Full-automatic coating and film forming all-in-one machine
By designing a fully automatic integrated machine for coating and film forming, integrating loading, coating, film forming and cutting mechanisms, and using automatic load transfer mechanisms, the problem of long substrate transfer time in the existing technology is solved, and the battery production efficiency is improved.
Patent Information
- Application Number
- CN202421752121.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-23
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-07-23
AI Technical Summary
In the production of existing solar cells, independent equipment is used in the coating and vacuum film formation processes, resulting in a long substrate transfer time and reducing production efficiency.
A fully automatic integrated machine for coating and film forming is designed, integrating a frame, a loading mechanism, a coating machine, a film forming machine, a cutting mechanism and a first load transfer mechanism. Through the first load transfer mechanism, the substrate is automatically moved between the loading mechanism, a coating machine, a film forming machine and a cutting mechanism to achieve continuous process.
The battery preparation time is reduced, the battery production efficiency is improved, and the transfer time between processes is shortened through integrated equipment and automated load transfer mechanism, and the efficiency of the production process is improved.
Smart Images

Figure CN223027727U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cell production, and more specifically, to a fully automatic coating and film forming integrated machine. Background Art
[0002] Both the coating process and the vacuum film forming process are key processes for preparing solar cells. Generally, the coating process and the vacuum film forming process are completed by two independent devices, namely a coating device and a vacuum film forming device respectively. After the coating process is completed, the substrate needs to be transferred from the coating device to the vacuum film forming device. However, the overall floor space occupied by the coating device and the vacuum film forming device is relatively large, and transferring the substrate from the coating device to the vacuum film forming device will, to a certain extent, extend the time for battery preparation and reduce the battery production efficiency. Content of the Utility Model
[0003] The purpose of the utility model includes, for example, providing a fully automatic coating and film forming integrated machine, which can, to a certain extent, reduce the time for battery preparation and improve the battery production efficiency.
[0004] The embodiments of the utility model can be implemented as follows:
[0005] The embodiment of the utility model provides a fully automatic coating and film forming integrated machine, which includes a frame, a loading mechanism, a coater, a film former, an unloading mechanism and a first transfer mechanism. The loading mechanism, the coater, the film former, the unloading mechanism and the first transfer mechanism are all arranged on the frame. The loading mechanism, the coater, the film former and the unloading mechanism are arranged in sequence. The first transfer mechanism is used to move the substrate among the loading mechanism, the coater, the film former and the unloading mechanism.
[0006] Optionally, the first transfer mechanism includes a guide rail, a sliding seat, a motor, a manipulator, a gear and a rack. The guide rail is arranged on the frame. The rack is arranged on the guide rail, and the length direction of the rack is consistent with the length direction of the guide rail. The sliding seat is slidably matched with the guide rail. The motor and the manipulator are both arranged on the sliding seat. The gear is coaxially connected with the motor and is engaged with the rack.
[0007] Optionally, both the loading mechanism and the unloading mechanism include a second transfer mechanism, a carrying arm and a storage bin. The carrying arm is connected with the second transfer mechanism. The second transfer mechanism is used to drive the carrying arm to move towards or away from the storage bin;
[0008] The first transfer mechanism is used to move the substrate among the carrying arms of the loading mechanism, the coater, the film former and the unloading mechanism.
[0009] Optionally, the second transfer mechanism is a lead screw module, which is connected to the carrying arm and used to drive the carrying arm to move towards or away from the storage bin.
[0010] Optionally, a suction cup is provided on the carrying arm, and the suction cup is used to adsorb the substrate;
[0011] The full-automatic coating and film-forming machine further includes a vacuum generator, which is arranged on one side of the frame, and the vacuum generator is communicated with the suction cup.
[0012] Optionally, the vacuum generator and the suction cup are communicated through a pipeline, and a solenoid valve is arranged on the pipeline.
[0013] Optionally, the full-automatic coating and film-forming machine further includes a sensor and a controller. The sensor is arranged on the frame and used to sense the substrate. The controller is electrically connected to the sensor, the first transfer mechanism and the second transfer mechanism at the same time.
