Wafer defect detection equipment

Abstract

The utility model belongs to the technical field of wafer detection, and particularly relates to wafer defect detection equipment which comprises a bottom plate, a first supporting plate is fixed to the top of the bottom plate, a fixing shaft is fixed to the top of one side of the first supporting plate, and a hexagonal box is rotationally installed at the other end of the fixing shaft in a damping mode. One end of the fixing shaft extends into the hexagonal box body to be fixedly provided with an irradiation lamp, lampshades are arranged on the six side walls of the hexagonal box body, the colors of the lampshades are different, and a plurality of protection assemblies capable of protecting the lampshades are arranged on the outer wall of the hexagonal box body. A wafer clamping assembly is arranged on the top of the bottom plate and located on one side of the first supporting plate. The protection plate can be automatically opened and closed, the lampshade can be effectively protected, dust is prevented from adhering to the lampshade, and normal use of equipment is prevented from being affected.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer detection, and in particular relates to a wafer defect detection device. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor integrated circuits. Because of its round shape, it is called a wafer. Wafer is the core basic material of the semiconductor industry. Its manufacturing process is complex and has extremely high technical requirements. With the continuous development of semiconductor technology, wafer defect detection has become a key link in ensuring chip quality and improving production efficiency. Any tiny defect on the wafer may cause the chip performance to deteriorate or fail. Therefore, comprehensive defect detection of wafers is an important means to ensure chip quality.

[0003] After searching the patent, it is found that the authorization announcement number is CN 221007365 U, which is a wafer defect detection device, including a base, a vertical plate is fixedly installed in the middle of the rear end of the upper surface of the base, a top plate is fixedly installed on the upper end of the front surface of the vertical plate, a vertical rod is fixedly installed in the middle of the lower surface of the top plate, a connecting rod is fixedly installed at the lower end of the vertical rod, an irradiation lamp is fixedly installed at the front end of the connecting rod, a flip structure is arranged in the middle of the upper surface of the base, a rotating structure is arranged inside the top plate, and the flip structure includes a rotating block No. 1. The wafer defect detection device described in the utility model can perform multi-angle detection on the wafer when detecting the wafer, so as to avoid the defects such as small scratches on the wafer surface being difficult to detect, and can also realize that the irradiation lamp emits white light or yellow-green light and other detection light to irradiate the wafer without manually replacing the lampshade of different colors, so as to avoid affecting the normal observation efficiency of the wafer.

[0004] When the other lampshades are not in use, they are directly exposed to the external environment and lack the necessary protective barriers. This causes dust to easily accumulate on the surface of the lampshades, reducing the light transmittance of the lampshades, which in turn has an adverse effect on the subsequent wafer inspection efficiency. In addition, each time the rotating box is operated to adjust the position of the lampshade, it is often difficult to quickly and accurately align the target lampshade with the irradiation lamp. This operational inconvenience weakens the ease of use and overall effect of the equipment. Summary of the invention

[0005] The purpose of the present invention is to provide a wafer defect detection device, which can automatically open and close a protection plate, effectively protect the lampshade, prevent dust from sticking to the lampshade, and avoid affecting the normal use of the equipment.

[0006] The technical solution adopted by the present invention is as follows:

[0007] A wafer defect detection device comprises a bottom plate, a first support plate is fixed on the top of the bottom plate, a fixed shaft is fixed on the top of one side of the first support plate, a hexagonal box body is mounted on the other end of the fixed shaft for damping rotation, one end of the fixed shaft extends into the hexagonal box body and an irradiation lamp is fixed therein, six side walls of the hexagonal box body are all provided with lampshades, each lampshade has a different color, a plurality of protective components for protecting the lampshades are provided on the outer wall of the hexagonal box body, and a wafer clamping component is provided on the top of the bottom plate and on one side of the first support plate;

[0008] The protective assembly includes an outer wall of a hexagonal box body and a plurality of first mounting plates fixedly located on one side of the lampshade, wherein one side of the first mounting plate is slidably mounted with two relatively movable protective plates, and one side of the two protective plates are fixed with a first slider on the outer wall of the first mounting plate, and a first slide groove is provided with which the first slide groove is slidably connected to the first slide groove, and the other end of the first spring is fixed to the outer wall of the first slide groove, and the other end of the first spring is fixed to the outer wall of the hexagonal box body and two mounting ears are fixed on the outer wall of the two mounting ears, and a first rotating shaft is rotatably mounted between the outer walls of the two mounting ears, and a winding roller is fixed on the outer wall of the first rotating shaft, and two cables are provided on the outer wall of the winding roller, and the other ends of the two cables are connected to one of the protective plates, and one end of the first rotating shaft is fixed with a second gear passing through the outer wall of the mounting ear, and two fixing rods are fixed on the outer wall of the first support plate, and an arc toothed plate meshing with the second gear is fixed between one end of the two fixing rods.

