In-place detection mechanism and processing equipment

Abstract

The utility model relates to an in-place detection mechanism and processing equipment. The in-place detection mechanism comprises a base, a movable part, a driving part and a triggering part. The movable part is arranged on the base and can reciprocate between a first position and a second position; the driving part is arranged on the base and provided with a driving end used for driving the furnace door to act, and in the process of driving the furnace door to be closed, the driving end can abut against and push the movable part to move from the first position to the second position; the triggering piece is arranged on the base, and the movable piece moving to the second position can trigger the triggering piece. When driving the furnace door to be closed, the driving end pushes the movable part to move from the first position to the second position, so that the movable part triggers the triggering part, and in-place detection of closing of the furnace door is completed. Meanwhile, as the triggering piece can be triggered through the movable piece, the triggering piece can be arranged away from the furnace door, frequent damage of the triggering piece due to high-temperature heat radiation in the furnace body is avoided, the shutdown overhaul frequency is reduced, and the reliability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of furnace door in-place detection, in particular to an in-place detection mechanism and a processing device. Background Art

[0002] In the preparation process of solar cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating, and printing in sequence. The diffusion process is a core process in the preparation of solar cells, and is distinguished as boron diffusion and phosphorus diffusion according to different technical routes. Among them, the process temperature of the boron diffusion equipment based on the N-type Topcon process is as high as 1050°C.

[0003] As Figure 1 shown, in the existing equipment, the microswitch for detecting the in-place closing of the furnace door is arranged close to the furnace door, and high-temperature thermal radiation will be generated inside the furnace body, making the in-place detection microswitch close to the furnace door prone to frequent damage, increasing the frequency of shutdown for maintenance. Summary of the Utility Model

[0004] Based on this, in view of the problem that the microswitch for detecting the in-place closing of the existing furnace door is prone to heat damage when close to the furnace door, it is necessary to provide an in-place detection mechanism and a processing device that can detect the in-place closing of the furnace door and is not prone to heat damage, reducing the frequency of shutdown for maintenance.

[0005] An in-place detection mechanism, comprising:

[0006] A base;

[0007] A movable part, arranged on the base and capable of reciprocating between a first position and a second position; and

[0008] A driving part, arranged on the base and having a driving end for driving the furnace door to move. During the process of driving the furnace door to close, the driving end can abut against and push the movable part to move from the first position to the second position; and

[0009] A triggering part, arranged at a part of the base far from the high-temperature source, and the movable part moving to the second position can trigger the triggering part.

[0010] In one embodiment, the in-place detection mechanism further includes a push block and an abutting block, the push block is connected to the driving end, and the abutting block is connected to the movable part;

[0011] During the process of driving the furnace door to close, the push block can abut against the abutting block to push the movable part to move from the first position to the second position.

[0012] In one embodiment, the abutting block can adjust its position relative to the movable part along the moving direction of the movable part.

[0013] In one embodiment, the in-place detection mechanism further includes a reset component disposed on the base. During the opening process of the furnace door, the reset component drives the movable member to move from the second position to the first position.

[0014] In one embodiment, the reset component includes an elastic member, a blocking member, and a pressing block. The blocking member is connected to the base, the pressing block is connected to the movable member, and two ends of the elastic member are respectively abutted against the pressing block and the blocking member.

[0015] During the process that the driving end pushes the movable member to move from the first position to the second position, the pressing block overcomes the resistance of the elastic member to compress it.

[0016] During the opening process of the furnace door, the elastic member pushes the pressing block to drive the movable member to move from the second position to the first position.

[0017] In one embodiment, the reset component further includes a limiting block. The limiting block is connected to the movable member and is located on a side of the blocking member away from the pressing block.

[0018] During the process that the elastic member drives the movable member to move from the second position to the first position, the limiting block moves towards the blocking member until it abuts against the blocking member.

[0019] In one embodiment, two ends of the moving stroke of the driving end respectively correspond to an open position and a closed position, and an abutting position is provided between the open position and the closed position.

[0020] When the driving end moves from the open position to the abutting position, the movable member is located at the first position. When the driving end is located at the closed position, the movable member is located at the second position.

[0021] In one embodiment, the in-place detection mechanism further includes a guiding member disposed on the base. The guiding member is provided with a guiding hole, and the movable member passes through the guiding hole. The guiding hole can guide the movement of the movable member.

