Gas distribution structure and PECVD (plasma enhanced chemical vapor deposition) equipment

Abstract

The utility model relates to the technical field of battery manufacturing, and discloses a gas distribution structure and PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. The gas distribution structure is suitable for being fixed on the side wall of a cavity of the PECVD equipment, and comprises a fixed frame, a gas distribution structure and a gas distribution structure, the plurality of spraying plates are correspondingly arranged on the plurality of inner wall surfaces, each spraying plate and the corresponding inner wall surface define an air inlet cavity and an air inlet communicated with the air inlet cavity, and each spraying plate is provided with a plurality of spraying holes communicated with the corresponding air inlet cavity. The gas distribution structure is fixed on the side wall of the cavity, the cavity cover does not need to be provided with the gas distribution structure, the weight of the cavity cover is reduced, the intricate structure of the cavity cover is greatly optimized, the gas distribution structure is formed by splicing the fixing frame and the spraying plates, machining is convenient, the material cost and the machining cost are reduced, and the manufacturing cost is reduced. The gas distribution structure is integrally installed in the cavity in a hoisting mode, assembly is simple, the gas distribution structure can be maintained only by opening the cavity cover during maintenance, maintenance is convenient, and the assembly and maintenance effect is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of battery manufacturing, in particular to a gas distribution structure and a PECVD device. Background Art

[0002] At present, as a major renewable energy source, photovoltaic power generation has developed rapidly in recent years. The PECVD (Plasma Enhanced Chemical Vapor Deposition) coating equipment is one of the important equipment for manufacturing solar cells. Due to its characteristics such as low temperature, high efficiency, and low cost, it has become one of the mainstream methods for coating photovoltaic solar cell wafers.

[0003] The PECVD coating equipment includes tube-type PECVD equipment and plate-type PECVD equipment. Compared with the tube-type PECVD equipment, the plate-type PECVD equipment has been widely used due to its good uniformity and high output.

[0004] The main structure of the plate-type PECVD coating equipment includes a cavity, a vacuum system, a transmission device, a water and special gas path system, an electric control system, etc. In traditional production lines, due to the low degree of automation and high dependence on the proficiency of operators, highly automated equipment control can not only reduce labor costs but also greatly improve production efficiency. However, the uniform distribution of special gases in the process chamber is also particularly crucial during production.

[0005] The existing special gas distribution device of the plate-type PECVD coating equipment is mainly designed on the chamber cover. Although the special gas distribution device can realize the gas distribution and use of special gases, the assembly of the special gas distribution device on the chamber cover increases the weight of the chamber cover, requires a large driving force when opening the chamber cover, and leads to a complex layout of the chamber cover and an increase in cost. Summary of the Utility Model

[0006] In view of this, the utility model provides a gas distribution structure and a PECVD device to solve the problems of heavy chamber weight and complex chamber cover layout caused by the assembly of the special gas distribution device on the chamber cover.

[0007] In a first aspect, the utility model provides a gas distribution structure, which is suitable for being fixed on the side wall of the cavity of a PECVD device. The gas distribution structure includes: a fixing frame having a plurality of inner wall surfaces; a plurality of spray plates correspondingly arranged on the plurality of inner wall surfaces. Each spray plate and the corresponding inner wall surface enclose an intake cavity and an intake port communicating with the intake cavity. The spray plate has a plurality of spray holes communicating with the corresponding intake cavity.

[0008] Beneficial effects: The gas distribution structure is fixed on the side wall of the cavity. At this time, there is no need to set the gas distribution structure on the cavity cover, which reduces the weight of the cavity cover, greatly optimizes the intricate structure of the cavity cover, and the gas distribution structure is assembled by a fixing frame and several spray plates, which is convenient for processing, reduces material costs and processing costs. After the gas distribution structure is assembled integrally, it is hoisted and installed inside the cavity as a whole. The assembly is simple. During maintenance, only the cavity cover needs to be opened to maintain the gas distribution structure, which is convenient for maintenance and greatly improves the assembly and maintenance effect. The gas enters the intake cavity through the intake port, and a certain pressure is formed in the intake cavity, and then it is evenly distributed through the spray holes, so that the gas achieves a uniform spray and gas distribution effect in the cavity. By distributing the gas around the cavity, the uneven gas distribution caused by arranging the gas distribution device on the cavity cover can be improved, and the film thickness uniformity of the battery cells can be improved.