[0009] Furthermore, a second mounting plate is fixed on the side wall of the hexagonal box body and located on one side of the protective plate, a first gear is rotatably installed on the outer wall of the second mounting plate and located between the two protective plates, and first tooth plates are slidably installed on the outer wall of the second mounting plate and located on both sides of the first gear, the two first tooth plates are meshed with the first gear, and one end of the two first tooth plates is respectively fixed to one side of the two protective plates.

[0010] Furthermore, a rotating groove that cooperates with the fixed shaft is opened on one side of the hexagonal box body, and a plurality of plug-in grooves are opened on the outer wall of the fixed shaft located in the rotating groove. A plug-in block is plugged into the inside of the plug-in groove, and a second spring is fixed to one side of the plug-in block. The other end of the second spring is fixed to the inner wall of the plug-in groove. A rounded chamfer is provided on one side of the plug-in block located outside the plug-in groove, and a plurality of arc-shaped slots that cooperate with the plug-in groove are opened on the inner side of the rotating groove.

[0011] Furthermore, a protective plate is fixed on one side of the hexagonal box body, and a plurality of toggle rods are fixed on one side of the protective plate.

[0012] Furthermore, the clamping assembly includes a second support plate fixed on the top of the base plate and located on one side of the first support plate, a second rotating shaft is rotatably installed on one side of the second support plate, a mounting block is fixed on one end of the second rotating shaft, two L-shaped grooves are formed on one side of the mounting block, an L-shaped slider is slidably installed inside the L-shaped groove, an arc-shaped clamping plate is fixed on one side of the L-shaped slider, a screw rod is rotatably installed on the top of the mounting block and located on one side of the L-shaped groove, a moving block is screwed on the outer wall of the screw rod, two connecting rods are rotatably installed on one side of the moving block, the other end of the connecting rod is rotatably connected to the top of the L-shaped slider, and a guide rod slidably connected to the moving block is fixed on the top of the mounting block.

[0013] Furthermore, a rubber pad is provided on one side of the arc-shaped clamping plate, and a protrusion is provided on one side of the rubber pad.

[0014] Furthermore, a worm gear is fixed to the outer wall of the second support plate through which one end of the second rotating shaft passes, and a third rotating shaft is rotatably mounted on the outer wall of the second support plate below the worm gear, and a worm meshing with the worm gear is fixed to the outer wall of the third rotating shaft.

[0015] Furthermore, a plurality of labels are provided on one side of the protective plate, and the number of the labels is the same as the number of the lampshades.

[0016] The technical effects achieved by the present invention are:

[0017] A wafer defect detection device of the present invention, when in use, is provided with a protective plate, and when the second gear meshes with the arc-shaped toothed plate, it drives the winding roller on the first rotating shaft to rotate, and the protective plate is pulled to move by a cable, and the protective plate cooperates with the first gear and the first toothed plate to make the two protective plates move relative to each other and open, so that the lampshade is exposed for use, and when the second gear is disengaged from the arc-shaped toothed plate, the elastic force of the first spring pushes the first slider to move, and the first slider drives the two protective plates to reset, and then protects the lampshade, and the structure is simple, the operation is convenient, and the protective plate can be automatically opened and closed. , which can effectively protect the lampshade and prevent dust from sticking to the lampshade to avoid affecting the normal use of the equipment. The cooperation of the set plug-in slot, plug-in block, second spring and arc-shaped slot can make the hexagonal box body get stuck when it is moved to the corresponding position, and fix the hexagonal box body. The set toggle rod and label can make the lampshade rotate to the corresponding position quickly and accurately. The lampshade is perfectly aligned with the irradiation lamp, which improves the use effect of the equipment; the set clamping component can perform multi-angle inspection on the wafer when inspecting the wafer, so as to avoid defects such as small scratches on the wafer surface that are difficult to be detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the front three-dimensional structure of the present invention;

