Heating disc surface deformation on-line detection device

By designing an online detection device for surface deformation of the heating disk and using rotary scanning detection technology, the problem of difficult monitoring of the surface deformation of the heating disk in high-temperature and vacuum environments is solved, and effective monitoring and improvement of the quality of the film deposition process is achieved.

CN223037114UActive Publication Date: 2025-06-27PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Application Number
CN202422309837.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-20
Publication Date
2025-06-27
Estimated Expiration
2034-09-20

AI Technical Summary

Technical Problem

The deformation caused by various factors in the surface of existing heating disks is difficult to effectively monitor in high temperature and vacuum environments, affecting the quality of film deposition.

Method used

An online detection device for surface deformation of the heating disk is designed, including a sealing cover assembly, a bracket assembly, a rotary table assembly and a sensor assembly. Through the rotation scanning detection technology of the sensor assembly, the deformation of the heating disk surface is monitored in real time.

Benefits of technology

It is realized that the surface deformation of the heating disk is efficiently monitored in a vacuum and temperature changing environment, and the quality and reliability of the thin film deposition process are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a heating disc surface deformation on-line detection device, comprising a sealing cover assembly, the top of which is provided with a transparent window used for signal detection; the bottom of the support assembly is connected to the edge of the sealing cover assembly; the rotary table assembly is connected to the top of the support assembly, and the sensor assembly is connected to the rotary table assembly and used for controlling the rotary table assembly to rotate so as to scan and detect the heating disc located in the sealing cover assembly. The sensor assembly is rotationally arranged above the sealing cover assembly through the support assembly, the encoder assembly controls the sampling frequency of a sensor, the sensor is driven by the rotary table assembly to rotate, so that rotary scanning detection of the upper disc face of the heating disc is completed, the sensor can be flexibly adjusted according to the detection radius, the compatibility is higher, and the detection efficiency is improved. The automation degree is high, detection is flexible and convenient, and the surface deformation condition of the heating disc can be monitored in the vacuum and temperature gradual change process.
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