fixedly arranged at the top of the base, and a through groove and an obstacle avoidance groove are formed in the vertical plate; the film thickness measuring and sampling equipment has the advantages that the measuring instrument probe is driven by the connecting plate to move downwards, so that the measuring instrument probe presses a film downwards, the thickness of the film is measured, the thickness of the film is measured through relative rotation of the second rubber roller and the first rubber roller, the thickness of the film is measured, and the thickness of the film is measured. Therefore, the film between the first rubber roller and the second rubber roller moves towards the same direction, the test area of the film is changed, the purpose of automatically changing the position to be tested of the film is achieved, a probe of a measuring instrument does not need to be frequently and manually lifted, and operation of operators is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of thickness measuring devices, and particularly relates to a sampling device for measuring the thickness of a thin film. Background Art

[0002] During the production and manufacturing process of a thin film, it is necessary to measure the thickness of the thin film. A film thickness tester is often used for testing. To prevent the singularity of measurement data, the thin film is often measured multiple times, and multiple data are sampled to improve the measurement accuracy.

[0003] When the existing film thickness tester moves the thin film to measure the next data, it is necessary to lift the measurement probe, and then move the thin film. When a large amount of data needs to be measured, it is necessary for the operator to frequently lift the probe, which causes inconvenience to the operator. Summary of the Utility Model

[0004] Therefore, the utility model provides a sampling device for measuring the thickness of a thin film. Through the cooperation of a thin film moving component and a connecting unit, the problem that when a large amount of data needs to be measured, it is necessary for the operator to frequently lift the probe, which causes inconvenience to the operator, is solved.

[0005] To achieve the above object, the utility model provides the following technical solution: A sampling device for measuring the thickness of a thin film, including a thin film measuring device. The thin film measuring device includes a base. A measuring base and a vertical plate are fixedly arranged on the top of the base. A through groove and an obstacle avoidance groove are formed inside the vertical plate. A fixing rod is fixedly arranged on the top of the vertical plate. A film thickness measuring instrument body is fixedly arranged outside the fixing rod. A measuring instrument probe is inserted into the film thickness measuring instrument body. A thin film moving component is arranged outside the vertical plate. The thin film moving component includes an electric push rod. A connecting rod is fixedly connected to the bottom of the electric push rod. A motor is fixedly arranged on one side of the connecting rod. A rotating shaft I is fixedly arranged at the output end of the motor. A rubber roller I is fixedly sleeved outside the rotating shaft I. Two friction rollers I and an anti-warping disc are respectively fixedly sleeved outside the rotating shaft I. A rotating shaft II is arranged at the bottom of the rotating shaft I. A rubber roller II is fixedly sleeved outside the rotating shaft II. Two friction rollers II are fixedly sleeved outside the rotating shaft II. A connecting unit is arranged at the top of the connecting rod.

[0006] Preferably, the connecting unit includes a fixing plate. The fixing plate is fixedly connected to the vertical plate. A fixing shaft is fixedly arranged on one side of the fixing plate. A gear is sleeved outside the fixing shaft. A main rack and a slave rack are respectively arranged on both sides of the gear. A connecting plate is fixedly arranged outside the slave rack. The connecting plate is fixedly sleeved outside the measuring instrument probe.

[0007] Preferably, the electric push rod is fixedly arranged on the top of the vertical plate. The output end of the electric push rod extends into the obstacle avoidance groove and is slidably connected to the top of the obstacle avoidance groove.

[0008] Preferably, the connecting rod is arranged inside the obstacle avoidance groove and is slidably connected to the obstacle avoidance groove.

[0009] Preferably, the first rotating shaft penetrates through the connecting rod and is connected to the connecting rod through a bearing, and the first rotating shaft penetrates through the through groove and is slidably connected to the through groove.

[0010] Preferably, the two anti-warping disks are respectively arranged on both sides of the vertical plate and are rotatably connected to the vertical plate.

[0011] Preferably, the second rotating shaft penetrates through the vertical plate and is connected to the vertical plate through a bearing.

[0012] Preferably, the gear sleeve is arranged outside the fixed shaft and is connected to the fixed shaft through a bearing, and the fixed shaft meshes with the main rack and the secondary rack respectively.

[0013] Preferably, both the main rack and the secondary rack are slidably connected to the fixed plate.

[0014] The embodiments of the present utility model have the following advantages:

[0015] 1. When it is necessary to measure the thickness of the film, start the electric push rod to pull the connecting rod upward. The movement of the connecting rod drives the main rack to move upward. The movement of the main rack makes the secondary rack move downward through the gear. The movement of the secondary rack drives the probe of the measuring instrument to move downward through the connecting plate, so that the probe of the measuring instrument presses down on the film to measure the thickness of the film.

