Angle adjusting mechanism
By designing an angle adjustment mechanism including a pad plate, a rotary plate and a variety of adjustment devices, the problem of graphic printing angle offset during the printing process of semiconductor products is solved, and the printing quality and molding rate are significantly improved.
Patent Information
- Application Number
- CN202422368426.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-09-27
AI Technical Summary
During the production process of electrostatic chucks of semiconductor products, graphic printing angle deviations are prone to occur when manually printing ceramic discs, resulting in poor printing quality.
An angle adjustment mechanism is designed, including a pad plate, a rotary plate, a loosening pressing device, a rotary guide device and a rotary adjustment device, through which precise angle adjustment of the rotary plate is achieved.
It effectively solves the problem of printing angle offset, ensures accurate alignment between the graphics and the ceramic disc, and improves the primary molding rate and overall quality of the printing.
Smart Images
Figure CN223045358U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor tooling, and particularly relates to an angle adjustment mechanism. Background Art
[0002] In the production process of semiconductor product electrostatic chucks, there is a manufacturing process step that requires slurry printing on a ceramic disk. In the printing process, the slurry is placed on a screen printing plate, and the inherent pattern on the screen plate is printed on the ceramic disk. However, during manual printing, there is a situation where the printing angle of the pattern is offset.
[0003] Therefore, according to the above situation, it is necessary to design and invent an angle adjustment mechanism tooling that can perform fine angle adjustment to make the pattern correspond to the ceramic disk one by one. Summary of the Utility Model
[0004] In order to solve the above problems, the utility model provides an angle adjustment mechanism. The angle adjustment mechanism can improve the one-time forming rate of printing and ensure the printing quality and effect by realizing the angle adjustment of the workpiece.
[0005] The technical solution of the utility model is as follows:
[0006] An angle adjustment mechanism includes a backing plate and a rotating plate. The rotating plate is rotatably installed on the backing plate. A loosening and clamping device, a rotation guiding device, and a rotation adjusting device are arranged between the backing plate and the rotating plate. The loosening and clamping device loosens or clamps the rotating plate on the backing plate. The rotation guiding device is used to guide the rotation of the rotating plate relative to the backing plate. The rotation adjusting device is used to adjust the rotation angle of the rotating plate relative to the backing plate. The workpiece to be processed is fixedly placed on the rotating plate.
[0007] The loosening and clamping device includes a manual shaft clamp. The lower threaded part of the manual shaft clamp passes through an arc-shaped long hole provided on the rotating plate and is fixedly connected to the backing plate.
[0008] The center of the arc-shaped long hole is concentric with the rotation center of the rotating plate.
[0009] A pressure plate is arranged between the upper part of the rotating plate and the manual shaft clamp.
[0010] The rotation guiding device includes a cam follower. An arc-shaped groove is provided at each of the four corners of the backing plate. One end of the cam follower is installed in the arc-shaped groove with a clearance fit, and the other end of the cam follower is fixedly connected to the rotating plate.
[0011] The center of the arc-shaped groove is concentric with the rotation center of the rotating plate.
[0012] The rotation adjustment device includes a slide plate, an angle push plate, a movable pin and a drive mechanism. One end of the angle push plate is fixedly connected to the end of the rotating plate. The movable pin consists of a square head and a cylindrical pin body. A long pin hole with a clearance fit with the cylindrical pin body is provided at the top of the other end of the angle push plate. The slide plate is composed of a left support leg, a right support leg and a cross beam. The slide plate is fixedly installed on the rotating plate through the left support leg and the right support leg. A square straight slide groove for mating with the square head is provided on the cross beam. The drive mechanism drives the movable pin to slide along the slide groove, thereby driving the angle push plate and the rotating plate to rotate.
