Static pressure linear rail

Abstract

The utility model discloses a static pressure linear rail which comprises a guide rail, a sliding block and a throttler. The guide rail comprises a top face, a first side wall face and a second side wall face, wherein the first side wall face and the second side wall face are opposite and perpendicularly connected with the guide rail in the width direction of the guide rail. The sliding block is arranged on the guide rail in a sliding mode, the sliding block is provided with a first face opposite to the first side wall face and a second face opposite to the second side wall face, a plurality of static pressure cavities are formed between the sliding block and the guide rail, and at least one of the first side wall face, the second side wall face, the first face and the second face is provided with a static pressure cavity. And the throttler is arranged on the sliding block, the throttler communicates with the static pressure cavity, the throttler is used for adjusting the rigidity of an oil film in the static pressure cavity, and the static pressure linear rail solves the problem that in the prior art, interference is likely to be generated between the sliding block and the guide rail.

Description

Technical Field

[0001] The present application relates to the field of ultra-precision machining machine tool components, and more particularly, to a hydrostatic linear guideway. Background Art

[0002] A hydrostatic linear guideway is a core component of a precision device that uses liquid hydrostatic pressure to provide support and performs linear motion with high precision and high stability. The hydrostatic linear guideway includes a slider and a guide rail. The slider is arranged on the guide rail, and there is an oil cavity between the slider and the guide rail. When oil is supplied to the oil cavity, a stable oil flow forms an oil film between the guide rail and the slider, so that the slider has extremely low friction and wear during the sliding process, thereby achieving high-precision motion control. Due to the various advantages of the liquid hydrostatic linear guideway, it plays an important role in many fields such as precision manufacturing, inspection and measurement, and large-scale scientific equipment, providing a reliable motion control solution for various high-precision linear motion devices.

[0003] For existing hydrostatic linear guideways, for example, the hydrostatic linear guideway disclosed in Chinese Patent Application CN118008953A can automatically adjust the oil film stiffness between the slider and the guide rail according to the load on the slider, so that the hydrostatic linear guideway can still work properly when the load on the hydrostatic linear guideway changes. However, when the load on the hydrostatic linear guideway is too large and the center of gravity of the load is close to the edge of the hydrostatic linear guideway, it may cause the slider and the guide rail to deviate, resulting in interference between the slider and the guide rail. Summary of the Utility Model

[0004] The main purpose of the present application is to provide a hydrostatic linear guideway to at least solve the problem that interference is likely to occur between the slider and the guide rail in the prior art.

[0005] According to one aspect of the present application, there is provided a hydrostatic linear guideway, including:

[0006] A guide rail, the guide rail includes a top surface and two opposite first side wall surfaces and second side wall surfaces that are perpendicularly connected to the guide rail along the width direction of the guide rail;

[0007] A slider, the slider is slidably arranged on the guide rail, the slider has a first surface opposite to the first side wall surface and a second surface opposite to the second side wall surface, and a plurality of hydrostatic cavities are arranged between the slider and the guide rail, and the hydrostatic cavities are arranged on at least one of the first side wall surface, the second side wall surface, the first surface and the second surface;

[0008] A restrictor, the restrictor is arranged on the slider, the restrictor is communicated with the hydrostatic cavity, and the restrictor is used for adjusting the stiffness of the oil film in the hydrostatic cavity.

[0009] Further, the hydrostatic cavity includes:

[0010] The first static pressure chamber is provided on the first surface;

[0011] The second static pressure chamber is provided on the second surface.

[0012] Furthermore, there are multiple restrictors, and the multiple restrictors are connected to the multiple static pressure chambers in a one-to-one correspondence. A pressure stabilizing channel is provided between the restrictor and the static pressure chamber;

[0013] Wherein, the pressure stabilizing channel is vertically connected between the restrictor and the first static pressure chamber, and the pressure stabilizing channel is vertically connected between the restrictor and the second static pressure chamber.

[0014] Furthermore, there are 6 restrictors, 3 of which are provided on one side wall in the width direction of the slider, and the remaining 3 are provided on the other side wall in the width direction of the slider. The 3 restrictors provided on the same side wall are arranged in a straight line along the length direction of the guide rail or are arranged in a high-low staggered manner in sequence along the length direction of the guide rail.

[0015] Furthermore, the cross-section of the static pressure chamber includes at least one of a runway shape, an oval shape, and a rectangular shape.

