Vacuum water-cooling flange combination with integrated connector

Abstract

The utility model relates to the technical field of water-cooling flanges, in particular to a vacuum water-cooling flange combination with an integrated connector, which comprises a front flange and a rear flange which are provided with cooling water channels, and mounting planes are arranged on the peripheral end faces of the front flange and the rear flange. A water inlet and outlet communicated with the cooling water channel is formed in the mounting plane, a connecting block communicated with the water inlet and outlet is fixedly mounted on the mounting plane, a communicating cavity is formed in the connecting block, and an auxiliary mounting structure is arranged on the lower end face of the connecting block; the auxiliary mounting structure replaces an existing clamping sleeve straight-through connector, an existing 90-degree welding connector and an existing bent pipe, multiple functions of flange sealing, cooling and the like can be achieved, connector mounting of a flange is facilitated through the auxiliary mounting structure, replacement of the flange is easy, and the flange is convenient to mount and dismount. Therefore, the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of water-cooled flanges, in particular to a vacuum water-cooled flange combination with an integrated interface. Background Art

[0002] The existing water circuit of the vacuum water-cooled flange combination is formed by welding a flange main body and a straight-through ferrule joint. The flange sealing surface is designed with a sealing ring. The combination is that after the sealing rings are installed on the overlapping surfaces of the two flanges, bolts are used to fasten and compress the sealing rings to ensure that the two flange planes completely overlap, thereby ensuring sealing. The water circuit between the two flanges is realized by connecting a bent pipe with a straight-through ferrule joint to form a combined water circuit circulation system, so as to cool and dissipate heat from the sealing ring and the flange, thereby ensuring that the chamber pressure and temperature are maintained constant and the operation stability of the equipment system. In this way, the pipeline connection occupies space and increases costs. When there is a problem with the joint, the flange needs to be removed and sent back to the factory to replace the joint, and the maintenance cost of the device is high. Moreover, a large number of bolts are generally required to completely fix the modular joint during installation, so the disassembly and installation are both relatively complex, affecting the work efficiency. Therefore, improvements are proposed. Summary of the Utility Model

[0003] The purpose of the utility model is to solve the problem that a large number of bolts are generally required to completely fix the modular joint during installation in the prior art, so the disassembly and installation are both relatively complex, affecting the work efficiency, and to propose a vacuum water-cooled flange combination with an integrated interface.

[0004] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0005] Design a vacuum water-cooled flange combination with an integrated interface, including a front flange and a rear flange with a cooling water circuit. Installation planes are provided on the outer peripheral end faces of the front flange and the rear flange. Water inlet and outlet openings communicating with the cooling water circuit are provided inside the installation planes. Connection blocks communicating with the water inlet and outlet openings are fixedly installed on the installation planes. A communication cavity is provided inside the connection blocks. An auxiliary installation structure is provided on the lower end face of the connection blocks;

[0006] The auxiliary installation structure includes a plurality of groups of second insertion blocks fixedly connected to the lower end face of the connection blocks. Limiting slots matching with the second insertion blocks are provided inside the installation planes. A second fixing block is fixedly connected to the bottom of the second insertion blocks. The second fixing block is inserted and engaged inside the limiting slots.

[0007] Preferably, a second clamping groove is provided inside the second fixing block, and a clamping block matching with the second clamping groove is provided inside the limiting slot.

[0008] Preferably, two groups of water inlet and outlet blocks are fixedly installed on the installation plane, and water pipe installation holes connected to the water inlet and outlet are opened inside the water inlet and outlet blocks. Connecting water pipes are fixedly connected inside the water pipe installation holes, and the connecting water pipes are interconnected with the external cooling water circulation system.

[0009] Preferably, the lower end surface of the water inlet and outlet block is fixedly connected with multiple groups of first plug-in blocks, the first plug-in blocks are movably plugged into the interior of the limiting slot, the bottom of the first plug-in block is fixedly connected with a first fixed block, and the interior of the first fixed block is provided with a first locking groove that cooperates with the locking block.

