Flange for pump opening of magnetic suspension molecular pump

Abstract

The utility model discloses a flange for a pump opening of a magnetic suspension molecular pump, the flange is fixedly connected with the pump opening of the magnetic suspension molecular pump through a sealing ring and a fastener, the flange is annular, and the inner ring edge of the flange is provided with a diagonal plane. On the basis of existing equipment, the edges of the two sides of the flange are designed into the oblique notches, so that the influence of the flange on the gas flow direction and the gas flow rate is reduced, process products cannot be deposited at the junction of the flange and the rotor, after arsine is massively prepared, the condition of rotor faults cannot occur, the replacement period of the rotor can be prolonged, and the production efficiency is improved. The cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing, and particularly to a flange for the pump port of a magnetic levitation molecular pump. Background Art

[0002] The existing molecular pump adopts a magnetic levitation design, the pump body has no heating function, the gap between the rotor and the bottom of the pump shell is small, the precipitation in the powder spraying process causes rotor friction, deformation, collision and imbalance faults, and due to the inherent design of the machine tool, the new rotor body and the valve at the machine tool end block each other and cannot be installed.

[0003] Therefore, improving the current process to avoid the deposition of process products at the junction of the flange and the rotor has become an urgent problem to be solved. Summary of the Utility Model

[0004] In order to avoid the deposition of process products at the junction of the flange and the rotor and the occurrence of rotor faults after a large amount of arsine is prepared, the utility model provides a flange for the pump port of a magnetic levitation molecular pump. Based on the original equipment, the two side edges of the flange are designed with bevel cuts, so as to reduce the influence of the flange on the gas flow direction and rate, and can also prevent process products from depositing at the junction of the flange and the rotor. After a large amount of arsine is prepared, rotor faults will not occur, the rotor replacement period can be extended, and the cost can be reduced.

[0005] According to one aspect of the utility model, there is provided a flange for the pump port of a magnetic levitation molecular pump. The flange is fixedly connected to the pump port of the magnetic levitation molecular pump through a sealing ring and a fastener. The flange is annular, and the inner ring edge of the flange is provided with a bevel surface.

[0006] According to an embodiment of the utility model, the inner ring edge of the flange is provided with a first bevel surface and a second bevel surface opposite to each other.

[0007] According to an embodiment of the utility model, the length of the first bevel surface is 40% - 60% of the inner ring circumference of the flange.

[0008] According to an embodiment of the utility model, the length of the second bevel surface is 40% - 60% of the inner ring circumference of the flange.

[0009] According to an embodiment of the utility model, the angle range between the first bevel surface and the second bevel surface and the vertical direction is 30° - 60°.

[0010] According to an embodiment of the utility model, a rotor is arranged along the height direction of the pump port of the magnetic levitation molecular pump, and the flange is fixedly connected to the rotor through a sealing ring and a fastener.

[0011] According to an embodiment of the utility model, the distance between the rotor and the bottom of the pump shell is 0.5 - 2 cm.

[0012] According to an embodiment of the present utility model, the flange is of a split structure.

[0013] According to an embodiment of the present utility model, a plurality of mounting holes are distributed on the upper surface of the flange.

[0014] According to an embodiment of the present utility model, the mounting holes are unevenly distributed.

[0015] Due to the adoption of the above technical solutions, the present utility model has the following advantages compared with the prior art: On the basis of the existing equipment, the present application adopts an inclined cut design for the two side edges of the flange, thereby reducing the influence of the flange on the gas flow direction and rate, and can also ensure that the process products will not deposit at the junction of the flange and the rotor. Moreover, after a large amount of arsine is prepared, the rotor will not malfunction, which can extend the rotor replacement cycle and reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0017] Figure 1 Shows a schematic diagram of rotor friction deformation, collision, and imbalance in the prior art;

[0018] Figure 2 Shows a schematic structural diagram of a flange for the pump port of a magnetic levitation molecular pump according to an exemplary embodiment of the present utility model;

[0019] Figure 3 Shows a schematic structural diagram of another side of a flange for the pump port of a magnetic levitation molecular pump according to an exemplary embodiment of the present utility model;

[0020] Figure 4 Shows a schematic structural diagram of the connection between a flange for the pump port of a magnetic levitation molecular pump and a sealing ring according to an exemplary embodiment of the present utility model.