[0016] Furthermore, the cross-section of the static pressure chamber is in a runway shape, and the maximum length A of the cross-section of the static pressure chamber satisfies the relationship: 120 mm ≤ A ≤ 145 mm; and / or,

[0017] The maximum width B of the cross-section of the static pressure chamber satisfies the relationship: 5 mm ≤ B ≤ 10 mm.

[0018] Furthermore, the maximum depth C of the static pressure chamber satisfies the relationship: 0.5 mm ≤ C ≤ 1 mm.

[0019] Furthermore, first limiting grooves and second limiting grooves are provided on opposite sides of the guide rail, and the first limiting grooves and the second limiting grooves are recessed along the width direction of the guide rail;

[0020] The slider is provided with a first limiting protrusion adapted to the first limiting groove and a second limiting protrusion adapted to the second limiting groove;

[0021] Wherein, the side wall surface of the first limiting groove close to the top surface is the third side wall surface, the side wall surface of the second limiting groove close to the top surface is the fourth side wall surface, the third side wall surface is perpendicular to the first side wall surface, the fourth side wall surface is perpendicular to the second side wall surface, the first limiting protrusion has a third surface relative to the third side wall surface, and the second limiting protrusion has a fourth surface relative to the fourth side wall surface.

[0022] Furthermore, the static pressure chamber further includes:

[0023] An upper static pressure chamber is arranged on the side wall surface of the slider relative to the top surface;

[0024] A lower static pressure chamber is arranged on at least one of the third surface and the fourth surface.

[0025] Furthermore, there are two upper static pressure chambers, and the two upper static pressure chambers are arranged at intervals along the width direction of the slider on the side wall surface of the slider relative to the top surface; and / or,

[0026] There are two lower static pressure chambers, one of which is arranged on the third surface and the other is arranged on the fourth surface.

[0027] Compared with the prior art, in the present application, a static pressure chamber is arranged on at least one of the first side wall surface, the second side wall surface, the first surface and the second surface. The static pressure chambers arranged on the first side wall surface, the second side wall surface, the first surface and the second surface enable an oil film to exist between the slider and the guide rail in the width direction of the slider. When the load on the slider is too large and the center of gravity of the load is close to the edge of the static pressure guide rail, the slider has a tendency to tilt and shift relative to the guide rail, thereby applying a certain overturning force to the oil film. After the oil film is subjected to this overturning force, under the action of the throttle, the rigidity of the oil film is adjusted and increased, thereby preventing the slider from tilting or shifting and avoiding interference caused by direct contact between the slider and the guide rail. Description of the Drawings

[0028] The drawings described herein are used to provide a further understanding of the present application, and constitute a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0029] Figure 1 is a schematic structural diagram of the static pressure guide rail disclosed in the present application;

[0030] Figure 2 is a structural diagram of the guide rail disclosed in the present application;

[0031] Figure 3 is a schematic structural diagram of the slider in the first perspective disclosed in the present application;

[0032] Figure 4 is a cross-sectional view of the static pressure guide rail disclosed in the present application;

[0033] Figure 5 is a schematic structural diagram of the slider in the second perspective disclosed in the present application;

[0034] Figure 6 is the Figure 5 cross-sectional view at A-A in the present application;

[0035] Figure 7 Structural schematic diagram of the throttle disclosed in the present application;

[0036] Figure 8 Exploded structural schematic diagram of the throttle disclosed in the present application;

[0037] Figure 9 Structural schematic diagram of the main body of the throttle table disclosed in the present application.

[0038] Among them, the above-mentioned drawings include the following reference numerals:

[0039] 10, guide rail; 11, first limiting groove; 12, second limiting groove; 20, slider; 21, first limiting protrusion; 22, second limiting protrusion; 30, static pressure chamber; 31, first static pressure chamber; 32, second static pressure chamber; 33, upper static pressure chamber; 34, lower static pressure chamber; 40, throttle; 41, main body; 42, cover plate; 43, thin film; 44, voltage stabilizing channel; 101, top surface; 102, first side wall surface; 103, second side wall surface; 104, third side wall surface; 105, fourth side wall surface; 201, first surface; 202, second surface; 203, third surface; 204, fourth surface; 411, first side; 412, second side; 413, oil supply port; 414, first throttle channel; 415, second throttle channel; 4111, groove; 4112, throttle boss; 4113, first channel; 4121, recessed part. Detailed implementation manners

[0040] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0041] It should be noted that the terms used herein are only for describing the specific implementation manners and are not intended to limit the exemplary implementation manners according to the present application. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or their combinations.

