Electron microscope sample preparation heating device

Abstract

The utility model relates to the technical field of scanning electron microscopes, in particular to an electron microscope sample preparation heating device which comprises a base, a movable sample preparation heating tank arranged on the upper side of the base, a cover opening and closing assembly arranged on the base on the rear side of the sample preparation heating tank, and a sampling assembly arranged on the base on the right side of the sample preparation heating tank. A metal heat-conducting inner cylinder is arranged in the outer shell, a high-temperature-resistant heat-insulating filler is filled between the metal heat-conducting inner cylinder and the outer shell, a resistance heating disc is arranged at the bottom of the metal heat-conducting inner cylinder, an electromagnetic induction coil is sleeved on the annular surface of the metal heat-conducting inner cylinder, and a sample box is arranged in the metal heat-conducting inner cylinder. According to the utility model, the resistance heating disc and the electromagnetic induction coil are combined, so that multidirectional heating of a sample is realized, the sample can be heated from the bottom and from the side surface, the heating uniformity and speed are obviously improved, and the heating efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscopes, and more specifically, to a heating device for sample preparation of an electron microscope. Background Technique

[0002] A scanning electron microscope (SEM) is an electron microscope that generates an image of a sample by scanning the surface with a focused electron beam. The electrons interact with the atoms in the sample, generating various signals that contain information about the surface topography and composition of the sample. The scanning path of the electron beam is in the shape of a raster, and combining the position of the electron beam with the intensity of the detected signal can output an image. The resolution of a scanning electron microscope can reach 1 nm; the magnification can be continuously adjusted up to 300,000 times and above; and it has a large depth of field, a large field of view, and a good three-dimensional imaging effect. In addition, when combined with other analytical instruments, a scanning electron microscope can perform micro-area composition analysis of substances while observing the microscopic topography. Scanning electron microscopes are widely used in the research of rock and soil, graphite, ceramics, and nanomaterials. Therefore, scanning electron microscopes play a significant role in the field of scientific research.

[0003] During the sample preparation process of a scanning electron microscope, it is often necessary to heat the sample to remove surface impurities, improve conductivity, and improve the surface flatness of the sample. However, when the existing heating device is heating, the heating element inside it is usually located at the lower side inside, and can only heat the sample from the bottom, resulting in uneven heating of the sample, slow heating speed, low heating efficiency, and affecting the preparation quality and efficiency of the sample. Therefore, there is an urgent need for a heating device for sample preparation of an electron microscope with uniform and fast heating to solve the above problems. Summary of the Utility Model

[0004] In view of the existing deficiencies, the utility model provides a heating device for sample preparation of an electron microscope, which can achieve uniform and rapid heating of the sample and improve the efficiency and quality of sample preparation.

[0005] To achieve the above object, the technical solution adopted by the utility model is as follows:

[0006] A heating device for sample preparation of an electron microscope includes a base. A movable sample preparation heating tank is arranged on the upper side of the base. An opening and closing cover assembly is arranged on the base at the rear side of the sample preparation heating tank. A sampling assembly is arranged on the base at the right side of the sample preparation heating tank. Adjustable support feet are assembled at the bottom of the base near the four corners.

[0007] The sample preparation heating tank includes an outer shell, a sample box, a high-temperature resistant heat insulation filler, a resistance heating plate, an electromagnetic induction coil, and a metal heat conduction inner cylinder. The metal heat conduction inner cylinder is arranged inside the outer shell. The space between the metal heat conduction inner cylinder and the outer shell is filled with the high-temperature resistant heat insulation filler. A resistance heating plate is provided at the bottom of the metal heat conduction inner cylinder. The electromagnetic induction coil is sleeved on the circumferential surface of the metal heat conduction inner cylinder. The sample box is arranged inside the metal heat conduction inner cylinder.

[0008] Further, a handle is fixedly installed on the front side of the circumferential surface of the outer shell through bolts.

[0009] Further, a plurality of component partitions are arranged at equal angles inside the sample box, and the height of the middle group of the partition plates is higher than that of the other partition plates.

[0010] Further, a limiting retaining ring is fixedly arranged on the inner wall of the metal heat conduction inner cylinder, and two groups of clamping blocks are symmetrically and fixedly arranged on the left and right sides of the upper surface of the limiting retaining ring. Two groups of notch grooves adapted to the clamping blocks are symmetrically formed at the edge of the top surface of the sample box.

