Flatness detection device

Abstract

The embodiment of the utility model provides a flatness detection device. The flatness detection device comprises a supporting cross beam, a guide rail, a distance measuring device, a driving assembly and at least two sliding connection structures. The support beam extends in a first direction. The at least two sliding connection structures are arranged on the supporting cross beam and arranged at intervals in the first direction, the sliding connection structures are used for being connected to an object and used for driving the supporting cross beam to slide in the second direction, and the first direction intersects with the second direction. The guide rail is arranged on the supporting beam and extends in the first direction. The distance measuring device is slidably connected with the guide rail and is used for measuring the distance from the to-be-detected plane to the distance measuring device. The driving assembly is used for driving the distance measuring device to reciprocate in the first direction. By adjusting different positions of the distance measuring device on the guide rail along the first direction and adjusting different positions of the supporting cross beam on the object along the second direction, the distances from a plurality of to-be-detected positions to the distance measuring device can be measured, and whether the flatness is qualified or not can be judged according to the plurality of measured distances.

Description

Technical Field

[0001] This application relates to the field of detection technology, and in particular, to a flatness detection device. Background Art

[0002] Plasma-Enhanced Chemical Vapor Deposition (PECVD) is a film coating technology widely used in semiconductor, solar cell, display and other high-tech fields for depositing thin films on the surface of substrates.

[0003] In the solar photovoltaic panel production industry, the PECVD technology is used to deposit a reflective film or a passivation layer on the surface of the electrode plate. The coating uniformity of the reflective film or the passivation layer seriously affects the product yield, conversion efficiency and service life of the solar cell, that is, it affects the performance of the solar photovoltaic panel. If the electrode plate is skewed when placed in the process chamber of the PECVD coating equipment, it will cause a change in the distance between the surface of the electrode plate and the plasma source, thereby affecting the distribution of the plasma. The uneven distribution of the plasma density will lead to inconsistent coating rates and qualities, which may cause the coating in some areas to be too thick or too thin, and even no coating can be formed at the edge of the electrode plate, thus affecting the product yield of the electrode plate coating. Therefore, it is particularly important to detect the flatness of the electrode plate before coating. Utility Model Content

[0004] In view of this, the embodiments of this application are expected to provide a flatness detection device that can be used to detect the flatness of the electrode plate.

[0005] To achieve the above object, the technical solution of the embodiments of this application is realized as follows:

[0006] The embodiments of this application provide a flatness detection device, including:

[0007] A support crossbeam extending in a first direction;

[0008] At least two sliding connection structures are arranged on the support crossbeam and are spaced apart along the first direction. The sliding connection structure is used to connect to an object and is used to drive the support crossbeam to slide along a second direction, where the first direction and the second direction intersect;

[0009] A guide rail is arranged on the support crossbeam, and the guide rail extends along the first direction;

[0010] A distance measuring device is slidably connected to the guide rail, and the distance measuring device is used to measure the distance from the plane to be detected to the distance measuring device;

[0011] A driving component is used to drive the distance measuring device to reciprocate along the first direction.

[0012] In some embodiments, the flatness detection device includes a connection assembly, and the distance measurement device is connected to the guide rail through the connection assembly;

[0013] The connection assembly includes a slider and a first mounting seat. The slider is slidably engaged with the guide rail. The first mounting seat is connected to the slider, and the distance measurement device is mounted on the first mounting seat.

[0014] In some embodiments, the connection assembly includes a first fastener. An installation hole is formed on the first mounting seat. The installation hole extends along a third direction. The first fastener is connected to the slider through the installation hole. The third direction is perpendicular to the plane formed by the first direction and the second direction.

[0015] In some embodiments, the flatness detection device includes a protective cover. The distance measurement device is disposed inside the protective cover. The protective cover includes a bottom wall, and a window is provided on the bottom wall. The window is used for signal transmission between the distance measurement device and the plane to be detected.

[0016] In some embodiments, the flatness detection device includes a heat insulation component, and the heat insulation component is disposed between the distance measurement device and the protective cover.

[0017] In some embodiments, the heat insulation component is provided with an opening. The flatness detection device includes a refrigeration device, and the refrigeration device conveys cold quantity to the distance measurement device through the opening.

[0018] In some embodiments, the heat insulation component is a plastic part.

[0019] In some embodiments, a plurality of first positioning holes are provided on the side wall of one side of the protective cover along the first direction. The plurality of first positioning holes are located on the same circumference, and the first positioning holes extend along the circumferential direction of the circumference. The flatness detection device includes a plurality of second fasteners, and the plurality of second fasteners are respectively connected to the heat insulation component through the first positioning holes.

[0020] In some embodiments, the connection assembly includes a second mounting seat and a plurality of third fasteners. The protective cover is connected to the second mounting seat. The second mounting seat is provided with a plurality of second positioning holes. The plurality of third fasteners are connected to the first mounting seat through the plurality of second positioning holes. The plurality of second positioning holes are located on the same circumference, and the second positioning holes extend along the circumferential direction of the circumference.