[0016] 2. When the rubber roller 1 and the rubber roller 2 cooperate to clamp the film to be measured, when the first rotating shaft rotates, the second rotating shaft rotates relative to the first rotating shaft through the frictional cooperation between the friction roller 1 and the friction roller 2. Furthermore, the rubber roller 2 rotates relative to the rubber roller 1, so that the film between the rubber roller 1 and the rubber roller 2 moves in the same direction, and then the test area of the film is changed, achieving the purpose of automatically changing the position of the film to be measured, without the need for the operator to frequently manually lift the probe of the measuring instrument, which is convenient for the operator to operate. Description of the Drawings

[0017] In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only exemplary, and for those of ordinary skill in the art, without creative efforts, other implementation drawings can also be obtained according to the provided drawings.

[0018] The structures, proportions, sizes, etc. shown in this specification are only used to match the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the implementation conditions of the present utility model. Therefore, they do not have substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in the present utility model.

[0019] Figure 1 It is the front view three-dimensional diagram of the film moving state provided by the present utility model;

[0020] Figure 2 It is the front view three-dimensional diagram of the film thickness measurement state provided by the present utility model;

[0021] Figure 3 It is the three-dimensional diagram of the film measuring device provided by the present utility model;

[0022] Figure 4 It is the partial explosion three-dimensional diagram provided by the present utility model;

[0023] Figure 5 It is the three-dimensional diagram of the film moving assembly provided by the present utility model;

[0024] Figure 6 It is the explosion three-dimensional diagram of the film moving assembly provided by the present utility model;

[0025] Figure 7 It is the three-dimensional diagram of the connection relationship at the connection unit provided by the present utility model.

[0026] In the figure: 1 film measuring device, 11 base, 12 measuring base, 13 vertical plate, 14 through groove, 15 obstacle avoidance groove, 16 fixed rod, 17 film thickness gauge body, 18 measuring probe, 2 film moving assembly, 21 electric push rod, 22 connecting rod, 23 motor, 231 first rotating shaft, 232 first rubber roller, 233 first friction roller, 234 anti-warping disc, 235 second rotating shaft, 236 second rubber roller, 237 second friction roller, 3 connection unit, 31 fixing plate, 32 main rack, 33 fixed shaft, 34 gear, 35 driven rack, 36 connecting plate. Specific Embodiments

[0027] The following specific embodiments illustrate the implementation manners of the present utility model. Those familiar with this technology can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0028] Referring to the attached Figure 1 -attachment Figure 7 , a film thickness measurement sampling device provided by the present utility model includes a film measurement device 1. The film measurement device 1 includes a base 11. A measurement base 12 and a vertical plate 13 are fixedly provided on the top of the base 11. A through groove 14 and an obstacle avoidance groove 15 are formed inside the vertical plate 13. A fixed rod 16 is fixedly provided on the top of the vertical plate 13. A film thickness measuring instrument body 17 is fixedly provided outside the fixed rod 16. A measuring instrument probe 18 is inserted into the film thickness measuring instrument body 17. A film moving assembly 2 is provided outside the vertical plate 13. The film moving assembly 2 includes an electric push rod 21. A connecting rod 22 is fixedly connected to the bottom of the electric push rod 21. A motor 23 is fixedly provided on one side of the connecting rod 22. A first rotating shaft 231 is fixedly provided at the output end of the motor 23. A first rubber roller 232 is fixedly sleeved outside the first rotating shaft 231. Two first friction rollers 233 and an anti-warping disk 234 are fixedly sleeved outside the first rotating shaft 231 respectively. A second rotating shaft 235 is provided at the bottom of the first rotating shaft 231. A second rubber roller 236 is fixedly sleeved outside the second rotating shaft 235. Two second friction rollers 237 are fixedly sleeved outside the second rotating shaft 235. A connecting unit 3 is provided at the top of the connecting rod 22;

[0029] In this embodiment, in order to achieve the purpose of automatically changing the film position to be measured, when measuring the film thickness, the electric push rod 21 is started to pull the connecting rod 22 upward. The movement of the connecting rod 22 drives the main rack 32 to move upward. The movement of the main rack 32 causes the driven rack 35 to move downward through the gear 34. The movement of the driven rack 35 drives the measuring instrument probe 18 to move downward through the connecting plate 36, so that the measuring instrument probe 18 presses down on the film to measure the film thickness. When the film needs to be replaced, the electric push rod 21 moves downward and cooperates with the connecting unit 3 to make the first rubber roller 232 and the second rubber roller 236 clamp the film to be measured. When the first rotating shaft 231 rotates, the relative rotation of the second rotating shaft 235 and the first rotating shaft 231 is caused by the frictional cooperation of the first friction roller 233 and the second friction roller 237, so that the second rubber roller 236 and the first rubber roller 232 rotate relatively, thereby making the film between the first rubber roller 232 and the second rubber roller 236 move in the same direction, and then changing the test area of the film, achieving the purpose of automatically changing the film position to be measured, without the need for the operator to frequently manually lift the measuring instrument probe 18, which is convenient for the operator to operate;