[0013] The drive mechanism includes an angle adjustment bolt, a slide plate and a movable pin. The angle adjustment bolt consists of a smooth rod part, a screw part and a cylindrical head part. Round holes Ⅰ and Ⅱ are respectively provided on the left support leg and the right support leg. The smooth rod part and the cylindrical head part are respectively rotatably installed in round holes Ⅰ and Ⅱ. A threaded hole for mating with the screw part is provided on the side surface of the square head.
[0014] A knob is fixedly connected to the end of the smooth rod part.
[0015] A cover plate for blocking the cylindrical head is fixedly provided outside the round hole Ⅱ.
[0016] The beneficial effects of the present utility model are as follows:
[0017] 1. An angle adjustment mechanism disclosed by the present utility model can achieve precise angle adjustment of the rotating plate (i.e., the carrier for placing the ceramic plate) through this angle adjustment mechanism, effectively solving the problem of graphic printing angle deviation during the manual printing process, ensuring the precise alignment of the graphic with the ceramic plate, and significantly improving the first forming rate and overall quality of printing.
[0018] 2. An angle adjustment mechanism disclosed by the present utility model adopts a manual shaft clamp and a loosening and pressing device, enabling the operator to easily press and loosen the rotating plate; at the same time, combined with a rotation adjustment device composed of a slide plate, an angle push plate and a movable pin, fine adjustment of the angle can be achieved through simple rotation operations, and the operation is simple and fast.
[0019] 3. An angle adjustment mechanism disclosed by the present utility model adopts a method of matching a cam follower with an arc-shaped groove for the rotation guiding device, ensuring the smoothness and accuracy of the rotating plate during rotation, and avoiding printing errors caused by poor rotation or deviation. In addition, the design of the pressing device also ensures the stability of the rotating plate after adjustment, preventing the influence on the printing effect due to loosening. Description of the Drawings
[0020] The solutions and advantages of the present application will become clear to those of ordinary skill in the art by reading the following detailed description of the preferred embodiments. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present utility model.
[0021] In the drawings:
[0022] Figure 1 is a schematic perspective view of an angle adjustment mechanism according to an embodiment of the present utility model;
[0023] Figure 2 is a schematic perspective view of an angle adjustment mechanism (when the slide plate and the rotating plate are hidden) according to an embodiment of the present utility model;
[0024] Figure 3 is a schematic perspective view of a backing plate of an angle adjustment mechanism according to an embodiment of the present utility model;
[0025] Figure 4 is a schematic perspective view of a rotating plate of an angle adjustment mechanism according to an embodiment of the present utility model;
[0026] Figure 5 is a schematic perspective view of an angle adjustment bolt of an angle adjustment mechanism according to an embodiment of the present utility model;
[0027] Figure 6 is a schematic perspective view of a slide plate of an angle adjustment mechanism according to an embodiment of the present utility model;
[0028] Figure 7 is a schematic perspective view of an angle push plate of an angle adjustment mechanism according to an embodiment of the present utility model;
[0029] Figure 8 is a schematic perspective view of a movable pin of an angle adjustment mechanism according to an embodiment of the present utility model;
[0030] Figure 9 is a schematic perspective view of a manual shaft clamp of an angle adjustment mechanism according to an embodiment of the present utility model;
[0031] Figure 10 is a schematic perspective view of a cam follower of an angle adjustment mechanism according to an embodiment of the present utility model;
[0032] The components represented by the reference numerals in the drawings are:
[0033] The utility model: 1. backing plate, 1a. arc-shaped groove, 2. rotating plate, 2a. arc-shaped long hole, 3. knob, 4. angle adjustment bolt, 4a. smooth rod part, 4b. screw rod part, 4c. cylindrical head part, 5. slide plate, 5a. left support leg, 5a1. round hole Ⅰ, 5b. right support leg, 5b1. round hole Ⅱ, 5c. cross beam, 5c1. slide groove, 6. angle push plate, 6a. long pin hole, 7. movable pin, 7a. square head, 7a1. threaded hole, 7b. cylindrical pin body, 8. cover plate, 9. pressing plate, 10. manual shaft clamp, 11. cam follower. Detailed implementation mode
[0034] Embodiment
[0035] As Figure 1 and Figure 2 shown, the angle adjustment mechanism includes a backing plate 1 and a rotating plate 2. The rotating plate 2 is rotatably mounted on the backing plate 1. A loosening and pressing device, a rotation guiding device and a rotation adjusting device are arranged between the backing plate 1 and the rotating plate 2. The loosening and pressing device loosens or presses the rotating plate 2 on the backing plate 1. The rotation guiding device is used to guide the rotation of the rotating plate 2 relative to the backing plate 1. The rotation adjusting device is used to adjust the rotation angle of the rotating plate 2 relative to the backing plate 1. The workpiece to be processed is fixedly placed on the rotating plate 2.
