Sucking disc mechanism for carrying

By designing a suction cup mechanism for assembly of liquid crystal displays, the mechanism includes a combined adsorption structure of the suction cup body and guide member, the problem of the conductive zebra paper being prone to wrinkles during adsorption process is solved, and the flatness and fit accuracy of the workpiece are improved.

CN223032273UActive Publication Date: 2025-06-27ZHEJIANG CHINT INTELLIGENT MFG EQUIP CO LTD
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Patent Information

Application Number
CN202421665223.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-15
Publication Date
2025-06-27
Estimated Expiration
2034-07-15

AI Technical Summary

Technical Problem

During the assembly process of the LCD monitor, the conductive zebra paper is soft and wrinkled due to its soft texture, which leads to wrinkles easily when the suction cup mechanism is adsorbed, affecting the accuracy of subsequent fitting.

Method used

A suction cup mechanism for handling is designed, which includes a suction cup member that can be adsorbed on the surface of the workpiece. The suction cup member consists of a suction cup body and a guide member. The suction cup body absorbs the outer peripheral edge of the workpiece, and the guide member absorbs the middle part of the workpiece to avoid wrinkles from the workpiece.

Benefits of technology

Through the combined adsorption of the suction cup body and the guide member, wrinkles of the workpiece can be effectively avoided and the flatness of the workpiece can be maintained, thereby ensuring the accuracy of subsequent fit.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of adsorption workpieces, and discloses a suction cup mechanism for carrying. The suction cup mechanism for carrying comprises a suction cup piece capable of being adsorbed to the surface of a workpiece. The suction cup piece comprises a suction cup body and a guide piece. Wherein the suction cup body is used for sucking the peripheral edge of a workpiece; the guiding piece is installed in the suction cup body and used for adsorbing the middle of a workpiece. According to the suction cup mechanism for carrying, by arranging the suction cup body and the guide piece which are mutually matched and adsorbed, the workpiece can be prevented from being wrinkled when being adsorbed, so that the follow-up fitting accuracy of the workpiece can be guaranteed.
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Description

Technical Field

[0001] The utility model relates to the technical field of adsorbing workpieces, in particular to a suction cup mechanism for handling. Background Art

[0002] In a liquid crystal display, a conductive zebra paper is usually used to connect a PCB board (Printed Circuit Board, also known as a circuit board) and an LCD board (Liquid Crystal Display, also known as a liquid crystal display board) to achieve conductive connection between the PCB board and the LCD board.

[0003] Before the conductive zebra paper is attached between the PCB board and the PCD board, a release paper for dust prevention on the conductive zebra paper needs to be separated by two suction cups capable of relative movement first; however, since the conductive zebra paper is relatively soft, when using suction cups with a relatively conventional structure at present to adsorb the conductive zebra paper, it is easy to cause wrinkles on the conductive zebra paper, and the subsequent attachment accuracy of the conductive zebra paper cannot be guaranteed.

[0004] Therefore, there is an urgent need for a suction cup mechanism for handling to solve the above problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a suction cup mechanism for handling, which can avoid wrinkles on the workpiece when adsorbing the workpiece, so as to ensure the subsequent attachment accuracy of the workpiece.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A suction cup mechanism for handling, the suction cup mechanism for handling includes a suction cup member that can be adsorbed on the surface of the workpiece, and the suction cup member includes:

[0008] A suction cup body for adsorbing the outer peripheral edge of the workpiece;

[0009] A guiding member installed in the suction cup body, and the guiding member is used for adsorbing the middle part of the workpiece.

[0010] As an optional solution, a suction hole extending in the Z direction is provided in the suction cup body, the guiding member includes a mounting portion and an adsorption portion that communicate with each other, the mounting portion is installed in the suction hole and is in communication with the suction hole, and the adsorption portion is used for adsorbing the middle part of the workpiece.

[0011] As an optional solution, the diameter of the adsorption portion is smaller than the diameter of the suction cup body.