[0042] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0043] See also Figures 1 to 9 As shown, according to an embodiment of the present application, a static pressure linear rail is provided, comprising a guide rail 10 , a slider 20 and a throttle 40 .

[0044] The guide rail 10 includes a top surface 101 and a bottom surface 102 along the width direction of the guide rail 10 (such as the top surface 101). Figure 1 The slider 20 is slidably disposed on the guide rail 10. The slider 20 has a first surface 201 opposite to the first side wall surface 102 and a second surface 202 opposite to the second side wall surface 103. A plurality of static pressure chambers 30 are disposed between the slider 20 and the guide rail 10. The static pressure chamber 30 is disposed on at least one of the first side wall surface 102, the second side wall surface 103, the first surface 201, and the second surface 202. The throttle 40 is disposed on the slider 20. The throttle 40 is in communication with the static pressure chamber 30. The throttle 40 is used to adjust the stiffness of the oil film in the static pressure chamber 30.

[0045] In this embodiment, when the static pressure linear guide is connected to the oil circuit, the multiple static pressure chambers 30 between the slider 20 and the guide rail 10 will be filled with an oil film, enabling the slider 20 to have extremely low friction and wear during the sliding process, thereby achieving high-precision motion control. In addition, the restrictor 40 includes a main body 41, a cover plate 42, and a thin film 43. The main body 41 has a first side surface 411 and a second side surface 412. A groove 4111 is formed on the first side surface 411 of the main body 41. A throttle boss 4112 is provided at the center of the groove 4111. A first channel 4113 is provided on the throttle boss 4112, and the first channel 4113 extends from the first side surface 411 to the second side surface 412; a recess 4121 is provided on the second side surface 412 of the main body 41. The recess 4121 and the slider 20 enclose to form an oil supply channel. The main body 41 is further provided with an oil supply port 413, a first throttle channel 414, and a second throttle channel 415. The oil supply port 413 is communicated with the oil supply channel and the second throttle channel 415. The cover plate 42 is covered on the first side surface 411 of the main body 41. The thin film 43 is disposed between the cover plate 42 and the main body 41, and the thin film 43 and the space of the groove 4111 outside the throttle boss 4112 enclose to form a pressure stabilizing chamber, and the thin film 43 and the cover plate 42 enclose to form an adjustment chamber. Among them, the two ends of the first throttle channel 414 are respectively communicated with the oil supply channel and the pressure stabilizing chamber, the two ends of the second throttle channel 415 are respectively communicated with the adjustment chamber and the oil supply channel, the first channel 4113 is communicated with the static pressure chamber 30 and the oil supply channel, and the oil supply port 413 is communicated with the second throttle channel 415.

[0046] In this embodiment, the stiffness of the oil film in the hydrostatic pressure chamber 30 can be automatically adjusted by the restrictor 40 of this embodiment. Specifically, when there is no load on the slider 20, the oil film in the hydrostatic pressure chamber 30 does not generate pressure on the oil in the oil supply passage. At the same time, the external oil circuit supplies oil to the oil supply passage through the oil supply port 413. The oil supply port 413 is communicated with the second throttle passage 415, so that the oil flows into the adjustment chamber, resulting in the hydraulic pressure in the adjustment chamber being higher than that in the pressure stabilizing chamber. At the same time, since the hydraulic pressure in the adjustment chamber is higher than the hydraulic pressure of the oil in the pressure stabilizing chamber, the diaphragm 43 abuts against the opening of the first passage 4113 of the throttle boss 4112, resulting in the oil being unable to enter the pressure stabilizing chamber through the first passage 4113. In addition, the oil flows through the oil supply passage to the connection between the oil supply passage and the first passage 4113, and then flows into the hydrostatic pressure chamber 30. When there is a load on the slider 20, the oil film on the hydrostatic pressure chamber 30 is subjected to pressure and transfers the pressure to the oil in the oil supply passage, resulting in the oil flowing into the pressure stabilizing chamber through the first throttle passage 414 applying a thrust force to the diaphragm 43, causing the diaphragm 43 to bend towards the adjustment chamber, and the opening on the first passage 4113 to open. The oil in the pressure stabilizing chamber flows out through the first passage 4113 and flows into the hydrostatic pressure chamber 30 together with the oil in the oil supply passage, increasing the oil flow rate, making the change in the oil film thickness smaller, and thus enhancing the rigidity of the oil film. When the load on the slider 20 changes, the pressure stabilizing chamber and the adjustment chamber monitor the pressure of the oil in the hydrostatic pressure chamber 30, thereby controlling the oil flow rate flowing into the hydrostatic pressure chamber 30 through the first passage 4113, so as to achieve automatic adjustment of the rigidity of the oil film.