[0019] Figure 2It is a schematic diagram of the rear stereoscopic structure of the present invention;

[0020] Figure 3 It is a schematic diagram of the partial side view sectional structure of the present invention;

[0021] Figure 4 It is a schematic diagram of the partial top view sectional structure of the present invention;

[0022] Figure 5 It is of the present invention Figure 1 Schematic diagram of the enlarged structure of area A therein;

[0023] Figure 6 It is of the present invention Figure 1 Schematic diagram of the enlarged structure of area B therein.

[0024] In the drawings, the list of components represented by each reference numeral is as follows:

[0025] 1. Bottom plate; 2. First support plate; 3. Fixed shaft; 4. Hexagonal box body; 5. Irradiation lamp; 6. Lamp cover; 7. First mounting plate; 8. First slider; 9. First chute; 10. First spring; 11. Protection plate; 12. Second mounting plate; 13. First gear; 14. First toothed plate; 15. First rotating shaft; 16. Reel; 17. Cable; 18. Second gear; 19. Fixed rod; 20. Arc toothed plate; 21. Insertion slot; 22. Insertion block; 23. Second spring; 24. Arc-shaped card slot; 25. Protection disc; 26. Poking rod; 27. Second support plate; 28. Second rotating shaft; 29. Mounting block; 30. L-shaped chute; 31. L-shaped slider; 32. Arc-shaped clamping plate; 33. Lead screw; 34. Moving block; 35. Connecting rod; 36. Worm gear; 37. Third rotating shaft; 38. Worm. Detailed implementation manners

[0026] In order to make the purpose and advantages of the present invention clearer, the present invention will be specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific implementation manners of the present invention, and does not strictly limit the scope of protection specifically claimed by the present invention.

[0027] As Figures 1-5As shown in the figure, a wafer defect detection device includes a bottom plate 1. A first support plate 2 is fixed to the top of the bottom plate 1. A fixed shaft 3 is fixed to the top of one side of the first support plate 2. The other end of the fixed shaft 3 is rotatably installed in a hexagonal box body 4 in a damped manner. One end of the fixed shaft 3 extends into the hexagonal box body 4 and is fixed with an irradiation lamp 5. Lampshades 6 are provided on the six side walls of the hexagonal box body 4. A plurality of protection components for protecting the lampshades 6 are provided on the outer wall of the hexagonal box body 4. A wafer clamping component is provided on the top of the bottom plate 1 and on one side of the first support plate 2; The protection component includes a plurality of first mounting plates 7 fixed to the outer wall of the hexagonal box body 4 and on one side of the lampshade 6. Two relatively moving protection plates 11 are slidably installed on one side of the first mounting plate 7. A first slider 8 is fixed to one side of each of the two protection plates 11. A first sliding groove 9 slidably connected to the first slider 8 is formed on the outer wall of the first mounting plate 7. A first spring 10 is fixed to the inner side of the first sliding groove 9. The other end of the first spring 10 is fixed to the outer wall of the first slider 8. Two mounting ears are fixed to the outer wall of the hexagonal box body 4 and on one side of the protection plate 11. A first rotating shaft 15 is rotatably installed between the outer walls of the two mounting ears in a damped manner. A winding roller 16 is fixed to the outer wall of the first rotating shaft 15. Two cable wires 17 are provided on the outer wall of the winding roller 16. The other ends of the two cable wires 17 are connected to one of the protection plates 11. One end of the first rotating shaft 15 passes through the outer wall of the mounting ear and is fixed with a second gear 18. Two fixed rods 19 are fixed to the outer wall of the first support plate 2. An arc-shaped toothed plate 20 meshing with the second gear 18 is fixed between the one ends of the two fixed rods 19; A second mounting plate 12 is fixed to the side wall of the hexagonal box body 4 and on one side of the protection plate 11. A first gear 13 is rotatably installed between the two protection plates 11 on the outer wall of the second mounting plate 12. First toothed plates 14 are slidably installed on both sides of the first gear 13 on the outer wall of the second mounting plate 12. Both of the two first toothed plates 14 are meshed with the first gear 13. One ends of the two first toothed plates 14 are respectively fixed to one side of the two protection plates 11. The structure is simple, which is convenient for the relative linkage movement of the two protection plates 11. When one of the protection plates 11 moves, through the cooperation of the two first toothed plates 14 and the first gear 13, the two protection plates 11 can move relatively, which is relatively perfect;When adjusting the lampshade 6 on the hexagonal box body 4, the hexagonal box body 4 is rotated, and the hexagonal box body 4 drives the second gear 18 to revolve around the fixed axis 3. When the second gear 18 is meshed with the arc-shaped toothed plate 20, the second gear 18 rotates, and the second gear 18 drives the first rotating shaft 15 to rotate, and the first rotating shaft 15 drives the winding roller 16 to rotate, and the winding roller 16 winds up the cable 17, and the cable 17 pulls one of the protective plates 11 to move to one side, and the protective plate 11 cooperates with the two first toothed plates 14 and the first gear 13 to make the other protective plate 11 move relatively, and the lampshade is opened. The first rotating shaft 15 and the two mounting ears are set to damp the rotation. When the second gear 18 is not in contact with the arc-shaped toothed plate 20, the second gear 18 is prevented from rotating. When the second gear 18 is disengaged from the arc-shaped toothed plate 20, the first slider 8 is pushed to move by the elastic force of the first spring 10, so that the two protective plates 11 are reset to continue to protect the lampshade 6. The rotation resistance of the first rotating shaft 15 is less than the elastic force of the first spring 10. The structure is simple and the operation is convenient. When other lampshades 6 are not in use, the protective plates 11 can be used to protect the lampshade 6 to avoid dust sticking to affect the subsequent normal use.