[0036] The loosening and pressing device includes a manual shaft clamp 10. The lower threaded part of the manual shaft clamp 10 passes through the arc-shaped long hole 2a provided on the rotating plate 2 and is fixedly connected to the backing plate 1.
[0037] As Figure 4 shown, the center of the arc-shaped long hole 2a is concentric with the rotation center of the rotating plate 2.
[0038] A pressing plate 9 is arranged between the upper part of the rotating plate 2 and the manual shaft clamp 10. As Figure 9 shown, in this embodiment, the manual shaft clamp 10 adopts a commercially available finished product, such as MISUMI quick handle CLCK5-30-B / CLCK5-40-B.
[0039] The rotation guiding device includes a cam follower 11. As Figure 3 and Figure 10 shown, an arc-shaped groove 1a is arranged at each of the four corners of the backing plate 1. One end of the cam follower 11 is installed in the arc-shaped groove 1a with a clearance fit, and the other end of the cam follower 11 is fixedly connected to the rotating plate 2.
[0040] The center of the arc-shaped groove 1a is concentric with the rotation center of the rotating plate 2.
[0041] The rotation adjustment device includes a slide plate 5, an angle push plate 6, a movable pin 7 and a drive mechanism. One end of the angle push plate 6 is fixedly connected to the end of the rotating plate 2, as Figure 8 shown. The movable pin 7 is composed of a square head 7a and a cylindrical pin body 7b, as Figure 7 shown. At the top of the other end of the angle push plate 6, there is a long pin hole 6a with a clearance fit with the cylindrical pin body 7b, as Figure 6 shown. The slide plate 5 is composed of a left support leg 5a, a right support leg 5b and a cross beam 5c. The slide plate 5 is fixedly installed on the rotating plate 2 through the left support leg 5a and the right support leg 5b. On the cross beam 5c, there is a square straight slide groove 5c1 that cooperates with the square head 7a. The drive mechanism drives the movable pin 7 to slide along the slide groove 5c1, thereby driving the angle push plate 6 and the rotating plate 2 to rotate.
[0042] The drive mechanism includes an angle adjustment bolt 4, a slide plate 5 and a movable pin 7, as Figure 5 shown. The angle adjustment bolt 4 is composed of a smooth rod portion 4a, a screw portion 4b and a cylindrical head 4c. On the left support leg 5a and the right support leg 5b, there are respectively a round hole Ⅰ 5a1 and a round hole Ⅱ 5b1. The smooth rod portion 4a and the cylindrical head 4c are respectively rotatably installed in the round hole Ⅰ 5a1 and the round hole Ⅱ 5b1. On the side surface of the square head 7a, there is a threaded hole 7a1 that cooperates with the screw portion 4b.
[0043] The end of the smooth rod portion 4a is fixedly connected with a knob 3.
[0044] Outside the round hole Ⅱ 5b1, a cover plate 8 for blocking the cylindrical head 4c is fixedly arranged. Embodiment
[0045] The angle adjustment mechanism includes a backing plate 1, a rotating plate 2, a knob 3, an angle adjustment bolt 4, a slide plate 5, an angle push plate 6, a movable pin 7, a cover plate 8, a pressing plate 9, a manual shaft clamp 10, a cam follower 11.