[0014] Optionally, the loading mechanism and the unloading mechanism further each include a lifting mechanism, which is arranged on the frame and located below the storage bin.
[0015] Optionally, the full-automatic coating and film-forming machine further includes a camera and a display screen. The camera and the display screen are both arranged on the frame, and the camera is electrically connected to the display screen.
[0016] Optionally, the full-automatic coating and film-forming machine further includes a housing, which is connected to the frame, and the housing covers the loading mechanism, the coater, the film-forming machine, the unloading mechanism and the first transfer mechanism.
[0017] The beneficial effects of the full-automatic coating and film-forming machine according to the embodiments of the present utility model include, for example: In order to reduce the battery preparation time to a certain extent and improve the battery production efficiency, a full-automatic coating and film-forming machine is designed. The full-automatic coating and film-forming machine includes a frame, a feeding mechanism, a coater, a film-forming machine, a discharging mechanism, and a first transfer mechanism. The feeding mechanism, the coater, the film-forming machine, the discharging mechanism, and the first transfer mechanism are all arranged on the frame. The feeding mechanism, the coater, the film-forming machine, and the discharging mechanism are arranged in sequence. The first transfer mechanism is used to move the substrate between the feeding mechanism, the coater, the film-forming machine, and the discharging mechanism. During the process of preparing the battery, the first transfer mechanism first moves the substrate in the feeding mechanism to the coater. The coater coats the substrate. After the coating is completed, the first transfer mechanism then moves the substrate from the coater to the film-forming machine. The film-forming machine performs vacuum film-forming on the substrate. After the vacuum film-forming is completed, the first transfer mechanism then moves the substrate from the film-forming machine to the discharging mechanism. Since the feeding mechanism, the coater, the film-forming machine, and the discharging mechanism are integrated on the frame, the occupied space is reduced. At the same time, through the first transfer mechanism, the substrate can be automatically transferred between the feeding mechanism, the coater, the film-forming machine, and the discharging mechanism, reducing the battery preparation time and improving the battery production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.
[0019] Figure 1 It is a schematic diagram of the overall structure of the full-automatic coating and film-forming machine in the embodiments of the present application;
[0020] Figure 2 It is a schematic diagram of a partial structure of the full-automatic coating and film-forming machine in the embodiments of the present application;
[0021] Figure 3 is Figure 2 an enlarged view of part A in;
[0022] Figure 4 It is a schematic diagram of a first partial structure of the full-automatic coating and film-forming machine in the embodiments of the present application;
[0023] Figure 5 It is a schematic diagram of a second partial structure of the full-automatic coating and film-forming machine in the embodiments of the present application.
[0024] Icons: 100 - Rack; 110 - Solenoid valve; 120 - Sensor; 200 - Loading mechanism; 210 - Second transfer mechanism; 220 - Carrying arm; 221 - Suction cup; 230 - Storage bin; 300 - Coater; 400 - Film forming machine; 500 - Unloading mechanism; 600 - First transfer mechanism; 610 - Guide rail; 620 - Sliding seat; 630 - Motor; 640 - Manipulator; 650 - Gear; 660 - Rack; 700 - Camera; 800 - Operation screen; 900 - Housing. Detailed implementation
[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations.
[0026] Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.
[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0028] In the description of the present utility model, it should be noted that if terms such as "upper", "lower", "inner", "outer", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship in which the product of the present utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.
[0029] In addition, terms such as "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.
[0030] It should be noted that the features in the embodiments of the present utility model can be combined with each other without conflict.
[0031] The inventors of the present application have found that currently, two independent coating devices and vacuum film forming devices are used to coat and form a vacuum film on a substrate respectively. The overall floor space occupied by the two independent coating devices and vacuum film forming devices is relatively large, and the time required to transfer the substrate from the coating device to the vacuum film forming device is relatively long, which prolongs the time for battery preparation and thus results in low battery production efficiency. This embodiment provides a fully automatic coating and film forming integrated machine to solve the above technical problems.