[0009] In an alternative embodiment, each inner wall surface has a first recessed groove recessed inward, and the spray plate has a second recessed groove recessed inward. The first recessed groove and the corresponding second recessed groove enclose the intake cavity.

[0010] Beneficial effects: Recessed grooves are provided on both the fixing frame and the spray plate, making the overall weight of the gas distribution structure lighter and facilitating assembly. Moreover, the intake cavity is formed by the first recessed groove and the corresponding second recessed groove, and the volume of the intake cavity is larger, so that a greater pressure is formed in the intake cavity and the spraying is more uniform.

[0011] In an alternative embodiment, a receiving groove for receiving the spray plate is provided on each inner wall surface, and a first recessed groove is provided on the bottom of the receiving groove. The spray plate is located in the corresponding receiving groove, and the thickness of the spray plate is less than or equal to the depth of the receiving groove.

[0012] Beneficial effects: The thickness of the spray plate is less than or equal to the depth of the receiving groove, so that the spraying surface of the spray plate does not protrude from the corresponding inner wall surface, making the inside of the gas distribution structure cleaner and more beautiful.

[0013] In an alternative embodiment, the receiving groove has a side opening, and the intake port is located at the side opening.

[0014] Beneficial effects: The setting of the side opening facilitates the assembly of the spray plate on the fixing frame on the one hand, and also facilitates the setting of the intake port on the other hand.

[0015] In an alternative embodiment, the side opening is formed on the top surface of the fixing frame.

[0016] Beneficial effects: The intake port is located on the top surface of the fixing frame, which is convenient for connecting with the intake channel and also makes the layout of the intake port and the intake channel more reasonable and flexible.

[0017] In an alternative embodiment, a first notch is formed on the inner wall surface and communicates with the top surface of the first recessed groove and the fixed frame, and a second notch is formed on the spray plate and communicates with the top surface of the second recessed groove and the spray plate. The first notch and the corresponding second notch enclose an air inlet.

[0018] Advantageous effects: The air inlet is formed by enclosing the first notch and the second notch, which is convenient for processing and manufacturing.

[0019] In an alternative embodiment, the fixed frame includes four fixing plates, and the four fixing plates are sequentially fixed to enclose a rectangle, and at least one spray plate is fixed on each fixing plate.

[0020] Advantageous effects: The fixed frame is a rectangular frame, which has a simple structure, low cost, and is also convenient for assembly.

[0021] In an alternative embodiment, two adjacent fixing plates are detachably connected.

[0022] Advantageous effects: The assembly is simple and the assembly efficiency is improved.

[0023] In an alternative embodiment, the spray holes include a straight hole section, a first flared hole section, and a second flared hole section, and the first flared hole section and the second flared hole section are respectively arranged at both ends of the straight hole section.

[0024] Advantageous effects: The gas in the air inlet cavity is ejected through the first flared hole section, the straight hole section, and the second flared hole section in sequence. When the gas passes through the straight hole section with a smaller aperture, the flow rate increases, which is more convenient for the gas to be ejected.

