Cooling system capable of regulating and controlling boiling point of coolant and heating furnace

By using a vacuum device in the cooling system to reduce the pressure in the chamber and adjust the boiling point of the coolant, the problem of poor cooling effect of the existing cooling system is solved, and rapid and effective thermal energy absorption and cooling heat dissipation are achieved.

CN223050498UActive Publication Date: 2025-07-01TANGTECK EQUIP
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Patent Information

Application Number
CN202421920889.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-09
Publication Date
2025-07-01
Estimated Expiration
2034-08-09

AI Technical Summary

Technical Problem

The existing cooling systems cannot absorb high-temperature thermal energy quickly and effectively, resulting in limited cooling effects.

Method used

A cooling system with adjustable boiling point of coolant is designed. The vacuum device in the cavity is evacuated to reduce the pressure in the chamber, so as to reduce the boiling point of the working fluid, thereby accelerating boiling and vaporizing and absorbing a large amount of heat.

Benefits of technology

A rapid cooling and heat dissipation effect of the heat source device is achieved and optional cooling performance is provided by controlling the boiling point of the coolant.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a cooling system capable of regulating and controlling the boiling point of a coolant and a heating furnace. The cooling system capable of regulating and controlling the boiling point of the coolant comprises a cavity, a fluid injection system, a vacuum device, a control unit and a control valve, the cavity is provided with an inlet and an outlet, the fluid injection system can convey working fluid into the cavity of the cavity from the inlet, the vacuum device is connected to the outlet of the cavity, and when the vacuum device is started, the cavity can be vacuumized through the outlet, so that negative pressure is formed in the cavity, and the boiling point of the working fluid in the cavity can be lowered. The working fluid in the cavity generates phase change, and the working fluid is converted into a gaseous phase from a liquid phase, so that a large amount of heat can be absorbed, and the cooling and heat dissipation effects are provided. The vacuum device and the control valve are electrically connected to the control unit, and the control unit can be used for controlling the vacuum device and the control valve. Therefore, the boiling point of the working fluid can be controlled and adjusted, and the temperature can be changed and adjusted.
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Description

Technical Field

[0001] The utility model relates to a cooling system, especially a cooling system and a heating furnace which are used for cooling a heat source device, can quickly absorb heat energy and assist in heat dissipation, and have adjustable boiling points of coolants. Background Art

[0002] Generally, electronic devices or machinery will generate high temperatures during operation. Therefore, manufacturers usually install cooling systems to assist in heat dissipation. For example, heat pipes have been widely used for heat dissipation. Heat pipes can utilize the evaporation and condensation of internal coolant to achieve the effect of rapid temperature equalization. However, the existing cooling systems cannot quickly remove high temperatures, and their cooling effects are quite limited. Summary of the Utility Model

[0003] The technical problem to be solved by the utility model is to provide a cooling system and a heating furnace with adjustable boiling points of coolants in view of the deficiencies of the prior art, which can provide optional cooling and heat dissipation effects.

[0004] To solve the above technical problems, the utility model provides a cooling system with adjustable boiling points of coolants, including: a cavity, a chamber is arranged in the cavity, the cavity has an inlet and an outlet, and the inlet and the outlet are respectively communicated with the chamber; a fluid injection system, the fluid injection system is connected to the inlet of the cavity, the fluid injection system can transport working fluid to the chamber through the inlet, and the working fluid is a coolant; a vacuum device, the vacuum device is connected to the outlet of the cavity; a control unit, the vacuum device is electrically connected to the control unit, and the operation of the vacuum device can be controlled by the control unit. When the vacuum device is started, it can evacuate the chamber through the outlet of the cavity, so that the pressure in the chamber decreases, and the boiling point of the working fluid in the chamber decreases; and a control valve, the control valve is connected to the inlet of the cavity, the control valve is electrically connected to the control unit, the control valve can control the injection amount of the working fluid, and cooperate with the control of the vacuum device to control the vacuum degree and temperature in the cavity.

[0005] Optionally, the working fluid extracted through the outlet of the cavity can be directly discharged into the atmosphere through the vacuum device, or can flow back to the cavity through the vacuum device and the fluid injection system.

