Quartz furnace door for diffusion of solar cell silicon wafer

Abstract

The utility model relates to the technical field of quartz furnace doors, and discloses a quartz furnace door for diffusion of a solar cell silicon wafer, which comprises a quartz furnace door body. The handle is arranged on the front of the quartz furnace door body; the radiator is arranged on the quartz furnace door body; the quartz furnace door body is clamped and installed on the quartz furnace, the inner wall of the sealing ring is in contact with the outer wall of the quartz furnace, and the sealing ring is located between the outer wall of the circular ring and the inner wall of the quartz furnace, so that the sealing effect of the quartz furnace door body is improved through double sealing; the arc-shaped ring drives the sealing ring to move into the circular ring, the spring drives the sealing ring to abut against the inner wall of the quartz furnace after the quartz furnace door body is closed, the first clamping groove and the second clamping groove facilitate disassembly and assembly of the sealing ring, replacement can be conducted only by pulling the sealing ring, and the purpose of convenient replacement is achieved. And the influence of the aging of the sealing rubber strip on the diffusion reaction of the quartz furnace is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz furnace doors, and particularly relates to a quartz furnace door for diffusing silicon wafers of solar cells. Background Technique

[0002] A furnace door for diffusing silicon wafers of solar cells with a publication number of CN217005354U includes a furnace door body. An observation window is opened on the furnace door body. A detachable liquid level assembly is connected to the furnace door body. The liquid level assembly corresponds to the position of the observation window and is used to convert the internal pressure of the diffusion furnace into liquid level information. A sealing assembly is also provided between the furnace door body and the liquid level assembly, and the sealing assembly is used to isolate the inside of the liquid level assembly from the inside of the diffusion furnace. Compared with the prior art, the utility model is convenient to directly observe the internal pressure relief situation through the observation window and is convenient to grasp the air pressure change in the diffusion furnace in real time.

[0003] Through exploration and analysis, when the patent is actually used, there are the following disadvantages: when the quartz furnace door is in use, the sealing strip on it is difficult to replace. And the quartz furnace is often used for a long time. After being baked at high temperature for a long time, the sealing strip is prone to aging, and the aging of the sealing strip affects the sealing effect of the quartz furnace and the diffusion reaction of the quartz furnace.

[0004] In summary, the present application now proposes a quartz furnace door for diffusing silicon wafers of solar cells to solve the above-mentioned problems. Content of the Utility Model

[0005] (1) Technical Problems to be Solved

[0006] In view of the deficiencies of the prior art, the utility model provides a quartz furnace door for diffusing silicon wafers of solar cells.

[0007] (2) Technical Solutions

[0008] To achieve the above object, the utility model provides the following technical solutions: A quartz furnace door for diffusing silicon wafers of solar cells includes a quartz furnace door body; a handle provided on the front of the quartz furnace door body; a heat dissipation valve provided on the quartz furnace door body; and a sealing mechanism provided on the back of the quartz furnace door body. The sealing mechanism includes a circular ring, an arc-shaped ring, a first slot, a second slot and a sealing ring. The circular ring is fixedly connected to the back of the quartz furnace door body. The first slot is opened on the outer wall of the arc-shaped ring. The second slot is opened on the outer wall of the circular ring. The sealing ring is movably connected inside the first slot and the second slot.

[0009] Preferably, two through holes are opened on the circular ring, and the number of arc-shaped rings is two. The two arc-shaped rings are slidably connected inside the two through holes. By providing the through holes, space is provided for the movement of the arc-shaped rings.

[0010] Preferably, one end of a spring is fixedly connected to the inner wall of the arc-shaped ring, and the other end of the spring is fixedly connected to a connecting plate. By providing the spring, the arc-shaped ring can drive the sealing ring to abut against the inner wall of the quartz furnace, and when the quartz furnace door body is closed, the sealing ring is squeezed and retracted, which is convenient for closing.

[0011] Preferably, the connecting plate is arc-shaped and there are two of them. The two connecting plates are arranged opposite to each other, and a sealing ring is fixedly connected to the back surface of the quartz furnace door body.

[0012] Preferably, a fixing plate is fixedly connected to the back surface of the quartz furnace door body. One end of a movable rod is fixedly connected to the connecting plate, and the movable rod passes through the fixing plate and is movably connected to the fixing plate. By providing the fixing plate and the movable rod, the arc-shaped ring can move stably.

[0013] Preferably, a lead screw is threadedly connected to the quartz furnace door body. A conical block and a rotating block are respectively fixedly connected to both ends of the lead screw. By providing the conical block, the movable rod can be squeezed.