[0021] In some embodiments, the flatness detection device includes a positioning crossbeam that extends along the first direction. The guide rail is disposed on the support crossbeam through the positioning crossbeam. The top surface of the positioning crossbeam includes a first positioning surface and a second positioning surface. The first positioning surface and the second positioning surface are arranged along the second direction. The height of the first positioning surface is lower than that of the second positioning surface, and a first step surface is formed at the junction of the first positioning surface and the second positioning surface. The guide rail is fixed to the first positioning surface, and the side wall of the guide rail away from the distance measuring device contacts the first step surface.

[0022] In some embodiments, the flatness detection device includes a positioning crossbeam that extends along the first direction. The guide rail is disposed on the support crossbeam through the positioning crossbeam. The bottom surface of the positioning crossbeam includes a first abutting surface and a second abutting surface. The height of the first abutting surface is lower than that of the second abutting surface, and a second step surface is formed at the junction of the first abutting surface and the second abutting surface. The second abutting surface is used to contact the top surface of the support crossbeam, and the second step surface contacts the side wall of the support crossbeam close to the distance measuring device.

[0023] In some embodiments, the sliding connection structure includes a support frame and rolling elements. The support frame is connected to the support crossbeam, and the rolling elements are connected to the support frame. The sliding connection structure is in rolling contact with the object through the rolling elements to drive the support frame to slide along the second direction.

[0024] In some embodiments, the support frame includes a first support portion and a second support portion. The second support portion extends downward from one end of the first support portion along the first direction away from the distance measuring device. The rolling elements include a first roller and a second roller. The first roller is connected to the first support portion and is in rolling contact with the object, and the second roller is connected to the second support portion and is in rolling contact with the object.

[0025] In some embodiments, the support crossbeam has a cavity extending along the first direction. The bottom wall of the support crossbeam has a communication groove communicating with the cavity. The communication groove extends along the first direction. The flatness detection device includes a convex block and a connecting member. The convex block is disposed in the cavity and can slide along the cavity. The convex block has a threaded hole, and the sliding connection structure is provided with a connection hole. The connecting member passes through the connection hole, the communication groove and is engaged with the threaded hole to realize the connection between the support crossbeam and the sliding connection structure.

[0026] When flatness detection is required, the sliding connection structure is used to drive the support crossbeam to slide in the second direction, so that the support crossbeam slides to a certain position of the object in the second direction. Then, the driving component is used to drive the distance measuring device to slide on the guide rail to the upper part of the position to be detected on the plane to be detected, so as to measure the distance from the position to be detected to the distance measuring device. By adjusting the different positions of the distance measuring device on the guide rail in the first direction and adjusting the different positions of the support crossbeam on the object in the second direction, the distances from multiple positions to be detected to the distance measuring device can be measured. Whether the flatness is qualified is judged according to the above-mentioned multiple measured distances, so as to realize the flatness detection of the plane to be detected. Description of the Drawings

[0027] Figure 1 Schematic structural diagram of the flatness detection device according to the embodiment of the present application placed in the process chamber;

[0028] Figure 2 Schematic structural diagram of the flatness detection device according to the embodiment of the present application;

[0029] Figure 3 is Figure 2 Schematic structural diagram of the structure shown from another angle;

[0030] Figure 4 is Figure 3 Enlarged schematic diagram of part A in

[0031] Figure 5 Schematic structural diagram of the positioning crossbeam according to the embodiment of the present application;

[0032] Figure 6 is Figure 5 Schematic structural diagram of the structure shown from another angle;

[0033] Figure 7 Partial structural schematic diagram of the flatness detection device according to the embodiment of the present application;

[0034] Figure 8 is Figure 7 Cross-sectional schematic diagram of the structure shown along the B-B direction;

[0035] Figure 9 Schematic structural diagram of the support crossbeam supported on the support frame according to the embodiment of the present application.

[0036] Description of the Reference Numerals

[0037] 10. Flatness detection device; 11. Support crossbeam; 111. Cavity; 12. Sliding connection structure; 121. Support frame; 1211. First support part; 12111. First support plate; 12112. Second support plate; 1212. Second support part; 122. Rolling element; 1221. First roller; 1222. Second roller; 13. Guide rail; 14. Distance measuring device; 15. Driving assembly; 151. Driving wheel; 152. Driven wheel; 153. Belt; 16. Connection assembly; 161. Slide block; 162. First mounting seat; 1621. Mounting hole; 163. Second mounting seat; 1631. Second positioning hole; 164. Limiting part; 17. Protective cover; 171. Bottom wall; 1711. Window; 172. First positioning hole; 181. Heat insulation component; 182. Refrigeration device; 19. Positioning crossbeam; 191. First positioning surface; 192. Second positioning surface; 193. First step surface; 194. First abutting surface; 195. Second abutting surface; 196. Second step surface; 110. Convex block; 20. Process chamber; 30. Electrode plate. Detailed implementation manners

[0038] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0039] In the various specific technical features described in the specific embodiments, they can be combined in any appropriate manner without conflict. For example, different embodiments and technical solutions can be formed by combining different specific technical features. To avoid unnecessary repetition, various possible combination methods of the specific technical features in the present application will not be described separately.