[0025] In a second aspect, the present invention further provides a PECVD device, including: a cavity; a cavity cover that is disposed at the top opening of the cavity in an openable and closable manner; and the above gas distribution structure that is disposed on the side wall of the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 It is an exploded view of a gas distribution structure according to an embodiment of the present invention;

[0028] Figure 2 is Figure 1 a three-dimensional view of the gas distribution structure shown;

[0029] Figure 3 is Figure 1Stereogram of the rear fixing plate of the gas distribution structure shown;

[0030] Figure 4 For Figure 1 Stereogram of the first spray plate of the rear fixing plate shown;

[0031] Figure 5 For Figure 1 Top view of the gas distribution structure shown installed in the cavity;

[0032] Figure 6 For Figure 5 A - A sectional view of the gas distribution structure shown installed in the cavity;

[0033] Figure 7 For Figure 6 Partial enlarged schematic diagram of B in

[0034] Explanation of reference numerals in the drawings:

[0035] 1. Fixed frame; 101. First recess; 102. Accommodating groove; 103. First notch; 104. Right fixing plate; 105. Front fixing plate; 1051. Inlet; 106. Left fixing plate; 107. Rear fixing plate; 1071. Outlet;

[0036] 2. Spray plate; 201. Second recess; 202. Spray hole; 203. Second notch; 204. First spray plate; 205. Second spray plate; 206. Third spray plate; 207. Fourth spray plate; 208. Fifth spray plate; 209. Sixth spray plate; 210. Seventh spray plate; 211. Eighth spray plate;

[0037] 301. Intake cavity; 303. Intake port;

[0038] 4. Cavity. Detailed implementation manners

[0039] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present utility model.

[0040] Next, in combination with Figures 1 to 7 , the embodiments of the present utility model will be described.

[0041] According to an embodiment of the present invention, on the one hand, a gas distribution structure is provided, which is adapted to be fixed on the side wall of the cavity 4 of the PECVD device. The gas distribution structure includes: a fixing frame 1 and a plurality of spray plates 2. The fixing frame 1 has a plurality of inner wall surfaces; the plurality of spray plates 2 are correspondingly arranged on the plurality of inner wall surfaces. Each spray plate 2 and the corresponding inner wall surface enclose an air inlet cavity 301 and an air inlet 303 communicating with the air inlet cavity 301. The spray plate 2 has a plurality of spray holes 202 communicating with the corresponding air inlet cavity 301.

[0042] Applying the gas distribution structure of this embodiment, the gas distribution structure is fixed on the side wall of the cavity 4. At this time, there is no need to set a gas distribution structure on the cavity cover, which reduces the weight of the cavity cover, greatly optimizes the intricate structure of the cavity cover, and the gas distribution structure is assembled by the fixing frame 1 and a plurality of spray plates 2, which is convenient for processing, reduces material costs and processing costs. After the gas distribution structure is assembled integrally, it is hoisted and installed inside the cavity 4 as a whole. The assembly is simple. During maintenance, only the cavity cover needs to be opened to maintain the gas distribution structure, which is convenient for maintenance and greatly improves the assembly and maintenance effect. Gas enters the air inlet cavity 301 through the air inlet 303. A certain pressure is formed in the air inlet cavity 301, and then it is evenly distributed through the spray holes 202, so that the gas achieves an even spray and gas distribution effect in the cavity 4. By distributing gas around the cavity 4, the uneven gas distribution caused by arranging gas distribution devices on the cavity cover can be improved, and the film thickness uniformity of the battery cells can be improved.

[0043] In one embodiment, each inner wall surface has a first recessed groove 101 recessed inward, and the spray plate 2 has a second recessed groove 201 recessed inward. The first recessed groove 101 and the corresponding second recessed groove 201 enclose the air inlet cavity 301. By opening recessed grooves on both the fixing frame 1 and the spray plate 2, the overall weight of the gas distribution structure is lighter, which is convenient for assembly. Moreover, the air inlet cavity 301 is formed by the first recessed groove 101 and the corresponding second recessed groove 201, and the volume of the air inlet cavity 301 is larger, so that a greater pressure is formed in the air inlet cavity 301 and the spray is more uniform.

[0044] It can be understood that in another embodiment, only the recessed groove is provided on the fixing frame 1, and the air inlet cavity 301 can be enclosed by the spray plate 2 blocking the opening of the recessed groove, or only the recessed groove is provided on the spray plate 2, and the air inlet cavity 301 can be enclosed by the fixing frame 1 blocking the opening of the recessed groove.

