Compensation type clamping jaw
Through the design of the flip positioning and structural optimization of the compensation jaw, the alignment problem of the alignment machine on the opaque silicon wafer substrate is solved, the clamping accuracy and structural applicability are improved, and the deformation of the cofferdam glass is avoided.
Patent Information
- Application Number
- CN202422217932.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-10
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-09-10
AI Technical Summary
Existing alignment machines cannot accurately align light-impermeable silicon wafer substrates with silicon wafer substrates, and the jaws are prone to deformation of the cofferdam glass due to excessive pressure, resulting in bonding defects.
A compensation jaw is designed, including a strip-shaped positioning through hole, a lateral connecting arm and a connecting frame in the jaw body, which is clamped by a flip positioning method, and arcuate grooves and connecting ears are provided on the connecting arm and frame to improve stability and applicability.
Accurate alignment of the light-transmitting silicon wafer substrate is achieved, reducing the deformation risk of cofferdam glass, and improving clamping accuracy and structural applicability.
Smart Images
Figure CN223044571U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of clamping and positioning, in particular to a compensation type jaw. Background Art
[0002] The traditional alignment machine adopts the method of bottom alignment, and the light source halogen lamp provides the light source. It can only accurately align one of the substrates that is transparent, and it is impossible to align the opaque silicon wafer substrate with the silicon wafer substrate. At the same time, in the permanent bonding process of CIS, there is a bonding adhesive with a thickness of 20-30 μm on the dam glass. Before bonding, in order to prevent premature contact and resulting in glue overflow defects, 1500-μm gaskets are used at the three jaws of the fixture to separate the wafer from the dam glass. Due to the material and thickness of the dam glass, premature contact may occur accidentally in the middle area after being separated by a 1500-μm thick gasket, resulting in bonding defects; the existing jaws are very likely to cause deformation of the dam glass due to pressure, resulting in premature contact in the middle area. Summary of the Utility Model
[0003] The technical problem to be solved by the utility model is that the current alignment machine cannot align the opaque silicon wafer substrate with the silicon wafer substrate, and at the same time, it is very easy to cause deformation due to excessive pressure caused by inaccurate alignment.
[0004] The technical solution adopted by the utility model to solve its technical problem is: a compensation type jaw, including a jaw body. A strip-shaped positioning through hole is opened inside the jaw body. The connection end of the jaw body has a lateral connection arm protruding to one side. An integral lateral connection frame is provided on the side wall of the lateral connection arm. An integral lateral connection ear is provided on the outer side surface of the lateral connection frame. A circular assembly through hole is opened inside the lateral connection ear.
[0005] Arc-shaped internal assembly grooves are symmetrically opened on the inner walls on both sides of the strip-shaped positioning through hole.
[0006] An outer guiding inclined surface is opened at the top corner of the non-connection end of the lateral connection arm.
[0007] The lateral connection ear is composed of right-angled trapezoidal connecting plates which are symmetrically fixed on both sides of the lateral connection frame and are of an integral structure.
[0008] The connection end of the lateral connection frame and the lateral connection arm has an arc-shaped inner chamfer, and the outer top corner of the lateral connection frame has an arc-shaped outer chamfer.
[0009] The inner wall of the lateral connection frame has an arc-shaped lower groove.
[0010] The beneficial effects of the utility model are as follows:
[0011] (1) The compensation type jaw of the utility model adopts the method of flipping and positioning for compensation clamping, which can achieve alignment and improve the clamping accuracy;
[0012] (2) Fix a lateral connection frame with lateral connection ears on the outside through a lateral connection arm on one side of the connection end of the jaw body, which facilitates misaligned movable assembly and makes the structural layout more reasonable;
[0013] (3) By providing a strip-shaped positioning through-hole inside the jaw body, the applicability of the structure can be improved. Description of the Drawings
[0014] The present utility model will be further described below in conjunction with the drawings and embodiments.
[0015] Figure 1 is a schematic structural view of the present utility model.
[0016] Figure 2 is the front view of the present utility model. Detailed Description of the Specific Embodiment
[0017] The present utility model will now be further described in detail in conjunction with the drawings. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present utility model in a schematic manner, so they only show the components related to the present utility model.
[0018] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0019] Figure 1 and Figure 2 A compensation-type jaw shown in and, includes a jaw body 1, a strip-shaped positioning through-hole 2 is provided inside the jaw body 1, a lateral connection arm 3 protruding to one side is provided at the connection end of the jaw body 1, a lateral connection frame 4 with an integral structure is provided on the side wall of the lateral connection arm 3, a lateral connection ear 5 with an integral structure is provided on the outer side surface of the lateral connection frame 4, and a circular assembly through-hole 6 is provided inside the lateral connection ear 5.
[0020] In order to improve the fitting and stability of the inner side, arc-shaped internal assembly grooves are symmetrically provided on the inner side walls of both sides of the strip-shaped positioning through-hole 2.
[0021] In order to cooperate with flipping and supporting, an outer guiding inclined surface is provided at the top corner of the non-connection end of the lateral connection arm 3.
[0022] In order to improve the stability and firmness of the movable assembly, the lateral connection ear 5 is composed of right-angled trapezoidal connecting plates with an integral structure symmetrically fixed on both sides of the lateral connection frame 4.
[0023] For the convenience of assembly, the connection end of the lateral connection frame 4 and the lateral connection arm 3 has an arc-shaped inner chamfer, and the outer top angle of the lateral connection frame 4 has an arc-shaped outer chamfer.
[0024] To cooperate with the internal flipping and enhance the internal support strength, the inner wall of the lateral connection frame 4 has an arc-shaped lower groove 7.
[0025] Enlightened by the ideal embodiments of the present invention described above, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.
Claims
1. A compensating clamping jaw, comprising a clamping jaw body (1), characterized in that: The clamp body (1) is provided with a strip-shaped positioning through hole (2) inside, the connecting end of the clamp body (1) is provided with a lateral connecting arm (3) protruding to one side, the side wall of the lateral connecting arm (3) is provided with an integral lateral connecting frame (4), the outer surface of the lateral connecting frame (4) is provided with an integral lateral connecting ear (5), and the inside of the lateral connecting ear (5) is provided with a circular assembly through hole (6).
2. A compensating clamp according to claim 1, characterized in that: Arc-shaped internal assembly grooves are symmetrically provided on the inner walls on both sides of the strip-shaped positioning through hole (2).
3. A compensating clamp according to claim 1, characterized in that: An outer guiding inclined surface is provided at the top corner of the non-connecting end of the lateral connecting arm (3).
4. The compensating clamp according to claim 1, characterized in that: The lateral connection ears (5) are composed of right-angled trapezoidal connection plates of an integral structure symmetrically fixed on both sides of the lateral connection frame.
5. The compensating clamp according to claim 1, characterized in that: The connecting end between the lateral connecting frame and the lateral connecting arm (3) has an arc-shaped inner chamfer, and the outer top corner of the lateral connecting frame (4) has an arc-shaped outer chamfer.
6. The compensating clamp according to claim 1, characterized in that: The inner wall of the lateral connection frame (4) has an arc-shaped lower groove (7).