Film coating chamber baffle bottom plate structure

Abstract

The utility model discloses a film coating chamber baffle plate structure which comprises a cavity, a bottom plate is arranged at the bottom of the cavity, baffles are arranged on the two sides of the cavity, the bottom plate is located between the baffles, and iron gauze is arranged on the bottom plate and the baffles, and by the adoption of the film coating chamber baffle plate structure, the surface adhesive force of the baffle plate is improved, and poor slag falling is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of sputtering coating, and specifically, the utility model relates to a structure of a baffle plate at the bottom of a coating chamber. Background Art

[0002] At present, the application of coated products in the high-end door and window system market is becoming more and more extensive, and the product quality requirements are also increasing. In production, during the continuous production of the coating process, slag dropping is an inevitable production defect in the coating process. When multiple cathode targets are continuously used, the target materials that are not sputtered onto the product will generate slag dropping. The slag dropping will be sputtered and deposited on the baffle plate at the bottom. It is very easy for the slag dropping to accumulate on the surface of the baffle plate. Currently, the baffle plate at the bottom used is a flat and smooth plate, and the adhesion to the slag dropping is poor. When the accumulated slag is too thick, it is easy to crack and generate slag dropping again, resulting in product defects.

[0003] The utility model patent with the publication number CN206244649U disclosed a device for preventing slag dropping in a compartment that can be quickly replaced on June 13, 2017. The baffle device includes a long strip-shaped baffle with a right-angled cross-section. The baffle includes a short horizontal side and a long vertical side. A number of rectangular windows are equally distributed on the vertical side. The number and spacing of the windows match the ventilation holes on the partition in the middle of the cavity compartment; a number of mounting holes are provided on the vertical side of the baffle, and the mounting holes are located at the intervals between adjacent two windows; the mounting position of the baffle is at the position of the partition between adjacent compartments. The vertical side of the baffle is fastened to the partition through the mounting holes, and the horizontal side is closely attached to the upper inner wall of the cavity. This baffle device cannot improve the adhesion of the surface of the baffle plate at the bottom to the slag dropping. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a structure of a baffle plate at the bottom of a coating chamber that can improve the adhesion of the surface of the baffle plate at the bottom and reduce the slag dropping defects in view of the deficiencies of the prior art.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] The structure of the baffle plate at the bottom of the coating chamber includes a cavity. A bottom plate is provided at the bottom of the cavity. Baffle plates are provided on both sides of the cavity. The bottom plate is located between the baffle plates. Wire meshes are provided on both the bottom plate and the baffle plates.

[0007] The wire meshes evenly cover the bottom plate and the baffle plates; grooves are evenly distributed on both the bottom plate and the baffle plates.

[0008] The cross-section of the groove is U-shaped or trapezoidal.

[0009] Bolts are provided on both the bottom plate and the baffle plates, and the bolts press the wire meshes.

[0010] Both ends of the bottom of the bottom plate are provided with supports, and a pressing block is provided on the baffle plate.

[0011] The baffle plate is of an L-shaped structure, the bottom plate is of a planar structure, and the bottom plate and the baffle plate are arranged in sequence along the cavity.

[0012] An opening is provided on the bottom plate, and the bottom of the baffle plate is higher than the bottom plate.

[0013] The technical effect of the present utility model is as follows: By adopting the baffle bottom plate structure of the coating chamber of the present utility model, a wire mesh is added to the baffle bottom plate member, and grooves are also provided on the plate member, so that the sputtered substances in the cavity are deposited, increasing the adhesion of the plate member to the slag falling, avoiding the cracking caused by too thick accumulated slag and generating slag falling again, reducing the generation of slag falling defects, ensuring the product quality, prolonging the cleaning cycle of the coating chamber, and ensuring the continuous production of coating; it also has the advantages of simple structure and low use cost. Description of the Drawings

[0014] This specification includes the following drawings, and the shown contents are respectively:

[0015] Figure 1 is a side view of the baffle bottom plate structure of the coating chamber of the present utility model;

[0016] Figure 2 is a top view of the baffle bottom plate structure of the coating chamber of the present utility model;

[0017] Figure 3 is a cross-sectional view of the bottom plate of the present utility model.

[0018] The marks in the figure are: 1, cavity; 2, bottom plate; 3, baffle plate; 4, wire mesh; 5, groove; 6, bolt; 7, pressing block; 8, opening; 9, support; 10, connecting rod. Detailed Embodiments

[0019] The following is a further detailed description of the specific embodiments of the present utility model by referring to the drawings and describing the embodiments, aiming to help those skilled in the art have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention, and contribute to its implementation.

[0020] Such as Figures 1 to 3As shown in the figure, the structure of the baffle bottom plate of the coating chamber includes a cavity 1, a bottom plate 2 is provided at the bottom of the cavity 1, baffle plates 3 are provided on both sides of the cavity 1, the bottom plate 2 is located between the baffle plates 3, and wire meshes 4 are provided on both the bottom plate 2 and the baffle plates 3. The baffle plates 3 and the bottom plate 2 wrap the stainless steel wire mesh 4, increasing the slag adhesion area on the surface of the plate parts. Threaded holes are drilled at equal distances on the surface of the plate parts, and the wire mesh 4 is fixed with bolts 6 to prevent the slag from cracking due to excessive accumulation and causing slag to fall off, reducing the scrapping of products caused by slag falling off, reducing the slag falling area of the cavity 1, making it more difficult for the cavity 1 and the products to be scratched, improving the quality of the coated glass products, increasing customer satisfaction, and extending the normal production cycle of coating. The cost of setting the wire mesh 4 is low, and the plate parts can be completely covered.