[0045] In one embodiment, each inner wall surface is provided with a receiving groove 102 for receiving the spray plate 2. The bottom of the receiving groove 102 has the first recessed groove 101. The spray plate 2 is located in the corresponding receiving groove 102, and the thickness of the spray plate 2 is less than or equal to the depth of the receiving groove 102, so that the spray surface of the spray plate 2 does not protrude from the corresponding inner wall surface, making the interior of the gas distribution structure cleaner and more beautiful.

[0046] Preferably, the thickness of the spray plate 2 is equal to the depth of the receiving groove 102, so that the spray surface is coplanar with the corresponding inner wall surface.

[0047] In one embodiment, the receiving groove 102 has a side opening, and the air inlet 303 is located at the side opening. The setting of the side opening facilitates the assembly of the spray plate 2 on the fixed frame 1 on the one hand, and also facilitates the setting of the air inlet 303 on the other hand.

[0048] Furthermore, the side opening is formed on the top surface of the fixed frame 1. At this time, an air inlet passage can be provided on the cavity cover, or an air inlet passage can be provided on the side wall of the cavity 4. The air inlet 303 is located on the top surface of the fixed frame 1, which facilitates connection with the air inlet passage and makes the layout of the air inlet 303 and the air inlet passage more reasonable and flexible.

[0049] In one embodiment, a first notch 103 communicating the first recess 101 and the top surface of the fixed frame 1 is formed on the inner wall surface, and a second notch 203 communicating the second recess 201 and the top surface of the spray plate 2 is formed on the spray plate 2. The first notch 103 and the corresponding second notch 203 enclose the air inlet 303. The air inlet 303 is enclosed by the first notch 103 and the second notch 203, which is convenient for processing and manufacturing.

[0050] It can be understood that in another embodiment, only a recess is provided on the fixed frame 1, and the air inlet 303 is provided on the fixed frame 1, or only a recess is provided on the spray plate 2, and the air inlet 303 is provided on the spray plate 2.

[0051] In one embodiment, the fixed frame 1 includes four fixing plates, and the four fixing plates are sequentially fixed to enclose a rectangle, and at least one spray plate 2 is fixed on each fixing plate. The fixed frame 1 is a rectangular frame, which has a simple structure, low cost and is also convenient for assembly.

[0052] Specifically, the four fixing plates are a left fixing plate 106, a front fixing plate 105, a right fixing plate 104 and a rear fixing plate 107 respectively. An inlet 1051 located below the first recess 101 is provided on the front fixing plate 105, and an outlet 1071 located below the first recess 101 is provided on the rear fixing plate 107. The inlet 1051 and the outlet 1071 can be used for a carrier plate carrying a substrate to enter and exit. The carrier plate enters the cavity 4 through the inlet 1051, and carbon plasma is formed in the cavity 4. Carbon in the carbon plasma is continuously deposited on the substrate in the cavity 4 and gradually accumulates and hardens, thereby forming a diamond film or sheet; after the diamond film or sheet forms a preset thickness, the carrier plate flows out through the outlet 1071.

[0053] Further, the front fixing plate 105 and the rear fixing plate 107 are respectively arranged between the left fixing plate 106 and the right fixing plate 104. It can be understood that in another embodiment, the left fixing plate 106 and the right fixing plate 104 are respectively arranged between the front fixing plate 105 and the rear fixing plate 107.

[0054] Specifically, two spray plates 2 are fixed on each fixing plate. The spray plates 2 on the four fixing plates are successively the first spray plate 204, the second spray plate 205, the third spray plate 206, the fourth spray plate 207, the fifth spray plate 208, the sixth spray plate 209, the seventh spray plate 210, and the eighth spray plate 211. The first spray plate 204 and the second spray plate 205 are fixed on the left fixing plate 106, the third spray plate 206 and the fourth spray plate 207 are fixed on the front fixing plate 105, the fifth spray plate 208 and the sixth spray plate 209 are fixed on the right fixing plate 104, and the seventh spray plate 210 and the eighth spray plate 211 are fixed on the rear fixing plate 107. Then, the right fixing plate 104, the front fixing plate 105, the left fixing plate 106, and the rear fixing plate 107 on which the spray plates 2 have been installed are sequentially installed by screws to form a gas distribution structure. At this time, the number of air inlets 303 of the gas distribution structure is eight and are respectively the first air inlet, the second air inlet, the third air inlet, the fourth air inlet, the fifth air inlet, the sixth air inlet, the seventh air inlet, and the eighth air inlet.

