Film battery coating machine

Abstract

The utility model provides a thin film battery coating machine, and relates to the technical field of battery coating. The thin film battery coating machine comprises a base, a coating machine body and a magnetic suspension planar motor, the coating machine body and the magnetic suspension planar motor are both arranged on the base, the coating machine body is used for coating a substrate, the magnetic suspension planar motor is used for bearing and transporting the substrate, and the requirement for higher movement precision can be met.

Description

Technical Field

[0001] This application relates to the technical field of battery coating, and more particularly, to a thin-film battery coater. Background Art

[0002] With the increasing maturity of the large-area coating process of perovskite batteries and the continuous improvement of efficiency, the trend of industrialization is irresistible. Existing coating equipment uses an air-floating device or a linear guide to transport the substrate during large-area operation. However, the highest motion accuracy of this transportation method can only reach the micron level and cannot meet the requirements for higher motion accuracy. Summary of the Utility Model

[0003] The objectives of this application include, for example, providing a thin-film battery coater that can meet the requirements for higher motion accuracy.

[0004] This application can be implemented as follows:

[0005] This application provides a thin-film battery coater, which includes a base, a coater body, and a magnetic levitation planar motor. Both the coater body and the magnetic levitation planar motor are arranged on the base. The coater body is used for coating the substrate, and the magnetic levitation planar motor is used for carrying and transporting the substrate.

[0006] Optionally, the magnetic levitation planar motor includes a coil array platform and a permanent magnet array platform. The permanent magnet array platform is arranged on the base and extends along the horizontal plane. The coil array platform is used for carrying the substrate.

[0007] Optionally, the permanent magnet array platform is a Halbach array, which is rectangular or annular. The coil array platform is provided with a first thrust coil and a second thrust coil that are parallel to the horizontal plane and arranged perpendicular to each other. The coil array platform and the permanent magnet array platform cooperate to generate a magnetic levitation force and a driving force, so that the coil array platform can achieve six-degree-of-freedom motion on the permanent magnet array platform.

[0008] Optionally, the number of the coil array platforms is one or more. When the number of the coil array platforms is multiple, the multiple coil array platforms are arranged at intervals on the permanent magnet array platform.

[0009] Optionally, the base includes a base plate and two fixed columns. Both of the two fixed columns are arranged on the base plate. The coater body is connected between the two fixed columns. The permanent magnet array platform is annular and is arranged on the base plate around one of the fixed columns.

[0010] Optionally, the coater body includes a fixing plate, a driving device, and a coating die head. The fixing plate is connected to the two fixing columns at the same time. The driving device is arranged on the fixing plate and connected to the coating die head to drive the coating die head to move up and down.

[0011] Optionally, the driving device includes a driving motor and a lead screw module. The lead screw module is arranged on the fixing plate. The driving motor is connected to the lead screw module, and the lead screw module is connected to the coating die head.

[0012] Optionally, the coater body further includes a first plate member and a second plate member. The first plate member is connected to the lead screw module. The second plate member is rotatably connected to the first plate member. The second plate member can rotate relative to the first plate member in a vertical plane. The coating die head is arranged on the second plate member.

[0013] Optionally, two displacement sensors are relatively arranged along the length direction of the second plate member.

[0014] Optionally, the second plate member is rotatably connected to the first plate member through a bearing.

[0015] The beneficial effects of the thin-film battery coater of the present application include, for example: In order to meet the requirements of higher motion accuracy, a thin-film battery coater is designed. The thin-film battery coater includes a base, a coater body, and a magnetic levitation planar motor. The coater body and the magnetic levitation planar motor are both arranged on the base. The coater body is used for coating a substrate, and the magnetic levitation planar motor is used for carrying and transporting the substrate. When the substrate needs to be coated, the substrate is placed on the magnetic levitation planar motor, and the magnetic levitation planar motor transports the substrate to the lower part of the coater body for coating. The magnetic levitation planar motor does not require physical structures such as mechanical support and air-floating support during the transportation of the substrate. There is no mechanical contact between the relative moving parts of the magnetic levitation planar motor, and it has a motion accuracy at the nanometer level, which can meet relatively higher accuracy requirements. Description of the Drawings

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0017] Figure 1 It is the first structural schematic diagram of the thin-film battery coater in the embodiment of the present application;

[0018] Figure 2This is the second structural schematic diagram of the thin-film battery coater in the embodiments of the present application;

[0019] Figure 3 This is the structural schematic diagram of the coater body in the embodiments of the present application.