[0040] In the following description, the terms "first / second / ..." involved are only used to distinguish different objects and do not indicate that there are the same or related relationships between the objects. It should be understood that the orientation descriptions "above", "below", "outside", and "inside" involved are all in the orientation in the normal use state, and the "left" and "right" directions represent the left and right directions shown in the specific corresponding schematic diagram, which may or may not be the left and right directions in the normal use state.

[0041] It should be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising that element. "Plurality" means greater than or equal to two.

[0042] Please refer to Figures 1 to 9 , an embodiment of the present application provides a flatness detection device 10, including a support beam 11, a guide rail 13, a distance measuring device 14, a driving assembly 15 and at least two sliding connection structures 12.

[0043] As Figure 1 shown, the support beam 11 extends in a first direction. At least two sliding connection structures 12 are provided on the support beam 11 and are arranged at intervals along the first direction. The sliding connection structure 12 is used to connect to an object and is used to drive the support beam 11 to slide in a second direction, wherein the first direction and the second direction intersect. That is to say, on the one hand, the sliding connection structure 12 plays a supporting role for the support beam 11, and on the other hand, it is used to drive the support beam 11 to slide in the second direction, so that the support beam 11 can slide to any position of the object in the second direction.

[0044] Exemplarily, the first direction is as Figure 1 , Figure 2 , Figure 3 and Figure 7 shown in.

[0045] Exemplarily, the second direction is as Figure 1 , Figure 2 , Figure 3 , Figure 8 and Figure 9 shown in.

[0046] It should be noted that intersection means that in the first direction and the second direction jointly define an abstract plane, and in this abstract plane, the first direction and the second direction are not parallel. It should be noted that the intersection angle is not limited, for example, 30 degrees, 45 degrees, 60 degrees, 90 degrees, etc. In some specific embodiments, the first direction and the second direction are substantially perpendicular, and this perpendicularity allows a certain installation error.

[0047] It should be noted that the sliding connection structure 12 refers to a structure that can realize sliding connection with an object. The manner of realizing sliding is not limited herein.

[0048] Please refer to Figure 3and Figure 4 The guide rail 13 is provided on the support cross beam 11, and the guide rail 13 extends along the first direction. The distance measuring device 14 is slidably connected to the guide rail 13, and the distance measuring device 14 is used to measure the distance from the plane to be detected to the distance measuring device 14. That is, the guide rail 13 determines the sliding path of the distance measuring device 14.

[0049] The driving assembly 15 is used to drive the distance measuring device 14 to reciprocate along the first direction, so that the distance measuring device 14 can slide to any position of the guide rail 13 along the first direction.

[0050] When flatness detection is required, the sliding connection structure 12 is used to drive the support cross beam 11 to slide along the second direction, so that the support cross beam 11 slides to a certain position of the object along the second direction, and then the driving assembly 15 is used to drive the distance measuring device 14 to slide on the guide rail 13 to above the position to be detected on the plane to be detected, so as to measure the distance from the position to be detected to the distance measuring device 14. By adjusting different positions of the distance measuring device 14 along the first direction on the guide rail 13 and adjusting different positions of the support cross beam 11 along the second direction of the object, the distances from multiple positions to be detected to the distance measuring device 14 can be measured, and whether the flatness is qualified is judged according to the above-mentioned multiple measured distances, so as to realize the flatness detection of the plane to be detected.

[0051] It should be noted that the object refers to a device that can place the object to be detected with the plane to be detected and can make the distance measuring device 14 have a gap with the plane to be detected along the third direction. The object can be a bracket that can realize multi-layer support along the third direction, and the object can be a chamber with an opening.

[0052] The third direction is perpendicular to the plane formed by the first direction and the second direction. Exemplarily, the third direction is Figure 1 , Figure 2 , Figure 3 , Figure 7 and Figure 9 the directions shown in. It can be understood that this perpendicularity allows a certain installation error.

[0053] The present application does not limit the number of the sliding connection structures 12, as long as it is at least 2, which means that the number of the sliding connection structures 12 can be 3, 4, 5, 6, etc. It can be understood that the more the number of the sliding connection structures 12, the interval between every two sliding connection structures 12 can be used to match objects of different sizes, that is, the flatness detection device 10 can be adapted to objects of different sizes.

[0054] In some embodiments, the object is the process chamber 20 of a coating device, and the object to be detected for flatness detection is the electrode plate 30. In the embodiments of the present application, the object is the process chamber 20 of a coating device, and the object to be detected is the electrode plate 30 for illustration.

[0055] It can be understood that the flatness detection device 10 provided in the embodiments of the present application is also applicable to other scenarios that require flatness detection.

[0056] In some embodiments, the distance measuring device 14 is a distance measuring sensor. The embodiments of the present application do not limit the type of the distance measuring sensor, such as an ultrasonic distance measuring sensor, a laser distance measuring sensor, an infrared distance measuring sensor, a radar distance measuring sensor, etc. In this way, a non-contact measurement of the distance between the distance measuring device 14 and the plane to be detected can be realized. Therefore, when measuring, the distance measuring device 14 will not damage the plane to be detected. In the embodiment of the flatness detection of the electrode plate 30, the distance measuring device 14 will not damage the surface of the electrode plate 30, and thus will not affect the sealing performance and air distribution holes of the electrode plate 30, which helps to ensure the integrity and sealing performance of the electrode plate 30.

