Manual matcher structure for radio frequency ion source cathode

Abstract

The utility model discloses a manual matcher structure for a cathode of a radio frequency ion source, belongs to the technical field of vacuum coating, and aims to provide the manual matcher structure for the cathode of the radio frequency ion source, so as to solve the problem that a traditional automatic matcher for the cathode of the radio frequency ion source is high in manufacturing cost, so that the manufacturing cost of the radio frequency ion source is too high. The device comprises a shell, an air adjustable capacitor bank is installed in the shell, the air adjustable capacitor bank comprises four adjustable capacitors, and a manual adjusting knob is connected with rotating rods of the adjustable capacitors. One end of the shell is provided with an electrical input base, the electrical input base is provided with a direct current power supply input socket, an argon input clamping sleeve joint and a radio frequency power supply lead-in socket, the shell is internally provided with an impedance pulsation switching assembly, and one end, far away from the electrical input base, of the shell is provided with a vacuum flange assembly. An argon penetrating capillary tube is further arranged in the shell. The utility model is suitable for the manual matcher structure for the cathode of the radio frequency ion source.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and particularly relates to a manual matching device structure for a radio frequency ion source cathode. Background Art

[0002] With the rapid development of science and technology, the technology of vacuum coating has been widely used. Due to the increasingly strict requirements for optical thin films, various ion sources are also increasingly used in the coating process. Especially now, with the continuous breakthrough of radio frequency ion source technology, the use of radio frequency ion sources has been gradually popularized.

[0003] Currently, the ignition of the radio frequency ion source cathode mainly uses an automatic matching device for the radio frequency ion source cathode. This device is very expensive, greatly increasing the production cost of enterprises. How to optimize the matching device structure and reduce the equipment cost while ensuring the working stability of the radio frequency ion source cathode is the key for production enterprises to reduce the manufacturing cost of radio frequency ion sources. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a manual matching device structure for a radio frequency ion source cathode, so as to solve the problem that the traditional automatic matching device for the radio frequency ion source cathode is expensive, resulting in too high manufacturing cost of the radio frequency ion source.

[0005] The technical solution adopted by the utility model is as follows:

[0006] A manual matching device structure for a radio frequency ion source cathode includes a housing, which is enclosed by an outer shell and an inner shell. A mask is arranged on the inner shell. An air adjustable capacitor bank is installed in the housing. The air adjustable capacitor bank includes four adjustable capacitors. Four manual adjustment knobs are installed on the mask, and the manual adjustment knobs are respectively connected to the rotating rods of the adjustable capacitors;

[0007] One end of the housing is provided with an electrical input base, and a DC power input socket, an argon input ferrule joint, and a radio frequency power input socket are arranged on the electrical input base;

[0008] An impedance pulsation switching component is installed in the housing. The impedance pulsation switching component includes a PCB rear board, a PCB front board, a first vacuum relay, and a second vacuum relay. One end of the first vacuum relay is welded to the PCB rear board, the other end of the first vacuum relay is welded to the PCB front board, the second vacuum relay is welded to the PCB rear board, and a PCB socket is also arranged on the PCB front board. The PCB socket is connected to the DC power input socket through a wire;

[0009] One end of the housing away from the electrical input base is provided with a vacuum flange assembly. On the vacuum flange assembly, there are a radio frequency electrode rod, a keeper electrode rod, a collector electrode rod, and an argon gas output ferrule joint. The electrode end of the radio frequency electrode rod is connected to the radio frequency signal lead-out point of the second vacuum relay through a PTFE wire. The electrode end of the keeper electrode rod is connected to the keeper lead-out point of the PCB front panel through a PTFE wire. The collector electrode rod is connected to the collector lead-out point of the PCB front panel through a PTFE wire. One end of the radio frequency electrode rod, the keeper electrode rod, the collector electrode rod, and the argon gas output ferrule joint away from the interior of the housing is installed with a radio frequency cathode connector locking flange;

[0010] An argon gas through capillary is also provided inside the housing. One end of the argon gas through capillary is communicated with the argon gas input ferrule joint, and the other end of the argon gas through capillary is communicated with the argon gas output ferrule joint.