[0012] As an alternative, an arched adsorption surface is annularly arranged at the bottom end of the suction cup body. The arched adsorption surface is gradually expanded outward from the top end to the bottom end of the suction cup body, and the arched adsorption surface is used for adsorbing the outer peripheral edge of the workpiece.

[0013] As an alternative, a horizontal adsorption surface is arranged on the adsorption part. The arched adsorption surface is annularly arranged on the outer periphery of the horizontal adsorption surface, and the horizontal adsorption surface is used for adsorbing the middle part of the workpiece.

[0014] As an alternative, two suction cup members are configured. The two suction cup members are arranged oppositely along the Z direction. One of the two suction cup members is used for adsorbing the first sub-component of the workpiece, and the other is used for adsorbing the second sub-component adjacent to and attached to the first sub-component. Moreover, the two suction cup members can move along the Z direction and move away from each other to separate the first sub-component from the second sub-component.

[0015] As an alternative, the suction cup mechanism for handling further includes:

[0016] A placement platform is arranged on one side of the suction cup member. A plurality of adsorption holes are arranged on the placement platform to adsorb the separated first sub-component or the second sub-component, and the suction cup member is also used for flattening the first sub-component or the second sub-component.

[0017] As an alternative, a positioning block protrudes from the placement platform. The adsorption holes are arranged on the positioning block, and the positioning block is used for adsorbing and positioning the first sub-component or the second sub-component.

[0018] As an alternative, an anti-sticking layer is arranged on the positioning block, and the separation surface on the first sub-component or the second sub-component is placed on the anti-sticking layer.

[0019] As an alternative, along the Z direction, the aperture of the adsorption hole gradually decreases from top to bottom.

[0020] Beneficial effects:

[0021] For the suction cup mechanism for handling proposed by the present utility model, by enabling the suction cup body to adsorb the outer peripheral edge of the workpiece, an outward flattening force can be applied to the outer peripheral edge of the workpiece to provide a positioning and supporting effect for the workpiece. When the guiding member adsorbs the middle part of the workpiece, wrinkles of the workpiece can be avoided, so as to ensure that the workpiece can maintain good flatness, and further ensure the subsequent fitting accuracy of the workpiece. Description of the Drawings

[0022] Figure 1 is a schematic structural diagram of the suction cup mechanism for handling provided by the present utility model (a workpiece is placed on the placement platform);

[0023] Figure 2 It is a schematic exploded view of the suction cup member provided in the present utility model;

[0024] Figure 3 It is a schematic layout view of multiple suction cup members provided in the present utility model;

[0025] Figure 4 It is a schematic structural view of the placement platform provided in the present utility model.

[0026] In the figure:

[0027] 1. Workpiece;

[0028] 3. Suction cup member; 31. Suction cup body; 311. Arch-shaped adsorption surface; 312. Suction hole; 32. Guide member; 321. Horizontal adsorption surface; 322. Installation part; 323. Adsorption part;

[0029] 5. Placement platform; 51. Adsorption hole; 52. Anti-sticking layer; 53. Positioning block. Detailed implementation manners

[0030] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only for explaining the present utility model, rather than limiting the present utility model. Additionally, it should be noted that for the sake of description, only parts related to the present utility model are shown in the drawings, rather than all structures.

