Superlens microstructure and optical performance detection device thereof

Abstract

The utility model relates to the technical field of super-lens detection equipment, in particular to a super-lens microstructure and an optical performance detection device thereof, which comprise a base and a mounting frame mounted on the top surface of the base, the dome is mounted on the mounting frame; the camera is connected to the dome in an angle-adjustable manner, and the distance of the camera relative to the dome is adjustable; the diaphragm position adjusting assembly is mounted on the base; the detachable light source is mounted on the base and comprises a first detection mode light source and a second detection mode light source; the workpiece table is used for placing a to-be-detected lens and is located between the detection end of the diaphragm position adjusting assembly and the detachable light source; and an optical screen mounting piece is also arranged between the diaphragm position adjusting assembly and the camera and is connected with the mounting frame. According to the utility model, full-automatic omnibearing automatic detection in a superlens mass production stage can be realized, and the detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of metalens detection equipment, and particularly relates to a metalens microstructure and an optical performance detection device thereof. Background Art

[0002] In recent years, as a revolutionary technology in the field of optics, metalens technology can freely control the amplitude, phase, and polarization of electromagnetic waves by designing various artificial meta-atoms, and has extremely broad application prospects in the fields of optical imaging, polarization conversion, optical holography, vortex light generators, etc.

[0003] When manufacturing metalens and DOE, semiconductor processes are required to etch them to obtain the desired micro-nano structures. However, for the processed metalens and DOE, it is also necessary to detect the appearance and size of their micro-nano structures to prevent large size errors or even large-area collapse or detachment of micro-nano structures. At the same time, for the appearance detection of metalens, it is also necessary to detect defects such as stains and scratches. For the lenses that pass the appearance inspection, it is also necessary to detect their optical performance before formal use, such as focal length, transmittance, modulation transfer function (MTF), distortion, field angle of view (FOV), etc. In the mass production stage, a large number of metalens and DOE lenses need to be detected, so the detection system needs to be fully automated to automatically detect the optical performance of metalens and DOE lenses and identify defective products. Currently, there is still a lack of relevant efficient detection devices in this field. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a metalens microstructure and an optical performance detection device thereof to solve the above problems and achieve full-automatic and all-round automated detection in the mass production stage of metalens, thereby improving the detection efficiency.

[0005] To achieve the above purpose, the utility model provides the following solutions:

[0006] A metalens microstructure and an optical performance detection device thereof, comprising:

[0007] A base and a mounting frame installed on the top surface of the base;

[0008] A dome installed on the mounting frame;

[0009] A camera, which is connected to the dome in an angle-adjustable manner, and the distance between the camera and the dome is adjustable;

[0010] A diaphragm position adjustment component is installed on the base;

[0011] A detachable light source is mounted on the base, wherein the light source comprises a first detection mode light source and a second detection mode light source;

[0012] A workpiece table, used for placing the lens to be inspected, located between the inspection end of the aperture position adjustment assembly and the detachable light source;

[0013] A light screen mounting piece is also provided between the aperture position adjustment assembly and the camera, and the light screen mounting piece is connected to the mounting frame.

[0014] Preferably, the dome includes a plurality of arc plates, an arc groove is formed on the arc plate, the arc groove is concentrically arranged with the arc plate, a plurality of the arc plates are arranged at equal intervals, a plurality of the arc plates are located on the same spherical surface, a camera adjustment plate is slidably installed in the arc groove, and the other end of the camera adjustment plate is connected to the camera.

[0015] Preferably, the aperture position adjustment assembly includes a support seat, one side of the support seat is connected to the fixed end of the first Z-axis electric displacement platform, the movable end of the first Z-axis electric displacement platform is installed with the fixed end of the XY manual displacement stage, the movable end of the XY manual displacement stage is fixedly connected to one end of the cantilever, the other end of the cantilever is installed with an aperture, the cantilever is also installed with a first laser rangefinder, and the aperture is located below the camera.

[0016] Preferably, the interior of the base is a hollow structure, and a mounting seat is fixedly connected inside the base, and a fixed end of a second Z-axis electric displacement platform is fixedly connected to one side of the mounting seat; a fixed end of a six-axis optical manual displacement platform is mounted on the movable end of the second Z-axis electric displacement platform, and a second laser rangefinder is fixedly connected to the movable end of the six-axis optical manual displacement platform, and the detachable light source is detachably connected to the movable end of the six-axis optical manual displacement stage.

[0017] Preferably, the light screen mounting member is a mounting plate, the mounting plate is fixedly connected to the mounting frame via a connecting rod, the light screen mounting member is a hollow structure, and the light screen is mounted in the hollow structure.

[0018] Preferably, the worktable is installed on the movable end of the XY electric mobile platform, the fixed end of the XY electric mobile platform is installed on the top surface of the base, a clearance space is opened in the middle of the worktable, a wafer tray is installed on the top surface of the worktable, the clearance space is located below the wafer tray, and the wafer is installed in the wafer tray.