[0006] Optionally, the fluid injection system includes a heat exchanger, a water tank, and a delivery pump. The heat exchanger is connected to the vacuum device, the water tank is connected to the heat exchanger, and the delivery pump is connected between the water tank and the inlet of the cavity. The working fluid extracted through the outlet of the cavity can be transported to the heat exchanger through the vacuum device. The heat exchanger can condense the vapor discharged from the vacuum device into a liquid working fluid, then transport the liquid working fluid to the water tank for storage, and transport the liquid working fluid to the inlet of the cavity through the delivery pump.

[0007] Optionally, the water tank is provided with a water injection valve and a liquid level gauge. The liquid level gauge can be used to detect the liquid level of the working fluid in the water tank. When the liquid level is too low, the addition operation of the working fluid can be carried out through the water injection valve.

[0008] Optionally, a gas-liquid separator is arranged between the heat exchanger and the water tank, which can directly discharge the vapor into the atmosphere, and can be separated by the gas-liquid separator, and the condensed working fluid flows into the water tank for collection.

[0009] Optionally, a pressure gauge and a thermometer are arranged in the cavity. The pressure gauge and the thermometer are electrically connected to the control unit. The thermometer can be used to detect the temperature in the cavity, and the pressure gauge can be used to detect the pressure in the cavity.

[0010] Optionally, the fluid injection system includes a water tank and a delivery pump. The water tank can add the working fluid and transport the liquid working fluid to the inlet of the cavity through the delivery pump, so that the working fluid is transported into the cavity.

[0011] Optionally, the water tank is provided with a water injection valve and a liquid level gauge. The liquid level gauge can be used to detect the liquid level of the working fluid in the water tank. When the liquid level is too low, the addition operation of the working fluid can be carried out through the water injection valve.

[0012] Optionally, the control valve is a on-off valve or a proportional valve, and the control unit can control the on-off or opening degree through the control valve.

[0013] Optionally, an atomizing head is arranged at the inlet, and the working fluid can be transported into the cavity in the form of water mist through the atomizing head.

[0014] Optionally, the inlet of the cavity is of a dropwise design, and a heat source device is close to the inlet of the cavity. When the fluid injection system transports the working fluid into the cavity from the inlet, the working fluid can drop onto the heat source device or near the heat source device.

[0015] To solve the above technical problems, the present utility model further provides a heating furnace, comprising: a heating zone; a cooling zone disposed downstream of the heating zone; and a cooling system with adjustable coolant boiling point, the cooling system with adjustable coolant boiling point being disposed in the cooling zone and used to provide a cooling and heat dissipation effect for the cooling zone.

[0016] Optionally, the vacuum device is connected to the heating zone, and the heating zone can be evacuated by the vacuum device.

[0017] The beneficial effect of the present utility model is that the cooling system with adjustable coolant boiling point and the heating furnace provided by the present utility model, the cooling system with adjustable coolant boiling point includes a cavity, a fluid injection system, a vacuum device, a control unit and a control valve. A chamber is provided in the cavity, the cavity has an inlet and an outlet, the fluid injection system is connected to the inlet of the cavity, the fluid injection system can transport the working fluid from the inlet to the chamber, the vacuum device is connected to the outlet of the cavity, the vacuum device is electrically connected to the control unit, the operation of the vacuum device can be controlled by the control unit, when the vacuum device is started, the chamber can be evacuated through the outlet of the cavity, so that the pressure in the chamber drops, the boiling point of the working fluid in the chamber drops, the working fluid accelerates boiling and vaporization, the working fluid in the chamber undergoes a phase change, the working fluid changes from the liquid phase to the gas phase, and a large amount of heat can be absorbed to provide a cooling and heat dissipation effect for the heat source device. The control valve is connected to the inlet of the cavity, the control valve is electrically connected to the control unit, the control valve can control the injection amount of the working fluid, and cooperate with the control of the vacuum device, so as to control the vacuum degree and temperature in the cavity. In the present utility model, the boiling point of the working fluid can be controlled and is adjustable, so that the temperature can be changed and adjusted, and an optional cooling and heat dissipation effect can be provided.

[0018] To further understand the features and technical content of the present utility model, please refer to the following detailed description and drawings of the present utility model. However, the drawings are only for reference and illustration, and are not used to limit the present utility model. Description of the Drawings

[0019] Figure 1 Schematic diagram of the cooling system with adjustable coolant boiling point according to the first embodiment of the present utility model.