[0014] (III) Beneficial effects

[0015] Compared with the prior art, the present utility model provides a quartz furnace door for silicon wafer diffusion in a solar cell, which has the following beneficial effects:

[0016] 1. For the quartz furnace door for silicon wafer diffusion in a solar cell, by clamping and installing the quartz furnace door body on the quartz furnace, the inner wall of the sealing ring contacts the outer wall of the quartz furnace, and the sealing ring is located between the outer wall of the circular ring and the inner wall of the quartz furnace. The double sealing improves the sealing effect of the quartz furnace door body. When the quartz furnace door body is closed, when the sealing ring is squeezed against the inner wall of the quartz furnace, the arc-shaped ring drives the sealing ring to move inward into the circular ring. After the quartz furnace door body is closed, the spring drives the sealing ring to abut against the inner wall of the quartz furnace. The first clamping groove and the second clamping groove facilitate the disassembly and assembly of the sealing ring, and only by pulling the sealing ring can it be replaced, achieving the purpose of easy replacement, and effectively reducing the influence of the aging of the sealing rubber strip on the diffusion reaction of the quartz furnace.

[0017] 2. For the quartz furnace door for silicon wafer diffusion in a solar cell, after the quartz furnace door body is closed, by rotating the rotating block to drive the lead screw to rotate, the lead screw drives the conical block to squeeze the movable rod, and the movable rod drives the connecting plate to squeeze the spring, increasing the force of the spring on the arc-shaped ring, so that the sealing ring closely adheres to the inner wall of the quartz furnace, further improving the sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings are used to provide a further understanding of the present utility model and constitute a part of the specification. They are used together with the embodiments of the present utility model to explain the present utility model and do not constitute a limitation to the present utility model. In the drawings:

[0019] Figure 1Structural schematic diagram of the utility model

[0020] Figure 2 Structural schematic diagram of the sealing mechanism of the utility model

[0021] Figure 3 Structural schematic diagram of the circular ring and arc ring of the utility model

[0022] Figure 4 Enlarged view of A of the utility model

[0023] In the figure: 1. Quartz furnace door body; 2. Handle; 3. Heat dissipation valve; 4. Sealing ring; 5. Sealing mechanism; 51. Circular ring; 52. Through hole; 53. Arc ring; 54. First card slot; 55. Spring; 56. Connecting plate; 57. Second card slot; 58. Sealing ring; 6. Movable rod; 7. Fixed plate; 8. Tapered block; 9. Rotating block Specific implementation mode

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments

[0025] Embodiment 1

[0026] As Figures 1-4 shown, the present utility model provides a quartz furnace door for silicon wafer diffusion of solar cells, including a quartz furnace door body 1; a handle 2 arranged on the front of the quartz furnace door body 1; a heat dissipation valve 3 arranged on the quartz furnace door body 1; and a sealing mechanism 5 arranged on the back of the quartz furnace door body 1. The sealing mechanism 5 includes a circular ring 51, an arc ring 53, a first card slot 54, a second card slot 57 and a sealing ring 58. The circular ring 51 is fixedly connected to the back of the quartz furnace door body 1. The first card slot 54 is opened on the outer wall of the arc ring 53. The second card slot 57 is opened on the outer wall of the circular ring 51. The sealing ring 58 is movably connected inside the first card slot 54 and the second card slot 57. Two through holes 52 are opened on the circular ring 51, and the number of arc rings 53 is two. The two arc rings 53 are slidably connected inside the two through holes 52. By providing the through holes 52, space is provided for the movement of the arc ring 53. One end of a spring 55 is fixedly connected to the inner wall of the arc ring 53, and the other end of the spring 55 is fixedly connected to a connecting plate 56. By providing the spring 55, the arc ring 53 can drive the sealing ring 58 to abut against the inner wall of the quartz furnace, and when the quartz furnace door body 1 is closed, the sealing ring 58 is squeezed and retracted, which is convenient for closing. The shape of the connecting plate 56 is arc-shaped, and the number is two. The two connecting plates 56 are arranged opposite to each other. A sealing ring 4 is fixedly connected to the back of the quartz furnace door body 1

[0027] In this embodiment, the quartz furnace door body 1 is clamped and installed on the quartz furnace. The inner wall of the sealing ring 4 contacts the outer wall of the quartz furnace. The sealing ring 58 is located between the outer wall of the circular ring 51 and the inner wall of the quartz furnace. The double sealing improves the sealing effect of the quartz furnace door body 1. When the quartz furnace door body 1 is closed, when the sealing ring 58 is squeezed against the inner wall of the quartz furnace, the arc-shaped ring 53 drives the sealing ring 58 to move into the circular ring 51. After the quartz furnace door body 1 is closed, the spring 55 drives the sealing ring 58 to abut against the inner wall of the quartz furnace. The first slot 54 and the second slot 57 facilitate the disassembly and assembly of the sealing ring 58. The sealing ring 58 can be replaced simply by pressing it, achieving the purpose of easy replacement and effectively reducing the influence of the aging of the sealing rubber strip on the diffusion reaction of the quartz furnace.