[0047] Compared with the prior art, in this embodiment, a hydrostatic pressure chamber 30 is provided on at least one of the first side wall surface 102, the second side wall surface 103, the first surface 201, and the second surface 202. The hydrostatic pressure chambers 30 provided on the first side wall surface 102, the second side wall surface 103, the first surface 201, and the second surface 202 are used to form an oil film between the slider 20 and the guide rail 10 in the width direction of the slider 20. When the load on the slider 20 is too large and the center of gravity of the load is close to the edge of the hydrostatic linear guide, the slider 20 has a tendency to tilt and shift relative to the guide rail 10, thereby applying a certain overturning force to the oil film. After the oil film is subjected to this overturning force, under the action of the restrictor 40, the rigidity of the oil film is adjusted and increased, thereby preventing the slider 20 from tilting or shifting, so as to avoid interference caused by direct contact between the slider 20 and the guide rail 10.

[0048] Further, the hydrostatic pressure chamber 30 includes a first hydrostatic pressure chamber 31 and a second hydrostatic pressure chamber 32. Among them, the first hydrostatic pressure chamber 31 is provided on the first surface 201, and the second hydrostatic pressure chamber 32 is provided on the second surface 202.

[0049] Specifically, on the one hand, the structure of this embodiment takes into account the processing difficulty. That is, it is time-consuming, laborious, difficult and costly to machine the hydrostatic cavity 30 on the guide rail 10. Therefore, a first hydrostatic cavity 31 is provided on the first surface 201 of the slider 20, and a second hydrostatic cavity 32 is provided on the second surface 202 of the slider 20. On the other hand, the first hydrostatic cavity 31 and the second hydrostatic cavity 32 are provided on the first surface 201 and the second surface 202 of the slider 20 at the same time. That is, when the load is close to the edge of the first surface 201 in the width direction of the slider 20, the oil film in the first hydrostatic cavity 31 can exert a certain supporting force on the slider 20 to prevent the first surface 201 of the slider 20 from directly contacting the guide rail 10. When the load is close to the edge of the second surface 202 in the width direction of the slider 20, the oil film in the second hydrostatic cavity 32 can exert a certain supporting force on the slider 20 to prevent the second surface 202 of the slider 20 from directly contacting the guide rail 10, thereby improving the stability of the hydrostatic linear guide.

[0050] Further, there are multiple restrictors 40, and the multiple restrictors 40 are connected to the multiple hydrostatic cavities 30 in a one-to-one correspondence. A pressure stabilizing channel 44 is provided between the restrictor 40 and the hydrostatic cavity 30. Among them, the pressure stabilizing channel 44 is vertically connected between the restrictor 40 and the first hydrostatic cavity 31, and the pressure stabilizing channel 44 is vertically connected between the restrictor 40 and the second hydrostatic cavity 32.

[0051] Specifically, in this embodiment, the pressure stabilizing channel 44 is vertically connected between the restrictor 40 and the first hydrostatic cavity 31, and the pressure stabilizing channel 44 is vertically connected between the restrictor 40 and the second hydrostatic cavity 32 to reduce the processing difficulty of machining the pressure stabilizing channels 44 connected to the first hydrostatic cavity 31 and the second hydrostatic cavity 32 on the slider 20.

[0052] Further, the cross-section of the hydrostatic cavity 30 includes at least one of a racetrack shape, an oval shape, and a rectangular shape. Specifically, the cross-section of the hydrostatic cavity 30 refers to the surface obtained by intercepting the hydrostatic cavity 30 with a plane perpendicular to the depth direction of the hydrostatic cavity 30. For example, the cross-section of the first hydrostatic cavity 31 refers to the surface obtained by intercepting the first hydrostatic cavity 31 with a plane perpendicular to the width direction of the slider 20. In this embodiment, the cross-section of the hydrostatic cavity 30 includes at least one of a racetrack shape, an oval shape, and a rectangular shape. The racetrack shape, the oval shape, and the rectangular shape are all regular shapes, which are convenient for processing and manufacturing. In a specific embodiment, each hydrostatic cavity 30 on the hydrostatic linear guide is racetrack-shaped.