[0057] In some embodiments, please refer to Figure 3 , the flatness detection device 10 includes a connection component 16, and the distance measuring device 14 is connected to the guide rail 13 through the connection component 16. That is, the connection between the distance measuring device 14 and the guide rail 13 is realized through the connection component 16.

[0058] Exemplarily, as Figure 3 and Figure 4 shown, the connection component 16 includes a slider 161 and a first mounting seat 162. The slider 161 is slidably engaged with the guide rail 13, the first mounting seat 162 is connected to the slider 161, and the distance measuring device 14 is mounted on the first mounting seat 162. In this embodiment, the slider 161 drives the first mounting seat 162 to slide, thereby driving the distance measuring device 14 to slide. Moreover, the distance measuring device 14 is connected to the slider 161 through the first mounting seat 162, which can make the size of the slider 161 smaller for easy adaptation to the guide rail 13, and at the same time make the size of the first mounting seat 162 larger for the distance measuring device 14 to be stably mounted, which helps to improve the mounting stability of the distance measuring device 14.

[0059] In some embodiments, the connection component 16 includes a first fastener. An installation hole 1621 is formed on the first mounting seat 162. The installation hole 1621 extends along the third direction. The first fastener is connected to the slider 161 through the installation hole 1621. With such a setting, the position adjustment of the first mounting seat 162 along the third direction can be realized by adjusting the position of the first fastener in the installation hole 1621 along the third direction.

[0060] In some embodiments, the first fastener may be one of a screw, a bolt, and a stud. A threaded hole adapted to the first fastener is provided on the slider 161, thereby realizing the threaded connection between the first fastener and the slider 161 to fix the first mounting seat 162 on the slider 161.

[0061] In some embodiments, the flatness detection device 10 includes a protective cover 17. Please refer to Figure 8 , the distance measuring device 14 is arranged inside the protective cover 17. The protective cover 17 includes a bottom wall 171, and a window 1711 is provided on the bottom wall 171. The window 1711 is used for signal transmission between the distance measuring device 14 and the plane to be detected. In this embodiment, the protective cover 17 is used to protect the distance measuring device 14, and the window 1711 is provided on the bottom wall 171 to avoid interference of the protective cover 17 with the distance measuring performance of the distance measuring device 14 as much as possible.

[0062] Exemplarily, as Figure 8 shown, the flatness detection device 10 includes a heat insulation member 181, and the heat insulation member 181 is arranged between the distance measuring device 14 and the protective cover 17. In this way, it can be ensured that the heat of the protective cover 17 is not transmitted to the distance measuring device 14 as much as possible, that is, the performance of the distance measuring device 14 is not affected by high temperature and heat as much as possible. At this time, the distance measuring device 14 is arranged inside the heat insulation member 181.

[0063] It should be noted that when the flatness detection device 10 of the embodiment of the present application is used to detect the flatness of the electrode plate 30 in the process chamber 20 of the coating equipment, the temperature in the process chamber 20 is higher than 100°C. This heat will be transmitted to the protective cover 17 through the conduction of the sliding connection structure 12, the support cross beam 11, and the guide rail 13.

[0064] In some embodiments, the heat insulation member 181 is provided with an opening, and the flatness detection device 10 includes a refrigeration device 182. The refrigeration device 182 conveys cold energy to the distance measuring device 14 through the opening. In this way, the refrigeration device 182 can further cool the distance measuring device 14.

[0065] It can be understood that the opening can be arranged at any position of the heat insulation member 181. For example, the opening is arranged on the side wall, the top wall, or the bottom wall of the heat insulation member 181. When the opening is arranged on the bottom wall of the heat insulation member 181, it is only necessary to ensure that the refrigeration device 182 does not interfere with the signal transmission between the distance measuring device 14 and the plane to be detected.

[0066] In some embodiments, the heat insulation member 181 is a plastic part. The plastic part has good heat insulation performance.

[0067] In some embodiments, please refer to Figure 2, on the side wall of the protective cover 17 on one side in the first direction, a plurality of first positioning holes 172 are provided. The plurality of first positioning holes 172 are located on the same circumference, and the first positioning holes 172 extend along the circumferential direction of the circumference. The flatness detection device 10 includes a plurality of second fasteners, and the plurality of second fasteners are respectively connected to the heat insulation component 181 through the first positioning holes 172. Fixing the heat insulation part to the side wall of the protective cover 17 by using a plurality of second fasteners helps to improve the installation stability of the heat insulation component 181. Moreover, since the first positioning holes 172 extend along the circumferential direction of the circumference, the position of the heat insulation component 181 can be adjusted along the circumferential direction of the circumference by adjusting the position of the second fastener in the first positioning hole 172, so as to drive the distance measuring device 14 to be adjusted along the circumferential direction of the circumference, thereby helping to make the distance measuring device 14 in the heat insulation component 181 horizontal and improving the accuracy of flatness detection.