[0030] Among them, in order to achieve the purpose of controlling the lifting of the probe 18 of the measuring instrument, the following technical solution is adopted in this device: The connecting unit 3 includes a fixing plate 31, the fixing plate 31 is fixedly connected to the vertical plate 13, a fixed shaft 33 is fixedly provided on one side of the fixing plate 31, a gear 34 is sleeved outside the fixed shaft 33, a main rack 32 and a secondary rack 35 are respectively provided on both sides of the gear 34, a connecting plate 36 is fixedly provided outside the secondary rack 35, the connecting plate 36 is fixedly sleeved outside the probe 18 of the measuring instrument, the gear 34 is sleeved outside the fixed shaft 33 and is connected to the fixed shaft 33 through a bearing, the fixed shaft 33 meshes with the main rack 32 and the secondary rack 35 respectively, the main rack 32 and the secondary rack 35 are both slidably connected to the fixing plate 31. Start the electric push rod 21 to pull the connecting rod 22 upward, the movement of the connecting rod 22 drives the main rack 32 to move upward, the movement of the main rack 32 makes the secondary rack 35 move downward through the gear 34, and the movement of the secondary rack 35 drives the probe 18 of the measuring instrument to move downward through the connecting plate 36, so that the probe 18 of the measuring instrument presses down on the film to measure the film thickness. Start the electric push rod 21 to press the connecting rod 22 downward, and the downward movement of the connecting rod 22 makes the probe 18 of the measuring instrument lift upward through the connecting unit 3 to release the pressing on the film;

[0031] Among them, in order to achieve the purpose of moving the film to be measured when the probe 18 of the measuring instrument is lifted, the following technical solution is adopted in this device: The electric push rod 21 is fixedly provided at the top of the vertical plate 13, the output end of the electric push rod 21 extends into the obstacle avoidance groove 15 and is slidably connected to the top of the obstacle avoidance groove 15. The connecting rod 22 is arranged inside the obstacle avoidance groove 15 and is slidably connected to the obstacle avoidance groove 15. The rotating shaft one 231 penetrates through the connecting rod 22 and is connected to the connecting rod 22 through a bearing. The rotating shaft one 231 penetrates through the through groove 14 and is slidably connected to the through groove 14. Two anti-warping disks 234 are respectively arranged on both sides of the vertical plate 13 and are rotatably connected to the vertical plate 13. The rotating shaft two 235 penetrates through the vertical plate 13 and is connected to the vertical plate 13 through a bearing. Start the electric push rod 21 to press the connecting rod 22 downward, the downward movement of the connecting rod 22 makes the probe 18 of the measuring instrument lift upward through the connecting unit 3 to release the pressing on the film, so that the rubber roller one 232 and the rubber roller two 236 cooperate to clamp the film to be measured. At this time, start the motor 23 to rotate counterclockwise. The rotation of the motor 23 drives the rubber roller one 232 to rotate through the connected rotating shaft one 231. When the rotating shaft one 231 rotates, the relative rotation of the rotating shaft two 235 and the rotating shaft one 231 is caused by the frictional cooperation between the friction roller one 233 and the friction roller two 237, and further the relative rotation of the rubber roller two 236 and the rubber roller one 232, so that the film between the rubber roller one 232 and the rubber roller two 236 moves in the same direction, and further the test area of the film is changed.

[0032] The usage process of the present utility model is as follows: When using the present utility model, connect to an external power supply, and control the start of the electric push rod 21 and the motor 23 through the PLC system. When measuring and sampling, first place one side of the thin film to be measured between the first rubber roller 232 and the second rubber roller 236, and make other areas of the thin film under the bottom of the probe 18 of the measuring instrument. When it is necessary to measure the thickness of the thin film, start the electric push rod 21 to pull the connecting rod 22 upward. The movement of the connecting rod 22 drives the main rack 32 to move upward. The movement of the main rack 32 causes the driven rack 35 to move downward through the gear 34. The movement of the driven rack 35 drives the probe 18 of the measuring instrument to move downward through the connecting plate 36, so that the probe 18 of the measuring instrument presses down on the thin film to measure the thickness of the thin film. When it is necessary to measure another set of data, start the electric push rod 21 to press down the connecting rod 22. The downward movement of the connecting rod 22 drives the probe 18 of the measuring instrument to lift upward through the connecting unit 3 to release the pressing on the thin film. At the same time, when the connecting rod 22 moves downward, it drives the first rubber roller 232 and the first friction roller 233 to contact the second rubber roller 236 and the second friction roller 237 respectively through the first rotating shaft 231, so that the first rubber roller 232 cooperates with the second rubber roller 236 to clamp the thin film to be measured. At this time, start the motor 23 to rotate counterclockwise. The rotation of the motor 23 drives the first rubber roller 232 to rotate through the connected first rotating shaft 231. When the first rotating shaft 231 rotates, the relative rotation of the second rotating shaft 235 and the first rotating shaft 231 is caused by the frictional cooperation between the first friction roller 233 and the second friction roller 237, and then the relative rotation of the second rubber roller 236 and the first rubber roller 232 is caused, so that the thin film between the first rubber roller 232 and the second rubber roller 236 moves in the same direction, and then the test area of the thin film is changed, achieving the purpose of automatically changing the position of the thin film to be measured, without the need for the operator to frequently manually lift the probe 18 of the measuring instrument, which is convenient for the operator to operate.