[0019] The utility model has the following technical effects:

[0020] In the present utility model, the camera and the dome are set to be adjustable in angle and distance, which can facilitate the camera to perform the detection on the lens to be detected for the expected detection. Moreover, the adjustable distance between the camera and the dome can adapt to the adjustment of the detection position of the camera according to the actual detection situation to adapt to different detection items. In addition, for different detection types, the light source is set to be replaceable to detect the microstructure and optical performance of the superlens, effectively improving the automated detection and the detection efficiency. Brief Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 Structural schematic diagram of the utility model;

[0023] Figure 2 Structural schematic diagram of another perspective of the present utility model after removing the base;

[0024] Figure 3 Structural schematic diagram of the dome of the present utility model;

[0025] Figure 4 Structural schematic diagram of the present utility model after removing the mounting bracket and the base;

[0026] Figure 5 Structural schematic diagram of the diaphragm position adjustment component, mounting seat, and second laser rangefinder of the present utility model.

[0027] Wherein, 1. Dome; 2. Connecting rod; 3. Workpiece table; 4. Light screen mounting member; 5. Base; 6. Diaphragm position adjustment component; 601. Support seat; 602. First Z-axis electric displacement platform; 603. XY manual displacement table; 604. Cantilever; 605. Diaphragm; 606. First laser rangefinder; 7. Mounting seat; 701. Second Z-axis electric displacement platform; 702. Six-axis optical manual displacement table; 703. Second laser rangefinder; 704. Light source mounting member; 11. Arc plate; 13. Camera; 131. Camera adjustment rod; 15. Mounting bracket; 16. Light screen; 17. Wafer tray; 18. Wafer. Detailed Embodiments

[0028] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0029] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the present utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] Refer to Figures 1 to 5 As shown, this embodiment provides a superlens microstructure and its optical performance detection device, including:

[0031] A base 5 and a mounting frame 15 mounted on the top surface of the base 5;

[0032] A dome 1, mounted on the mounting frame 15;

[0033] A camera 13, the angle of the camera 13 is adjustably connected to the dome 1, and the distance of the camera 13 relative to the dome 1 is adjustable;

[0034] A diaphragm position adjustment component 6 is mounted on the base 5;

[0035] A detachable light source, mounted on the base 5, the light source includes a first detection mode light source and a second detection mode light source;

[0036] A workpiece table 3, used to place the lens to be detected, located between the detection end of the diaphragm position adjustment component 6 and the detachable light source;

[0037] A light screen mounting member 4 is further provided between the diaphragm position adjustment component 6 and the camera 13, and the light screen mounting member 4 is connected to the mounting frame 15.

[0038] In the present utility model, the camera 13 and the dome 1 are set to be adjustable in angle and distance, which can facilitate the camera 13 to perform the detection on the lens to be detected as expected. And the adjustable distance between the camera 13 and the dome 1 can adapt to adjust the detection position of the camera 13 according to the actual detection situation to adapt to different detection items. In addition, the present utility model sets different detection types, and the light source is set to be replaceable to detect the microstructure of the superlens and the optical performance of the superlens; effectively improving the automated detection and the detection efficiency.

[0039] For a further optimized solution, the dome 1 includes several arc-shaped plates 11. Arc-shaped grooves are formed in the arc-shaped plates 11, and the arc-shaped grooves are concentric with the arc-shaped plates 11. The several arc-shaped plates 11 are arranged at equal intervals and are located on the same spherical surface. A camera adjustment plate 131 is slidably installed in the arc-shaped groove, and the other end of the camera adjustment plate 131 is connected to the camera 13.

[0040] One end of the camera adjustment plate 131 is detachably connected to the arc-shaped groove by bolts, and the other end of the camera adjustment plate 131 is detachably connected to the camera 13. The angle adjustment of the camera 13 is achieved by different positions of the camera adjustment plate 131 in the arc-shaped groove. The camera adjustment plate 131 also has a telescopic function, and the adjustment of the position of the camera 13 relative to the dome 1 can be realized through the telescopic function of the camera adjustment rod 14.

[0041] For a further optimized solution, the diaphragm position adjustment assembly 6 includes a support base 601. One side of the support base 601 is connected to the fixed end of the first Z-axis electric displacement platform 602. The movable end of the first Z-axis electric displacement platform 602 is installed with the fixed end of an XY manual displacement stage 603. The movable end of the XY manual displacement stage 603 is fixedly connected to one end of a cantilever 604. The other end of the cantilever 604 is installed with a diaphragm 605. A first laser rangefinder 606 is also installed on the cantilever 604. The diaphragm 605 is located below the camera 13.

[0042] The first laser rangefinder 606 and the diaphragm 605 can adjust the height in the vertical direction through the first Z-axis electric displacement platform 602, so that the diaphragm 605 can be in a suitable position for detection during the detection process.

[0043] For a further optimized solution, the interior of the base 5 is a hollow structure. An installation base 7 is fixedly connected inside the base 5. One side of the installation base 7 is fixedly connected to the fixed end of a second Z-axis electric displacement platform 701. The movable end of the second Z-axis electric displacement platform 701 is installed with the fixed end of a six-axis optical manual displacement stage 702. The movable end of the six-axis optical manual displacement stage 702 is fixedly connected to a second laser rangefinder 703. The detachable light source is detachably connected to the movable end of the six-axis optical manual displacement stage 702.