[0068] In some embodiments, the second fastener can be one of a screw, a bolt and a stud. Threaded holes adapted to the second fastener are provided on the heat insulation component 181, thereby realizing the threaded connection between the second fastener and the heat insulation component 181 to fix the heat insulation component 181 to the protective cover 17.

[0069] It can be understood that the present application does not limit the specific number of the first positioning holes 172. For example, the number of the first positioning holes 172 can be 2, 3, 4, 5, etc., and can be set according to the assembly situation.

[0070] In some embodiments, the connection assembly 16 includes a second mounting seat 163 and a plurality of third fasteners. As Figure 7 shown, the protective cover 17 is connected to the second mounting seat 163. The second mounting seat 163 is provided with a plurality of second positioning holes 1631, and the plurality of third fasteners are connected to the first mounting seat 162 through the plurality of second positioning holes 1631, that is, the protective cover 17 is connected to the first mounting seat 162 through the second mounting seat 163.

[0071] Please refer to Figure 7 , the plurality of second positioning holes 1631 are located on the same circumference, and the second positioning holes 1631 extend along the circumferential direction of the circumference. Thus, by adjusting the position of the third fastener in the second positioning hole 1631, the second mounting seat 163 is adjusted along the circumferential direction of the circumference to drive the protective cover 17 to adjust its position, and finally drive the heat insulation component 181 and the distance measuring device 14 in the protective cover 17 to adjust their positions along the circumferential direction of the circumference, which helps to make the distance measuring device 14 horizontal and improve the accuracy of flatness detection.

[0072] It can be understood that the present application does not limit the specific number of the second positioning holes 1631. For example, the number of the second positioning holes 1631 can be 2, 3, 4, 5, etc., and can be set according to the assembly situation.

[0073] In some embodiments, the third fastener may be one of a screw, a bolt, and a stud. The first mounting seat 162 is provided with a threaded hole adapted to the third fastener, thereby realizing the threaded connection between the third fastener and the first mounting seat 162, so that the second mounting seat 163 is fixed to the first mounting seat 162, and thus the protective cover 17 is connected to the first mounting seat 162 through the second mounting seat 163.

[0074] In an embodiment where the mounting hole 1621 on the first mounting seat 162 extends in the third direction, the distance measuring device 14 in the protective cover 17 can perform position adjustment in the height direction along the extension direction of the mounting hole 1621, can make the distance measuring device 14 as horizontal as possible along the extension direction of the first positioning hole 172 and along the extension direction of the second positioning hole 1631, can perform position adjustment in the first direction through the driving assembly 15, and can drive the support cross beam 11 to slide in the second direction through the sliding connection structure 12 to achieve position adjustment in the second direction. Through multi-faceted adjustment, the distance measuring device 14 can detect the flatness of multiple points to be detected on the plane to be detected, and at the same time improve the accuracy of flatness detection by making the distance measuring device 14 as horizontal as possible. When detecting the flatness of the electrode plate 30, the improvement of the accuracy of flatness detection helps to improve the coating uniformity of the electrode plate 30.

[0075] In some embodiments, please refer to Figure 4 , the flatness detection device 10 includes a positioning cross beam 19. The positioning cross beam 19 extends in the first direction. The guide rail 13 is arranged on the support cross beam 11 through the positioning cross beam 19. During the assembly process of the flatness detection device 10, the positioning cross beam 19 is used to position the guide rail 13, which helps to improve the assembly accuracy of the flatness detection device 10.

[0076] Exemplarily, as Figure 5 shown, the top surface of the positioning cross beam 19 includes a first positioning surface 191 and a second positioning surface 192. The first positioning surface 191 and the second positioning surface 192 are arranged in the second direction. The height of the first positioning surface 191 is lower than that of the second positioning surface 192, and a first step surface 193 is formed at the junction of the first positioning surface 191 and the second positioning surface 192. The guide rail 13 is fixed to the first positioning surface 191, and the side wall 13a of the guide rail 13 away from the distance measuring device 14 contacts the first step surface 193.

[0077] That is, the first positioning surface 191 is used to support the guide rail 13 and to position the bottom wall 13b of the guide rail 13, and the first step surface 193 is used to position the side wall 13a of the guide rail 13 away from the distance measuring device 14. Planar contact helps to improve the assembly accuracy between the guide rail 13 and the positioning beam 19, and the use of plane positioning during the assembly process makes the assembly process simpler, and the guide rail 13 only needs to be placed on the first positioning surface 191 and the side wall 13a of the guide rail 13 away from the distance measuring device 14 is in contact with the first step surface 193.

[0078] In some embodiments, such as Figure 6 As shown, the bottom surface of the positioning beam 19 includes a first abutting surface 194 and a second abutting surface 195, the height of the first abutting surface 194 is lower than the second abutting surface 195, and a second step surface 196 is formed at the junction of the first abutting surface 194 and the second abutting surface 195. The second abutting surface 195 is used to contact the top surface 11a of the supporting beam 11, and the second step surface 196 is in contact with the side wall 11b of the supporting beam 11 close to the distance measuring device 14.