[0011] Further, a bracket is provided at the bottom of the PCB front panel, and the bracket is installed at the bottom of the inner housing through screws.

[0012] Further, the radio frequency electrode rod, the keeper electrode rod, and the collector electrode rod are all high-voltage insulated electrode rods.

[0013] Further, an anti-touch safety guard plate is also installed inside the housing beside the air adjustable capacitor bank.

[0014] In summary, due to the adoption of the above technical solutions, the beneficial effects of the present utility model are as follows:

[0015] 1. In the present utility model, four adjustable capacitors are divided into two groups in pairs, which are respectively used to adjust the real part and the imaginary part of the radio frequency matching circuit. The DC power input socket is connected to a dual-channel DC power supply, the argon gas input ferrule joint is connected to a high-purity argon gas cylinder, the radio frequency power supply input socket is connected to a radio frequency power supply, and then after the vacuum flange assembly is hermetically connected to the vacuum chamber and introduced to the radio frequency cathode through wires, the electrical conditions for radio frequency cathode ignition can be provided. Based on the structural design, a manual matcher for the radio frequency ion source cathode is provided, effectively replacing the expensive automatic matcher for the radio frequency ion source cathode, while ensuring the working stability of the radio frequency ion source cathode, greatly reducing the manufacturing cost of the radio frequency ion source. Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts, where:

[0017] Figure 1 Explosion schematic diagram of the present utility model;

[0018] Figure 2 Structural schematic diagram of the present utility model;

[0019] Figure 3 Structural schematic diagram of the electrical input base of the present utility model;

[0020] Figure 4 Structural schematic diagram of the impedance pulsation switching component of the present utility model;

[0021] Figure 5 Structural schematic diagram of the vacuum flange component of the present utility model;

[0022] Figure 6 Application schematic diagram of the present utility model;

[0023] Markings in the figure: 1 - outer shell, 2 - face mask, 3 - inner shell, 4 - electrical input base, 41 - RF power supply input socket, 42 - argon input ferrule joint, 43 - DC power supply input socket, 5 - air adjustable capacitor bank, 6 - impedance pulsation switching component, 61 - first vacuum relay, 62 - second vacuum relay, 63 - PCB rear panel, 64 - PCB socket, 65 - bracket, 66 - PCB front panel, 67 - collector lead-out point, 68 - keeper lead-out point, 69 - RF signal lead-out point, 7 - argon through capillary, 8 - vacuum flange component, 81 - RF electrode rod, 82 - keeper electrode rod, 83 - collector electrode rod, 84 - argon output ferrule joint, 85 - RF cathode connector locking flange, 9 - anti-touch safety guard plate, 10 - manual adjustment knob. Specific embodiments

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0026] It should be noted that the reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use. It is only for the convenience of describing the present utility model and is a simplified description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical", etc. do not mean that the components are required to be absolutely horizontal or hanging vertically, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0029] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0030] A manual matching device structure for a radio frequency ion source cathode, comprising a housing, the housing is enclosed by an outer shell and an inner shell, a mask is arranged on the inner shell, an air adjustable capacitor bank is installed in the housing, the air adjustable capacitor bank includes four adjustable capacitors, four manual adjustment knobs are installed on the mask, and the manual adjustment knobs are respectively connected to the rotating rods of the adjustable capacitors;

[0031] One end of the housing is installed with an electrical input base, and a DC power input socket, an argon input ferrule joint, and a radio frequency power input socket are arranged on the electrical input base;

[0032] An impedance pulsation switching component is installed inside the housing. The impedance pulsation switching component includes a PCB rear plate, a PCB front plate, a first vacuum relay, and a second vacuum relay. One end of the first vacuum relay is welded to the PCB rear plate, and the other end of the first vacuum relay is welded to the PCB front plate. The second vacuum relay is welded to the PCB rear plate. A PCB socket is also provided on the PCB front plate, and the PCB socket is connected to a DC power input socket through a wire.