[0046] The rotating plate 2 is installed on the backing plate 1 through the pressing plate 9 and the manual shaft clamp 10. At the same time, when the manual shaft clamp 10 is loosened or tightened, the rotating plate 2 and the backing plate 1 are in a state where relative displacement can occur or relative displacement cannot occur;
[0047] The knob 3 is installed on the angle adjustment bolt 4;
[0048] The angle adjustment bolt 4 is clamped in the sliding groove of the slide plate 5 and is blocked by the cover plate 8 at the same time.
[0049] The slide plate 5 is installed on the backing plate 1;
[0050] The angle push plate 6 is installed on the rotating plate 2, and there are corresponding grooves on the rotating plate 2 to limit the angle push plate 6;
[0051] The threaded part of the movable pin 7 is connected to the angle adjustment bolt 4, and the cylindrical part at the end is stuck in the long slot of the angle push plate 6;
[0052] The cover plate 8 is installed on the slide plate 5.
[0053] The manual shaft clamp 10 is installed on the backing plate 1.
[0054] The pressure plate 9 is clamped between the manual shaft clamp 10 and the rotating plate 2.
[0055] The cam follower 11 is installed on the rotating plate 2 and is limited in the arc-shaped groove of the backing plate 1 at the same time. It plays a guiding role during the rotation process. There are four such places, distributed at the four corners of the entire backing plate.
[0056] The rotating plate 2 and the backing plate 1 can respectively remain fixed without relative displacement or have relative displacement when the manual shaft clamp 10 is tightened or relaxed.
[0057] The movable pin 7 is installed on the angle adjustment bolt 4. By rotating the knob 3, the movable pin 7 can reciprocate in the slide groove.
[0058] The cam follower 10 is installed on the rotating plate 2 and is limited in the arc-shaped groove of the backing plate 1 at the same time. It plays a guiding role during the rotation process. There are four such places, distributed at the four corners of the entire backing plate.
[0059] The cylindrical part at the end of the movable pin 7 is stuck in the long slot of the angle push plate 6. The angle push plate 6 is installed on the rotating plate 2, and there are corresponding grooves on the rotating plate 2 to limit the angle push plate 6. During the reciprocating movement of the movable pin 7, the rotating plate 2 is driven to rotate at an angle under the limiting action of the cam follower 11.
[0060] Manually place the workpiece product on the rotating plate for fixation. During the manual calibration process, if it is found that the workpiece has an angular deviation, manually unlock the manual shaft clamp to make the rotating plate and the backing plate in a relaxed state where relative movement can occur. By turning the knob, the movable pin can move back and forth in the slide plate. The movable pin and the angle push plate are connected through the cylindrical part at the front end of the movable pin. During the forward and backward movement of the movable pin, the angle push plate will be driven to change in the angular direction. The angle push plate and the rotating plate are fastened by screws and limiting slots. During the rotation of the angle push plate, the rotating plate will be driven to rotate, thereby realizing the angle adjustment of the workpiece. After the adjustment is in place, lock the manual shaft clamp to fix the rotating plate.
[0061] Working principle of the angle adjustment mechanism: Manually place the workpiece product on the rotating plate 2 for fixation. During the manual calibration process, if it is found that the workpiece has an angular deviation, manually unlock the manual shaft clamp 10 to make the rotating plate 2 and the backing plate 1 in a relaxed state where relative movement can occur. By turning the knob 3, the movable pin 7 moves back and forth in the slide plate 5. The movable pin 7 is connected to the angle push plate 6 through the cylindrical part at the front end of the movable pin 7. During the back-and-forth movement of the movable pin 7, it will drive the angle push plate 6 to achieve a change in the angular direction. The angle push plate 6 is fastened to the rotating plate 2 through screws and the limiting groove. In addition, the cam follower 11 is installed on the rotating plate 2 and is simultaneously limited in the arc-shaped groove of the backing plate 1. The rotating plate 2 rotates at an angle under the drive of the angle push plate 6 and the limiting action of the cam follower 11.
