Sensor positioning device for photoetching machine

Abstract

The utility model discloses a sensor positioning device for a photoetching machine, and relates to the technical field of photoetching machine accessories, the sensor positioning device for the photoetching machine comprises a circular box body, the top surface of the circular box body is provided with a plurality of circumferentially distributed first sliding chutes, and the bottom end of each first sliding chute is provided with a long opening; the utility model discloses a sensor positioning device for a photoetching machine, which is provided with a plurality of positioning mechanisms which are connected in a sliding manner and can be attached to the side wall of a vibration sensor, so that the vibration sensor can be preliminarily positioned, and then the positioning mechanism at the current position can be locked by matching with a locking mechanism; finally, a fastening pressing piece in the forward rotation positioning mechanism can be extruded on the top face of the vibration sensor, positioning and fixed installation of the vibration sensor can be achieved, the positioning device of the structure can be suitable for positioning and installation of vibration sensors of different sizes and shapes, flexibility is high, and different actual requirements can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of lithography machine accessories, and specifically relates to a sensor positioning device for a lithography machine. Background Technique

[0002] A lithography machine is the core equipment for manufacturing chips. Its working principle is similar to photo printing. Through a series of complex optical systems and precise mechanical controls, the chip design pattern is projected onto a silicon wafer coated with photoresist, thereby forming a tiny circuit diagram on the silicon wafer.

[0003] The stage is a component inside the lithography machine, and its function is to carry and move the silicon wafer or other substrates to be lithographed to ensure that the pattern can be accurately projected onto the substrate during the lithography process. Usually, vibration sensors are installed on the stage to monitor the vibration of the stage, so as to understand the operating state of the stage.

[0004] In order to facilitate the positioning and installation of vibration sensors, mounting holes for positioning and fixedly connecting with vibration sensors are provided on the stage. The positions and quantities of these mounting holes are fixed and cannot be changed. They can only be used to install customized vibration sensors. When the customized vibration sensor fails, other specifications of vibration sensors cannot be used, resulting in low flexibility and inability to meet actual needs. Content of the Utility Model

[0005] The utility model provides a sensor positioning device for a lithography machine, which has the advantages of flexible positioning and installation and is not limited to a single specification of vibration sensor, so as to solve the problems raised in the background technique.

[0006] To solve the defect of the single installation range of vibration sensors in existing lithography machines, the utility model provides the following technical solution: A sensor positioning device for a lithography machine includes a circular box body. A plurality of circumferentially distributed first chutes are provided on the top surface of the circular box body. A long opening is provided at the bottom end of each first chute. A positioning mechanism is provided on each first chute and is slidably connected thereto. A locking mechanism matching the positioning mechanism is provided at the bottom end of the circular box body. A plurality of circumferentially distributed second chutes are provided on the side wall of the circular box body. A first slider is provided on each second chute and is slidably connected up and down therewith. A traction rope is fixedly connected between the top surface of the first slider and the positioning mechanism. A connecting rod is fixedly connected to the bottom end of the first slider. A circular connecting frame is fixedly connected to the bottom end of the connecting rod. The circular connecting frame is fixedly connected to all the connecting rods.

[0007] As a preferred technical solution of the present utility model, the positioning mechanism includes a second slider slidably connected to the first chute. A stud is welded to the top surface of the second slider, and a fastening pressing piece is threadedly connected to the stud. A spring is welded between the second slider and one inner wall of the first chute.

[0008] As a preferred technical solution of the present utility model, the locking mechanism includes a screw rod rotatably connected to the upper and lower inner walls of the circular box body. The screw rod is threadedly connected to a lifting circular plate. A plurality of friction pressing strips distributed circumferentially are integrally connected to the top surface of the lifting circular plate. A plurality of guide rods distributed circumferentially are welded to the upper inner wall of the circular box body, and the lifting circular plate is slidably connected to the guide rods up and down.

[0009] As a preferred technical solution of the present utility model, the friction pressing strips are located in the long opening, and an internal hexagonal bolt is welded to the bottom end of the screw rod.

[0010] As a preferred technical solution of the present utility model, a plurality of grooves distributed circumferentially are formed in the top surface of the circular box body, and mounting holes are formed at the bottom ends of the grooves.

[0011] As a preferred technical solution of the present utility model, the second chute is a through chute, and the circular connecting frame can extend into the second chute.