[0079] That is, the positioning beam 19 is positioned with the supporting beam 11 through the second abutting surface 195 and the second step surface 196, and plane positioning helps to improve the assembly accuracy of the positioning beam 19 and the supporting beam 11. That is, the positioning beam 19 is more accurately assembled to the supporting beam 11, and the guide rail 13 is more accurately assembled to the positioning beam 19, which helps to improve the overall assembly accuracy.

[0080] In some embodiments, the connection assembly 16 includes two stoppers 164, and the two stoppers 164 are spaced apart along the first direction and arranged on the positioning beam 19 (see Figure 2 and Figure 4 ), the limiting member 164 is used to form a stop contact with the slider 161 to limit the sliding stroke of the slider 161 along the guide rail 13 to prevent the slider 161 from sliding out of the two ends of the guide rail 13 along the first direction as much as possible.

[0081] In some embodiments, the positioning beam 19 is provided with a plurality of installation positions spaced apart along the first direction, and the plurality of installation positions are used for installing the limit members 164 , that is, the two limit members 164 can reasonably select the installation positions according to the size of the plane to be detected to limit the movement range of the slider 161 along the first direction.

[0082] In some embodiments, the driving assembly 15 includes a driving wheel 151 (see Figure 3 ), driven wheel 152 (see Figure 2 ) and belt 153 (see Figure 2 and Figure 3) The driving wheel 151 and the driven wheel 152 are respectively arranged at both ends of the support cross beam 11 along the first direction. The belt 153 is drivingly connected to the driving wheel 151 and the driven wheel 152, and the distance measuring device 14 is connected to the belt 153. The belt 153 is suitable for long-distance transmission, and the transmission cost of the belt 153 is relatively low.

[0083] In the embodiment of the flatness detection of the electrode plate 30, the size of the electrode plate 30 is generally large, that is, the dimension of the process chamber 20 along the first direction is long, so that the dimensions of the support cross beam 11 and the guide rail 13 along the first direction are both long, that is, the one-way movement distance of the distance measuring device 14 along the first direction is long. Using the belt 153 to drive the distance measuring device 14 to move can better solve the problem of the long one-way movement distance.

[0084] In some embodiments, the driving assembly 15 includes a motor. The output shaft of the motor is connected to the driving wheel 151. The output shaft of the motor drives the driving wheel 151 to rotate. The driving wheel 151 drives the driven wheel 152 to rotate through the belt 153 to realize the movement of the belt 153, thereby driving the distance measuring sensor to move along the first direction. The movement direction of the distance measuring sensor along the first direction is controlled by controlling the rotation direction of the output shaft of the motor. Using the motor drive helps to achieve a more precise control of the movement of the distance measuring sensor. By controlling the number of clockwise or counterclockwise rotations of the output shaft of the motor, it helps to achieve precise control of the traveling direction and traveling distance of the belt 153, thereby helping to achieve precise control of the position of the distance measuring device 14 moving along the first direction.

[0085] It should be noted that the type of the motor is not limited here. For example, the motor can be a servo motor or a stepper motor, etc.

[0086] In some embodiments, the sliding connection structure 12 includes a support frame 121 and a rolling member 122. The support frame 121 is connected to the support cross beam 11, and the rolling member 122 is connected to the support frame 121. The sliding connection structure 12 is in rolling contact with the object through the rolling member 122 to drive the support frame 121 to slide along the second direction. With such a setting, by providing the rolling member 122, the frictional resistance between the support frame 121 and the object is reduced, facilitating the sliding connection structure 12 to drive the support cross beam 11 to move along the second direction.

[0087] In some embodiments, the support frame 121 includes a first support portion 1211 and a second support portion 1212. The second support portion 1212 extends downward from one end of the first support portion 1211 along the first direction away from the distance measuring device 14. That is, the two second support portions 1212 of the two sliding connection structures 12 connected to the object can confine the object between the two second support portions 1212.

[0088] The rolling members 122 include a first roller 1221 and a second roller 1222. The first roller 1221 is connected to the first support portion 1211 and is in rolling contact with the object. The second roller 1222 is connected to the second support portion 1212 and is in rolling contact with the object. That is to say, the friction between the first support portion 1211 and the object, and the friction between the second support portion 1212 and the object are rolling frictions, reducing the frictional resistance between the first support portion 1211 and the object, and between the second support portion 1212 and the object, facilitating the sliding connection structure 12 to drive the support cross beam 11 to move in the second direction.

[0089] It can be understood that the embodiments of the present application do not limit the number of the first roller 1221 and the second roller 1222. The number and arrangement form of the first roller 1221 can be determined according to the size of the first support portion 1211 and the size of the area where the object is in rolling contact with the first roller 1221. In some embodiments, two groups of rollers are arranged at intervals along the first direction for the first roller 1221, and two rollers are arranged at intervals along the second direction for each group.

[0090] The number and arrangement form of the second roller 1222 can be determined according to the size of the second support portion 1212. In some embodiments, the second roller 1222 includes two rollers, and the two rollers are arranged at intervals along the second direction.