[0021] DESCRIPTION OF THE REFERENCE NUMERALS:

[0022] 1. Flange; 2. Sealing ring; 3. First inclined cutting surface; 4. Second inclined cutting surface; 5. Mounting hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The following detailed description of the embodiments is used to exemplarily illustrate the principles of the present utility model, but cannot be used to limit the scope of the present utility model. The present utility model can be implemented in many different forms, not limited to the specific embodiments disclosed herein, but including all technical solutions falling within the scope of the claims.

[0024] The present utility model provides these embodiments to make the present disclosure thorough and complete, and to fully convey the scope of the present utility model to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, the components of materials, numerical expressions and values set forth in these embodiments should be construed as merely exemplary, rather than as limitations.

[0025] It should be noted that in the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is greater than or equal to two; the orientation or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present utility model. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0026] It should also be noted that in the description of the present utility model, unless otherwise clearly defined and limited, the terms "mounted", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. When it is described that a specific device is located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0027] All terms used in the present utility model have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in a general dictionary, such as those, should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and should not be interpreted in an idealized or overly formal sense, unless specifically defined as such here.

[0028] Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, these technologies, methods and devices should be regarded as part of the specification.

[0029] As Figure 1As shown, the existing molecular pump adopts a magnetic levitation design, the pump body has no heating function, the gap between the rotor and the bottom of the pump housing is small, and the precipitation of the powder spraying process causes rotor friction deformation, collision and imbalance failures. Moreover, due to the inherent design of the machine, the new rotor body and the machine end valve block each other and cannot be installed.

[0030] The purpose of this application is to adopt an inclined cut design for the edges on both sides of the flange on the basis of the existing equipment, so as to reduce the influence of the flange on the gas flow direction and rate, and it can also ensure that the process products will not deposit at the junction of the flange and the rotor. Moreover, after a large amount of arsine is prepared, there will be no rotor failures, which can extend the rotor replacement cycle and reduce costs.

[0031] As Figure 2 and 3 shown, the present utility model provides a flange 1 for the pump port of a magnetic levitation molecular pump. The flange 1 is fixedly connected to the pump port of the magnetic levitation molecular pump through a sealing ring 2 and fasteners. Among them, the flange 1 is annular, and the inner ring edge of the flange 1 is provided with an inclined cut surface.

[0032] The existence of the inclined cut surface helps to improve the stress distribution at the connection part of the flange 1. In the traditional design, stress concentration often occurs at the connection of the flange 1, which increases the risk of connection failure. The introduction of the inclined cut surface can disperse the stress to a larger area, reduce the stress peak value, and improve the strength and stability of the connection.

[0033] The design of the inclined cut surface can make the contact between the flange 1 and the seal (such as the sealing ring 2) more uniform and tight, reducing the leakage risk caused by uneven contact. This design helps to maintain the integrity of the seal under higher pressure or temperature conditions.

[0034] In some specific embodiments, the inner ring edge of the flange 1 is provided with a first inclined cut surface 3 and a second inclined cut surface 4 that are opposite to each other. The design of the first inclined cut surface 3 and the second inclined cut surface 4 is similar to a mortise and tenon structure. This structure can generate greater friction when connecting, thereby improving the strength and stability of the connection. Through the close fit of the inclined surfaces, the connecting parts are not easily loosened or detached when stressed. The design of the inclined cut surface enables the two connecting surfaces to form a tighter bite when contacting, further improving the stability of the connection.

[0035] The design of the inclined cut surface makes the connecting parts more convenient and fast to install and disassemble. Due to the guiding effect of the inclined surface, the connecting parts can be more easily aligned and inserted into the predetermined position.

[0036] On the basis of the above embodiments, the length of the first inclined cut surface 3 is 40% - 60% of the inner ring circumference of the flange 1. Specifically, the length of the first inclined cut surface 3 is 50% of the inner ring circumference of the flange 1.