[0031] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0032] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact of the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above the", and "on the" of the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below the", and "under the" of the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0033] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] In this embodiment, a suction cup mechanism for handling is proposed. As Figure 1 shown, the suction cup mechanism for handling includes a suction cup member 3 that can be adsorbed on the surface of the workpiece 1. Among them, the workpiece 1 can specifically be a conductive zebra paper with a release paper for dust prevention attached, and after separating the release paper, both ends of the conductive zebra paper are used to be respectively attached to the PCB board and the LCD board to achieve conductive connection between the PCB board and the LCD board. The suction cup mechanism for handling can ensure that there are no wrinkles on the workpiece 1 during the process of adsorbing the workpiece 1, that is, no wrinkles will appear on the relatively soft conductive zebra paper, so that the flatness of the conductive zebra paper is better, which is beneficial to the accuracy of subsequently attaching the conductive zebra paper to the PCB board and the LCD board respectively. Among them, the conductive zebra paper is also called a thermocompression sealing connector, also known as conductive paper, thermocompression paper, etc. It is a new type of electronic component for connecting and conducting that can be bent arbitrarily, has stable performance, and is easy to use. The PCB board and the LCD board are both common circuit boards in the prior art, and the conductive zebra paper can also be conductively connected between two other circuit boards, which is not specifically limited here.

[0035] Specifically, as Figure 1 and Figure 2 shown, the suction cup member 3 includes a suction cup body 31 and a guiding member 32. Among them, the suction cup body 31 is used to adsorb the outer periphery of the workpiece 1, and the guiding member 32 is installed inside the suction cup body 31, and the guiding member 32 is used to adsorb the middle part of the workpiece 1.

[0036] Compared with the prior art, the suction cup mechanism for handling in this embodiment changes the specific adsorption structure of the suction cup member 3. By making the suction cup body 31 adsorb the outer periphery of the workpiece 1, an outward flattening force can be applied to the outer periphery of the workpiece 1 to provide a positioning and supporting effect for the workpiece 1. When the guiding member 32 adsorbs the middle part of the workpiece 1, it can prevent the workpiece 1 from generating wrinkles, so as to ensure that the workpiece 1 can maintain good flatness, and further ensure the subsequent fitting accuracy of the workpiece 1.

[0037] Moreover, a guiding member 32 is installed inside the suction cup body 31 to provide a certain supporting effect for the suction cup body 31 through the guiding member 32, so as to avoid the problem of deformation of the suction cup body 31 during the process of the suction cup member 3 sucking the workpiece 1, and to ensure the suction effect of the suction cup body 31 on the workpiece 1. Also, due to the large-area suction of the middle part of the workpiece 1 by the guiding member 32, the problem of the workpiece 1 generating vibration and swing during the process of sucking the workpiece 1 can be avoided, ensuring the stability of the workpiece 1 during the suction process, and thus ensuring the suction effect on the workpiece 1.

[0038] It should be noted that in this embodiment, the workpiece 1 is sucked by the guiding member 32 and the suction cup body 31 simultaneously, so that the suction effect on the workpiece 1 is better, thereby ensuring the suction reliability of the suction cup member 3 on the workpiece 1.

[0039] Furthermore, as Figure 2 shown, a suction hole 312 extending in the Z direction is provided inside the suction cup body 31. The guiding member 32 includes an installation portion 322 and a suction portion 323 that communicate with each other. The installation portion 322 is installed in the suction hole 312 and is in communication with the suction hole 312, so that the suction portion 323 is used to suck the middle part of the workpiece 1.

[0040] By providing the suction hole 312, on the one hand, the guiding member 32 can be installed inside the suction cup body 31 through the suction hole 312; on the other hand, the suction hole 312 can generate a suction force, so that the suction cup body 31 can suck the outer peripheral edge of the workpiece 1 through the suction hole 312.

[0041] Specifically, as Figure 2 shown, the diameter of the suction portion 323 is smaller than the diameter of the suction cup body 31, so that the suction portion 323 will not interfere with the suction cup body 31 when sucking the middle part of the workpiece 1, ensuring that the suction cup body 31 can suck the outer peripheral edge of the workpiece 1.

[0042] Furthermore, as Figure 2 shown, an arched suction surface 311 is annularly provided at the bottom end of the suction cup body 31. The arched suction surface 311 gradually expands outward from the top end to the bottom end of the suction cup body 31, and the arched suction surface 311 is used to suck the outer peripheral edge of the workpiece 1. In this embodiment, the suction cup body 31 is made of silica gel material.