[0028] like Figure 3 As shown, a rotating groove matched with the fixed shaft 3 is opened on one side of the hexagonal box body 4, and a plurality of plug-in grooves 21 are opened on the outer wall of the fixed shaft 3 located in the rotating groove, and a plug-in block 22 is plugged in the plug-in groove 21, and a second spring 23 is fixed on one side of the plug-in block 22, and the other end of the second spring 23 is fixed to the inner wall of the plug-in groove 21, and a round chamfer is set on the side of the plug-in block 22 located outside the plug-in groove 21, and a plurality of arc-shaped card grooves 24 matched with the plug-in groove 21 are opened on the inner side of the rotating groove, and the number of the arc-shaped card grooves 24 and the round chamfers set are consistent with the number of the lampshade 6, and every time it rotates to sixty degrees, the elastic force of the second spring 23 pushes the top of the plug-in block 22 to be inserted into the arc-shaped card groove 24, so that the hexagonal box body 4 after moving can be stably fixed. Because the top of the plug-in block 22 is a round chamfer, the plug-in block 22 can be separated from the arc-shaped card groove 24 when the hexagonal box body 4 is rotated forcefully;

[0029] like Figures 1-3 As shown, a protective plate 25 is fixed to one side of the hexagonal box body 4. The setting of the protective plate 25 is convenient for protecting the hexagonal box body 4 and preventing the staff from being pinched. A plurality of toggle rods 26 are fixed to one side of the protective plate 25. The number of the toggle rods 26 is consistent with the lampshade 6. Each toggle rod 26 is set to point to the lampshade 6, so that the hexagonal box body 4 can make the lampshade 6 align with the irradiation lamp 5 every time it is manually turned, which is more practical.

[0030] like Figure 1 and 5As shown, multiple tags are provided on one side of the protection plate 25. The number of tags is the same as that of the lamp shades 6, which facilitates the correspondence between each tag and the lamp shade 6 and marks the corresponding color names, enabling the staff to clearly know the color corresponding to the lamp shade 6 and facilitating the quick adjustment of the lamp shade 6.