[0033] One end of the housing away from the electrical input base is provided with a vacuum flange assembly. The vacuum flange assembly is provided with a radio frequency electrode rod, a keeper electrode rod, a collector electrode rod, and an argon gas output ferrule joint. The electrode end of the radio frequency electrode rod is connected to the radio frequency signal lead-out point of the second vacuum relay through a PTFE wire. The electrode end of the keeper electrode rod is connected to the keeper lead-out point of the PCB front plate through a PTFE wire. The collector electrode rod is connected to the collector lead-out point of the PCB front plate through a PTFE wire. One end of the radio frequency electrode rod, the keeper electrode rod, the collector electrode rod, and the argon gas output ferrule joint away from the inside of the housing is installed with a radio frequency cathode connector locking flange.

[0034] An argon gas through capillary is also provided inside the housing. One end of the argon gas through capillary is communicated with an argon gas input ferrule joint, and the other end of the argon gas through capillary is communicated with the argon gas output ferrule joint.

[0035] Further, a bracket is provided at the bottom of the PCB front plate, and the bracket is installed at the bottom of the inner housing through screws.

[0036] Further, the radio frequency electrode rod, the keeper electrode rod, and the collector electrode rod are all high-voltage insulating electrode rods.

[0037] Further, an anti-touch safety guard plate is also installed inside the housing beside the air adjustable capacitor bank.

[0038] In the implementation process of the present utility model, four adjustable capacitors are divided into two groups in pairs, which are respectively used to adjust the real part and the imaginary part of the radio frequency matching circuit. The DC power input socket is connected to a dual-channel DC power supply, the argon gas input ferrule joint is connected to a high-purity argon gas cylinder, the radio frequency power supply input socket is connected to a radio frequency power supply, and then the vacuum flange assembly is hermetically connected to the vacuum chamber and then introduced to the radio frequency cathode through a wire, so as to provide the electrical conditions for radio frequency cathode ignition. Based on the structural design, a manual matcher for the radio frequency ion source cathode is provided, which effectively replaces the expensive automatic matcher for the radio frequency ion source cathode, and while ensuring the working stability of the radio frequency ion source cathode, greatly reduces the manufacturing cost of the radio frequency ion source.

[0039] Embodiment 1

[0040] A manual matching device structure for the cathode of a radio frequency ion source, comprising a housing, which is enclosed by an outer shell and an inner shell. A mask is provided on the inner shell. An air-adjustable capacitor bank is installed inside the housing. The air-adjustable capacitor bank includes four adjustable capacitors. Four manual adjustment knobs are installed on the mask, and the manual adjustment knobs are respectively connected to the rotating rods of the adjustable capacitors;

[0041] One end of the housing is equipped with an electrical input base, and a DC power input socket, an argon input ferrule joint, and a radio frequency power input socket are provided on the electrical input base;

[0042] An impedance pulsation switching component is installed inside the housing. The impedance pulsation switching component includes a PCB rear plate, a PCB front plate, a first vacuum relay, and a second vacuum relay. One end of the first vacuum relay is welded to the PCB rear plate, and the other end of the first vacuum relay is welded to the PCB front plate. The second vacuum relay is welded to the PCB rear plate. A PCB socket is also provided on the PCB front plate, and the PCB socket is connected to the DC power input socket through a wire;

[0043] A vacuum flange assembly is provided at the end of the housing away from the electrical input base. A radio frequency electrode rod, a holding electrode rod, a collector electrode rod, and an argon output ferrule joint are provided on the vacuum flange assembly. The electrode end of the radio frequency electrode rod is connected to the radio frequency signal extraction point of the second vacuum relay through a teflon wire. The electrode end of the holding electrode rod is connected to the holding electrode extraction point of the PCB front plate through a teflon wire. The collector electrode rod is connected to the collector electrode extraction point of the PCB front plate through a teflon wire. A radio frequency cathode connector locking flange is installed at the ends of the radio frequency electrode rod, the holding electrode rod, the collector electrode rod, and the argon output ferrule joint away from the interior of the housing;

[0044] An argon through capillary is also provided inside the housing. One end of the argon through capillary is communicated with the argon input ferrule joint, and the other end of the argon through capillary is communicated with the argon output ferrule joint.

[0045] Embodiment 2

[0046] On the basis of Embodiment 1, a bracket is provided at the bottom of the PCB front plate, and the bracket is installed at the bottom of the inner shell through screws.