[0011] Further, ear plates are arranged on both the left and right sides of the circumferential surface of the outer shell. Sliders are fixedly connected to the lower sides of the ear plates. Guide rails corresponding to the positions of the sliders are arranged on both the left and right sides of the upper surface of the base, and the sliders are connected in cooperation with the guide rails.

[0012] Further, the opening and closing cover assembly includes a hydraulic rod, a cross beam plate, fixed columns, a connecting frame, and a sealing cover plate. The cross beam plate is arranged in parallel at intervals above the base. The left and right ends of the cross beam plate are fixedly connected to the base through two groups of fixed columns. A hydraulic rod is assembled at the center of the cross beam plate. The lower end of the hydraulic rod penetrates through the cross beam plate and is connected to the connecting frame. A sealing cover plate adapted to the sample preparation heating tank is fixedly connected to the lower side of the connecting frame.

[0013] Further, a heat reflecting plate made of a metal material is arranged on the bottom surface of the sealing cover plate, and a heat reflecting coating is arranged on the surface of the heat reflecting plate.

[0014] Further, the sampling assembly includes an electric clamping head, a connecting support arm, and an electric push rod. The electric push rod is fixedly installed on the base on the right side of the sample preparation heating tank. A connecting support arm is fixedly connected to the output end of the electric push rod. An electric clamping head is assembled on the lower side of the left end of the connecting support arm.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] 1. The utility model combines a resistance heating plate and an electromagnetic induction coil to achieve multi-directional heating of samples. It can not only heat from the bottom but also from the side, significantly improving the heating uniformity and speed, enhancing the heating efficiency, and overcoming the problem of uneven heating caused by the existing heating devices that can only heat from the bottom.

[0017] 2. The utility model divides the space inside the sample box into multiple independent small areas through the multi-component partition board set, allowing multiple samples to be placed in the sample box at the same time, thereby improving the efficiency of sample processing. The operator can process multiple samples simultaneously during one heating process without batch processing, and at the same time, it can reduce the mutual influence between samples, reduce the risk of cross-contamination between different samples, and ensure the heating effect of the samples.

[0018] 3. In the utility model, ear plates are provided on both the left and right sides of the outer shell ring surface. A slider is fixedly connected to the lower side of the ear plate. Guide rails corresponding to the positions of the sliders are provided on both the left and right sides of the upper surface of the base, and the slider is connected with the guide rail in a matching manner. The matching connection between the slider and the guide rail enables the sample preparation and heating tank to move easily on the base while maintaining a stable movement trajectory. This design enables the operator to operate more conveniently and quickly when adjusting the position of the sample preparation and heating tank.

[0019] 4. The utility model can realize the automatic opening and closing of the sample preparation and heating tank through the opening and closing cover assembly provided, improving the operation convenience. Through the telescopic movement of the hydraulic rod, the sealing cover plate can be driven to move up and down, thereby facilitating the automatic closing of the sealing cover plate during heating and automatically opening the sealing cover plate after heating is completed, reducing the work burden of the operator and improving the work efficiency.

[0020] 5. The utility model is provided with a sampling assembly to facilitate taking out the sample box from the sample preparation and heating tank after the sample heating is completed, which can effectively reduce the risk and labor intensity of manual operation and improve the operation convenience. When sampling is required, the electric push rod starts to work, pushing the connecting arm and the electric clamping head to move into the sample preparation and heating tank. After the electric clamping head extends into the sample preparation and heating tank to reach the sampling position, it automatically clamps the partition board inside the sample box, and then the electric push rod drives the connecting arm and the electric clamping head to return to the original position, thereby taking out the sample box from the sample preparation and heating tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is the overall structural schematic diagram of the utility model.

[0022] Figure 2 is the front view of the utility model.

[0023] Figure 3 is the partial structural schematic diagram of the utility model.

[0024] Figure 4 This is a schematic cross-sectional view of the sample preparation heating tank in the present utility model.

[0025] Figure 5 This is a schematic structural view of the opening and closing cover assembly in the present utility model.

[0026] Figure 6 This is a schematic bottom view of the sealing cover plate in the present utility model.