[0031] As Figure 1 , 2 As shown in FIGS. 6, the clamping assembly includes a second support plate 27 fixed to the top of the bottom plate 1 and on one side of the first support plate 2. A second rotating shaft 28 is rotatably installed through one side of the second support plate 27. One end of the second rotating shaft 28 is fixed with a mounting block 29. Two L-shaped sliding grooves 30 are formed through one side of the mounting block 29. An L-shaped slider 31 is slidably installed inside the L-shaped sliding groove 30. One side of the L-shaped slider 31 is fixed with an arc-shaped clamping plate 32. A lead screw 33 is rotatably installed on the top of the mounting block 29 and on one side of the L-shaped sliding groove 30. A moving block 34 is screwed on the outer wall of the lead screw 33. Two connecting rods 35 are rotatably installed on one side of the moving block 34. The other ends of the connecting rods 35 are rotatably connected to the top of the L-shaped slider 31. A guide rod slidably connected to the moving block 34 is fixed to the top of the mounting block 29. The structure is simple and the operation is convenient. By rotating the lead screw 33, the moving block 34 is driven to move. The moving block 34 drives the two L-shaped sliders 31 to move through the two connecting rods 35. The L-shaped sliders 31 drive the two arc-shaped clamping plates 32 to move relatively and stably clamp the wafer. A rubber pad is provided on one side of the arc-shaped clamping plate 32. A protrusion is provided on one side of the rubber pad. The rubber pad can stably clamp the wafer and avoid damaging the wafer during clamping, which is relatively perfect. A worm gear 36 is fixed to the outer wall of the second support plate 27 through which one end of the second rotating shaft 28 passes. A third rotating shaft 37 is rotatably installed on the outer wall of the second support plate 27 and below the worm gear 36. A worm 38 meshing with the worm gear 36 is fixed to the outer wall of the third rotating shaft 37. By rotating the third rotating shaft 37, the worm 38 is driven to rotate. The worm 38 drives the worm gear 36 to rotate, thereby rotating the mounting block 29 and facilitating the angle adjustment of the clamped wafer for multi-angle detection of the wafer. Wheels are provided at one ends of the lead screw 33 and the third rotating shaft 37, facilitating the easy rotation of the lead screw 33 and the third rotating shaft 37 through the wheels.

[0032] The working principle of the present invention is as follows: The rotation of the lead screw 33 drives the movement of the moving block 34. The moving block 34 drives the movement of two L-shaped sliders 31 through two connecting rods 35. The L-shaped sliders 31 drive the relative movement of two arc-shaped clamping plates 32 and stably clamp the wafer. Then, rotate the hexagonal box body 4. The hexagonal box body 4 drives the second gear 18 to revolve around the fixed shaft 3. When the second gear 18 meshes with the arc-shaped toothed plate 20, the second gear 18 rotates itself. The second gear 18 drives the first rotating shaft 15 to rotate. The first rotating shaft 15 drives the winding roller 16 to rotate. The winding roller 16 winds up the cable 17. The cable 17 pulls one of the protective plates 11 to move to one side. The protective plate 11 cooperates with two first toothed plates 14 and the first gear 13 to make the other protective plate 11 move relatively and open the lamp cover 6. Then, turn on the irradiation lamp 5. The light of the irradiation lamp 5 irradiates the wafer through the lamp cover 6. At this time, the third rotating shaft 37 can also be rotated. The third rotating shaft 37 drives the worm 38 to rotate. The worm 38 drives the worm gear 36 to rotate, so as to rotate the mounting block 29, which is convenient for adjusting the angle of the clamped wafer and performing multi-angle detection on the wafer.

[0033] The above is only the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and retouches can be made, and these improvements and retouches should also be regarded as the protection scope of the present invention. The structures, devices and operation methods not specifically described and explained in the present invention are implemented by conventional means in the art without special description and limitation.

Claims

1. A wafer defect detection device, characterized in that: The invention comprises a bottom plate (1), a first support plate (2) is fixed on the top of the bottom plate (1), a fixed shaft (3) is fixed on the top of one side of the first support plate (2), a hexagonal box body (4) is mounted on the other end of the fixed shaft (3) for damped rotation, one end of the fixed shaft (3) extends into the hexagonal box body (4) and an irradiation lamp (5) is fixed therein, six side walls of the hexagonal box body (4) are all provided with lampshades (6), the outer wall of the hexagonal box body (4) is provided with a plurality of protective components capable of protecting the lampshades (6), and a wafer clamping component is provided on the top of the bottom plate (1) and on one side of the first support plate (2); The protection component comprises an outer wall of a hexagonal box body (4) and a plurality of first mounting plates (7) fixed on one side of the lampshade (6); two relatively movable protection plates (11) are slidably mounted on one side of the first mounting plate (7); a first slider (8) is fixed on one side of the two protection plates (11); a first slide groove (9) slidably connected to the first slider (8) is formed on the outer wall of the first mounting plate (7); a first spring (10) is fixed on the inner side of the first slide groove (9); the other end of the first spring (10) is fixed to the outer wall of the first slider (8); the outer wall of the hexagonal box body (4) and the protection plate (11) are ) is fixed with two mounting ears on one side, a first rotating shaft (15) is rotatably mounted between the outer walls of the two mounting ears, a winding roller (16) is fixed to the outer wall of the first rotating shaft (15), two cables (17) are arranged on the outer wall of the winding roller (16), the other ends of the two cables (17) are connected to one of the protective plates (11), a second gear (18) is fixed to one end of the first rotating shaft (15) and passes through the outer wall of the mounting ears, two fixing rods (19) are fixed to the outer wall of the first support plate (2), an arc-shaped toothed plate (20) meshing with the second gear (18) is fixed between one ends of the two fixing rods (19).