[0021] As Figure 1 and Figure 2 shown in the figure, the wire mesh 4 evenly covers the bottom plate 2 and the baffle plates 3; grooves 5 are evenly distributed on the bottom plate 2 and the baffle plates 3. The setting of the grooves 5 improves the adhesion to the slag. When the slag falls into the grooves 5, the sputtered slag can be stored, greatly reducing the height of its re-sputtering, and it will be difficult for the slag to sputter to other positions again. The grooves 5 are strip-shaped, and the grooves 5 penetrate from one end of the baffle plate 3 or the bottom plate 2 to the other end. This design can reduce the processing difficulty and cost, and the slag is easy to break away from the plate parts during slag cleaning, facilitating the subsequent maintenance and upkeep of the baffle bottom plate.

[0022] As Figure 3 shown in the figure, the cross-section of the groove 5 is U-shaped or trapezoidal. Designing the groove 5 as trapezoidal or U-shaped expands its accommodation space, which is beneficial to accommodating more slag and extending the cleaning cycle.

[0023] As Figure 1 shown in the figure, bolts 6 are provided on both the bottom plate 2 and the baffle plates 3, and the bolts 6 press the wire mesh 4. The detachable replacement of the wire mesh 4 is realized by using the bolts 6.

[0024] As Figure 1 and Figure 3 shown in the figure, supports 9 are provided at both ends of the bottom of the bottom plate 2, and pressing blocks 7 are provided on the baffle plates 3. The supports 9 facilitate the installation of the bottom plate 2 to be horizontal. A connecting rod 10 is provided between the cavity 1 and the baffle plates 3 for fixing the baffle plates 3 and maintaining their accurate positions. The pressing blocks 7 are connected to the baffle plates 3 by bolts 6 or magnetically fixed. Using the pressing blocks 7 can further press the wire mesh 4 tightly against the baffle plates 3, preventing the edges or joints of the wire mesh 4 from warping, enabling the wire mesh 4 to be used reliably, and at the same time avoiding the wire of the wire mesh 4 from coming out during the installation of the plate parts provided with the wire mesh 4 in the cavity 1 and causing scratches on the film surface.

[0025] As Figure 1 shown in the figure, the baffle plate 3 is of an L-shaped structure, the bottom plate 2 is of a planar structure, and the bottom plate 2 and the baffle plates 3 are arranged in sequence along the cavity 1. Both the bottom plate 2 and the baffle plates 3 can be spliced and installed, so as to adapt to the installation of cavities 1 of different lengths.

[0026] As Figure 2 shown, an opening 8 is provided on the bottom plate 2, and the bottom of the baffle 3 is higher than the bottom plate 2. The area between the baffle 3 and the bottom plate 2 is the moving area of the product, and the area between the bottom plate 2 and the baffle 3 is the magnetron sputtering area. A conveying wheel is provided below the bottom plate 2. The openings 8 are arranged at equal intervals and are used for the upper end of the conveying wheel to pass through, so that the product can run normally following the conveying wheel to complete the coating operation.

[0027] For the structure of the baffle bottom plate of this coating chamber, a wire mesh 4 is added to the baffle bottom plate member, and a groove 5 is also provided on the plate member, so that the sputtered substances in the cavity 1 are deposited, increasing the adhesion of the plate member to the falling slag, avoiding the re-generation of falling slag caused by too thick accumulated slag and cracking, reducing the generation of falling slag defects, ensuring the product quality, extending the cleaning cycle of the coating cavity 1, and ensuring the continuous production of coating; it also has the advantages of simple structure and low use cost. Through test comparison experiments, compared with the coating chamber using the traditional baffle bottom plate structure, the scrap rate of falling slag decreases by more than 15% on average per month, reducing the scrap of about 5000 ㎡ of coated glass, reducing the production loss cost. At the same time, the cleaning cycle is extended to more than 30 days, and the shutdown frequency is reduced.

[0028] The above has made an exemplary description of the present invention in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above methods. As long as various non-substantive improvements are made by adopting the method concept and technical solution of the present invention; or without improvement, the above concept and technical solution of the present invention are directly applied to other occasions, they are all within the protection scope of the present invention.

Claims

1. A coating chamber baffle plate structure, characterized in that: The invention comprises a cavity (1), wherein a bottom plate (2) is provided at the bottom of the cavity (1), baffles (3) are provided on both sides of the cavity (1), the bottom plate (2) is located between the baffles (3), and wire meshes (4) are provided on the bottom plate (2) and the baffles (3); the wire meshes (4) are evenly covered on the bottom plate (2) and the baffles (3); grooves (5) are evenly distributed on the bottom plate (2) and the baffles (3); and the cross section of the grooves (5) is U-shaped or trapezoidal.

2. The coating chamber baffle plate structure according to claim 1, characterized in that: Bolts (6) are provided on the bottom plate (2) and the baffle plate (3), and the bolts (6) press the wire mesh (4).

3. The coating chamber baffle plate structure according to claim 2, characterized in that: Supports (9) are provided at both ends of the bottom of the base plate (2), and a pressing block (7) is provided on the baffle plate (3).

4. The coating chamber baffle plate structure according to claim 3, characterized in that: The baffle plate (3) is an L-shaped structure, the bottom plate (2) is a planar structure, and the bottom plate (2) and the baffle plate (3) are arranged in sequence along the cavity (1).

5. The coating chamber baffle structure according to claim 4, characterized in that: The bottom plate (2) is provided with an opening (8), and the bottom of the baffle (3) is higher than the bottom plate (2).

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