[0033] The above are only the preferred embodiments of the present utility model. Any person skilled in the art may modify the present utility model by using the technical solutions described above or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement made according to the technical solutions of the present utility model falls within the scope of protection required by the present utility model.

Claims

1. A film thickness measurement sampling device, comprising a film measuring device (1), characterized in that: The thin film measuring device (1) comprises a base (11), a measuring base (12) and a vertical plate (13) are fixedly provided on the top of the base (11), a through slot (14) and an obstacle avoidance slot (15) are provided inside the vertical plate (13), a fixing rod (16) is fixedly provided on the top of the vertical plate (13), a film thickness measuring instrument body (17) is fixedly provided on the outside of the fixing rod (16), a measuring instrument probe (18) is plugged into the inside of the film thickness measuring instrument body (17), a thin film moving assembly (2) is provided on the outside of the vertical plate (13), and the thin film moving assembly (2) comprises an electric push rod (21), and a connecting rod (18) is fixedly connected to the bottom of the electric push rod (21) A rod (22), a motor (23) is fixedly provided on one side of the connecting rod (22), a rotating shaft (231) is fixedly provided on the output end of the motor (23), a rubber roller (232) is fixedly provided on the outer sleeve of the rotating shaft (231), two friction rollers (233) and an anti-skew disk (234) are fixedly provided on the outer sleeve of the rotating shaft (231), a rotating shaft (235) is provided on the bottom of the rotating shaft (231), a rubber roller (236) is fixedly provided on the outer sleeve of the rotating shaft (235), two friction rollers (237) are fixedly provided on the outer sleeve of the rotating shaft (235), and a connecting unit (3) is provided on the top of the connecting rod (22).

2. A film thickness measurement sampling device according to claim 1, characterized in that: The connection unit (3) comprises a fixed plate (31), the fixed plate (31) is fixedly connected to the vertical plate (13), a fixed shaft (33) is fixedly provided on one side of the fixed plate (31), a gear (34) is sleeved on the outside of the fixed shaft (33), a main rack (32) and a slave rack (35) are respectively provided on both sides of the gear (34), a connecting plate (36) is fixedly provided on the outside of the slave rack (35), and the connecting plate (36) is fixedly sleeved on the outside of the measuring instrument probe (18).

3. A film thickness measurement sampling device according to claim 1, characterized in that: The electric push rod (21) is fixedly arranged on the top of the vertical plate (13); the output end of the electric push rod (21) extends into the obstacle avoidance groove (15) and is slidably connected to the top of the obstacle avoidance groove (15).

4. The film thickness measurement sampling device according to claim 1, characterized in that: The connecting rod (22) is arranged inside the obstacle avoiding groove (15) and is slidably connected to the obstacle avoiding groove (15).

5. The film thickness measurement sampling device according to claim 1, characterized in that: The rotating shaft 1 (231) passes through the connecting rod (22) and is connected to the connecting rod (22) via a bearing. The rotating shaft 1 (231) passes through the through slot (14) and is slidably connected to the through slot (14).

6. The film thickness measurement sampling device according to claim 1, characterized in that: The two anti-skew plates (234) are respectively arranged on both sides of the vertical plate (13) and are rollingly connected to the vertical plate (13).

7. The film thickness measurement sampling device according to claim 1, characterized in that: The second rotating shaft (235) passes through the vertical plate (13) and is connected to the vertical plate (13) via a bearing.

8. The film thickness measurement sampling device according to claim 2, characterized in that: The gear (34) is sleeved on the outside of the fixed shaft (33) and connected to the fixed shaft (33) via a bearing. The fixed shaft (33) is meshed with the main rack (32) and the slave rack (35) respectively.

9. A film thickness measurement sampling device according to claim 2, characterized in that: The main rack (32) and the slave rack (35) are both slidably connected to the fixed plate (31).

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