[0053] Further, the cross-section of the hydrostatic cavity 30 is racetrack-shaped, and the maximum length A of the cross-section of the hydrostatic cavity 30 satisfies the relationship: 120 mm ≤ A ≤ 145 mm. Specifically, in this embodiment, the hydrostatic cavity 30 extends along the length direction of the slider 20 (such as attached Figure 1extends in the X direction. The length of the slider 20 is 152 mm. If the maximum length A of the hydrostatic cavity 30 is too small, that is, A is less than 120 mm, there is a large gap between the length of the hydrostatic cavity 30 and the length of the slider 20 at this time, which may cause the oil film in the hydrostatic cavity 30 to not fully cover between the slider 20 and the guide rail 10. When A is greater than 145 mm, the length gap between the hydrostatic cavity 30 and the slider 20 is small, which may cause the side wall thickness in the length direction of the hydrostatic cavity 30 to be relatively thin, making the rigidity of this side wall weak and easily causing damage to the hydrostatic cavity 30. The value of A can be 120 mm, 125 mm, 130 mm, 135 mm, 140 mm, and 145 mm.

[0054] Optionally, the maximum width B of the cross-section of the hydrostatic cavity 30 satisfies the relationship: 5 mm ≤ B ≤ 10 mm. When the maximum width B of the hydrostatic cavity 30 satisfies the above relationship, the width of the hydrostatic cavity 30 will not be too narrow, which can avoid the small width of the oil film between the slider 20 and the guide rail 10, thereby preventing interference between the slider 20 and the guide rail 10; at the same time, the width of the hydrostatic cavity 30 will not be too large, thereby avoiding a decrease in the pressure exerted by the oil film on the slider 20 and the guide rail 10. The value of B can be 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, and 10 mm.

[0055] In addition, the maximum depth C of the hydrostatic cavity 30 satisfies the relationship: 0.5 mm ≤ C ≤ 1 mm. Specifically, the depth of the hydrostatic cavity 30 is not easy to be set too deep. That is, when C is greater than 1 mm, the depth of the hydrostatic cavity 30 increases, and the pressure exerted by the oil film on the guide rail 10 and the slider 20 will decrease. When C is less than 0.5 mm, when the depth of the hydrostatic cavity 30 is relatively shallow, the thickness of the oil film in the hydrostatic cavity 30 decreases, resulting in uneven changes in the rigidity of the oil film when the oil film bears the load, and ultimately weakening the anti-eccentric load capacity of the hydrostatic linear guide.

[0056] Furthermore, a first limiting groove 11 and a second limiting groove 12 are provided on opposite sides of the guide rail 10. The first limiting groove 11 and the second limiting groove 12 are recessed along the width direction of the guide rail 10; a first limiting protrusion 21 adapted to the first limiting groove 11 and a second limiting protrusion 22 adapted to the second limiting groove 12 are provided on the slider 20; wherein, the side wall surface of the first limiting groove 11 close to the top surface 101 is the third side wall surface 104, the side wall surface of the second limiting groove 12 close to the top surface 101 is the fourth side wall surface 105, the third side wall surface 104 is perpendicular to the first side wall surface 102, the fourth side wall surface 105 is perpendicular to the second side wall surface 103, the first limiting protrusion 21 has a third surface 203 relative to the third side wall surface 104, and the second limiting protrusion 22 has a fourth surface 204 relative to the fourth side wall surface 105.

[0057] Specifically, the first limiting groove 11 cooperates with the first limiting protrusion 21 and the second limiting groove 12 and the second limiting protrusion 22, so that the slider 20 can be limited on the guide rail 10, thereby preventing the slider 20 from falling off the guide rail 10 when the load is unbalanced. In addition, the guide rail 10 of this embodiment is an I-shaped structure, and the top surface 101 of the guide rail 10, i.e., the I-shaped structure, is in the height direction of the static pressure line rail (such as the attached Figure 1 The upper surface in the Z direction.