[0091] In the embodiment of the flatness detection of the electrode plate 30, the first support portion 1211 contacts the top wall 20a of the process chamber 20 through the first roller 1221, and the second support portion 1212 contacts the side wall 20b of the process chamber 20 away from the ranging device 14 through the second roller 1222.

[0092] In some embodiments, both the first roller 1221 and the second roller 1222 are plastic parts, so as to reduce the degree of scratching of the process chamber 20 by the first roller 1221 and the second roller 1222 during the sliding process.

[0093] In some embodiments, as Figure 9 shown, the support cross beam 11 has a cavity 111 extending along the first direction. The bottom wall 11c of the support cross beam 11 has a communication groove communicating with the cavity 111. The communication groove extends along the first direction. The flatness detection device 10 includes a convex block 110 and a connecting member. The convex block 110 is arranged in the cavity 111 and can slide along the cavity 111. The convex block 110 has a threaded hole. The sliding connection structure 12 is provided with a connection hole. The connecting member passes through the connection hole, the communication groove and cooperates with the threaded hole to realize the connection between the support cross beam 11 and the sliding connection structure 12.

[0094] In this embodiment, when the connecting member is stably arranged in the connecting hole and the threaded hole, the supporting beam 11 and the sliding structure are in a stably connected state. The supporting beam 11 is fixed to the sliding connection structure 12 by the connecting member, and the tilting of the supporting beam 11 in the second direction relative to the sliding connection structure 12 can also be reduced.

[0095] When the connection between the connecting member and the protrusion 110 is released, the protrusion 110 can slide along the cavity 111, that is, the position of the protrusion 110 in the cavity 111 can be adjusted. When the connecting member is connected to the protrusion 110 through the connecting hole again, the position of the sliding connection structure 12 relative to the supporting beam 11 is also changed. In this way, the position of the sliding connection structure 12 along the first direction can be adjusted, that is, the interval between the two sliding connection structures 12 can be adjusted to match the size of different objects, such as the size of different process chambers 20. That is to say, in this embodiment, only two sliding connection structures 12 can be provided to meet the needs of objects of different sizes.

[0096] In some embodiments, the connecting member may be one of a screw, a bolt, and a stud.

[0097] In the embodiment having the first supporting portion 1211 and the second supporting portion 1212 , the connecting hole is provided in the first supporting portion 1211 .

[0098] In some embodiments, the dimension a1 of the first support portion 1211 along the second direction is greater than the dimension a2 of the support beam 11 along the second direction, that is, a1>a2. In this way, the first support portion 1211 can provide relatively stable support for the support beam 11.

[0099] In some embodiments, the first support portion 1211 includes a first support plate 12111 and a second support plate 12112, the first support plate 12111 is disposed on the second support plate 12112, and one end of the second support plate 12112 away from the distance measuring device 14 is connected to the second support portion 1212 to constrain the object between the second support plate 12112 and the second support portion 1212. A connecting hole is provided on the first support plate 12111. The first support plate 12111 and the second support plate 12112 are detachably connected by bolts or screws. During the assembly process, the first pallet 12111 is first connected to the supporting beam 11, and then the first pallet 12111 connected to the supporting beam 11 is fixed to the second pallet 12112. With this arrangement, when the first pallet 12111 and the second pallet 12112 are fixed, since the supporting beam 11 has formed a stable connection with the first pallet 12111, and the size of the first pallet 12111 along the second direction is larger than the size of the supporting beam 11 along the second direction, the tilting or shaking of the supporting beam 11 along the second direction can be reduced, thereby reducing the difficulty of assembly.

[0100] In the description of the present application, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In the present application, the schematic expressions of the above terms are not necessarily directed to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art may combine the different embodiments or examples described in the present application and the features of the different embodiments or examples.

[0101] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A flatness detection device, characterized in that: include: A supporting beam (11) extending along a first direction; At least two sliding connection structures (12) are provided on the supporting beam (11) and are arranged at intervals along the first direction, the sliding connection structures (12) are used to connect to an object and to drive the supporting beam (11) to slide along a second direction, wherein the first direction and the second direction intersect; A guide rail (13) is arranged on the supporting beam (11), and the guide rail (13) extends along the first direction; A distance measuring device (14) is slidably connected to the guide rail (13), and the distance measuring device (14) is used to measure the distance from the plane to be detected to the distance measuring device (14); A driving assembly (15) is used to drive the distance measuring device (14) to reciprocate along the first direction.

2. The flatness detection device according to claim 1, characterized in that: The flatness detection device (10) comprises a connection component (16), and the distance measuring device (14) is connected to the guide rail (13) via the connection component (16); The connecting assembly (16) comprises a slider (161) and a first mounting seat (162); the slider (161) is slidably matched with the guide rail (13); the first mounting seat (162) is connected to the slider (161); and the distance measuring device (14) is mounted on the first mounting seat (162).