[0020] Figure 2 Schematic diagram of the cooling system with adjustable coolant boiling point according to the second embodiment of the present utility model.

[0021] Figure 3 Schematic diagram of the cooling system with adjustable coolant boiling point according to the third embodiment of the present utility model.

[0022] Figure 4Schematic diagram of the heating furnace according to the fourth embodiment of the present utility model.

[0023] Figure 5 Schematic diagram of the heating furnace according to the fifth embodiment of the present utility model.

[0024] Figure 6 Schematic diagram of the cavity according to the sixth embodiment of the present utility model.

[0025] Figure 7 Schematic diagram of the cavity according to the seventh embodiment of the present utility model. Detailed implementation manners

[0026] Please refer to Figure 1 , the present utility model provides a cooling system with adjustable coolant boiling point for cooling a heat source device. The cooling system 100 with adjustable coolant boiling point in this embodiment is a fully closed refrigerant system, and the refrigerant is a working fluid, taking water as an example, but not limited thereto. The cooling system 100 with adjustable coolant boiling point includes a cavity 1, a fluid injection system 2, a vacuum device 3, a control unit 4 and a control valve 5.

[0027] The cavity 1 is a hollow body, and a chamber 11 is provided inside the cavity 1. The cavity 1 has an inlet 12 and an outlet 13, and the inlet 12 and the outlet 13 are respectively communicated with the chamber 11, so that the working fluid can be input into the chamber 11 through the inlet 12 and output through the outlet 13. The working fluid can also be regarded as a coolant. The cavity 1 is an evaporator, and the cavity 1 can contact or be close to the heat source device, so that the high temperature of the heat source device can be transferred to the cavity 1. The heat source device can be arranged inside or outside the cavity 1, and the heat source device is not limited. The heat source device can be, for example, a heating furnace, or an electronic device or a machine device, etc., which needs to be cooled and dissipated. The number of the inlet 12 and the outlet 13 is not limited. For example, two or three or more inlets 12 and outlets 13 can also be provided.

[0028] The fluid injection system 2 is connected to the inlet 12 of the cavity 1. The fluid injection system 2 can transport the working fluid from the inlet 12 into the chamber 11. The fluid injection system 2 can transport the working fluid in the form of water mist or liquid into the chamber 11, and the state of the working fluid is not limited. The vacuum device 3 includes a vacuum pump and the like. The vacuum device 3 is connected to the outlet 13 of the cavity 1. The vacuum device 3 is electrically connected to the control unit 4, and the operation of the vacuum device 3 can be controlled by using the control unit 4. For example, the switch and rotation speed of the vacuum device 3 can be controlled. When the vacuum device 3 is started, it can evacuate the chamber 11 through the outlet 13, so that the pressure in the chamber 11 decreases, and the boiling point of the working fluid in the chamber 11 can be decreased, enabling the working fluid to boil and vaporize more rapidly. The working fluid in the chamber 11 undergoes a phase change, changing from the liquid phase to the gas phase, and can absorb a large amount of heat, so as to provide a cooling and heat dissipation effect for the heat source device. According to the Clausius-Clapeyron equation, the relationship between the boiling point temperature and the vapor pressure of a single-component liquid is dP / dT = L / TΔV, where dP / dT is the rate of change of pressure with temperature, L is the latent heat, T is the phase equilibrium temperature, and ΔV is the change in specific volume during the phase change. Therefore, the purpose of regulating the boiling point temperature can be achieved by regulating the pressure.

[0029] The working fluid extracted through the outlet 13 of the cavity 1 can flow back to the cavity 1 through the vacuum device 3 and the fluid injection system 2. The structure of the fluid injection system 2 is not limited. In this embodiment, the fluid injection system 2 may include a heat exchanger 21, a water tank 22, and a delivery pump 23. The heat exchanger 21 is connected to the vacuum device 3, the water tank 22 is connected to the heat exchanger 21, and the delivery pump 23 is connected between the water tank 22 and the inlet 12 of the cavity 1. The working fluid extracted through the outlet 13 of the cavity 1 can be transported to the heat exchanger 21 through the vacuum device 3. The heat exchanger 21 can condense the vapor discharged from the vacuum device 3 into a liquid working fluid, and then transport the liquid working fluid to the water tank 22 for storage. Then, the liquid working fluid can be transported to the inlet 12 of the cavity 1 through the delivery pump 23, and an atomizing head 24 can be provided at the inlet 12, so that the working fluid can be transported into the chamber 11 in the form of water mist through the atomizing head 24.