Claims
1. An angle adjustment mechanism, characterized in that: The invention comprises a backing plate (1) and a rotating plate (2), wherein the rotating plate (2) is rotatably mounted on the backing plate (1), and a loosening and clamping device, a rotation guiding device and a rotation adjusting device are arranged between the backing plate (1) and the rotating plate (2). The loosening and clamping device loosens or clamps the rotating plate (2) on the backing plate (1), the rotation guiding device is used to guide the rotation of the rotating plate (2) relative to the backing plate (1), and the rotation adjusting device is used to adjust the rotation angle of the rotating plate (2) relative to the backing plate (1). A workpiece to be processed is fixedly placed on the rotating plate (2).
2. An angle adjustment mechanism according to claim 1, characterized in that: The loosening and clamping device comprises a manual shaft clamp (10), the lower threaded portion of the manual shaft clamp (10) passing through an arc-shaped long hole (2a) provided on the rotating plate (2) and then fixedly connected to the backing plate (1).
3. An angle adjustment mechanism according to claim 2, characterized in that: The center of the arc-shaped long hole (2a) is concentric with the rotation center of the rotating plate (2).
4. The angle adjustment mechanism according to claim 2, characterized in that: A pressing plate (9) is provided between the upper portion of the rotating plate (2) and the manual shaft clamp (10).
5. The angle adjustment mechanism according to claim 1, characterized in that: The rotation guide device comprises a cam follower (11), wherein an arcuate groove (1a) is provided at each of the four corners of the backing plate (1), one end of the cam follower (11) is installed in the arcuate groove (1a) with a clearance fit, and the other end of the cam follower (11) is fixedly connected to the rotating plate (2).
6. An angle adjustment mechanism according to claim 5, characterized in that: The center of the arc-shaped groove (1a) is concentric with the rotation center of the rotating plate (2).
7. The angle adjustment mechanism according to claim 1, characterized in that: The rotation adjustment device comprises a slide plate (5), an angle push plate (6), a movable pin (7) and a driving mechanism. One end of the angle push plate (6) is fixedly connected to the end of the rotating plate (2). The movable pin (7) consists of a square head (7a) and a cylindrical pin body (7b). A long pin hole (6a) that is clearance-matched with the cylindrical pin body (7b) is provided at the top of the other end of the angle push plate (6). The slide plate (5) consists of a left support leg (5a), a right support leg (5b) and a crossbeam (5c). The slide plate (5) is fixedly mounted on the rotating plate (2) via the left support leg (5a) and the right support leg (5b). A square straight slide groove (5c1) that is matched with the square head (7a) is provided on the crossbeam (5c). The driving mechanism drives the movable pin (7) to slide along the slide groove (5c1), thereby driving the angle push plate (6) and the rotating plate (2) to rotate.
8. An angle adjustment mechanism according to claim 7, characterized in that: The driving mechanism comprises an angle adjustment bolt (4), a slide plate (5) and a movable pin (7); the angle adjustment bolt (4) comprises a smooth rod portion (4a), a screw rod portion (4b) and a cylindrical head portion (4c); a circular hole I (5a1) and a circular hole II (5b1) are respectively arranged on the left support leg (5a) and the right support leg (5b); the smooth rod portion (4a) and the cylindrical head portion (4c) are respectively rotatably mounted in the circular hole I (5a1) and the circular hole II (5b1); and a threaded hole (7a1) matching with the screw rod portion (4b) is arranged on the side surface of the square head portion (7a).
9. The angle adjustment mechanism according to claim 8, characterized in that: The end of the smooth rod portion (4a) is fixedly connected to a knob (3).
10. The angle adjustment mechanism according to claim 8, characterized in that: A cover plate (8) for sealing the cylindrical head (4c) is fixedly arranged outside the circular hole II (5b1).