[0020] Reference numerals: 100 - base; 110 - base plate; 120 - fixing column; 200 - coater body; 210 - fixing plate; 220 - driving device; 221 - driving motor; 222 - lead screw module; 230 - first plate member; 240 - second plate member; 250 - displacement sensor; 300 - maglev planar motor; 310 - coil array table; 320 - permanent magnet array table; 400 - substrate. Detailed implementation manners

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some, but not all, of the embodiments of the present application. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the scope of protection of the present application.

[0023] It should be noted that: like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0024] In the description of the present application, it should be noted that if terms such as "upper", "lower", "inner", "outer", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the utility model product is normally placed. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application.

[0025] In addition, if terms such as "first", "second", etc. are only used for distinguishing descriptions, they cannot be understood as indicating or implying relative importance.

[0026] It should be noted that, without conflict, the features in the embodiments of the present application can be combined with each other.

[0027] The inventors of the present application have found that when existing coating equipment performs large-area coating work, an air-floating device or a linear guide rail is generally used to transport the substrate. However, the maximum motion accuracy of this transportation method can only reach the micron level. When higher motion accuracy is required, the method of using an air-floating device or a linear guide rail to transport the substrate cannot meet the requirements. The embodiments of the present application provide a thin-film battery coater, which is at least used to solve the above technical problems.

[0028] Please refer to Figures 1 - 3 , the thin-film battery coater provided by the embodiments of the present application includes a base 100, a coater body 200, and a magnetic levitation planar motor 300. The coater body 200 and the magnetic levitation planar motor 300 are both arranged on the base 100. The coater body 200 is used to coat the substrate 400, and the magnetic levitation planar motor 300 is used to carry and transport the substrate 400.

[0029] The base 100 includes a base plate 110 and two fixing columns 120. The two fixing columns 120 are both arranged on the base plate 110, and the coater body 200 is connected between the two fixing columns 120. Among them, the base plate 110 is made of marble to ensure the stability and seismic performance of the coater, and further ensure the stability of the magnetic levitation planar motor 300.

[0030] When the substrate 400 needs to be coated, the substrate 400 is placed on the magnetic levitation planar motor 300, and the magnetic levitation planar motor 300 transports the substrate 400 to the lower part of the coater body 200 for coating. During the process of transporting the substrate 400, the magnetic levitation planar motor 300 does not require physical structures such as mechanical support and air-floating support. There is no mechanical contact between the relative moving parts of the magnetic levitation planar motor 300, and it has a motion accuracy of the nanometer level, which can meet relatively higher accuracy requirements.

[0031] The magnetic levitation planar motor 300 includes a coil array table 310 and a permanent magnet array table 320. The permanent magnet array table 320 is arranged on the base 100, and the permanent magnet array table 320 extends along the horizontal plane. The coil array table 310 is used to carry the substrate 400.

[0032] The permanent magnet array table 320 is a Halbach array. The coil array table 310 is provided with a first thrust coil and a second thrust coil that are parallel to the horizontal plane and arranged perpendicular to each other. The coil array table 310 and the permanent magnet array table 320 cooperate to generate a magnetic levitation force and a driving force, so that the coil array table 310 can achieve six-degree-of-freedom motion on the permanent magnet array table 320.

[0033] The permanent magnet array stage 320 passes through between the two fixed posts 120. Under the action of the magnetic force exerted by the permanent magnet array stage 320 on the coil array stage 310, the coil array stage 310 is driven to pass under the coating machine body 200, thereby facilitating the coating machine body 200 to coat the substrate 400 on the coil array stage 310.

[0034] It should be noted that the coil array stage 310 is also called a mover, and the permanent magnet array stage 320 is also called a stator. The permanent magnet array stage 320 makes the coil array stage 310 suspended and can push the coil array stage 310 to move with the same-source electromagnetic energy. The coil array stage 310 can obtain six degrees of freedom of movement in the magnetic suspension space. There is no mechanical contact between the permanent magnet array stage 320 and the coil array stage 310, and there is no wear between them, nor will abrasive particles be generated. The movement accuracy can reach the nanometer level, and the cleaning and maintenance requirements can also be greatly reduced. Compared with the method of using the magnetic suspension planar motor 300 to transport the substrate 400 in this embodiment, there is a mechanical connection between the existing linear guide rail and the stage carrying the substrate 400, and errors caused by friction vibration, etc. will occur; the air-floating support requires continuous introduction of gas with a stable pressure to ensure the stability of the stage, and the air flow itself is a relatively difficult object to control. The height of the air-floating and the disturbance of the gas will affect the movement accuracy.