[0030] The control valve 5 is connected to the inlet 12 of the cavity 1. The control valve 5 can be arranged between the delivery pump 23 and the inlet 12 of the cavity 1. The control valve 5 is electrically connected to the control unit 4. The control unit 4 can send control signals to control the control valve 5 so as to control the working fluid delivered to the inlet 12 of the cavity 1. The control valve 5 can be an on / off valve or a proportional valve, capable of controlling the injection amount of the working fluid, enabling the control unit 4 to perform on / off or opening degree control through the control valve 5. The control unit 4 can also control the operation of the vacuum device 3 to control the vacuum degree and temperature in the cavity 1.

[0031] In this embodiment, a pressure gauge 6 and a thermometer 7 can also be provided in the chamber 11. The pressure gauge 6 and the thermometer 7 are electrically connected to the control unit 4. The thermometer 7 can be used to detect the temperature in the chamber 11 for temperature control. The pressure gauge 6 can be used to detect the pressure in the chamber 11 for pressure control. The control unit 4 is a main control system, capable of detecting the pressure and temperature in the cavity 1, and enabling the cavity 1 to maintain the target temperature or pressure through the control of the vacuum device 3 and the control valve 5.

[0032] Please refer to Figure 2 The cooling system 100 with adjustable coolant boiling point in this embodiment is a fully open refrigerant system. When water is used as the refrigerant, since water is a harmless substance and can be directly discharged, the heat exchanger can be omitted to reduce the volume and cost. This embodiment is generally the same as the above first embodiment. The main difference is that the working fluid (vapor) drawn out through the outlet 13 of the cavity 1 can be directly discharged into the atmosphere through the vacuum device 3 without being recycled, so there is no need to set up the heat exchanger 21 in the above embodiment. The fluid injection system 2 of this embodiment includes a water tank 22 and a delivery pump 23. The water tank 22 can be filled with the working fluid (such as water), and then the liquid working fluid can be delivered to the inlet 12 of the cavity 1 through the delivery pump 23, so that the working fluid is delivered into the chamber 11. The water tank 22 can be provided with a water injection valve 8 and a liquid level gauge 9. The liquid level gauge 9 can be used to detect the liquid level of the working fluid in the water tank 22. When the liquid level is too low, the working fluid can be added through the water injection valve 8.

[0033] Please refer to Figure 3, the coolant boiling point adjustable cooling system 100 of this embodiment is a semi-open refrigerant system. This embodiment is substantially the same as the above first embodiment. In this embodiment, the fluid injection system 2 includes a heat exchanger 21, a water tank 22, and a delivery pump 23. The heat exchanger 21 is connected to the vacuum device 3, the water tank 22 is connected to the heat exchanger 21, and the delivery pump 23 is connected between the water tank 22 and the inlet 12 of the cavity 1. The working fluid extracted from the outlet 13 of the cavity 1 can be transported to the heat exchanger 21 through the vacuum device 3. The heat exchanger 21 can condense the vapor discharged from the vacuum device 3 into a liquid working fluid, then transport the liquid working fluid to the water tank 22 for storage, and then the liquid working fluid can be transported into the inlet 12 of the cavity 1 through the delivery pump 23. This embodiment mainly sets a gas-liquid separator 10 between the heat exchanger 21 and the water tank 22, which can directly discharge the vapor into the atmosphere, so a smaller heat exchanger 21 can be used. Only part of the vapor discharged from the heat exchanger 21 condenses, and after being separated by the gas-liquid separator 10, the condensed working fluid flows into the water tank 22 for collection. The water tank 22 can also be provided with a water injection valve 8 and a liquid level gauge 9. The liquid level gauge 9 can be used to detect the liquid level of the working fluid in the water tank 22. When the liquid level is too low, the addition operation of the working fluid can be performed through the water injection valve 8.