[0010] Preferably, the connection block and the water inlet and outlet blocks are fixedly connected to the flange through the cooperation of bolts.

[0011] Preferably, the front flange and the rear flange are fixedly connected by bolts, and a locking structure is provided on the mating surfaces of the front flange and the rear flange.

[0012] Preferably, the interiors of the front flange and the rear flange are both sleeved with sealing rings that cooperate with the cooling water channel.

[0013] The utility model proposes a vacuum water-cooling flange combination with an integrated interface, which has the beneficial effect of: inserting the plug-in block into the limiting slot, and then pushing the connecting block and the inlet and outlet water blocks to one side, at this time, with the cooperation of the fixing block, the connecting block and the inlet and outlet water blocks cannot be pulled out upward, and then fixing the connecting block and the inlet and outlet water blocks by bolts, so that with the cooperation of the fixing block and the limiting slot, the number of bolts required can be reduced, thereby improving the installation efficiency of the interface part, and during use, water is filled into the cooling water circuit through a group of inlet and outlet water blocks, and with the cooperation of the connecting block, the cooling water circuits of the front and rear flanges can be connected, so that after the cooling water circuit is filled with water, it can be discharged by another group of inlet and outlet water blocks, thereby achieving a circulating vacuum water-cooling flange, and the vacuum water-cooling flange combination water circuit circulation system will take away the high temperature generated when the vacuum system is running to provide cooling and heat dissipation for the sealing ring and the flange, and the device is installed at both ends of the chamber, and then the front end furnace door and the rear end furnace door are installed to achieve chamber sealing, thereby achieving the stability of the operation of the vacuum system, and playing an important role. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a structural schematic diagram of a vacuum water-cooling flange assembly with an integrated interface proposed by the utility model;

[0015] Figure 2 This is a schematic diagram of the flange structure of a vacuum water-cooling flange assembly with an integrated interface proposed by the utility model;

[0016] Figure 3A vacuum water-cooled flange combination with an integrated interface proposed by the present utility model Figure 2 Partial enlarged view at location A in

[0017] Figure 4 Schematic structural diagram of the water connection component of a vacuum water-cooled flange combination with an integrated interface proposed by the present utility model

[0018] Figure 5 Schematic longitudinal sectional structure diagram of a vacuum water-cooled flange combination with an integrated interface proposed by the present utility model

[0019] Figure 6 A vacuum water-cooled flange combination with an integrated interface proposed by the present utility model Figure 5 Partial enlarged view at location B in

[0020] Figure 7 Schematic sectional structure diagram of the connection block of a vacuum water-cooled flange combination with an integrated interface proposed by the present utility model

[0021] Figure 8 A vacuum water-cooled flange combination with an integrated interface proposed by the present utility model Figure 7 Partial enlarged view at location C in

[0022] Figure 9 Schematic sectional structure diagram of the limiting component of a vacuum water-cooled flange combination with an integrated interface proposed by the present utility model

[0023] Figure 10 A vacuum water-cooled flange combination with an integrated interface proposed by the present utility model Figure 9 Partial enlarged view at location D in

[0024] In the figure: 1. Rear flange; 101. Installation plane; 102. Water inlet and outlet; 103. Limiting slot; 104. Positioning block; 105. Cooling water path; 2. Front flange; 3. Water inlet and outlet block; 301. Water pipe installation hole; 302. First insertion block; 303. First fixing block; 304. First clamping groove; 4. Connection block; 401. Communication cavity; 402. Second insertion block; 403. Second fixing block; 404. Second clamping groove; 5. Connection water pipe; 6. Sealing ring Specific embodiments