[0037] Based on the above embodiments, the length of the second inclined plane 4 is 40% to 60% of the inner ring circumference of the flange 1. Specifically, the length of the second inclined plane 4 is 50% of the inner ring circumference of the flange 1.

[0038] The inclined plane length being 50% of the inner ring circumference means it covers half of the circumference of the flange 1, which helps to achieve a more uniform force distribution during the connection process. Compared with shorter or longer inclined planes, this design can better disperse the stress at the connection, reduce the stress concentration phenomenon, and thus improve the strength and stability of the connection.

[0039] Since the inclined plane covers a relatively large area, even if there are minor deviations during the installation process, it can be automatically corrected through the guiding action of the inclined plane, thereby reducing the installation error.

[0040] This design can be applied to various flange 1 connection scenarios. Whether it is in high-pressure, high-temperature or other special environments, it can improve the reliability and stability of the connection to a certain extent.

[0041] In some specific embodiments, the angles of the first inclined plane 3 and the second inclined plane 4 with respect to the vertical direction range from 30° to 60°. Specifically, the angle with respect to the vertical direction is 45°.

[0042] As Figure 4 shown, in some specific embodiments, a rotor is provided along the height direction of the pump port of the magnetic levitation molecular pump, and the flange 1 is fixedly connected to the rotor through the sealing ring 2 and the fasteners.

[0043] Based on the above embodiments, the distance between the rotor and the bottom of the pump housing is 0.5 cm to 2 cm. Specifically, the distance between the rotor and the bottom of the pump housing is 1 cm.

[0044] In some specific embodiments, the flange 1 has a split structure. The split structure makes the assembly and disassembly processes easy and fast. Without disassembling the equipment, it is convenient to replace components such as the sealing ring 2, improving the maintenance efficiency. The fasteners of the split flange 1 have a large fastening force and can withstand large tensile and shear forces, ensuring the stability of the connection. This structure allows the equipment to have a certain degree of flexibility to adapt to different system requirements and installation environments. Due to being easy to disassemble and install, the split flange 1 can save a large amount of time and labor costs during maintenance and overhaul.

[0045] In some specific embodiments, a plurality of mounting holes 5 are distributed on the upper surface of the flange 1. The mounting holes 5 provided on the upper surface of the flange 1 enable the flange 1 to be flexibly connected to other pipes, valves or equipment through fasteners such as bolts and nuts, thereby meeting various complex industrial connection requirements. Through the reserved mounting holes 5, the flange 1 can be conveniently installed, reducing the installation time and cost and improving the installation efficiency. During the manufacturing process, the mounting holes 5 can also be used for the sealing inspection of the welds to ensure the sealing of the connection between the flange 1 and other components and prevent the leakage of the medium. By reasonably designing the position and shape of the mounting holes 5, the stress concentration at the connection of the flange 1 can be reduced, and the fatigue life and overall performance of the flange 1 can be improved.

[0046] Based on the above embodiments, the mounting holes 5 are unevenly distributed. In some systems with entrained particles or close-contact media, the uneven distribution of the bolt hole layout can increase the sealing effect. By optimizing the position and quantity of the mounting holes 5 and the fasteners, the stress distribution of the sealing surface can be better controlled to prevent the leakage of the medium. In the case where the temperature field where the equipment is located is complex, the connection temperatures of the flange 1 at different positions are different, and their thermal deformations are also different. The uneven distribution of the bolt hole layout can better adapt to this thermal deformation difference and ensure the stability of the sealing effect.

[0047] In some specific embodiments, a heating device is provided on the molecular pump. The heating device can increase the internal temperature of the molecular pump, thereby accelerating the thermal motion speed of gas molecules, which makes it easier for gas molecules to be captured and processed by the molecular pump, improving the working efficiency. The high-temperature environment increases the possibility of gas molecule ionization, further enhancing the gas processing ability of the molecular pump.