[0043] Specifically, as Figure 2 shown, a horizontal suction surface 321 is provided on the suction portion 323. The arched suction surface 311 is annularly arranged on the outer periphery of the horizontal suction surface 321, and the horizontal suction surface 321 is used to suck the middle part of the workpiece 1.

[0044] By providing an arched adsorption surface 311 and a horizontal adsorption surface 321 that cooperate with each other; on the one hand, it can ensure the large-area adsorption effect of the horizontal adsorption surface 321 on the middle part of the workpiece 1; on the other hand, it can limit and adsorb the outer peripheral edge of the workpiece 1 through the arched adsorption surface 311, so as to provide an adsorption and limiting effect on the workpiece 1, avoid the problem of misalignment between the workpiece 1 and the suction cup member 3, and thus ensure the relative position between the workpiece 1 and the horizontal adsorption surface 321, and further ensure a better adsorption effect of the suction cup member 3 on the workpiece 1.

[0045] To meet the fitting requirements of the workpiece 1, the workpiece 1 needs to be separated, that is, the above-mentioned release paper needs to be separated from the conductive zebra paper, so as to facilitate attaching the two ends of the separated conductive zebra paper to the PCB board and the LCD board respectively.

[0046] For this purpose, as Figure 1 and Figure 3 shown, there are two suction cup members 3, and the two suction cup members 3 are arranged oppositely along the Z direction. One of the two suction cup members 3 is used to adsorb the first sub-component in the workpiece 1, and the other is used to adsorb the second sub-component adjacent to and attached to the first sub-component. And the two suction cup members 3 can move along the Z direction and move away from each other to separate the first sub-component and the second sub-component; that is, the first sub-component is specifically the conductive zebra paper, and the second sub-component is specifically the release paper; one of the two suction cup members 3 is used to adsorb the conductive zebra paper in the workpiece 1, and the other is used to adsorb the release paper adjacent to and attached to the conductive zebra paper, and the two suction cup members 3 can move along the Z direction and move away from each other to separate the conductive zebra paper and the release paper.

[0047] It should be noted that, as Figure 1 and Figure 3 shown, a set of adsorption structures is formed by two suction cup members 3 arranged oppositely in the Z direction, so as to be able to adsorb the workpiece 1 between the two suction cup members 3, and thus the first sub-component and the second sub-component in the workpiece 1 can be separated from each other by the two suction cup members 3 moving away from each other in the Z direction; among them, multiple sets of adsorption structures can be set to adsorb one workpiece 1 in a set of adsorption structures, so that multiple sets of adsorption structures can simultaneously perform adsorption and separation work on multiple workpieces 1, and further improve the working efficiency of the entire suction cup mechanism. In this embodiment, a total of two sets of adsorption structures are formed, and here, the number of sets of adsorption structures is not specifically limited.

[0048] Furthermore, as Figure 1 and Figure 4As shown, the suction cup mechanism for handling further includes a placement platform 5. The transfer platform 5 is fixedly arranged on one side of the suction cup member 3. A plurality of suction holes 51 are provided on the placement platform 5 to vacuum-adsorb the first sub-component after separation, that is, the conductive zebra paper after separating the release paper is vacuum-adsorbed on the placement platform 5 through each suction hole 51. Moreover, the suction cup member 3 can also flatten the first sub-component or the second sub-component, that is, the suction cup member 3 can flatten the conductive zebra paper onto the placement platform 5.

[0049] By providing the placement platform 5, on the one hand, it is convenient to temporarily store and place the conductive zebra paper after separation, so as to better adapt to the working rhythm of adsorption, separation, and subsequent lamination of the conductive zebra paper, making the entire working rhythm more appropriate and improving work efficiency. On the other hand, the conductive zebra paper can be flattened on the placement platform 5 by the suction cup member 3 to perform a flattening process on the conductive zebra paper, further ensuring that there will be no wrinkles or protrusions on the conductive zebra paper, ensuring that the flatness of the conductive zebra paper after separating the release paper is better, and thus being more conducive to the subsequent accurate positioning and lamination of the conductive zebra paper, ensuring the lamination accuracy between the conductive zebra paper and the PCB board and the LCD board respectively.

