Layout structure of detection device with multiple sample sources

Abstract

The utility model relates to the field of wafer detection, and discloses a multi-sample-source detection device layout structure which comprises a wafer pretreatment mechanism, the wafer pretreatment mechanism is arranged on the left side of the outer wall of an element analysis instrument, a bottled sample injection module is detachably arranged in the wafer pretreatment mechanism, and the bottled sample injection module is arranged on the left side of the outer wall of the element analysis instrument. The bottled sample injection module is composed of a swing arm, a plurality of sample bottles and a rotating platform, a pneumatic control valve is arranged between the three-way pipe and the element analysis instrument, an atomizer is arranged in the element analysis instrument, a first guide pipe is fixed between the three-way pipe and the injection pump, a third guide pipe is fixed between the three-way pipe and the pneumatic control valve, and the third guide pipe is fixed between the three-way pipe and the rotating platform. And a fourth guide pipe is fixed between the pneumatic control valve and the atomizer. According to the utility model, through the split type structure of the rack and the bypass design of the pipeline, the sample injection detection of multiple sample sources is realized, the detection modes of sample injection are increased, the utilization rate of a detection instrument is improved, and the use cost of equipment is also reduced at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection, in particular to a layout structure of a detection device with multiple sample sources. Background Technique

[0002] A wafer refers to a silicon wafer used to fabricate silicon semiconductor circuits, and its raw material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon. After the silicon ingot is ground, polished, and sliced, a silicon wafer is formed, that is, a wafer. The domestic wafer production line is mainly 8 inches and 12 inches.

[0003] With the continuous reduction of the semiconductor chip line width limit, the proportion of non-visual defects gradually increases. In the process of less than 20nm process, the demand for non-visual (chemical method) monitoring solutions grows rapidly. Existing fully automatic wafer metal pollutant detection equipment often integrates wafer transfer, wafer pre-treatment, metal pollutant extraction, and elemental content analysis.

[0004] Since the chemical method monitoring solution uses a method of destroying the surface protective film of the wafer and using chemical liquid to extract surface metal pollutants to analyze the elemental composition and content, this equipment can only monitor wafers produced in the same batch by sampling. It has the following disadvantages: the number of sampled wafers will be relatively less than the production capacity of the above-mentioned fully automatic detection equipment, resulting in underutilization of the equipment and elemental content analysis instruments. Content of the Utility Model

[0005] The purpose of the utility model is to provide a layout structure of a detection device with multiple sample sources to solve the problem that the number of sampled wafers is relatively less than the production capacity of the above-mentioned fully automatic detection equipment, resulting in underutilization of the equipment and elemental content analysis instruments.

[0006] To achieve the above-mentioned utility model purpose, the present utility model adopts the following technical solutions: A layout structure of a detection device with multiple sample sources, including a wafer pretreatment mechanism, which is arranged on the left outer wall of an elemental analysis instrument. A bottled sample injection module is detachably arranged inside the wafer pretreatment mechanism. The bottled sample injection module consists of a swing arm, several sample bottles, and a rotating platform. The swing arm is rotatably arranged on the top surface of the bottled sample injection module. The rotating platform is detachably arranged inside the wafer pretreatment mechanism. Several of the sample bottles are respectively arranged on the top surface of the rotating platform. An injection pump is arranged inside the wafer pretreatment mechanism. A three-way pipe is arranged between the wafer pretreatment mechanism and the elemental analysis instrument. An air control valve is arranged between the three-way pipe and the elemental analysis instrument. An atomizer is arranged inside the elemental analysis instrument. A first conduit is fixed between the three-way pipe and the injection pump. A second conduit is fixed between the three-way pipe and the swing arm. A third conduit is fixed between the three-way pipe and the air control valve. A fourth conduit is fixed between the air control valve and the atomizer.

[0007] Preferably, a display is rotatably arranged on the front side of the outer wall of the wafer pretreatment mechanism.

[0008] Preferably, a mounting frame is fixed on the front side of the outer wall of the wafer pretreatment mechanism. A connecting rod is rotatably arranged on the top surface of the mounting frame. A connecting frame is rotatably arranged on the top surface of the connecting rod. One side of the connecting frame is fixedly connected to one side of the display.

[0009] Preferably, a fixing plate is fixed on the right side of the outer wall of the bottled sample injection module. Two bolts are arranged on the fixing plate. The fixing plate and the wafer pretreatment mechanism are connected by two bolts.

[0010] Preferably, a lighting lamp is arranged inside the wafer pretreatment mechanism.

[0011] Preferably, several support frames are respectively fixed on the bottom surfaces of the wafer pretreatment mechanism and the elemental analysis instrument.