[0058] Furthermore, the static pressure chamber 30 also includes an upper static pressure chamber 33 and a lower static pressure chamber 34 . The upper static pressure chamber 33 is arranged on the side wall surface of the slider 20 relative to the top surface 101 , and the lower static pressure chamber 34 is arranged on at least one of the third surface 203 and the fourth surface 204 .

[0059] In this embodiment, the oil film in the upper static pressure chamber 33 and the lower static pressure chamber 34 can balance the pressure exerted by the load on the slider 20 on the slider 20 and the guide rail 10 in the height direction, thereby avoiding direct contact between the guide rail 10 and the slider 20. In addition, in this embodiment, the upper static pressure chamber 33, the lower static pressure chamber 34, the first static pressure chamber 31 and the second static pressure chamber 32 make the slider 20 and the guide rail 10 completely isolated by the oil film, thereby greatly improving the motion accuracy of the static pressure linear rail. At the same time, the pressure stabilizing channel 44 between the upper static pressure chamber 33 and the throttle 40 can be arranged obliquely between the upper static pressure chamber 33 and the throttle 40, or can be arranged vertically between the upper static pressure chamber 33 and the throttle 40. Similarly, the pressure stabilizing channel 44 between the lower static pressure chamber 34 and the throttle 40 can be arranged obliquely between the lower static pressure chamber 34 and the throttle 40, or can be arranged vertically between the lower static pressure chamber 34 and the throttle 40.

[0060] Since the width of the slider 20 and the guide rail 10 is relatively wide, in order to make the oil film in the upper static pressure chamber 33 and the lower static pressure chamber 34 bear force uniformly, in this embodiment, there are two upper static pressure chambers 33, and the two upper static pressure chambers 33 are arranged at intervals along the width direction of the slider 20 on the side wall surface of the slider 20 relative to the top surface 101. There are two lower static pressure chambers 34, one of which is arranged on the third surface 203, and the other is arranged on the fourth surface 204.

[0061] In addition, there are six throttles 40, three of which are arranged on one side wall in the width direction of the slider 20, and the remaining three are arranged on the other side wall in the width direction of the slider 20. The three throttles 40 arranged on the same side wall are arranged in a straight line along the length direction of the guide rail 10 or arranged in sequence with high and low staggered positions along the length direction of the guide rail 10.

[0062] Specifically, three restrictors 40 are provided on one side wall in the width direction of the slider 20. One of them is communicated with one of the upper static pressure chambers 33, another one is communicated with one of the lower static pressure chambers 34, and the other one is communicated with the first static pressure chamber 31. Similarly, three restrictors 40 are provided on the other side wall in the width direction of the slider 20. One of them is communicated with another one of the upper static pressure chambers 33, another one is communicated with another one of the lower static pressure chambers 34, and the other one is communicated with the second static pressure chamber 32. In addition, the three restrictors 40 provided on the same side wall are arranged in a straight line along the length direction of the guide rail 10 for facilitating the installation of the restrictors 40. However, when a pressure stabilizing channel 44 needs to be opened on the slider 20, it may cause inconvenience in arranging multiple pressure stabilizing channels 44, resulting in greater processing difficulty. While the three restrictors 40 provided on the same side wall are arranged in a staggered manner in sequence along the length direction of the guide rail 10, which can better arrange the pressure stabilizing channels 44 and avoid the communication of the pressure stabilizing channels 44 when the pressure stabilizing channels 44 are opened on the slider 20.

[0063] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. can be used here to describe the spatial position relationship of a device or feature shown in the figure with other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the figure for the device. For example, if the device in the drawing is inverted, the device described as "above" or "over" other devices or structures will then be positioned "below" or "beneath" other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations for the spatial relative descriptions used here will be made.

[0064] In addition, it should be noted that using words such as "first" and "second" to limit components is only for facilitating the distinction of the corresponding components. Without additional statements, the above words have no special meanings, so they cannot be understood as limiting the protection scope of the present application.