[0044] The second Z-axis electric displacement platform 701 is used to adjust the vertical height of the positions of the second laser rangefinder 703 and the light source, and the six-axis optical manual displacement stage 702 is used to adjust their positions in the XY two directions to ensure the detection of different positions of the wafer.

[0045] For a further optimized solution, the light screen mounting member 4 is a mounting plate. The mounting plate is fixedly connected to the mounting frame 15 through a connecting rod 2. The light screen mounting member 4 is a hollow structure, and the light screen 16 is mounted in the hollow structure.

[0046] When performing DOE testing, the light screen 16 is mounted on the light screen mounting member 4, and the detachable light source is installed as a halogen lamp for testing.

[0047] To further optimize the solution, the workpiece table 3 is installed on the movable end of the XY electric mobile platform, the fixed end of the XY electric mobile platform is installed on the top surface of the base 5, a clearance space is opened in the middle of the workpiece table 3, a wafer tray 17 is installed on the top surface of the workpiece table 3, the clearance space is located below the wafer tray 17, and the wafer 18 is installed in the wafer tray 17.

[0048] When performing structural inspection on wafer 18, the detachable light source is installed as a laser. By controlling the movement of the workpiece table 3, inspections can be performed on different positions of the wafer 18, which provides assistance for the automation of inspection. This utility model can realize multiple inspections using one device, and there is no need to replace the device for inspection.

[0049] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0050] The embodiments described above are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A superlens microstructure and an optical performance detection device thereof, characterized in that: include: A base (5), and a mounting frame (15) mounted on the top surface of the base (5); A dome (1) mounted on the mounting frame (15); A camera (13), wherein the camera (13) is connected to the dome (1) in an adjustable angle, and the distance of the camera (13) relative to the dome (1) is adjustable; The aperture position adjustment component (6) is mounted on the base (5); A detachable light source, mounted on the base (5), the light source comprising a first detection mode light source and a second detection mode light source; A workpiece table (3) is used to place the lens to be inspected and is located between the inspection end of the aperture position adjustment component (6) and the detachable light source; A light screen mounting component (4) is also provided between the aperture position adjustment component (6) and the camera (13), and the light screen mounting component (4) is connected to the mounting frame (15).

2. A superlens microstructure and an optical performance detection device thereof according to claim 1, characterized in that: The dome (1) comprises a plurality of arc-shaped plates (11), the arc-shaped plates (11) are provided with an arc-shaped groove, the arc-shaped groove is arranged concentrically with the arc-shaped plates (11), the plurality of arc-shaped plates (11) are arranged at equal intervals, the plurality of arc-shaped plates (11) are located on the same spherical surface, a camera adjustment plate (131) is slidably installed in the arc-shaped groove, and the other end of the camera adjustment plate (131) is connected to the camera (13).

3. A superlens microstructure and an optical performance detection device thereof according to claim 1, characterized in that: The aperture position adjustment assembly (6) comprises a support seat (601), one side of the support seat (601) is connected to the fixed end of a first Z-axis electric displacement platform (602), the movable end of the first Z-axis electric displacement platform (602) is mounted with the fixed end of an XY manual displacement platform (603), the movable end of the XY manual displacement platform (603) is fixedly connected with one end of a cantilever (604), the other end of the cantilever (604) is mounted with an aperture (605), the cantilever (604) is also mounted with a first laser rangefinder (606), and the aperture (605) is located below the camera (13).

4. A superlens microstructure and an optical performance detection device thereof according to claim 1, characterized in that: The interior of the base (5) is a hollow structure, and a mounting seat (7) is fixedly connected inside the base (5); a fixed end of a second Z-axis electric displacement platform (701) is fixedly connected to one side of the mounting seat (7); a fixed end of a six-axis optical manual displacement platform (702) is mounted on the movable end of the second Z-axis electric displacement platform (701); a second laser rangefinder (703) is fixedly connected to the movable end of the six-axis optical manual displacement platform (702); and the detachable light source is detachably connected to the movable end of the six-axis optical manual displacement platform (702).

5. A superlens microstructure and optical performance detection device according to claim 1, characterized in that: The light screen mounting member (4) is a mounting plate, the mounting plate is fixedly connected to the mounting frame (15) via a connecting rod (2), the light screen mounting member (4) is a hollow structure, and the light screen (16) is mounted in the hollow structure.

6. A superlens microstructure and an optical performance detection device thereof according to claim 1, characterized in that: The workpiece table (3) is mounted on the movable end of the XY electric movable platform, the fixed end of the XY electric movable platform is mounted on the top surface of the base (5), a clearance space is opened in the middle of the workpiece table (3), a wafer tray (17) is mounted on the top surface of the workpiece table (3), the clearance space is located below the wafer tray (17), and the wafer (18) is mounted in the wafer tray (17).

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