[0012] Compared with the prior art, a layout structure of a detection device with multiple sample sources adopting the above technical solutions has the following beneficial effects:

[0013] First, in use, through the split structure of the rack and the bypass design of the pipeline, the injection detection of multiple sample sources is realized, increasing the detection methods of sample injection, improving the utilization rate of the detection instrument, and at the same time reducing the use cost of the equipment;

[0014] II. During use, the display facilitates the display of information, enabling staff to monitor and analyze data more directly and effectively, thereby improving the convenience and work efficiency of operations. The mounting bracket, connecting rod, and connecting frame facilitate the rotation of the display by the staff, making it convenient for the staff to make adjustments, and improving the flexibility and comfort of operations;

[0015] III. During use, the fixed plate and bolts facilitate the disassembly and assembly of the bottled sample injection module by the staff, and thus facilitate the maintenance or replacement of the bottled sample injection module by the staff. The lighting lamp facilitates the illumination of the interior of the wafer pretreatment mechanism, enabling the staff to observe and operate the internal structure of the equipment more clearly, and enhancing the convenience and accuracy of maintenance and operations. The support frame facilitates the support of the wafer pretreatment mechanism and the elemental analysis instrument, can improve stability, and at the same time raises the bottoms of the wafer pretreatment mechanism and the elemental analysis instrument, reducing the impact of ground dust and moisture on the equipment and extending the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the embodiment.

[0017] Figure 2 It is an exploded schematic diagram of the embodiment.

[0018] Figure 3 It is an exploded schematic diagram of the swing arm and the rotating platform in the embodiment.

[0019] Figure 4 It is a front view schematic diagram of the embodiment.

[0020] In the figure: 1. Wafer pretreatment mechanism; 2. Elemental analysis instrument; 3. Bottled sample injection module; 301. Swing arm; 302. Sample bottle; 303. Rotating platform; 4. Injection pump; 5. Three-way pipe; 6. Pneumatic control valve; 7. Nebulizer; 8. First conduit; 9. Second conduit; 10. Third conduit; 11. Fourth conduit; 12. Display; 13. Mounting bracket; 14. Connecting rod; 15. Connecting frame; 16. Fixed plate; 17. Bolt; 18. Lighting lamp; 19. Support frame. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The following will describe in detail the preferred embodiments of the present invention with reference to the accompanying drawings.

[0022] Such as Figures 1 - 4As shown in the figure, a detection device layout structure with multiple sample sources includes a wafer pretreatment mechanism 1, which is arranged on the left outer wall of an elemental analysis instrument 2. A bottled sampling module 3 is detachably arranged inside the wafer pretreatment mechanism 1. The bottled sampling module 3 consists of a swing arm 301, several sample bottles 302, and a rotating platform 303. The swing arm 301 is rotatably arranged on the top surface of the bottled sampling module 3. The rotating platform 303 is detachably arranged inside the wafer pretreatment mechanism 1. Several sample bottles 302 are respectively arranged on the top surface of the rotating platform 303. An injection pump 4 is arranged inside the wafer pretreatment mechanism 1. A three-way pipe 5 is arranged between the wafer pretreatment mechanism 1 and the elemental analysis instrument 2. An air control valve 6 is arranged between the three-way pipe 5 and the elemental analysis instrument 2. An atomizer 7 is arranged inside the elemental analysis instrument 2. A first conduit 8 is fixed between the three-way pipe 5 and the injection pump 4. A second conduit 9 is fixed between the three-way pipe 5 and the swing arm 301. A third conduit 10 is fixed between the three-way pipe 5 and the air control valve 6. A fourth conduit 11 is fixed between the air control valve 6 and the atomizer 7.

[0023] During use, the existing fully automatic wafer metal pollutant detection equipment is split into two parts: the wafer pretreatment mechanism 1 and the elemental analysis instrument 2, and at the same time, a bottled sampling module 3 is equipped, which is used as a temporary storage area for metal pollutant extraction liquid or other liquids to be measured. In terms of equipment use, they can be combined in pairs. The sample extraction liquid to be measured is sent to the three-way pipe 5 through a conduit by the injection pump 4. The air control valve 6 is opened, and the sample solution is inhaled into the elemental analysis instrument 2 by the atomizer 7 at the elemental analysis instrument 2 for analysis. The air control valve 6 is closed, and the sample extraction liquid to be measured is sent to the bottled sampling module 3 through a conduit by the injection pump 4 and introduced into the corresponding sample bottles 302 for measurement. When the equipment is idle, the elemental analysis instrument 2 can be fully utilized. The liquid to be measured from other equipment or other sources is filled in the sample bottles 302, placed in the bottled sampling module 3, and then the conduit on the swing arm 301 is inserted into the sample bottles 302. The air control valve 6 is opened, and the liquid to be measured is inhaled into the elemental analysis instrument 2 by the atomizer 7 for analysis. Through the movement of the swing arm 301 and the rotating platform 303, different sample extraction liquids can be introduced into different sample bottles 302 for measurement. In terms of equipment configuration, multiple options are provided. For example, if there is already an elemental analysis instrument 2, the wafer pretreatment mechanism 1 and the bottled sampling module 3 can be selected, the sample solution is introduced into the sample bottles 302 for measurement, and then it is moved to the existing elemental analysis instrument 2 for analysis. Or multiple wafer pretreatment mechanisms 1 can be configured with fewer elemental analysis instruments 2.

[0024] Through the split structure of the frame and the bypass design of the pipeline, the sampling detection of multiple sample sources is realized, increasing the detection methods of sample sampling, improving the utilization rate of the detection instrument, and at the same time reducing the use cost of the equipment.