[0048] Based on the above embodiments, the heating device can include a PTC thermistor to achieve automatic constant temperature control of the internal temperature of the molecular pump. When the temperature reaches the preset value, the heating device will automatically stop heating to avoid damage to the equipment caused by excessive temperature.

[0049] Specifically, the heating device is arranged inside the magnetic levitation molecular pump.

[0050] After the implementation of the present utility model, it has at least the following beneficial effects: Based on the existing production equipment, an inclined cut design strategy is implemented on both side edges of the inner ring of the flange, thereby significantly reducing the obstruction of the flange to the gas flow direction and the negative impact on the gas flow rate. By introducing the inclined cut, the gas can change its flow direction more smoothly when flowing through the flange area, reducing the formation of eddy currents and turbulence, thereby ensuring a more stable and efficient gas flow rate.

[0051] The inclined cut design also solves the problem of process product deposition at the junction of the flange and the rotor. In traditional designs, due to the non-uniformity of the gas flow and the existence of dead corners, process products are prone to accumulate in these areas, which not only affects product quality but may also damage the equipment. The inclined cut design effectively improves the gas flow distribution, enabling the gas to wash through these areas more thoroughly, reducing the formation of deposits, and ensuring the continuity and stability of the production process.

[0052] When preparing large quantities of highly reactive and corrosive gases such as arsine, the application of the inclined cut design significantly reduces the risk of rotor failure. The corrosiveness of arsine and the impurities that may be generated during the production process often cause severe erosion to equipment components. Especially when deposits accumulate near the rotor, it will exacerbate the wear and failure of the rotor. The inclined cut design ensures a clean operating environment for the rotor by reducing deposits, effectively extends the service life of the rotor, and reduces the downtime and maintenance costs caused by frequent rotor replacement.

[0053] Those of ordinary skill in the art should understand that: the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope (including the claims) of the disclosure of the embodiments of the present invention is limited to these examples; under the concept of the embodiments of the present invention, the technical features in the above embodiments or different embodiments can also be combined, and there are many other variations in different aspects of the embodiments of the present invention as above, which are not provided in detail for the sake of brevity. Therefore, any omission, modification, equivalent replacement, improvement, etc. made within the spirit and principle of the embodiments of the present invention shall be included within the protection scope of the embodiments of the present invention.

Claims

1. A flange for a pump port of a magnetic levitation molecular pump, wherein the flange is fixedly connected to the pump port of the magnetic levitation molecular pump through a sealing ring and a fastener, characterized in that: The flange is annular, and an inner ring edge of the flange is provided with a chamfered surface.

2. The flange for the pump port of a magnetic levitation molecular pump according to claim 1, characterized in that: The inner ring edge of the flange is provided with a first chamfered surface and a second chamfered surface opposite to each other.

3. The flange for the pump port of a magnetic levitation molecular pump according to claim 2, characterized in that: The length of the first chamfered surface is 40-60% of the circumference of the inner ring of the flange.

4. The flange for the pump port of a magnetic levitation molecular pump according to claim 2, characterized in that: The length of the second chamfered surface is 40-60% of the circumference of the inner ring of the flange.

5. The flange for the pump port of a magnetic levitation molecular pump according to claim 2, characterized in that: The angle between the first bevel and the second bevel and the vertical direction is in the range of 30-60 degrees.

6. The flange for the pump port of a magnetic levitation molecular pump according to claim 1, characterized in that: The pump port of the magnetic suspension molecular pump is provided with a rotor along the height direction, and the flange is fixedly connected to the rotor through the sealing ring and the fastener.

7. The flange for the pump port of a magnetic levitation molecular pump according to claim 6, characterized in that: The distance between the rotor and the bottom of the pump housing is 0.5-2 cm.

8. The flange for the pump port of a magnetic levitation molecular pump according to claim 1, characterized in that: The flange is a split structure.

9. The flange for the pump port of a magnetic levitation molecular pump according to claim 1, characterized in that: A plurality of mounting holes are distributed on the upper surface of the flange.

10. The flange for the pump port of a magnetic levitation molecular pump according to claim 9, characterized in that: The mounting holes are unevenly distributed.

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