[0028] Embodiment 2

[0029] As Figures 1-4 shown, on the basis of Embodiment 1, the present utility model provides a technical solution: Preferably, a fixing plate 7 is fixedly connected to the back surface of the quartz furnace door body 1. One end of a movable rod 6 is fixedly connected to the connecting plate 56. The movable rod 6 passes through the fixing plate 7 and is movably connected to the fixing plate 7. By providing the fixing plate 7 and the movable rod 6, the arc-shaped ring 53 can move stably. The quartz furnace door body 1 is threadedly connected to a lead screw. Conical blocks 8 and rotating blocks 9 are respectively fixedly connected to both ends of the lead screw. By providing the conical blocks 8, the movable rod 6 can be squeezed.

[0030] In this embodiment, after the quartz furnace door body 1 is closed, the rotating block 9 is rotated to drive the lead screw to rotate. The lead screw drives the conical block 8 to squeeze the movable rod 6. The movable rod 6 drives the connecting plate 56 to squeeze the spring 55, increasing the force of the spring 55 on the arc-shaped ring 53, so that the sealing ring 58 closely adheres to the inner wall of the quartz furnace, further improving the sealing effect.

[0031] Next, specifically describe the working principle of the quartz furnace door for diffusing solar cell silicon wafers.

[0032] As Figures 1-4As shown in the figure, during use, the quartz furnace door body 1 is clamped and installed on the quartz furnace. The inner wall of the sealing ring 4 contacts the outer wall of the quartz furnace, and the sealing ring 58 is located between the outer wall of the circular ring 51 and the inner wall of the quartz furnace. The double sealing improves the sealing effect of the quartz furnace door body 1. When the quartz furnace door body 1 is closed, when the sealing ring 58 is squeezed by the inner wall of the quartz furnace, the arc-shaped ring 53 drives the sealing ring 58 to move into the circular ring 51. After the quartz furnace door body 1 is closed, the spring 55 drives the sealing ring 58 to abut against the inner wall of the quartz furnace. The first slot 54 and the second slot 57 facilitate the disassembly and assembly of the sealing ring 58. Just pull the sealing ring 58 to replace it, achieving the purpose of easy replacement, effectively reducing the influence of the aging of the sealing rubber strip on the diffusion reaction of the quartz furnace; after closing the quartz furnace door body 1, rotate the rotating block 9 to drive the screw rod to rotate, and the screw rod drives the tapered block 8 to squeeze the movable rod 6. The movable rod 6 drives the connecting plate 56 to squeeze the spring 55, increasing the force of the spring 55 on the arc-shaped ring 53, making the sealing ring 58 closely adhere to the inner wall of the quartz furnace, further improving the sealing effect; the above is the working process of the entire device, and the content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

Claims

1. A quartz furnace door for diffusion of solar cell silicon wafers, comprising a quartz furnace door body (1); A handle (2) arranged on the front of the quartz furnace door body (1); A heat dissipation valve (3) arranged on the quartz furnace door body (1); and a sealing mechanism (5) arranged on the back side of the quartz furnace door body (1), characterized in that: The sealing mechanism (5) comprises a circular ring (51), an arcuate ring (53), a first clamping groove (54), a second clamping groove (57) and a sealing ring (58); the circular ring (51) is fixedly connected to the back side of the quartz furnace door body (1); the first clamping groove (54) is provided on the outer wall of the arcuate ring (53); the second clamping groove (57) is provided on the outer wall of the circular ring (51); and the sealing ring (58) is movably connected inside the first clamping groove (54) and the second clamping groove (57).

2. A quartz furnace door for solar cell silicon wafer diffusion according to claim 1, characterized in that: The circular ring (51) is provided with two through holes (52), and the number of the arc-shaped rings (53) is two, and the two arc-shaped rings (53) are slidably connected inside the two through holes (52).

3. A quartz furnace door for diffusion of solar cell silicon wafers according to claim 2, characterized in that: One end of a spring (55) is fixedly connected to the inner wall of the arc-shaped ring (53), and the other end of the spring (55) is fixedly connected to a connecting plate (56).

4. A quartz furnace door for diffusion of solar cell silicon wafers according to claim 3, characterized in that: The connecting plate (56) is arc-shaped and is two in number. The two connecting plates (56) are arranged opposite to each other. A sealing ring (4) is fixedly connected to the back of the quartz furnace door body (1).

5. A quartz furnace door for diffusion of solar cell silicon wafers according to claim 4, characterized in that: A fixed plate (7) is fixedly connected to the back of the quartz furnace door body (1), one end of a movable rod (6) is fixedly connected to the connecting plate (56), and the movable rod (6) passes through the fixed plate (7) and is movably connected to the fixed plate (7).

6. A quartz furnace door for solar cell silicon wafer diffusion according to claim 5, characterized in that: The quartz furnace door body (1) is threadedly connected to a screw rod, and two ends of the screw rod are respectively fixedly connected to a conical block (8) and a rotating block (9).

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