[0065] The above are only the preferred embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A static pressure linear rail, characterized in that: include: A guide rail (10), the guide rail (10) comprising a top surface (101) and two opposite first side wall surfaces (102) and a second side wall surface (103) vertically connected to the guide rail (10) along a width direction of the guide rail (10); A slider (20), the slider (20) being slidably disposed on the guide rail (10), the slider (20) having a first surface (201) opposite to the first side wall surface (102) and a second surface (202) opposite to the second side wall surface (103), and a plurality of static pressure cavities (30) being disposed between the slider (20) and the guide rail (10), the static pressure cavity (30) being disposed on at least one of the first side wall surface (102), the second side wall surface (103), the first surface (201) and the second surface (202); A throttle (40), wherein the throttle (40) is arranged on the slider (20), the throttle (40) is connected to the static pressure chamber (30), and the throttle (40) is used to adjust the stiffness of the oil film in the static pressure chamber (30).

2. The static pressure linear guide according to claim 1, characterized in that: The static pressure chamber (30) comprises: A first static pressure chamber (31), wherein the first static pressure chamber (31) is arranged on the first surface (201); A second static pressure chamber (32), wherein the second static pressure chamber (32) is arranged on the second surface (202).

3. The static pressure linear guide according to claim 2, characterized in that: The throttle (40) includes a plurality of throttles (40), the plurality of throttles (40) are connected to the plurality of static pressure chambers (30) in a one-to-one correspondence, and a pressure stabilizing channel (44) is provided between the throttle (40) and the static pressure chamber (30); The pressure-stabilizing channel (44) is vertically connected between the throttle (40) and the first static pressure chamber (31), and the pressure-stabilizing channel (44) is vertically connected between the throttle (40) and the second static pressure chamber (32).

4. The static pressure linear guide according to claim 1, characterized in that: The throttles (40) include six, three of which are arranged on one side wall in the width direction of the slider (20), and the remaining three are arranged on another side wall in the width direction of the slider (20). The three throttles (40) arranged on the same side wall are arranged in a straight line along the length direction of the guide rail (10) or are arranged in sequence in a high-low staggered manner along the length direction of the guide rail (10).

5. The static pressure linear guide according to claim 1, characterized in that: The cross-section of the static pressure chamber (30) includes at least one of a racetrack shape, an ellipse and a rectangle.

6. The static pressure linear guide according to claim 5, characterized in that: The cross section of the static pressure chamber (30) is in the shape of a racetrack, and the maximum length A of the cross section of the static pressure chamber (30) satisfies the relationship: 120 mm ≤ A ≤ 145 mm; and / or, The maximum width B of the cross section of the static pressure chamber (30) satisfies the relationship: 5mm≤B≤10mm.

7. The static pressure linear guide according to any one of claims 1 to 6, characterized in that: The maximum depth C of the static pressure chamber (30) satisfies the relationship: 0.5 mm ≤ C ≤ 1 mm.

8. The static pressure linear guide according to any one of claims 1 to 6, characterized in that: A first limiting groove (11) and a second limiting groove (12) are provided on opposite sides of the guide rail (10), and the first limiting groove (11) and the second limiting groove (12) are recessed along the width direction of the guide rail (10); The sliding block (20) is provided with a first limiting protrusion (21) adapted to the first limiting groove (11) and a second limiting protrusion (22) adapted to the second limiting groove (12); The side wall surface of the first limiting groove (11) close to the top surface (101) is a third side wall surface (104), the side wall surface of the second limiting groove (12) close to the top surface (101) is a fourth side wall surface (105), the third side wall surface (104) is perpendicular to the first side wall surface (102), the fourth side wall surface (105) is perpendicular to the second side wall surface (103), the first limiting protrusion (21) has a third surface (203) relative to the third side wall surface (104), and the second limiting protrusion (22) has a fourth surface (204) relative to the fourth side wall surface (105).

9. The static pressure linear guide according to claim 8, characterized in that: The static pressure chamber (30) further comprises: an upper static pressure chamber (33), the upper static pressure chamber (33) being arranged on a side wall surface of the sliding block (20) relative to the top surface (101); A lower static pressure chamber (34), wherein the lower static pressure chamber (34) is disposed on at least one of the third surface (203) and the fourth surface (204).

10. The static pressure linear guide according to claim 9, characterized in that: The upper static pressure chamber (33) includes two upper static pressure chambers (33), and the two upper static pressure chambers (33) are arranged at intervals along the width direction of the slider (20) on the side wall surface of the slider (20) relative to the top surface (101); and / or, The lower static pressure chamber (34) includes two, one of which is arranged on the third surface (203), and the other of which is arranged on the fourth surface (204).

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