[0022] In one embodiment, the movable member includes a first rod portion and a second rod portion. The second rod portion is connected to the first rod portion and is disposed at an angle with the first rod portion. The second rod portion passes through the guiding hole. When the movable member moves to the second position, the second rod portion can trigger the triggering member.

[0023] A processing device includes the above in-place detection mechanism.

[0024] With the above-mentioned in-place detection mechanism and processing equipment, when the driving end drives the furnace door to close, the driving end will push the movable part from the first position to the second position, so that the movable part will trigger the triggering part, thus completing the in-place detection of the furnace door closing. At the same time, since the triggering part can be triggered by the movable part, the triggering part can be arranged away from the furnace door, avoiding frequent damage to the triggering part due to the high-temperature thermal radiation in the furnace body, thereby reducing the shutdown maintenance frequency and improving the reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0026] Figure 1 is a schematic structural diagram of the prior art;

[0027] Figure 2 is a schematic structural diagram of the in-place detection mechanism provided by an embodiment of the present application;

[0028] Figure 3 is a schematic structural diagram of the driving end in the in-place detection mechanism when it is in the open position;

[0029] Figure 4 is a schematic structural diagram of the driving end in the in-place detection mechanism when it is in the closed position. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] In order to make the above-mentioned objects, features and advantages of the present application more obvious and understandable, the following will give a detailed description of the specific embodiments of the present application with reference to the drawings. Many specific details are set forth in the following description in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein. Those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0033] In the present application, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0034] In the present application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0035] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0036] As Figure 1 shown, an embodiment of the present application provides a furnace door opening and closing mechanism in the prior art. The furnace door 2 cooperates with the opening part of the furnace chamber 1. The driver 4 drives the furnace door 2 to open or close. The microswitch 3 is disposed near the opening of the furnace chamber 1 and is easily damaged by the thermal radiation shown by the arrow in the figure.

[0037] As Figure 2 shown, an embodiment of the present application provides a position detection mechanism 10, including a base 110 and a movable member 120, a driving member 130 and a triggering member 140 disposed on the base 110. Among them, the triggering member 140 is disposed at a part of the base 110 far from the high-temperature source, so as to avoid high-temperature damage. In this embodiment, the high-temperature source can be the furnace mouth of a diffusion furnace; in other embodiments, the high-temperature source can also be other equipment chambers with heating functions and their opening parts.

[0038] The movable member 120 can reciprocate between a first position and a second position, and the movable member 120 moving to the second position can trigger the triggering member 140. The driving member 130 has a driving end 131 for driving the furnace door to act. During the process of driving the furnace door to close, the driving end 131 can abut against and push the movable member 120 to move from the first position to the second position.

[0039] It should be noted that the triggering member 140 is a microswitch. In other embodiments, the triggering member 140 can also be other structures.

[0040] With the above-mentioned position detection mechanism, when the driving end 131 drives the furnace door to close, the driving end 131 will push the movable member 120 to move from the first position to the second position, so that the movable member 120 triggers the triggering member 140, thereby completing the in-place detection of the furnace door closing. At the same time, since the triggering member 140 can be triggered by the movable member 120, the triggering member 140 can be disposed away from the furnace door, avoiding frequent damage to the triggering member 140 due to the high-temperature thermal radiation in the furnace body, thereby reducing the frequency of shutdown for maintenance and improving the reliability.

[0041] As Figure 3 and Figure 4As shown, in one embodiment, both ends of the moving stroke of the driving end 131 respectively correspond to an open position and a closed position, and an abutting position is provided between the open position and the closed position. During an operation of closing the furnace door, when the driving end 131 moves, it sequentially passes through the open position, the abutting position, and the closed position.

[0042] When the driving end 131 moves to the open position, the furnace door is in an open state; during the process of the driving end 131 moving from the open position to the closed position, the driving end 131 can drive the furnace door to close, and the driving end 131 can abut against and push the movable member 120 to move from the first position to the second position.

[0043] When the driving end 131 moves from the open position to the abutting position, the movable member 120 is located at the first position, and the driving end 131 can abut against the movable member 120; when the driving end 131 is located at the closed position, the furnace door is in a closed state, and the movable member 120 is located at the second position.