2. A wafer defect detection device according to claim 1, characterized in that: A second mounting plate (12) is fixed on the side wall of the hexagonal box body (4) and located on one side of the protective plate (11); a first gear (13) is rotatably mounted on the outer wall of the second mounting plate (12) and located between the two protective plates (11); first tooth plates (14) are slidably mounted on the outer wall of the second mounting plate (12) and located on both sides of the first gear (13); the two first tooth plates (14) are meshed with the first gear (13); and one end of the two first tooth plates (14) is respectively fixed to one side of the two protective plates (11).

3. The wafer defect detection device according to claim 1, characterized in that: A rotating groove cooperating with the fixed shaft (3) is provided on one side of the hexagonal box body (4); a plurality of plug-in grooves (21) are provided on the outer wall of the fixed shaft (3) located in the rotating groove; a plug-in block (22) is plugged into the inside of the plug-in groove (21); a second spring (23) is fixed on one side of the plug-in block (22); the other end of the second spring (23) is fixed to the inner wall of the plug-in groove (21); a round chamfer is provided on one side of the plug-in block (22) located outside the plug-in groove (21); and a plurality of arc-shaped slots (24) cooperating with the plug-in groove (21) are provided on the inner side of the rotating groove.

4. The wafer defect detection device according to claim 1, characterized in that: A protective plate (25) is fixed on one side of the hexagonal box body (4), and a plurality of toggle rods (26) are fixed on one side of the protective plate (25).

5. The wafer defect detection device according to claim 1, characterized in that: The clamping assembly comprises a second support plate (27) fixed at the top of the base plate (1) and located on one side of the first support plate (2), a second rotating shaft (28) being rotatably mounted on one side of the second support plate (27), a mounting block (29) being fixed at one end of the second rotating shaft (28), two L-shaped sliding grooves (30) being provided on one side of the mounting block (29), an L-shaped sliding block (31) being slidably mounted inside the L-shaped sliding groove (30), an arc-shaped clamping plate (32) being fixed at one side of the L-shaped sliding block (31), a screw rod (33) being rotatably mounted on the top of the mounting block (29) and located on one side of the L-shaped sliding groove (30), a moving block (34) being screwed on the outer wall of the screw rod (33), two connecting rods (35) being rotatably mounted on one side of the moving block (34), the other end of the connecting rod (35) being rotatably connected to the top of the L-shaped sliding block (31), and a guide rod slidably connected to the moving block (34) being fixed at the top of the mounting block (29).

6. The wafer defect detection device according to claim 5, characterized in that: A rubber pad is provided on one side of the arc-shaped clamping plate (32), and a protrusion is provided on one side of the rubber pad.

7. The wafer defect detection device according to claim 5, characterized in that: A worm gear (36) is fixed to the outer wall of the second support plate (27) through which one end of the second rotating shaft (28) passes, and a third rotating shaft (37) is rotatably mounted on the outer wall of the second supporting plate (27) and located below the worm gear (36), and a worm (38) meshing with the worm gear (36) is fixed to the outer wall of the third rotating shaft (37).

8. The wafer defect detection device according to claim 7, characterized in that: One end of the screw rod (33) and the third rotating shaft (37) are both provided with a rotating wheel.

9. The wafer defect detection device according to claim 4, characterized in that: A plurality of labels are provided on one side of the protection plate (25), and the number of the labels is the same as the number of the lampshades (6).

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