[0025] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments

[0026] Refer to Figure 1-10, A vacuum water-cooled flange combination with an integrated interface, including a front flange 2 and a rear flange 1 with a cooling water channel 105. Installation planes 101 are provided on the peripheral end faces of the front flange 2 and the rear flange 1. Water inlet and outlet openings 102 that communicate with the cooling water channel 105 are provided inside the installation planes 101. A connecting block 4 that communicates with the water inlet and outlet openings 102 is fixedly installed on the installation plane 101. A communication cavity 401 is provided inside the connecting block 4. An auxiliary installation structure is provided on the lower end face of the connecting block 4;

[0027] The auxiliary installation structure includes multiple groups of second insertion blocks 402 fixedly connected to the lower end face of the connecting block 4. Limit slots 103 that cooperate with the second insertion blocks 402 are provided inside the installation plane 101. A second fixing block 403 is fixedly connected to the bottom of the second insertion block 402. The second fixing block 403 is inserted and engaged inside the limit slot 103. By providing the auxiliary installation structure, the installation of the connecting block 4 is facilitated.

[0028] A second clamping groove 404 is provided inside the second fixing block 403. A clamping block 104 that cooperates with the second clamping groove 404 is provided inside the limit slot 103. By providing the clamping groove and the clamping block 104, it is ensured that the fixing block will not shift after insertion, thus facilitating bolt fixing.

[0029] Two groups of water inlet and outlet blocks 3 are fixedly installed on the installation plane 101. A water pipe installation hole 301 that communicates with the water inlet and outlet opening 102 is provided inside the water inlet and outlet block 3. A connecting water pipe 5 is fixedly connected inside the water pipe installation hole 301. The connecting water pipe 5 communicates with an external cooling water circulation system. One group of water inlet and outlet blocks 3 is used to inject water into the cooling water channel 105. With the cooperation of the connecting block 4, the cooling water channels 105 of the front and rear flanges can be connected. In this way, after the cooling water channel 105 is filled with water, it can be discharged by the other group of water inlet and outlet blocks 3, thus achieving a circulating vacuum water-cooled flange system.

[0030] Multiple groups of first insertion blocks 302 are fixedly connected to the lower end face of the water inlet and outlet block 3. The first insertion blocks 302 are movably inserted inside the limit slot 103. A first fixing block 303 is fixedly connected to the bottom of the first insertion block 302. A first clamping groove 304 that cooperates with the clamping block 104 is provided inside the first fixing block 303. By providing the auxiliary installation structure, the installation of the water inlet and outlet block 3 is facilitated.

[0031] The connecting block 4 and the water inlet and outlet block 3 are fixedly connected to the flange through the cooperation of bolts. The connecting block 4 and the water inlet and outlet block 3 can be fixed by bolts. By providing the auxiliary installation structure, the number of bolts required is reduced, thus improving the installation efficiency of the interface part.

[0032] The front flange 2 and the rear flange 1 are fixedly connected through the cooperation of bolts. A clamping structure is provided on the mating surface of the front flange 2 and the rear flange 1. By fixing the front flange 2 and the rear flange 1 with bolts, the cooperation degree between the front flange 2 and the rear flange 1 is improved by setting the clamping structure, so as to ensure that the mating surfaces are completely coincident.

[0033] Sealing rings 6 that cooperate with the cooling water channels 105 are sleeved inside both the front flange 2 and the rear flange 1. By setting the sealing rings 6, the sealing effect after the two flange planes are completely coincident is ensured.