[0034] Please refer to Figure 4 , this embodiment discloses a heating furnace 200. The heating furnace 200 includes a heating zone 201 and a cooling zone 202. The heating zone 201 can heat the component to be heated by means of electric heating or the like. The cooling zone 202 is arranged at the downstream position of the heating zone 201. The cooling zone 202 can be used to cool the component to be heated that has been heated. The coolant boiling point adjustable cooling system 100 of the present utility model is arranged in the cooling zone 202. The coolant boiling point adjustable cooling system 100 can provide the cooling and heat dissipation effect for the cooling zone 202.

[0035] Please refer to Figure 5, this embodiment discloses a heating furnace 200, which includes a heating zone 201 and a cooling zone 202. The cooling zone 202 is arranged at the downstream position of the heating zone 201. The cooling zone 202 can be used to cool the heated component to be heated. The cooling system 100 with adjustable coolant boiling point of the present invention is arranged in the cooling zone 202, and the cooling system 100 with adjustable coolant boiling point can provide the cooling and heat dissipation effect of the cooling zone 202. In this embodiment, the vacuum device 3 is mainly connected to the heating zone 201. Therefore, the vacuum device 3 can also be used to evacuate the heating zone 201 of the heating furnace 200 before each activation of heating, so that when the protective gas such as nitrogen is injected into the heating zone 201 of the heating furnace 200, the consumption of the protective gas can be reduced. A valve body 20 can also be arranged between the vacuum device 3 and the heating zone 201 to open and close the operation of evacuating the heating zone 201 of the heating furnace 200 by the vacuum device 3.

[0036] Please refer to Figure 6 and Figure 7 , the inlet 12 of the cavity 1 can also be of a drip type design, and the heat source device 300 is close to the inlet 12 of the cavity 1. When the fluid injection system 2 transports the working fluid from the inlet 12 to the chamber 11, the working fluid can drip onto the heat source device 300 or near the heat source device 300, so that the working fluid can be closer to the heat source device 300 and provide a more preferable cooling and heat dissipation effect. In this embodiment, the heat source device 300 can be arranged in the cavity 1.

[0037] The cooling system with adjustable coolant boiling point of the present invention can change the boiling point of the working fluid by changing the pressure in the chamber, and there is no high-pressure part in the cooling system. The working fluid in the cooling system can exist in a liquid state at room temperature and can be condensed and recovered under atmospheric pressure. On the contrary, the refrigeration compression system cannot use a liquid that is liquid at normal temperature and pressure (such as pure water with a boiling point greater than 25°C) as the working fluid. The refrigeration compression system operates in a refrigerant closed system. The cooling system of the present invention can operate in both a closed or open system. The refrigeration compression system is high-pressure (compressed) condensation, and the cooling system of the present invention is low-pressure (evacuated) evaporation.

[0038] The beneficial effects of the present utility model are as follows. The cooling system and heating furnace with adjustable coolant boiling point provided by the present utility model, the cooling system with adjustable coolant boiling point includes a cavity, a fluid injection system, a vacuum device, a control unit and a control valve. A chamber is provided inside the cavity, the cavity has an inlet and an outlet, the fluid injection system is connected to the inlet of the cavity, the fluid injection system can transport the working fluid from the inlet to the chamber inside, the vacuum device is connected to the outlet of the cavity, the vacuum device is electrically connected to the control unit, and the operation of the vacuum device can be controlled by the control unit. When the vacuum device is started, it can evacuate the chamber through the outlet of the cavity, so that the pressure inside the chamber drops, the boiling point of the working fluid inside the chamber drops, the working fluid accelerates boiling and vaporization, the working fluid inside the chamber undergoes a phase change, the working fluid changes from the liquid phase to the gas phase, and can absorb a large amount of heat, so as to provide a cooling and heat dissipation effect for the heat source device. The control valve is connected to the inlet of the cavity, the control valve is electrically connected to the control unit, the control valve can control the injection amount of the working fluid, and cooperate with the control of the vacuum device, so as to control the vacuum degree and temperature inside the cavity. The present utility model enables the boiling point of the working fluid to be controllable and adjustable, and can change and adjust the temperature, so as to provide an optional cooling and heat dissipation effect.