[0032] Please refer to Figures 1 - 5 , the fully automatic coating and film forming integrated machine provided in this embodiment includes a frame 100, a loading mechanism 200, a coater 300, a film former 400, a unloading mechanism 500, and a first transfer mechanism 600. The loading mechanism 200, the coater 300, the film former 400, the unloading mechanism 500, and the first transfer mechanism 600 are all arranged on the frame 100. The loading mechanism 200, the coater 300, the film former 400, and the unloading mechanism 500 are arranged in sequence. The first transfer mechanism 600 is used to move the substrate among the loading mechanism 200, the coater 300, the film former 400, and the unloading mechanism 500.
[0033] It should be noted that the loading mechanism 200 is used to store the substrates to be processed, and the unloading mechanism 500 is used to store the processed substrates. During the process of the first transfer mechanism 600 moving the substrate from the loading mechanism 200 to the unloading mechanism 500, the substrate to be processed is transformed into a processed substrate after two processes of coating and vacuum film forming.
[0034] During the process of preparing the battery, the first transfer mechanism 600 first moves the substrate to be processed in the loading mechanism 200 to the coater 300. The coater 300 coats the substrate. After the coating is completed, the first transfer mechanism 600 then moves the substrate from the coater 300 to the film former 400. The film former 400 forms a vacuum film on the substrate. After the vacuum film forming is completed, the substrate is transformed into a processed substrate. The first transfer mechanism 600 then moves the processed substrate from the film former 400 to the unloading mechanism 500. Since the loading mechanism 200, the coater 300, the film former 400, and the unloading mechanism 500 are integrated on the frame 100, the occupied space is reduced. At the same time, through the first transfer mechanism 600, the transfer of the substrate can be automatically completed among the loading mechanism 200, the coater 300, the film former 400, and the unloading mechanism 500, reducing the time for battery preparation and improving the battery production efficiency.
[0035] In this embodiment, the first transfer mechanism 600 includes a guide rail 610, a sliding seat 620, a motor 630, a manipulator 640, a gear 650, and a rack 660. The guide rail 610 is disposed on the frame 100. The rack 660 is disposed on the guide rail 610, and the length direction of the rack 660 is the same as that of the guide rail 610. The sliding seat 620 is slidably engaged with the guide rail 610. The motor 630 and the manipulator 640 are both disposed on the sliding seat 620. The gear 650 is coaxially connected to the motor 630 and is engaged with the rack 660.
[0036] The length direction of the guide rail 610 is the same as the arrangement direction of the feeding mechanism 200, the coating machine 300, the film forming machine 400, and the discharging mechanism 500. The guide rail 610 is fixedly connected to the frame 100. The rack 660 is disposed on the side of the guide rail 610 and is fixedly connected to the guide rail 610. A chute is provided on the guide rail 610, and a slider slidably engaged with the chute is provided on the sliding seat 620, so that the sliding seat 620 can slide relative to the guide rail 610. When the motor 630 is started, the motor 630 can drive the gear 650 to rotate. Since the gear 650 is engaged with the rack 660, at this time, the motor 630 and the manipulator 640 can move simultaneously with the sliding seat 620, and the manipulator 640 can grab or place the substrate during the movement.
[0037] During the operation of the first transfer mechanism 600, the motor 630 is started, and the motor 630 drives the gear 650 to rotate, so that the sliding seat 620 slides relative to the guide rail 610. The motor 630 and the manipulator 640 move synchronously with the sliding seat 620, and the manipulator 640 grabs or places the substrate during the movement, thereby enabling the substrate to move between the feeding mechanism 200, the coating machine 300, the film forming machine 400, and the discharging mechanism 500.
[0038] In this embodiment, both the feeding mechanism 200 and the discharging mechanism 500 include a second transfer mechanism 210, a carrying arm 220, and a storage bin 230. The carrying arm 220 is connected to the second transfer mechanism 210, and the second transfer mechanism 210 is used to drive the carrying arm 220 to move toward or away from the storage bin 230. The first transfer mechanism 600 is used to move the substrate between the carrying arms 220 of the feeding mechanism 200, the coating machine 300, the film forming machine 400, and the discharging mechanism 500.