[0044] In addition, before the driving end 131 moves from the open position to the abutting position, the driving end 131 does not abut against the movable member 120, so as not to drive the movable member 120 to move. In this way, the moving distance of the movable member 120 can be made much smaller than the moving distance of the driving end 131, so that the distance between the movable member 120 and the triggering member 140 can be reduced, effectively reducing the size of the in-place detection mechanism.

[0045] It should be noted that the driving member 130 is a cylinder. In other embodiments, the driving member 130 can also be other driving structures.

[0046] In one embodiment, the in-place detection mechanism further includes a guiding member 150. The guiding member 150 is disposed on the base 110, and the guiding member 150 is provided with a guiding hole 151. The movable member 120 passes through the guiding hole 151, and the guiding hole 151 can guide the movement of the movable member 120.

[0047] The guiding hole 151 can be a slotted hole, and its length direction is consistent with the moving direction of the guiding member 150. When the guiding member 150 moves, the guiding hole 151 can limit its movement trajectory, avoid deviation, and improve the reliability of action execution.

[0048] In one embodiment, the movable member 120 includes a first rod portion 121 and a second rod portion 122. The second rod portion 122 is connected to the first rod portion 121 and is disposed at an angle to the first rod portion 121. The second rod portion 122 passes through the guiding hole 151, and when the movable member 120 moves to the second position, the second rod portion 122 can trigger the triggering member 140.

[0049] A contact is provided on one side of the second rod portion 122 facing the trigger member 140. During the process of the driving end 131 driving the furnace door to close, the driving end 131 can push the movable member 120 to move. At this time, the second rod portion 122 will move towards the trigger member 140 until the contact triggers the trigger member 140. In other embodiments, the trigger member 140 can also adopt pressure-sensitive triggering. When the second rod portion 122 abuts against the trigger member 140, the trigger member 140 can be triggered.

[0050] It can be understood that in this embodiment, the above-mentioned reduction of the distance between the movable member 120 and the trigger member 140 refers to the reduction of the distance between the second rod portion 122 and the trigger member 140. In addition, the second rod 122 can be connected and arranged at one end of the first rod 121, or can be connected and arranged at other parts of the first rod 121; the first rod 121 and the second rod 122 can be a split connection structure, or can be an integrally formed part, such as an L-shaped bent pipe fitting. The first rod portion 121 can be a straight rod extending along the moving direction of the driving end 131.

[0051] In one embodiment, the in-place detection mechanism further includes a push block 161 and an abutting block 162. The push block 161 is connected to the driving end 131, and the abutting block 162 is connected to the movable member 120, and is specifically connected to the first rod portion 121.

[0052] During the process of driving the furnace door to close, the push block 161 moves with the driving end 131, and the push block 161 can abut against the abutting block 162 to push the movable member 120 to move from the first position to the second position.

[0053] By connecting and arranging the push block 161 on the driving end 131 and connecting and arranging the abutting block 162 on the movable member 120, so that the abutting block 162 is located on the moving path of the push block 161 to achieve abutting and driving cooperation, the setting position of the movable member 120 can be made more flexible, and the adaptability of the structure layout of the in-place detection mechanism can be improved.

[0054] Optionally, the push block 161 is provided with a first through hole, and the first rod portion 121 passes through the first through hole.

[0055] Combined with the above embodiments, it can be understood that before the driving end 131 moves from the open position to the abutting position, the push block 161 will not abut against the abutting block 162. At this time, the push block 161 can move relative to the movable member 120 with the driving end 131 and will not drive the movable member 120; and after the driving end 131 moves to the abutting position, the push block 161 abuts against the abutting block 162 and then pushes the abutting block 162 and the movable member 120 to move towards the second position.

[0056] In one embodiment, the abutting block 162 can adjust its position relative to the movable member 120 along the moving direction of the movable member 120, so that the position where the pushing block 161 abuts against the abutting block 162 can be adjusted as required, that is, the abutting position is adjusted, so as to be able to adjust for different working conditions of the closing stroke of the furnace door and improve the adaptability of the in-place detection mechanism.

[0057] Optionally, the abutting block 162 is threadedly connected to the first rod portion 121.

[0058] In one embodiment, the in-place detection mechanism further includes a reset assembly 170. The reset assembly 170 is disposed on the base 110. During the process of opening the furnace door, the reset assembly 170 drives the movable member 120 to move from the second position to the first position, so that the triggering state of the trigger member 140 can be quickly switched with the opening or closing of the furnace door, realizing the quick response of the in-place detection mechanism.