[0050] Specifically, as Figure 4 shown, a positioning block 53 protrudes on the placement platform 5. The suction holes 51 are arranged on the positioning block 53. The positioning block 53 is used to adsorb and position the first sub-component or the second sub-component, that is, the conductive zebra paper is accurately positioned on the placement platform 5 through the positioning block 53 to ensure the position accuracy of the conductive zebra paper on the placement platform 5.

[0051] Furthermore, since there is adhesive on the separation surface of the conductive zebra paper after separating the release paper, in order to facilitate subsequent lamination operations, if the separation surface of the conductive zebra paper is directly placed on the positioning block 53, it is easy to cause the separation surface to directly adhere to the positioning block 53, which is not conducive to subsequently taking away the conductive zebra paper directly from the positioning block 53.

[0052] Therefore, as Figure 4 shown, an anti-adhesive layer 52 is provided on the positioning block 53. When the suction cup member 3 places the conductive zebra paper on the positioning block 53, the separation surface of the conductive zebra paper is placed on the anti-adhesive layer 52 to ensure that while the suction holes 51 vacuum-adsorb the conductive zebra paper, the separation surface of the conductive zebra paper will not adhere to the positioning block 53, which is conducive to subsequently taking away the conductive zebra paper directly from the positioning block 53. In this embodiment, the anti-adhesive layer 52 is specifically a Teflon anti-adhesive layer with good anti-adhesive effect.

[0053] Further, in the Z direction, the aperture of the adsorption holes 51 gradually decreases from top to bottom; on the one hand, it can make the adsorption area between the upper half of the adsorption holes 51 and the conductive zebra paper larger, ensuring the adsorption effect of the adsorption holes 51 on the conductive zebra paper; on the other hand, it can make the adsorption strength of the lower half of the adsorption holes 51 on the conductive zebra paper larger, so as to better ensure the adsorption effect of the adsorption holes 51 on the conductive zebra paper, and further ensure the stability and reliability of the vacuum adsorption of the conductive zebra paper on the positioning block 53.

[0054] The specific working process of the suction cup mechanism in this embodiment is as follows:

[0055] First, place the workpiece 1 between two relatively arranged suction cup members 3, so that one of the suction cup members 3 vacuum adsorbs the conductive zebra paper in the workpiece 1, and the other suction cup member 3 vacuum adsorbs the release paper in the workpiece 1; at this time, the arched adsorption surface 311 of the suction cup body in one suction cup member 3 adsorbs the outer periphery of the conductive zebra paper, and the horizontal adsorption surface 321 on the adsorption portion 323 in this suction cup member 3 adsorbs the middle part of the conductive zebra paper; at the same time, the arched adsorption surface 311 of the suction cup body in the other suction cup member 3 adsorbs the outer periphery of the release paper, and the horizontal adsorption surface 321 on the adsorption portion 323 in this suction cup member 3 adsorbs the middle part of the release paper.

[0056] Then, move the two suction cup members 3 along the Z direction and move away from each other, so that the conductive zebra paper and the release paper move away from each other until they are completely separated; at this time, the conductive zebra paper is adsorbed on one suction cup member 3, and the release paper is adsorbed on the other suction cup member 3.

[0057] Finally, make the suction cup member 3 place the conductive zebra paper on the positioning block 53 of the placement platform, so that each adsorption hole 51 on the positioning block 53 vacuum adsorbs the conductive zebra paper on the placement platform, which is beneficial to directly grasping the conductive zebra paper on the positioning block 53 and bonding it to the PCB board and the LCD board subsequently.