[0027] In the figure: 1, base; 2, opening and closing cover assembly; 21, hydraulic rod; 22, cross beam plate; 23, fixed support pillar; 24, connecting frame; 25, sealing cover plate; 26, heat reflecting plate; 3, sampling assembly; 31, electric clamping head; 32, connecting support arm; 33, electric push rod; 4, sample preparation heating tank; 41, outer shell; 42, handle; 43, sample box; 44, partition plate; 45, notch groove; 46, high temperature resistant heat insulation filler; 47, resistance heating plate; 48, electromagnetic induction coil; 49, metal heat conducting inner cylinder; 410, limit retaining ring; 411, clamping block; 5, adjustable support feet; 6, ear plate; 7, slider; 8, guide rail. Specific embodiments

[0028] Next, in combination with the embodiments of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0029] Embodiment:

[0030] As Figures 1 to 6 shown, an electron microscope sample preparation heating device includes a base 1. A movable sample preparation heating tank 4 is arranged on the upper side of the sealing cover plate 25. An opening and closing cover assembly 2 is arranged on the base 1 at the rear of the sample preparation heating tank 4. A sampling assembly 3 is arranged on the base 1 on the right side of the sample preparation heating tank 4. Adjustable support feet 5 are assembled near the four corners at the bottom of the base 1.

[0031] In this embodiment, the sample preparation heating tank 4 includes an outer shell 41, a sample box 43, high-temperature resistant heat insulation filler 46, a resistance heating plate 47, an electromagnetic induction coil 48, and a metal heat conduction inner cylinder 49. Inside the outer shell 41, there is a metal heat conduction inner cylinder 49. Between the metal heat conduction inner cylinder 49 and the outer shell 41, there is high-temperature resistant heat insulation filler 46 filled. At the bottom of the metal heat conduction inner cylinder 49, there is a resistance heating plate 47. An electromagnetic induction coil 48 is sleeved on the circumferential surface of the metal heat conduction inner cylinder 49. Inside the metal heat conduction inner cylinder 49, there is a sample box 43. This design solves the problem that in the existing heating devices during heating, the heating elements inside are usually located at the lower side inside, and can only heat the sample from the bottom, resulting in uneven heating of the sample, slow heating speed, low heating efficiency, and affecting the preparation quality and efficiency of the sample.

[0032] By combining the resistance heating plate 47 and the electromagnetic induction coil 48, this device realizes multi-directional heating of the sample. It not only heats from the bottom but also performs auxiliary heating from the side, significantly improving the uniformity and speed of heating. This design overcomes the problem of uneven heating caused by traditional heating devices that can only heat from the bottom.

[0033] In this embodiment, a handle 42 is fixedly installed on the front side of the circumferential surface of the outer shell 41 through bolts. The handle 42 provides a clear grasping point for the operator, making it more convenient and fast to move the sample preparation heating tank 4 when needed.

[0034] In this embodiment, multiple component partitions 44 are equiangularly arranged inside the sample box 43, and the height of the middle group of partition plates 44 is higher than that of the other partition plates 44. The arranged multiple component partitions 44 divide the space inside the sample box 43 into multiple independent small areas, allowing multiple samples to be placed in the sample box 43 simultaneously, thereby improving the efficiency of sample processing. The operator can process multiple samples simultaneously during one heating process without batch processing, and at the same time, it can reduce the mutual influence between samples, reduce the risk of cross-contamination between different samples, and ensure the heating effect of the samples.

[0035] In this embodiment, a limiting retaining ring 410 is fixedly installed on the inner wall of the metal heat conduction inner cylinder 49, and two groups of clamping blocks 411 are symmetrically and fixedly installed on the left and right sides of the upper surface of the limiting retaining ring 410. At the edge of the top surface of the sample box 43, two groups of notch grooves 45 adapted to the clamping blocks 411 are symmetrically opened. The arranged limiting retaining ring 410 can limit and support the sample box 43, preventing it from moving or tilting during heating, thereby ensuring the uniformity and stability of heating. At the same time, the clamping blocks 411 are adapted to the notch grooves 45 on the top surface of the sample box 43, enabling the sample box 43 to be restricted to a specified position during heating, further enhancing the stability of the sample box 43 inside the metal heat conduction inner cylinder 49.

[0036] In this embodiment, ear plates 6 are provided on both the left and right sides of the toroidal surface of the outer shell 41. A slider 7 is fixedly connected to the lower side of the ear plate 6. Guide rails 8 corresponding to the positions of the sliders 7 are provided on both the left and right sides of the upper surface of the base 1, and the slider 7 is connected to the guide rail 8 in a mating manner. The mating connection between the slider 7 and the guide rail 8 enables the sample preparation heating tank 4 to move easily on the base 1 while maintaining a stable movement trajectory. This design enables the operator to operate more conveniently and quickly when adjusting the position of the sample preparation heating tank 4.