[0059] It can be understood that in other embodiments, the driving end 131 can also be used to push the movable member 120 back to the first position. For example, an abutting block 162 is also provided at a position where the first rod portion 121 is close to the second rod portion 122. During the process of driving the end 131 to move from the closed position to the open position to open the furnace door, the driving end 131 drives the pushing block 161 to move, and the pushing block 161 will abut against the abutting block 162 close to the second rod portion 122 and drive the movable member 120 back to the first position. In this way, it can be determined that the furnace door is closed when the trigger member 140 is triggered, and it can also be determined that the furnace door is open or being opened when the trigger member 140 is no longer triggered.

[0060] In addition, it can be understood that when two abutting blocks 162 are provided, the driving end 131 will pass through two abutting positions during the reciprocating movement, and abut against the two abutting blocks 162 at the two abutting positions respectively.

[0061] In one embodiment, the reset assembly 170 includes an elastic member 171, a blocking member 172 and a pressing block 173. The blocking member 172 is connected to the base 110, the pressing block 173 is connected to the movable member 120, and both ends of the elastic member 171 abut against the pressing block 173 and the blocking member 172 respectively.

[0062] During the process of the driving end 131 pushing the movable member 120 from the first position to the second position, the pressing block 173 overcomes the resistance of the elastic member 171 and compresses it.

[0063] During the process of opening the furnace door, the elastic member 171 pushes the pressing block 173, driving the movable member 120 to move from the second position to the first position. The elastic member 171 contracts and stores energy under the extrusion of the pressing block 173, and releases the elastic potential energy to return to the initial state during the process of opening the furnace door.

[0064] Optionally, the briquette 173 is threadedly connected to the first rod portion 121, the elastic member 171 is a spring and is sleeved on the first rod portion 121.

[0065] It should be noted that the blocking member 172 is provided with a second through hole along the moving direction of the movable member 120, the first rod portion 121 passes through the second through hole, one end of the elastic member 171 abuts against the blocking member 172, and the other end abuts against the briquette 173.

[0066] In one embodiment, the reset assembly 170 further includes a limit block 174, the limit block 174 is connected to the movable member 120 and is located on the side of the blocking member 172 away from the briquette 173.

[0067] During the process that the elastic member 171 drives the movable member 120 to move from the second position to the first position, the limit block 174 moves towards the blocking member 172 until it abuts against the blocking member 172.

[0068] It can be understood that during the process that the driving end 131 moves from the open position to the closed position, the push block 161 on the driving end 131 pushes the movable member 120 to move. When the driving end 131 moves to the closed position, the movable member 120 is located at the second position. And during the process that the driving end 131 moves from the closed position to the open position, the movable member 120 moves under the push of the elastic member 171. At this time, the limit block 174 can abut against the blocking member 172 to limit the movable member 120 at the first position.

[0069] In one embodiment, the in-place detection mechanism further includes a support block 180. The support block 180 and the blocking member 172 are arranged at intervals along the extending direction of the first rod portion 121, and the support block 180 is located on the side of the limit block 174 away from the blocking member 172. The support block 180 is provided with a third through hole, and the end portion of the first rod portion 121 passes through the third through hole. In this way, the first rod portion 121 can be supported by the support block 180 to facilitate the movement of the first rod portion 121.

[0070] It should be noted that the push block 161 is provided with a first through hole along the moving direction of the movable member 120, the blocking member 172 is provided with a second through hole along the moving direction of the movable member 120, the first rod portion 121 passes through the first through hole, the second through hole and the third through hole respectively, and the diameters of the first through hole, the second through hole and the third through hole are larger than the diameter of the first rod portion 121. At the same time, in order to reduce the friction force when the first rod portion 121 contacts the hole wall, the hole walls of the first through hole, the second through hole and the third through hole are all provided with Teflon liners.