3. The flatness detection device according to claim 2, characterized in that: The connecting assembly (16) comprises a first fastener, a mounting hole (1621) is formed on the first mounting seat (162), the mounting hole (1621) extends along a third direction, the first fastener is connected to the slider (161) via the mounting hole (1621), and the third direction is perpendicular to a plane formed by the first direction and the second direction.

4. The flatness detection device according to claim 2, characterized in that: The flatness detection device (10) comprises a protective cover (17), the distance measuring device (14) is arranged in the protective cover (17), the protective cover (17) comprises a bottom wall (171), the bottom wall (171) is provided with a window (1711), and the window (1711) is used for signal transmission between the distance measuring device (14) and the plane to be detected.

5. The flatness detection device according to claim 4, characterized in that: The flatness detection device (10) comprises a heat insulating component (181), and the heat insulating component (181) is arranged between the distance measuring device (14) and the protective cover (17).

6. The flatness detection device according to claim 5, characterized in that: The heat insulating component (181) is provided with an opening, and the flatness detection device (10) comprises a refrigeration device (182), and the refrigeration device (182) transmits cold energy to the distance measuring device (14) through the opening.

7. The flatness detection device according to claim 5, characterized in that: The heat insulating component (181) is a plastic component.

8. The flatness detection device according to any one of claims 5 to 7, characterized in that: The side wall of the protective cover (17) on one side along the first direction is provided with a plurality of first positioning holes (172), the plurality of first positioning holes (172) are located on the same circumference, and the first positioning holes (172) extend along the circumferential direction of the circumference, and the flatness detection device (10) includes a plurality of second fasteners, and the plurality of second fasteners are respectively connected to the heat insulation component (181) through the first positioning holes (172).

9. The flatness detection device according to any one of claims 4 to 7, characterized in that: The connecting assembly (16) comprises a second mounting seat (163) and a plurality of third fasteners, the protective cover (17) is connected to the second mounting seat (163), the second mounting seat (163) is provided with a plurality of second positioning holes (1631), the plurality of third fasteners are connected to the first mounting seat (162) via the plurality of second positioning holes (1631), the plurality of second positioning holes (1631) are located on the same circumference, and the second positioning holes (1631) extend along the circumferential direction of the circumference.

10. The flatness detection device according to any one of claims 1 to 3, characterized in that: The flatness detection device (10) comprises a positioning beam (19), the positioning beam (19) extending along the first direction, the guide rail (13) being arranged on the supporting beam (11) through the positioning beam (19), the top surface of the positioning beam (19) comprising a first positioning surface (191) and a second positioning surface (192), the first positioning surface (191) and the second positioning surface (192) being arranged along the second direction, the height of the first positioning surface (191) being lower than that of the second positioning surface (192), and a first step surface (193) being formed at the junction of the first positioning surface (191) and the second positioning surface (192), the guide rail (13) being fixed to the first positioning surface (191), and the side wall of the guide rail (13) away from the distance measuring device (14) being in contact with the first step surface (193).

11. The flatness detection device according to any one of claims 1 to 3, characterized in that: The flatness detection device (10) comprises a positioning beam (19), the positioning beam (19) extending along the first direction, the guide rail (13) being arranged on the supporting beam (11) through the positioning beam (19), the bottom surface of the positioning beam (19) comprising a first abutting surface (194) and a second abutting surface (195), the height of the first abutting surface (194) being lower than that of the second abutting surface (195), and a second step surface (196) being formed at the junction of the first abutting surface (194) and the second abutting surface (195), the second abutting surface (195) being used to contact the top surface of the supporting beam (11), and the second step surface (196) being in contact with the side wall of the supporting beam (11) close to the distance measuring device (14).

12. The flatness detection device according to any one of claims 1 to 3, characterized in that: The sliding connection structure (12) comprises a support frame (121) and a rolling member (122); the support frame (121) is connected to the supporting crossbeam (11); the rolling member (122) is connected to the support frame; the sliding connection structure (12) is in rolling contact with the object through the rolling member (122) to drive the support frame (121) to slide along the second direction.

13. The flatness detection device according to claim 12, characterized in that: The support frame (121) comprises a first support portion (1211) and a second support portion (1212), wherein the second support portion (1212) extends downward from one end of the first support portion (1211) away from the distance measuring device (14) along the first direction, and the rolling element (122) comprises a first roller (1221) and a second roller (1222), wherein the first roller (1221) is connected to the first support portion (1211) and is in rolling contact with the object, and the second roller (1222) is connected to the second support portion (1212) and is in rolling contact with the object.

14. The flatness detection device according to any one of claims 1 to 3, characterized in that: The support beam (11) has a cavity (111) extending along the first direction, and the bottom wall (171) of the support beam (11) has a connecting groove connected to the cavity (111), and the connecting groove extends along the first direction. The flatness detection device (10) comprises a protrusion (110) and a connecting piece, and the protrusion (110) is arranged in the cavity (111) and can slide along the cavity (111), and the protrusion (110) has a threaded hole, and the sliding connection structure (12) is provided with a connecting hole, and the connecting piece passes through the connecting hole and the connecting groove and cooperates with the threaded hole to realize the connection between the support beam (11) and the sliding connection structure (12).

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