[0055] It can be understood that the shape of the fixing frame 1 can also be a polygon.

[0056] In one embodiment, two adjacent fixing plates are detachably connected, which is simple to assemble and improves the assembly efficiency.

[0057] Further, two adjacent fixing plates are connected by fasteners such as screws. Specifically, both ends of the left fixing plate 106 and the right fixing plate 104 have through holes for the fasteners to pass through, and the front fixing plate 105 and the rear fixing plate 107 are provided with connection holes connected to the fasteners. The fasteners pass through the through holes and are connected to the connection holes.

[0058] In one embodiment, the spray holes 202 include a straight hole section, a first trumpet hole section, and a second trumpet hole section. The first trumpet hole section and the second trumpet hole section are respectively arranged at both ends of the straight hole section. The gas in the air inlet cavity 301 is successively ejected through the first trumpet hole section, the straight hole section, and the second trumpet hole section. When the gas passes through the straight hole section with a smaller aperture, the flow rate increases, which is more convenient for the gas to be ejected.

[0059] Further, the first horn hole section communicates with the intake cavity 301. The first horn hole section includes a first tapered section and a second tapered section with different tapers. The second tapered section is located between the first tapered section and the straight hole section. The taper of the first tapered section is smaller than that of the second tapered section. The second horn hole section includes a third tapered section, a straight section, and a fourth tapered section. The third tapered section is arranged between the straight section and the straight hole section. The straight section is arranged between the fourth tapered section and the third tapered section. The taper of the third tapered section is greater than or equal to that of the fourth tapered section. The aperture of the straight hole section is 0.8 mm, etc.

[0060] It can be understood that in another embodiment, the spray hole 202 is a straight hole, and the aperture of the straight hole is 0.8 mm, etc.

[0061] In one embodiment, the gas distribution structure distributes special gases. It can be understood that the gas distribution structure can also distribute other gases.

[0062] According to an embodiment of the present invention, on the other hand, a PECVD device is further provided, including: a cavity 4, a cavity cover, and the above-mentioned gas distribution structure. The cavity cover is disposed at the top opening of the cavity 4 in an openable and closable manner; the gas distribution structure is disposed on the side wall of the cavity 4.

[0063] In one embodiment, an intake channel is provided on the cavity cover. The gas distribution structure is integrally installed inside the cavity 4 and evenly distributed around the cavity 4. When the PECVD device is in a working state, the controller controls the special gas to enter the positions of the first intake port, the second intake port, the third intake port, the fourth intake port, the fifth intake port, the sixth intake port, the seventh intake port, and the eighth intake port respectively and evenly through the intake channel on the cavity cover. The special gas enters the position of the intake cavity 301 through the eight intake ports 303. The intake cavity 301 is equivalent to a gas storage tank. Spray holes 202 are regularly formed on each spray plate 2. The special gas forms a certain pressure in the intake cavity 301, and then the special gas is evenly distributed through the spray holes 202, so that the gas achieves an even spraying and distribution effect in the process cavity 4.

[0064] Further, a plurality of spray holes 202 on the spray plate 2 are arranged in a matrix, etc.

[0065] In the related art, the special gas distribution device is disposed on the cavity cover. Although the special gas distribution device can achieve the distribution and use of special gases, there are the following deficiencies at the same time;

[0066] 1. The special gas distribution device is assembled on the cavity cover, increasing the weight of the cavity cover, requiring a large driving force to open the cavity cover, and resulting in a complex layout of the cavity cover and an increase in cost.