[0039] It should be noted that the loading mechanism 200 and the unloading mechanism 500 have the same structure, both including a second transfer mechanism 210, a carrying arm 220, and a storage bin 230. The carrying arm 220 is used to carry the substrate, and the storage bin 230 is used to store the substrate. The moving direction of the carrying arm 220 is perpendicular to the moving direction of the manipulator 640. During the movement, the manipulator 640 can move the substrate between the carrying arm 220 of the loading mechanism 200, the coater 300, the film forming machine 400, and the carrying arm 220 of the unloading mechanism 500.
[0040] During the loading process, the second transfer mechanism 210 in the loading mechanism 200 drives the carrying arm 220 to move towards the storage bin 230, so that the substrate in the storage bin 230 is carried on the carrying arm 220. Then, the second transfer mechanism 210 drives the carrying arm 220 to move away from the storage bin 230 until the carrying arm 220 carrying the substrate moves to the loading position, so that the manipulator 640 can grab the substrate at the loading position.
[0041] During the unloading process, the carrying arm 220 in the unloading mechanism 500 is located at the unloading position. The manipulator 640 places the substrate on the carrying arm 220 at the unloading position. Then, the second transfer mechanism 210 in the unloading mechanism 500 drives the carrying arm 220 to move towards the storage bin 230, so that the substrate is stored in the storage bin 230 to complete the unloading. Finally, the second transfer mechanism 210 drives the carrying arm 220 to move away from the storage bin 230, so that the carrying arm 220 returns to its original position.
[0042] In this embodiment, the second transfer mechanism 210 is a lead screw module. The lead screw module is connected to the carrying arm 220 and is used to drive the carrying arm 220 to move towards or away from the storage bin 230.
[0043] The lead screw module can stably and reliably drive the carrying arm 220 to move towards or away from the storage bin 230. Of course, in other embodiments, the second transfer mechanism 210 can also be a driving component such as a cylinder.
[0044] The carrying arm 220 is provided with a suction cup 221. The suction cup 221 is used to adsorb the substrate. The full-automatic coating and film forming machine also includes a vacuum generator. The vacuum generator is arranged on one side of the frame 100 and is connected to the suction cup 221.
[0045] It should be noted that the vacuum generator is a pneumatic component that forms a certain degree of vacuum by using the flow of compressed air. Starting the vacuum generator can make the suction cup 221 reach a negative pressure state. The suction cup 221 can adsorb the substrate in the negative pressure state, so that the substrate is stably carried on the carrying arm 220.
[0046] The vacuum generator and the suction cup 221 are connected through a pipeline, and a solenoid valve 110 is arranged on the pipeline.
[0047] By arranging a solenoid valve 110 on the pipeline between the vacuum generator and the suction cup 221, the opening and closing of the solenoid valve 110 can be controlled to facilitate the control of the on-off of the pipeline between the vacuum generator and the suction cup 221, so that the suction cup 221 can be switched between the negative pressure state and the normal pressure state.
[0048] In this embodiment, the full-automatic coating and film-forming machine further includes a sensor 120 and a controller. The sensor 120 is arranged on the frame 100 and is used to sense the substrate. The controller is electrically connected to the sensor 120, the first transfer mechanism 600 and the second transfer mechanism 210 at the same time.
[0049] Sensors 120 are arranged on one side of the storage bin 230 of the loading mechanism 200, the loading position, the coater 300, the film-forming machine 400, the unloading position and the storage bin 230 of the unloading mechanism 500. The multiple sensors 120 are used to detect the substrate at different positions; the controller is electrically connected to the multiple sensors 120, the motor 630 and the lead screw module at the same time.
[0050] In this embodiment, the sensor 120 can be a fiber optic sensor. It can be understood that in other embodiments, the sensor 120 can also be other types of sensors, such as displacement sensors, etc., as long as it can detect the substrate.
[0051] The full-automatic coating and film-forming machine further includes an operation screen 800. The operation screen 800 is arranged on one side of the frame 100. The controller is electrically connected to the operation screen 800 and can feedback various process characterization parameters to the operation screen 800 for display. The staff can observe the process characterization parameters through the operation screen 800. In addition, operating on the operation screen 800 can start or stop each mechanism electrically connected to the controller.