[0035] In this embodiment, the number of the coil array stages 310 is one or more. When the number of the coil array stages 310 is multiple, the multiple coil array stages 310 are arranged at intervals on the permanent magnet array stage 320.

[0036] It should be noted that the movement stroke of the coil array stage 310 in the horizontal direction can be expanded as the area of the permanent magnet array stage 320 expands. In order to meet the requirements of the production beat, multiple coil array stages 310 can be evenly arranged at intervals on the permanent magnet array stage 320. A substrate 400 is placed on each coil array stage 310. After the substrate 400 on each coil array stage 310 is coated, it only needs to be transported to the next process. Of course, when only one substrate 400 needs to be processed, only one coil array stage 310 is arranged on the permanent magnet array stage 320.

[0037] In this embodiment, the permanent magnet array stage 320 is rectangular or annular.

[0038] When the permanent magnet array table 320 is rectangular, the permanent magnet array table 320 extends between two fixed columns 120. When the coil array table 310 carrying the substrate 400 passes through the coating machine body 200 between the two fixed columns 120, the coating machine body 200 coats the substrate 400 on the coil array table 310. After coating, the coil array table 310 transports the substrate 400 along the length direction of the permanent magnet array table 320 to the next process; when the permanent magnet array table 320 is annular, the permanent magnet array table 320 is arranged on the base 110 around one of the fixed columns 120. When the coil array table 310 carrying the substrate 400 passes through the coating machine body 200 between the two fixed columns 120, the coating machine body 200 coats the substrate 400 on the coil array table 310. After coating, the coil array table 310 transports the substrate 400 along the circumferential direction of the permanent magnet array table 320 to one side of the fixed column 120, thereby facilitating the removal of the substrate 400 and placing it in the next process equipment. The substrate 400 forms a thin film battery after processes such as coating and etching.

[0039] In this embodiment, the coating machine body 200 includes a fixing plate 210, a driving device 220, and a coating die head (not shown in the figure). The fixing plate 210 is connected to the two fixed columns 120 at the same time. The driving device 220 is arranged on the fixing plate 210, and the driving device 220 is connected to the coating die head to drive the coating die head to move up and down.

[0040] When the coil array table 310 transports the substrate 400 to the lower part of the coating die head, the driving device 220 drives the coating die head to descend, so that the substrate 400 can be coated by the coating die head. After coating, the driving device 220 drives the coating die head to rise and reset.

[0041] In this embodiment, the driving device 220 includes a driving motor 221 and a lead screw module 222. The lead screw module 222 is arranged on the fixing plate 210. The driving motor 221 is connected to the lead screw module 222, and the lead screw module 222 is connected to the coating die head.

[0042] The lead screw module 222 is arranged on the fixing plate 210. The driving motor 221 is arranged at the top of the lead screw module 222, and the driving motor 221 is connected to the lead screw module 222. The lead screw module 222 is connected to the coating die head. When the substrate 400 needs to be coated, the driving motor 221 is started. The driving motor 221 drives the lead screw module 222 to operate. The lead screw module 222 drives the coating die head to descend to the working position, so that the substrate 400 can be coated. After coating, the driving motor 221 drives the coating die head to rise and reset.

[0043] In other embodiments, the driving device 220 can also be a driving member such as a cylinder or an electric cylinder, as long as it can drive the coating die head to move up and down.

[0044] In this embodiment, the coating machine body 200 further includes a first plate member 230 and a second plate member 240. The first plate member 230 is connected to the lead screw module 222, and the second plate member 240 is rotatably connected to the first plate member 230. The second plate member 240 can rotate relative to the first plate member 230 in a vertical plane, and the coating die head is disposed on the second plate member 240.

[0045] It should be noted that the middle part of the second plate member 240 is rotatably connected to the first plate member 230. Before coating the substrate 400 with the coating die head, the second plate member 240 is first rotated relative to the first plate member 230 to level the coating die head. After leveling, the second plate member 240 can be fixed to the first plate member 230 with fasteners such as bolts.

[0046] To ensure the leveling accuracy, two displacement sensors 250 are relatively disposed along the length direction of the second plate member 240.

[0047] It should be noted that both ends of the first plate member 230 along its length direction face the two fixed columns 120. After the second plate member 240 is leveled, the length direction of the second plate member 240 is consistent with the length direction of the first plate member 230. By relatively disposing two displacement sensors 250 along the length direction of the second plate member 240, the displacement sensors 250 can real-time feedback the position data of the second plate member 240. When the position data of the two displacement sensors 250 are the same, it indicates that the second plate member 240 is in a leveled state. At this time, the second plate member 240 can be fixed to the first plate member 230 with fasteners such as bolts.