[0071] For the convenience of understanding the technical solution of the present application, hereby in combination with Figure 3 and Figure 4 the working process of the in-place detection mechanism in the above embodiment is described as follows:

[0072] In Figure 3 and Figure 4 In the illustrated embodiment, the driving end 131 moves in the left - right direction, and Figure 3 in Figure 4 the driving end 131 is in the open position,

[0073] During the process of closing the furnace door: Initially, as shown in Figure 3 , the driving end 131 is in the open position and the movable member 120 is in the first position. The driving end 131 moves rightward. When it moves to the abutting position, the push block 161 abuts against the abutting block 162. Subsequently, the push block 161 pushes the abutting block 162 and the movable member 120 to move rightward. The movable member 120 moves from the first position to the second position, and the elastic member 171 is compressed by the pressing block 173 until the driving end 131 moves to the closed position. As shown in

[0074] During the process of opening the furnace door: Initially, as shown in Figure 4 , the driving end 131 is in the closed position and the movable member 120 is in the second position. The driving end 131 moves leftward to the open position to open the furnace door. The elastic member 171 pushes the pressing block 173 to move leftward until the limiting block 174 abuts against the blocking member 172, so that the movable member 120 is kept in the first position.

[0075] Optionally, when the movable member 120 is in the second position, the pressing block 173 compresses the elastic member 171, and at this time, the compression amount of the elastic member 171 is 30%.

[0076] Based on the above - mentioned in - place detection mechanism, the present application further provides a processing device, which includes a furnace body, a furnace door and the above - mentioned in - place detection mechanism. The furnace door is matched with the opening of the furnace body, and the driving end 131 is connected to the furnace door to drive the furnace door to open or close.

[0077] It should be noted that the processing device can be a diffusion device, a coating device or other devices, which is not limited herein.

[0078] The technical features of the above - described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above - described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0079] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patented application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A detection mechanism for reaching the target position, characterized in that: include: Base; A movable member, disposed on the base and capable of reciprocating between a first position and a second position; and a driving member, disposed on the base and having a driving end for driving the furnace door to move, wherein the driving end can push the movable member to move from the first position to the second position during the process of driving the furnace door to close; and The triggering member is arranged at a position of the base away from the high temperature source, and the movable member moved to the second position can trigger the triggering member.

2. The in-place detection mechanism according to claim 1, characterized in that: The in-place detection mechanism further comprises a push block and an abutment block, wherein the push block is connected to the driving end, and the abutment block is connected to the movable part; In the process of driving the furnace door to close, the pushing block can abut against the abutting block to push the movable member to move from the first position to the second position.

3. The in-place detection mechanism according to claim 2, characterized in that: The abutment block can adjust its position relative to the movable member along the moving direction of the movable member.

4. The in-place detection mechanism according to claim 1, characterized in that: The in-position detection mechanism further includes a reset component, which is disposed on the base. During the process of opening the furnace door, the reset component drives the movable part to move from the second position to the first position.

5. The in-place detection mechanism according to claim 4, characterized in that: The reset assembly comprises an elastic member, a blocking member and a pressing block, wherein the blocking member is connected to the base, the pressing block is connected to the movable member, and two ends of the elastic member are respectively in contact with the pressing block and the blocking member; When the driving end pushes the movable member to move from the first position to the second position, the pressing block overcomes the resistance of the elastic member to compress it; During the process of opening the furnace door, the elastic member pushes the pressing block to drive the movable member to move from the second position to the first position.

6. The in-place detection mechanism according to claim 5, characterized in that: The reset assembly further comprises a limit block, which is connected to the movable member and is located at a side of the blocking member away from the pressing block; When the elastic member drives the movable member to move from the second position to the first position, the limiting block moves toward the blocking member until it abuts against the blocking member.

7. The in-place detection mechanism according to claim 1, characterized in that: The two ends of the moving stroke of the driving end correspond to an open position and a closed position respectively, and an abutment position is provided between the open position and the closed position; When the driving end moves from the open position to the abutting position, the movable member is located at the first position, and when the driving end is located at the closed position, the movable member is located at the second position.

8. The in-place detection mechanism according to claim 1, characterized in that: The in-place detection mechanism further includes a guide member, which is arranged on the base and has a guide hole, through which the movable member passes, and the guide hole can guide the movement of the movable member.

9. The in-place detection mechanism according to claim 8, characterized in that: The movable part includes a first rod and a second rod, the second rod is connected to the first rod and is arranged at an angle with the first rod, the second rod is passed through a guide hole, and when the movable part moves to the second position, the second rod can trigger the trigger part.

10. A processing device, characterized in that: It comprises the in-place detection mechanism described in any one of claims 1 to 9.

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