[0012] Compared with the prior art, the present utility model provides a sensor positioning device for a lithography machine, which has the following beneficial effects: By providing a plurality of positioning mechanisms connected in a sliding manner, they can be attached to the side wall of the vibration sensor to achieve preliminary positioning of the vibration sensor. Then, in cooperation with the locking mechanism, the positioning mechanism at this position can be locked. Finally, by rotating the fastening pressing piece in the positioning mechanism clockwise, it can be pressed against the top surface of the vibration sensor, thus realizing the positioning and fixed installation of the vibration sensor. The positioning device with this structure can be used for the positioning and installation of vibration sensors of different sizes and shapes, so that the stage in the lithography machine can be positioned and installed with vibration sensors of different specifications, with high installation flexibility and can meet different actual requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is the upper perspective view of the present utility model;

[0014] Figure 2 is the top view of the present utility model;

[0015] Figure 3 is the lower perspective view of the present utility model;

[0016] Figure 4 is the structural schematic diagram of the locking mechanism in the present utility model.

[0017] In the figure:

[0018] 10. Circular box body; 20. First chute; 30. Long opening; 40. Positioning mechanism; 41. Second slider; 42. Stud; 43. Tightening pressing piece; 44. Spring; 50. Second chute; 60. First slider; 70. Traction rope; 80. Locking mechanism; 81. Screw rod; 82. Lifting circular plate; 83. Friction pressing strip; 84. Guide rod; 90. Connecting rod; 100. Circular connecting frame; 110. Hexagon socket head bolt; 120. Mounting hole. Detailed implementation manners

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Please refer to Figures 1 - 4 , the present invention discloses a sensor positioning device for a lithography machine, including a circular box body 10. A plurality of first chutes 20 distributed circumferentially are opened on the top surface of the circular box body 10. A long opening 30 is opened at the bottom end of each first chute 20. A positioning mechanism 40 slidably connected therewith is provided on each first chute 20. A locking mechanism 80 matching the positioning mechanism 40 is provided at the bottom end of the circular box body 10. A plurality of second chutes 50 distributed circumferentially are opened on the side wall of the circular box body 10. A first slider 60 slidably connected up and down therewith is provided on each second chute 50. A traction rope 70 is fixedly connected between the top surface of the first slider 60 and the positioning mechanism 40. A connecting rod 90 is fixedly connected to the bottom end of the first slider 60. A circular connecting frame 100 is fixedly connected to the bottom end of the connecting rod 90. The circular connecting frame 100 is fixedly connected to all the connecting rods 90.

[0021] By pulling down the circular connecting frame 100, the connecting rod 90, the first slider 60 and the traction rope 70 can be driven to move downward together. Since the traction rope 70 is fixedly connected to the second slider 41 in the positioning mechanism 40, all the second sliders 41 can be pulled to move simultaneously, so as to facilitate placing the vibration sensor on the top surface of the circular box body 10, thereby facilitating the subsequent positioning and installation of the vibration sensor.

[0022] Specifically, the positioning mechanism 40 includes a second slider 41 slidably connected to the first chute 20. A stud 42 is welded to the top surface of the second slider 41. The stud 42 is threadedly connected with a tightening pressing piece 43. A spring 44 is welded between the second slider 41 and one inner wall of the first chute 20.

[0023] In this embodiment, the second slider 41 moves closer to the middle of the circular box 10 under the elastic force of the spring 44. At this time, the circular box 10 will fit on the side wall of the vibration sensor, realizing the preliminary positioning of the vibration sensor, and not being affected by the shape and size of the vibration sensor. After locking the second slider 41, the top surface of the vibration sensor can be squeezed by rotating the fastening piece 43 forward, so as to realize the final positioning and installation of the vibration sensor.

[0024] Specifically, the locking mechanism 80 includes a screw 81 rotatably connected to the upper and lower inner walls of the circular box 10. The screw 81 is threadedly connected with a lifting disc 82. The top surface of the lifting disc 82 is integrally connected with a plurality of friction strips 83 distributed circumferentially. A plurality of guide rods 84 distributed circumferentially are welded to the upper inner wall of the circular box 10. The lifting disc 82 is slidably connected with the guide rods 84 up and down. The friction strips 83 are located in the long opening 30. The bottom end of the screw 81 is welded with an internal hexagonal bolt 110.

[0025] In this embodiment, an internal hexagonal wrench is inserted onto the internal hexagonal bolt 110 to facilitate driving the screw 81 to rotate. When the screw 81 rotates forward, the lifting disc 82 moves upward, and the friction strips 83 move upward and press against the bottom surface of the second slider 41, so as to lock the second slider 41.