[0025] Such as Figure 1 、 Figure 2 andFigure 4 As shown in the figure, a display 12 is rotatably arranged on the front side of the outer wall of the wafer pre-processing mechanism 1.

[0026] In use, the information can be displayed through the display 12, enabling the staff to monitor and analyze data more directly and effectively, improving the operation convenience and work efficiency.

[0027] Such as Figures 1 - 4 As shown in the figure, a mounting bracket 13 is fixed on the front side of the outer wall of the wafer pre-processing mechanism 1. A connecting rod 14 is rotatably arranged on the top surface of the mounting bracket 13. A connecting frame 15 is rotatably arranged on the top surface of the connecting rod 14. One side of the connecting frame 15 is fixedly connected with one side of the display 12. A fixing plate 16 is fixed on the right side of the outer wall of the bottled sample injection module 3. Two bolts 17 are arranged on the fixing plate 16. The fixing plate 16 and the wafer pre-processing mechanism 1 are connected by two bolts 17.

[0028] In use, through the mounting bracket 13, the connecting rod 14 and the connecting frame 15, it is convenient for the staff to rotate the display 12, facilitating the staff to make adjustments, improving the operation flexibility and comfort. Through the fixing plate 16 and the bolts 17, it is convenient for the staff to disassemble and assemble the bottled sample injection module 3, and then facilitate the staff to maintain or replace the bottled sample injection module 3.

[0029] Such as Figure 1 、 Figure 2 And Figure 4 As shown in the figure, a lighting lamp 18 is arranged inside the wafer pre-processing mechanism 1. A number of support frames 19 are respectively fixed on the bottom surfaces of the wafer pre-processing mechanism 1 and the elemental analysis instrument 2.

[0030] In use, through the lighting lamp 18, it is beneficial to illuminate the inside of the wafer pre-processing mechanism 1, enabling the staff to observe and operate the internal structure of the equipment more clearly, improving the convenience and accuracy of maintenance and operation. Through the support frames 19, it is beneficial to support the wafer pre-processing mechanism 1 and the elemental analysis instrument 2, improving the stability. At the same time, the bottoms of the wafer pre-processing mechanism 1 and the elemental analysis instrument 2 are raised, reducing the influence of ground dust and moisture on the equipment and extending the service life of the equipment.

[0031] The above is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and the inventive concept of the present invention, makes equivalent substitution or change, and should be covered by the protection scope of the present invention.

Claims

1. A layout structure of a detection device with multiple sample sources, comprising a wafer pre-processing mechanism (1), wherein the wafer pre-processing mechanism (1) is arranged on the left side of the outer wall of an elemental analysis instrument (2), characterized in that: The wafer pre-processing mechanism (1) is provided with a bottle injection module (3) detachably therein, and the bottle injection module (3) is composed of a swing arm (301), a plurality of sample bottles (302), and a rotating platform (303). The swing arm (301) is rotatably arranged on the top surface of the bottle injection module (3), and the rotating platform (303) is detachably arranged inside the wafer pre-processing mechanism (1). The plurality of sample bottles (302) are respectively arranged on the top surface of the rotating platform (303). An injection pump (4) is provided inside the wafer pre-processing mechanism (1). A three-way pipe (5) is provided between the pre-treatment mechanism (1) and the elemental analysis instrument (2), a gas control valve (6) is provided between the three-way pipe (5) and the elemental analysis instrument (2), an atomizer (7) is provided inside the elemental analysis instrument (2), a first conduit (8) is fixed between the three-way pipe (5) and the injection pump (4), a second conduit (9) is fixed between the three-way pipe (5) and the swing arm (301), a third conduit (10) is fixed between the three-way pipe (5) and the gas control valve (6), and a fourth conduit (11) is fixed between the gas control valve (6) and the atomizer (7).

2. The layout structure of a detection device with multiple sample sources according to claim 1, characterized in that: A display (12) is rotatably provided on the front side of the outer wall of the wafer pre-processing mechanism (1).

3. The layout structure of a detection device with multiple sample sources according to claim 2, characterized in that: A mounting frame (13) is fixed on the front side of the outer wall of the wafer pre-processing mechanism (1), a connecting rod (14) is rotatably provided on the top surface of the mounting frame (13), a connecting frame (15) is rotatably provided on the top surface of the connecting rod (14), and one side of the connecting frame (15) is fixedly connected to one side of the display (12).

4. The layout structure of a detection device with multiple sample sources according to claim 3, characterized in that: A fixing plate (16) is fixed to the right side of the outer wall of the bottled sample injection module (3), two bolts (17) are provided on the fixing plate (16), and the fixing plate (16) is connected to the wafer pre-processing mechanism (1) via the two bolts (17).

5. The layout structure of a detection device with multiple sample sources according to claim 1, characterized in that: An illumination lamp (18) is provided inside the wafer pre-processing mechanism (1).

6. The layout structure of a detection device with multiple sample sources according to claim 5, characterized in that: A plurality of support frames (19) are respectively fixed to the bottom surfaces of the wafer pre-processing mechanism (1) and the element analysis instrument (2).

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