[0039] However, the above are only the preferred embodiments of the present utility model, and are not intended to limit the patent protection scope of the present utility model. Therefore, all equivalent changes made by using the content of the specification and drawings of the present utility model are similarly included in the scope of the rights protection of the present utility model, and are hereby stated.

Claims

1. A cooling system with adjustable coolant boiling point, characterized in that: include: A cavity, wherein a chamber is disposed in the cavity, the cavity has an inlet and an outlet, and the inlet and the outlet are respectively connected to the chamber; a fluid injection system, the fluid injection system is connected to the inlet of the cavity, the fluid injection system can transport a working fluid into the cavity from the inlet, the working fluid is a coolant; a vacuum device connected to the outlet of the cavity; a control unit, the vacuum device is electrically connected to the control unit, and the operation of the vacuum device can be controlled by the control unit. When the vacuum device is started, the chamber can be evacuated through the outlet of the chamber, thereby reducing the pressure in the chamber, so as to reduce the boiling point of the working fluid in the chamber; as well as A control valve is connected to the inlet of the cavity and is electrically connected to the control unit. The control valve can control the injection amount of the working fluid and, in conjunction with the control of the vacuum device, can control the vacuum degree and temperature in the cavity.

2. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The working fluid extracted through the outlet of the cavity can be directly discharged into the atmosphere through the vacuum device, or can flow back to the cavity through the vacuum device and the fluid injection system.

3. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The fluid injection system includes a heat exchanger, a water tank and a delivery pump. The heat exchanger is connected to the vacuum device, the water tank is connected to the heat exchanger, and the delivery pump is connected between the water tank and the inlet of the cavity. The working fluid extracted through the outlet of the cavity can be delivered to the heat exchanger through the vacuum device. The heat exchanger can condense the steam discharged from the vacuum device into liquid working fluid, and then deliver the liquid working fluid to the water tank for storage, and deliver the liquid working fluid to the inlet of the cavity through the delivery pump.

4. The cooling system with adjustable coolant boiling point according to claim 3, characterized in that: The water tank is provided with a water filling valve and a liquid level meter. The liquid level meter can be used to detect the liquid level of the working fluid in the water tank. When the liquid level is too low, the working fluid can be added through the water filling valve.

5. The cooling system with adjustable coolant boiling point according to claim 3, characterized in that: A gas-liquid separator is arranged between the heat exchanger and the water tank, which can discharge the steam directly into the atmosphere, and can separate the condensed working fluid through the gas-liquid separator and flow into the water tank for collection.

6. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: A pressure gauge and a thermometer are provided in the chamber, and the pressure gauge and the thermometer are electrically connected to the control unit. The thermometer can be used to detect the temperature in the chamber, and the pressure gauge can be used to detect the pressure in the chamber.

7. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The fluid injection system includes a water tank and a delivery pump. The water tank can be used to add working fluid, and the delivery pump delivers the liquid working fluid to the inlet of the cavity, so that the working fluid is delivered into the cavity.

8. The cooling system with adjustable coolant boiling point according to claim 7, characterized in that: The water tank is provided with a water filling valve and a liquid level meter. The liquid level meter can be used to detect the liquid level of the working fluid in the water tank. When the liquid level is too low, the working fluid can be added through the water filling valve.

9. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The control valve is a switch valve or a proportional valve, and the control unit can control the switch or opening degree through the control valve.

10. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The inlet is provided with an atomizing head, and the working fluid can be transported into the chamber in the form of water mist through the atomizing head.

11. The cooling system with adjustable coolant boiling point according to claim 1, characterized in that: The inlet of the cavity is of a drip-type design, and a heat source device is close to the inlet of the cavity, so that when the fluid injection system transports the working fluid into the chamber from the inlet, the working fluid can drip onto the heat source device or drip near the heat source device.

12. A heating furnace, characterized in that: include: a heating zone; a cooling zone, the cooling zone being disposed downstream of the heating zone; as well as A cooling system with an adjustable coolant boiling point as claimed in any one of claims 1 to 11, wherein the cooling system with an adjustable coolant boiling point is arranged in the cooling zone, and the cooling system can provide cooling and heat dissipation effect for the cooling zone.

13. The heating furnace according to claim 12, characterized in that The vacuum device is connected to the heating zone, and the heating zone can be evacuated by the vacuum device.