[0052] During the process of preparing the battery, when the sensor 120 on one side of the storage bin 230 of the feeding mechanism 200 senses the substrate, the controller controls the lead screw module in the feeding mechanism 200 to start, so as to drive the carrying arm 220 to move towards the storage bin 230 to carry the substrate, and then move the substrate away from the storage bin 230 to the feeding position. At this time, the sensor 120 at the feeding position senses the substrate, and the controller controls the motor 630 to start. The motor 630 drives the manipulator 640 to move to the feeding position to grab the substrate and move the substrate to the coater 300. After the coater 300 finishes coating, the sensor 120 on one side of the coater 300 senses the substrate, and the controller controls the motor 630 to start again. The motor 630 drives the manipulator 640 to move to the coater 300 to grab the substrate and move the substrate to the film forming machine 400. After the film forming machine 400 finishes film forming, the sensor 120 on one side of the film forming machine 400 senses the substrate, and the controller controls the motor 630 to start again. The motor 630 drives the manipulator 640 to move to the film forming machine 400 to grab the substrate and move the substrate to the carrying arm 220 at the discharging position. The sensor 120 at the discharging position senses the substrate, and the controller controls the lead screw module in the discharging mechanism 500 to start, so as to drive the carrying arm 220 to move towards the storage bin 230 until the substrate is stored in the storage bin 230. After the sensor 120 on one side of the storage bin 230 senses the substrate, the controller controls the lead screw module to start again, so as to drive the carrying arm 220 to move away from the storage bin 230 and reset.
[0053] In this embodiment, both the feeding mechanism 200 and the discharging mechanism 500 further include a lifting mechanism. The lifting mechanism is arranged on the frame 100 and is located below the storage bin 230.
[0054] Lifting mechanisms are arranged below the storage bin 230 of the feeding mechanism 200 and the storage bin 230 of the discharging mechanism 500. The lifting mechanism can be a driving part such as a cylinder, and the lifting mechanism can carry and drive the substrate in the storage bin 230 to rise or fall.
[0055] In this embodiment, the full-automatic coating and film forming integrated machine further includes a camera 700 and a display screen. The camera 700 and the display screen are both arranged on the frame 100, and the camera 700 is electrically connected to the display screen.
[0056] The camera 700 is arranged on the frame 100 and is used to obtain the working state of one or more of the feeding mechanism 200, the coater 300, the film forming machine 400, and the discharging mechanism 500, and to feed back the image information to the display screen outside the frame 100 in real time, so that the staff can monitor the working state of one or more of the feeding mechanism 200, the coater 300, the film forming machine 400, and the discharging mechanism 500.
[0057] In this embodiment, the fully automatic coating and film-forming integrated machine further includes a housing 900, which is connected to the frame 100, and the housing 900 shields the feeding mechanism 200, the coater 300, the film-forming machine 400, the discharging mechanism 500, and the first transfer mechanism 600.
[0058] By providing the housing 900 on the frame 100, the housing 900 completely shields the feeding mechanism 200, the coater 300, the film-forming machine 400, the discharging mechanism 500, and the first transfer mechanism 600, isolating the substrate from the external environment, and making it difficult for the substrate to be contaminated by the external environment and manual contact.
[0059] The technical effects provided by the embodiment of the present utility model for the fully automatic coating and film-forming integrated machine at least include: the first transfer mechanism 600 can automatically complete the transfer of the substrate among the feeding mechanism 200, the coater 300, the film-forming machine 400, and the discharging mechanism 500, reducing the time for battery preparation and improving the battery production efficiency; by controlling the opening and closing of the solenoid valve 110, it is convenient to control the on-off of the pipeline between the vacuum generator and the suction cup 221, enabling the suction cup 221 to switch between the negative pressure state and the normal pressure state; multiple sensors 120 can detect the substrate at different positions and send signals to the controller, and the controller controls the operation of the first transfer mechanism 600 and the second transfer mechanism 210 according to the signals, improving the response speed, and thus being able to improve the production efficiency.