[0026] Specifically, a plurality of grooves distributed circumferentially are formed in the top surface of the circular box 10, and mounting holes 120 are formed at the bottom ends of the grooves.

[0027] In this embodiment, it plays a role in fixedly installing the circular box 10, and there is no need for screws with a long length.

[0028] Specifically, the second chute 50 is a through chute, and the circular connecting frame 100 can extend into the second chute 50.

[0029] In this embodiment, the circular connecting frame 100 extending into the second chute 50 can make the horizontal height of the bottom surface of the circular connecting frame 100 higher than the bottom surface height of the circular box 10, facilitating the subsequent fixed installation of the circular box 10.

[0030] Working principle and usage process of the present utility model: When the vibration sensor of the lithography machine fails, if there is no exactly the same vibration sensor, vibration sensors of other shapes and sizes can also be used. Pull the circular connecting frame 100 downward, and all the traction ropes 70 can be pulled simultaneously. At this time, each positioning mechanism 40 moves towards the edge of the circular box body 10. At this time, a relatively large placement space will be left at the center of the top surface of the circular box body 10 to place the vibration sensor. Release the circular connecting frame 100. Under the elastic force of the spring 44, each positioning mechanism 40 moves towards the vibration sensor and finally tightly fits on the side wall of the vibration sensor, realizing the positioning of the vibration sensor. Then insert the hex wrench into the hexagon socket bolt 110 and drive the screw rod 81 to rotate forward. At this time, the lifting disc 82 moves upward and drives all the friction pressing strips 83 to move upward. The friction pressing strips 83 tightly press against the bottom surface of the second slider 41, realizing the locking of the second slider 41. Then rotate the fastening piece 43 forward. The fastening piece 43 rotates forward and moves downward to press against the top surface of the vibration sensor, realizing the final positioning and fixing of the vibration sensor. Finally, fix the entire positioning device on the stage in the lithography machine through the mounting holes 120 and screws, so as to monitor the vibration condition of the stage.

[0031] It should be noted that in this article, terms such as "including", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. Without more limitations, an element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0032] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A sensor positioning device for a photolithography machine, characterized in that: The invention comprises a circular box body (10), wherein the top surface of the circular box body (10) is provided with a plurality of first slide grooves (20) distributed in a circumferential manner, the bottom end of each of the first slide grooves (20) is provided with a long opening (30), each of the first slide grooves (20) is provided with a positioning mechanism (40) slidably connected thereto, the bottom end of the circular box body (10) is provided with a locking mechanism (80) matching the positioning mechanism (40), the side wall of the circular box body (10) is provided with a plurality of second slide grooves (50) distributed in a circumferential manner, each of the second slide grooves (50) is provided with a first slider (60) slidably connected thereto up and down, the top surface of the first slider (60) is fixedly connected to the positioning mechanism (40) with a traction rope (70), the bottom end of the first slider (60) is fixedly connected to a connecting rod (90), the bottom end of the connecting rod (90) is fixedly connected to a circular connecting frame (100), and the circular connecting frame (100) is fixedly connected to all the connecting rods (90).

2. The sensor positioning device for a photolithography machine according to claim 1, characterized in that: The positioning mechanism (40) comprises a second slider (41) slidably connected to the first slide groove (20), a stud (42) is welded on the top surface of the second slider (41), a fastening pressing plate (43) is threadedly connected to the stud (42), and a spring (44) is welded to the inner wall of one side of the second slider (41) and the first slide groove (20).

3. The sensor positioning device for a photolithography machine according to claim 1, characterized in that: The locking mechanism (80) comprises a screw rod (81) rotatably connected to the upper and lower inner walls of the circular box body (10); the screw rod (81) is threadedly connected to a lifting disc (82); the top surface of the lifting disc (82) is integrally connected to a plurality of circumferentially distributed friction strips (83); the upper inner wall of the circular box body (10) is welded to a plurality of circumferentially distributed guide rods (84); the lifting disc (82) is slidably connected to the guide rods (84) up and down.

4. The sensor positioning device for a photolithography machine according to claim 3, characterized in that: The friction strip (83) is located in the long opening (30), and a hexagon socket bolt (110) is welded to the bottom end of the screw rod (81).

5. The sensor positioning device for a photolithography machine according to claim 1, characterized in that: The top surface of the circular box body (10) is provided with a plurality of circumferentially distributed grooves, and the bottom ends of the grooves are provided with mounting holes (120).

6. The sensor positioning device for a photolithography machine according to claim 1, characterized in that: The second slide groove (50) is a through groove, and the circular connecting frame (100) can extend into the second slide groove (50).

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