[0067] 2. The outlet pressures of the proximal air holes and the distal air holes of the special gas distribution device installed on the cavity cover may be uneven, thus affecting the uniformity of the airflow field and the film thickness uniformity of the battery wafers.

[0068] 3. The special gas distribution device is processed as a whole board and integrally formed, which is difficult to process and costly.

[0069] 4. In the open cavity state, the special gas distribution device needs to be hoisted with the cavity cover in a vertical state, and the assembly difficulty, maintenance difficulty are large and the cycle is long.

[0070] In this embodiment, the gas distribution structure is installed inside the cavity 4, which greatly optimizes the intricate structure of the cavity cover and improves the overall aesthetics of the equipment. The gas distribution structure distributes gas around the cavity 4, improving the uneven gas distribution caused by the gas distribution device arranged on the cavity cover used in current mainstream equipment, and improving the film thickness uniformity of the battery wafers. The gas distribution structure is assembled with split parts, which is convenient for processing and reduces material costs and processing costs. After the gas distribution structure is assembled integrally, it is hoisted and installed inside the cavity 4. The assembly is simple. During maintenance, only the cavity cover needs to be opened to maintain the gas distribution structure, which is convenient for maintenance and greatly improves the assembly and maintenance effect.

[0071] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A gas separation structure, characterized in that: Suitable for being fixed on the side wall of the chamber of the PECVD equipment, the gas distribution structure comprises: A fixed frame (1) having a plurality of inner wall surfaces; A plurality of spray plates (2) are correspondingly arranged on a plurality of the inner wall surfaces, each of the spray plates (2) and the corresponding inner wall surface enclose an air inlet cavity (301) and an air inlet port (303) connected to the air inlet cavity (301), and the spray plate (2) has a plurality of spray holes (202) connected to the corresponding air inlet cavity (301).

2. The gas distribution structure according to claim 1, characterized in that: Each of the inner wall surfaces has a first recessed groove (101) recessed inwardly, and the shower plate (2) has a second recessed groove (201) recessed inwardly, and the first recessed groove (101) and the corresponding second recessed groove (201) enclose the air inlet cavity (301).

3. The gas distribution structure according to claim 2, characterized in that: Each inner wall surface is provided with a receiving groove (102) for receiving the spray plate (2); the bottom of the receiving groove (102) is provided with the first recessed groove (101); the spray plate (2) is located in the corresponding receiving groove (102); and the thickness of the spray plate (2) is less than or equal to the depth of the receiving groove (102).

4. The gas distribution structure according to claim 3, characterized in that: The accommodating groove (102) has a side opening, and the air inlet (303) is located at the side opening.

5. The gas distribution structure according to claim 4, characterized in that: The side opening is formed on the top surface of the fixing frame (1).

6. The gas distribution structure according to any one of claims 2 to 5, characterized in that: A first notch (103) is provided on the inner wall surface and connects the first recessed groove (101) and the top surface of the fixed frame (1); a second notch (203) is provided on the spray plate (2) and connects the second recessed groove (201) and the top surface of the spray plate (2); the first notch (103) and the corresponding second notch (203) form the air inlet (303).

7. The gas distribution structure according to any one of claims 1 to 5, characterized in that: The fixing frame (1) comprises four fixing plates, which are fixed in sequence and form a rectangle, and at least one spray plate (2) is fixed on each of the fixing plates.

8. The gas distribution structure according to claim 7, characterized in that: Two adjacent fixing plates are detachably connected.

9. The gas distribution structure according to any one of claims 1 to 5, characterized in that: The spray hole (202) comprises a straight hole section, a first horn hole section and a second horn hole section, wherein the first horn hole section and the second horn hole section are respectively arranged at two ends of the straight hole section.

10. A PECVD device, characterized in that: include: Cavity (4); A cavity cover, which is openably and closably arranged at the top opening of the cavity (4); The gas distribution structure according to any one of claims 1 to 9 is arranged on the side wall of the cavity (4).

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