[0058] The suction cup mechanism for handling in this embodiment, by making the suction cup member 3 include a suction cup body and a guide member that cooperate with each other for adsorption, can ensure the adsorption effect on the workpiece 1 and can prevent the workpiece 1 from wrinkling during the adsorption process, ensuring that the flatness of the workpiece 1 is better; at the same time, an anti-adhesion layer 52 is provided on the positioning block 53 of the placement platform 5 to avoid the separated conductive zebra paper from adhering to the positioning block 53, which is beneficial to the quick detachment between the conductive zebra paper and the positioning block 53; moreover, the adsorption holes 51 on the positioning block 53 are subjected to variable diameter treatment, which can better ensure the vacuum adsorption effect of the adsorption holes 51 on the conductive zebra paper; and by using two suction cup members 3 in cooperation with each other, the quick separation between the first sub-component and the second sub-component in the workpiece 1 can be realized.

[0059] Obviously, the above embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present utility model. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.

Claims

1. A suction cup mechanism for transporting, comprising a suction cup member (3) that can be adsorbed on the surface of a workpiece (1), characterized in that: The suction cup member (3) comprises: A suction cup body (31) for sucking the outer peripheral edge of the workpiece (1); A guide member (32) is installed in the suction cup body (31), and the guide member (32) is used to absorb the middle part of the workpiece (1); The suction cup body (31) is provided with a suction hole (312) extending along the Z direction, and the guide member (32) comprises a mounting portion (322) and a suction portion (323) which are interconnected, the mounting portion (322) being mounted in the suction hole (312) and being in communication with the suction hole (312), and the suction portion (323) being used for sucking the middle portion of the workpiece (1).

2. The suction cup mechanism for transporting according to claim 1, characterized in that: The diameter of the adsorption portion (323) is smaller than the diameter of the suction cup body (31).

3. The suction cup mechanism for transporting according to claim 1, characterized in that: An arched adsorption surface (311) is provided in an annular manner at the bottom end of the suction cup body (31), and the arched adsorption surface (311) is gradually expanded outward from the top end to the bottom end of the suction cup body (31), and the arched adsorption surface (311) is used to adsorb the outer peripheral edge of the workpiece (1).

4. The suction cup mechanism for transporting according to claim 3, characterized in that: The adsorption portion (323) is provided with a horizontal adsorption surface (321), the arched adsorption surface (311) is arranged around the outer periphery of the horizontal adsorption surface (321), and the horizontal adsorption surface (321) is used to adsorb the middle part of the workpiece (1).

5. The suction cup mechanism for transporting according to any one of claims 1 to 4, characterized in that: The suction cup components (3) are provided with two, and the two suction cup components (3) are arranged opposite to each other along the Z direction. One of the two suction cup components (3) is used to absorb a first subcomponent in the workpiece (1), and the other is used to absorb a second subcomponent adjacent to and attached to the first subcomponent. The two suction cup components (3) can move along the Z direction and move away from each other, so as to separate the first subcomponent from the second subcomponent.

6. The suction cup mechanism for transporting according to claim 5, characterized in that: The suction cup mechanism for carrying also includes: A placement platform (5) is arranged on one side of the suction cup component (3), and a plurality of adsorption holes (51) are arranged on the placement platform (5) for adsorbing the first sub-component or the second sub-component after separation, and the suction cup component (3) is also used to flatten the first sub-component or the second sub-component.

7. The suction cup mechanism for transporting according to claim 6, characterized in that: A positioning block (53) is protrudingly provided on the placement platform (5), the adsorption hole (51) is provided on the positioning block (53), and the positioning block (53) is used for adsorbing and positioning the first sub-component or the second sub-component.

8. The suction cup mechanism for transporting according to claim 7, characterized in that: The positioning block (53) is provided with an anti-sticking layer (52), and the separation surface on the first sub-component or the second sub-component is placed on the anti-sticking layer (52).

9. The suction cup mechanism for transporting according to any one of claims 6 to 8, characterized in that: Along the Z direction, the diameter of the adsorption hole (51) gradually decreases from top to bottom.