[0047] Embodiment 3

[0048] On the basis of the above embodiments, the radio frequency electrode rod, the holding electrode rod, and the collector electrode rod are all high-voltage insulating electrode rods.

[0049] Embodiment 4

[0050] Based on the above embodiments, an anti-touch safety guard plate is also installed in the housing beside the air-adjustable capacitor bank.

[0051] As described above are the embodiments of the present invention. The foregoing are the various preferred embodiments of the present invention. If the preferred implementation manners in each preferred embodiment are not obviously self-contradictory or premised on a certain preferred implementation manner, the various preferred implementation manners can be arbitrarily superimposed and combined for use. The embodiments and the specific parameters in the embodiments are only for clearly expressing the verification process of the invention, and are not used to limit the patent protection scope of the present invention. The patent protection scope of the present invention still takes its claims as the criterion. All equivalent structural changes made by using the content of the specification and drawings of the present invention should, by the same token, be included in the protection scope of the present invention.

Claims

1. A manual matching device structure for a cathode of a radio frequency ion source, characterized in that: The invention comprises a shell, wherein the shell is enclosed by an outer shell (1) and an inner shell (3), a mask (2) is arranged on the inner shell (3), an air adjustable capacitor group (5) is installed in the shell, the air adjustable capacitor group (5) comprises four adjustable capacitors, four manual adjustment knobs (10) are installed on the mask (2), and the manual adjustment knobs (10) are respectively connected to the rotating rods of the adjustable capacitors; An electrical input base (4) is installed at one end of the housing, and a DC power input socket (43), an argon gas input ferrule connector (42), and a radio frequency power supply introduction socket (41) are provided on the electrical input base (4); An impedance pulsation switching component (6) is installed in the housing, and the impedance pulsation switching component (6) comprises a PCB rear plate (63), a PCB front plate (66), a first vacuum relay (61), and a second vacuum relay (62); one end of the first vacuum relay (61) is welded to the PCB rear plate (63), the other end of the first vacuum relay (61) is welded to the PCB front plate (66), and the second vacuum relay (62) is welded to the PCB rear plate (63); a PCB socket (64) is also provided on the PCB front plate (66), and the PCB socket (64) is connected to the DC power input socket (43) through a wire; A vacuum flange assembly (8) is provided at one end of the shell away from the electrical input base (4); a radio frequency electrode rod (81), a sustaining electrode rod (82), a collecting electrode rod (83), and an argon gas output ferrule joint (84) are provided on the vacuum flange assembly (8); the electrode end of the radio frequency electrode rod (81) is connected to the radio frequency signal lead-out point (69) of the second vacuum relay (62) through a polytetrafluoroethylene wire; the electrode end of the sustaining electrode rod (82) is connected to the sustaining electrode lead-out point (68) of the PCB front plate (66) through a polytetrafluoroethylene wire; the collecting electrode rod (83) is connected to the collecting electrode lead-out point (67) of the PCB front plate (66) through a polytetrafluoroethylene wire; and a radio frequency cathode connector locking connection flange (85) is installed at one end of the radio frequency electrode rod (81), the sustaining electrode rod (82), the collecting electrode rod (83), and the argon gas output ferrule joint (84) away from the inside of the shell; An argon gas penetrating capillary (7) is also provided in the shell, one end of the argon gas penetrating capillary (7) is connected to an argon gas input ferrule joint (42), and the other end of the argon gas penetrating capillary (7) is connected to an argon gas output ferrule joint (84).

2. A manual cathode matching device structure for a radio frequency ion source according to claim 1, characterized in that: A bracket (65) is provided at the bottom of the PCB front plate (66), and the bracket (65) is mounted on the bottom of the inner shell (3) by means of screws.

3. A manual cathode matching device structure for a radio frequency ion source according to claim 1, characterized in that: The radio frequency electrode rod (81), the sustaining electrode rod (82), and the collecting electrode rod (83) are all high-voltage insulating electrode rods.

4. A manual cathode matching device structure for a radio frequency ion source according to claim 1, characterized in that: An anti-touch safety shield (9) is also installed in the housing next to the air adjustable capacitor group (5).

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