[0034] Working mode; during operation, the sealing ring 6 is installed on the combined surface of the front flange 2 and the rear flange 1, and then the flanges are fastened with bolts to compress the sealing ring 6 to ensure that the two flange planes are completely coincident to ensure the sealing effect. By installing sealing washers at the water inlet and outlet 102 positions of the front flange 2 and the rear flange 1, then inserting the plug-in block into the limit slot 103, and pushing the connecting block 4 and the water inlet and outlet block 3 to one side. At this time, with the cooperation of the fixing block, the connecting block 4 and the water inlet and outlet block 3 cannot be pulled out upward. Then the connecting block 4 and the water inlet and outlet block 3 are fixed with bolts. In this way, with the cooperation of the fixing block and the limit slot 103, the number of bolts required can be reduced, thereby improving the installation efficiency of the interface part. By using bolts to fasten and compress the sealing washer to ensure that the sealing surfaces of the connecting block 4 and the water inlet and outlet block 3 are completely coincident with the water inlet and outlet 102 of the flange, a vacuum water-cooled flange combined waterway seal is formed. When the vacuum system is working, the high temperature generated inside is 600 - 800 degrees Celsius. Since the high temperature directly affects the service life of the sealing ring 6 and the deformation of the flange, it is easy to cause the vacuum system to leak and unable to work. Therefore, the vacuum water-cooled flange combined waterway circulation system will take away the generated high temperature to cool and dissipate heat for the sealing ring 6 and the flange when the vacuum system is running. The vacuum water-cooled flange combination is installed at both ends of the chamber, and then the front furnace door and the rear furnace door are installed to achieve the sealing of the chamber, realizing the stability of the vacuum system operation and playing an important role.

[0035] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and the inventive concept of the present invention, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.

Claims

1. A vacuum water-cooled flange assembly with an integrated interface, comprising a front flange (2) and a rear flange (1) having a cooling water path (105), characterized in that: The front flange (2) and the rear flange (1) are both provided with a mounting plane (101) on their outer end surfaces, a water inlet and outlet (102) which are interconnected with the cooling water path (105) are provided inside the mounting plane (101), a connecting block (4) which is connected with the water inlet and outlet (102) is fixedly mounted on the mounting plane (101), a connecting cavity (401) is provided inside the connecting block (4), and an auxiliary mounting structure is provided on the lower end surface of the connecting block (4); The auxiliary installation structure comprises a plurality of groups of second plug-in blocks (402) fixedly connected to the lower end surface of the connection block (4); a limiting slot (103) cooperating with the second plug-in block (402) is provided inside the installation plane (101); a second fixing block (403) is fixedly connected to the bottom of the second plug-in block (402); and the second fixing block (403) is plugged and engaged inside the limiting slot (103).

2. The vacuum water-cooling flange assembly with an integrated interface according to claim 1, characterized in that: A second locking groove (404) is provided inside the second fixing block (403), and a locking block (104) cooperating with the second locking groove (404) is provided inside the limiting slot (103).

3. The vacuum water-cooling flange assembly with an integrated interface according to claim 2, characterized in that: Two groups of water inlet and outlet blocks (3) are fixedly mounted on the mounting plane (101); a water pipe mounting hole (301) communicating with the water inlet and outlet (102) is provided inside the water inlet and outlet blocks (3); a connecting water pipe (5) is fixedly connected inside the water pipe mounting hole (301); and the connecting water pipe (5) is communicated with an external cooling water circulation system.

4. The vacuum water-cooling flange assembly with an integrated interface according to claim 3, characterized in that: The lower end surface of the water inlet and outlet block (3) is fixedly connected to a plurality of first plug-in blocks (302); the first plug-in blocks (302) are movably plugged into the interior of the limiting slot (103); the bottom of the first plug-in block (302) is fixedly connected to a first fixing block (303); the interior of the first fixing block (303) is provided with a first locking groove (304) that cooperates with the locking block (104).

5. The vacuum water-cooling flange assembly with an integrated interface according to claim 4, characterized in that: The connection block (4) and the water inlet and outlet block (3) are fixedly connected to the flange through the cooperation of bolts.

6. The vacuum water-cooling flange assembly with an integrated interface according to claim 1, characterized in that: The front flange (2) and the rear flange (1) are fixedly connected by means of bolts, and a locking structure is provided on the matching surfaces of the front flange (2) and the rear flange (1).

7. The vacuum water-cooling flange assembly with an integrated interface according to claim 6, characterized in that: The front flange (2) and the rear flange (1) are both sleeved with sealing rings (6) that cooperate with the cooling water channel (105).

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