[0060] In summary, the embodiment of the present utility model provides a fully automatic coating and film-forming integrated machine. During the process of preparing the battery, the second transfer mechanism 210 in the feeding mechanism 200 moves the substrate from the storage bin 230 to the loading position, the first transfer mechanism 600 moves the substrate to be processed at the loading position to the coater 300, the coater 300 coats the substrate, after the coating is completed, the first transfer mechanism 600 moves the substrate from the coater 300 to the film-forming machine 400, the film-forming machine 400 performs vacuum film-forming on the substrate, after the vacuum film-forming is completed, the first transfer mechanism 600 moves the processed substrate from the film-forming machine 400 to the unloading position, and the second transfer mechanism 210 of the discharging mechanism 500 moves the substrate from the unloading position to the storage bin 230 for storage. Through the first transfer mechanism 600 and the second transfer mechanism 210, the transfer of the substrate can be automatically completed among the feeding mechanism 200, the coater 300, the film-forming machine 400, and the discharging mechanism 500, reducing the time for battery preparation and improving the battery production efficiency.
[0061] The above is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present utility model should be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.
Claims
1. A fully automatic all-in-one coating and film-forming machine, characterized in that: It includes a frame, a loading mechanism, a coater, a film-forming machine, a unloading mechanism and a first transfer mechanism, wherein the loading mechanism, the coater, the film-forming machine, the unloading mechanism and the first transfer mechanism are all arranged on the frame, and the loading mechanism, the coater, the film-forming machine and the unloading mechanism are arranged in sequence, and the first transfer mechanism is used to move the substrate among the loading mechanism, the coater, the film-forming machine and the unloading mechanism.
2. The fully automatic film-forming machine according to claim 1, characterized in that: The first transfer mechanism includes a guide rail, a sliding seat, a motor, a manipulator, a gear and a rack. The guide rail is arranged on the frame, the rack is arranged on the guide rail, and the length direction of the rack is consistent with the length direction of the guide rail. The sliding seat is slidably matched with the guide rail, the motor and the manipulator are both arranged on the sliding seat, the gear is coaxially connected to the motor, and the gear is matched with the rack.
3. The fully automatic film-forming machine according to claim 1, characterized in that: The loading mechanism and the unloading mechanism both include a second transfer mechanism, a carrying arm and a storage bin, the carrying arm is connected to the second transfer mechanism, and the second transfer mechanism is used to drive the carrying arm to move toward or away from the storage bin; The first transfer mechanism is used to move the substrate between the carrying arm of the loading mechanism, the coating machine, the film forming machine and the carrying arm of the unloading mechanism.
4. The fully automatic film-forming machine according to claim 3, characterized in that: The second transfer mechanism is a screw module, which is connected to the carrying arm and is used to drive the carrying arm to move toward or away from the storage bin.
5. The fully automatic film-forming machine according to claim 4, characterized in that: The carrying arm is provided with a suction cup, and the suction cup is used for adsorbing the substrate; The fully automatic integrated coating and film-forming machine further comprises a vacuum generator, which is arranged on one side of the frame and is connected to the suction cup.
6. The fully automatic film-forming machine according to claim 5, characterized in that: The vacuum generator is connected to the suction cup through a pipeline, and a solenoid valve is arranged on the pipeline.
7. The fully automatic film-forming machine according to claim 3, characterized in that: The fully automatic integrated coating and film-forming machine also includes a sensor and a controller. The sensor is arranged on the frame and is used to sense the substrate. The controller is electrically connected to the sensor, the first transfer mechanism and the second transfer mechanism at the same time.
8. The fully automatic all-in-one coating and film-forming machine according to claim 3, characterized in that: The loading mechanism and the unloading mechanism both include a lifting mechanism, and the lifting mechanism is arranged on the frame and located below the storage bin.
9. The fully automatic film-forming machine according to claim 1, characterized in that: The fully automatic integrated coating and film-forming machine also includes a camera and a display screen. Both the camera and the display screen are arranged on the frame, and the camera is electrically connected to the display screen.
10. The fully automatic all-in-one coating and film-forming machine according to claim 1, characterized in that: The fully automatic integrated coating and film-forming machine also includes a shell, which is connected to the frame and covers the loading mechanism, the coating machine, the film-forming machine, the unloading mechanism and the first transfer mechanism.