[0048] The second plate member 240 is rotatably connected to the first plate member 230 through a bearing. The bearing is disposed in the middle of the second plate member 240, and a rotating shaft that cooperates with the bearing is disposed on the first plate member 230, so as to make the rotation process between the second plate member 240 and the first plate member 230 more stable.

[0049] The beneficial effects of the thin-film battery coating machine provided by the embodiment of the present application at least include: compared with the method of transporting the substrate 400 by using an air-floating device or a linear guide, the solution of using the magnetic levitation planar motor 300 to carry and transport the substrate 400 can improve the motion accuracy from the micron level to the nanometer level; using the magnetic levitation planar motor 300 eliminates the mechanical guiding components, greatly reducing the cleaning and maintenance requirements; the permanent magnet array table 320 has strong expandability. By extending the permanent magnet array table 320 along the processing direction of the substrate 400, it is convenient to directly transfer the substrate 400 to the next process after the coating process, or multiple coil array tables 310 can be placed on the permanent magnet array table 320 to meet the production beat requirements.

[0050] In summary, the embodiment of the present application provides a thin-film battery coater. When it is necessary to coat the substrate 400, the drive motor 221 is started. The drive motor 221 drives the lead screw module 222 to operate. The lead screw module 222 drives the coating die head to descend to the working position. The substrate 400 is placed on the coil array table 310 of the magnetic levitation planar motor 300. Under the action of the permanent magnet array table 320 applying magnetic force to the coil array table 310, the coil array table 310 is driven to pass under the coating die head for coating. After the coating is completed, the coating die head is driven by the drive motor 221 to rise and reset. Since there is no mechanical contact between the permanent magnet array table 320 and the coil array table 310, there is no wear between them, and no abrasive particles are generated. The motion accuracy can reach the nanometer level, and the cleaning and maintenance requirements can also be greatly reduced.

[0051] As described above, the above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A thin film battery coating machine, characterized in that: It comprises a base, a coater body and a magnetic levitation planar motor, wherein the coater body and the magnetic levitation planar motor are both arranged on the base, the coater body is used for coating the substrate, and the magnetic levitation planar motor is used for carrying and transporting the substrate.

2. The thin film battery coating machine according to claim 1, characterized in that: The magnetic levitation planar motor comprises a coil array stage and a permanent magnet array stage. The permanent magnet array stage is arranged on the base and extends along a horizontal plane. The coil array stage is used to carry a substrate.

3. The thin film battery coating machine according to claim 2, characterized in that: The permanent magnet array platform is a Halbach array, which is rectangular or ring-shaped. The coil array platform is provided with a first thrust coil and a second thrust coil which are parallel to a horizontal plane and arranged perpendicularly to each other. The coil array platform and the permanent magnet array platform cooperate to generate magnetic levitation force and thrust force, so that the coil array platform can realize six-degree-of-freedom movement on the permanent magnet array platform.

4. The thin film battery coating machine according to claim 2, characterized in that: The number of the coil array platforms is one or more. When the number of the coil array platforms is plural, the plurality of coil array platforms are arranged at intervals on the permanent magnet array platform.

5. The thin film battery coating machine according to claim 2, characterized in that: The base includes a pedestal and two fixed columns, the two fixed columns are arranged on the pedestal, the coater body is connected between the two fixed columns, the permanent magnetic array platform is annular, and the permanent magnetic array platform is arranged on the pedestal around one of the fixed columns.

6. The thin film battery coating machine according to claim 5, characterized in that: The coating machine body comprises a fixed plate, a driving device and a coating die head, the fixed plate is connected to the two fixed columns at the same time, the driving device is arranged on the fixed plate, and the driving device is connected to the coating die head to drive the coating die head to rise and fall.

7. The thin film battery coating machine according to claim 6, characterized in that: The driving device comprises a driving motor and a screw module, wherein the screw module is arranged on the fixing plate, the driving motor is connected to the screw module, and the screw module is connected to the coating die head.

8. The thin film battery coating machine according to claim 7, characterized in that: The coating machine body also includes a first plate and a second plate, the first plate is connected to the screw module, the second plate is rotatably connected to the first plate, the second plate can rotate in a vertical plane relative to the first plate, and the coating die head is arranged on the second plate.

9. The thin film battery coating machine according to claim 8, characterized in that: The second plate is provided with two displacement sensors opposite to each other along its length direction.

10. The thin film battery coating machine according to claim 8, characterized in that: The second plate is rotatably connected to the first plate via a bearing.

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