[0037] In this embodiment, the lid opening and closing assembly 2 includes a hydraulic rod 21, a cross beam plate 22, a fixed support column 23, a connecting frame 24, and a sealing cover plate 25. The cross beam plate 22 is arranged parallel to each other at intervals on the upper side of the base 1. The left and right ends of the cross beam plate 22 are fixedly connected to the base 1 through two groups of fixed support columns 23. A hydraulic rod 21 is assembled at the center of the cross beam plate 22. The lower end of the hydraulic rod 21 penetrates the cross beam plate 22 and is connected to the connecting frame 24. A sealing cover plate 25 adapted to the sample preparation heating tank 4 is fixedly connected to the lower side of the connecting frame 24. By providing the lid opening and closing assembly 2, the automatic opening and closing operations of the sample preparation heating tank 4 can be realized, improving the operation convenience. Through the telescopic movement of the hydraulic rod 21, the sealing cover plate 25 can be driven to move up and down, thereby facilitating the automatic closing of the sealing cover plate 25 during heating and the automatic opening of the sealing cover plate 25 after heating is completed, reducing the work burden of the operator and improving the work efficiency.

[0038] In this embodiment, a heat reflection plate 26 made of a metal material is provided on the bottom surface of the sealing cover plate 25, and a heat reflection coating is provided on the surface of the heat reflection plate 26. By providing the heat reflection plate 26 and the heat reflection coating, the heat generated in the sample preparation heating tank 4 can be effectively reflected onto the sample, enabling the heat to be concentrated on the sample, thereby improving the heating efficiency, enabling the sample to reach the required temperature faster, and shortening the heating time.

[0039] In this embodiment, the sampling assembly 3 includes an electric clamping head 31, a connecting support arm 32, and an electric push rod 33. The electric push rod 33 is fixedly installed on the base 1 on the right side of the sample preparation heating tank 4. A connecting support arm 32 is fixedly connected to the output end of the electric push rod 33. An electric clamping head 31 is assembled on the lower side of the left end of the connecting support arm 32. By providing the sampling assembly 3, it is convenient to take out the sample box 43 from the sample preparation heating tank 4 after the sample is heated, which can effectively reduce the risk and labor intensity of manual operation and improve the operation convenience. When sampling is required, the electric push rod 33 starts to work, pushing the connecting support arm 32 and the electric clamping head 31 to move into the sample preparation heating tank 4. After the electric clamping head 31 extends into the sample preparation heating tank 4 to reach the sampling position, it automatically clamps the partition plate 44 inside the sample box 43, and then the electric push rod 33 drives the connecting support arm 32 and the electric clamping head 31 to return to the original position, thereby taking out the sample box 43 from the sample preparation heating tank 4.

[0040] The working principle of this electron microscope sample preparation heating device is as follows: First, ensure that the base 1 is stably placed and adjusted to a horizontal position through the adjustable feet 5. Pull the sample preparation heating tank 4 through the handle 42 to move it to the foremost position of the base 1. Place the sample into the sample box 43, and separate different samples through the partition plate 44. Then, place the sample box 43 into the metal heat-conducting inner cylinder 49, and ensure that the notch groove 45 of the sample box 43 is aligned and clamped with the clamping block 411 on the limit retaining ring 410. Then, push the sample preparation heating tank 4 backward through the handle 42 to move it to the rearmost position on the moving guide rail 8 and align it with the sealing cover plate 25. Drive the sealing cover plate 25 to move downward through the hydraulic rod 21 and tightly press it on the sample preparation heating tank 4. Connect the power supply, start the resistance heating disk 47 and the electromagnetic induction coil 48, and start heating the sample. The resistance heating disk 47 heats the metal heat-conducting inner cylinder 49 from the bottom, and the heat is transferred to the sample box 43 and the sample. The electromagnetic induction coil 48 generates a magnetic field to perform induction heating on the metal heat-conducting inner cylinder 49, and transfers the heat to the sample box 43 and the sample through the metal heat-conducting inner cylinder 49, further heating the sample from the side to achieve rapid heating of the sample;

[0041] After heating is completed, turn off the power supply of the resistance heating disk 47 and the electromagnetic induction coil 48. Lift the sealing cover plate 25 through the hydraulic rod 21 to open the sample preparation heating tank 4. Pull the sample preparation heating tank 4 through the handle 42 to move it to the foremost position of the base 1. At this time, the sample preparation heating tank 4 is directly below the electric clamping head 31. Start the electric push rod 33. The electric push rod 33 drives the connecting arm 32 and the electric clamping head 31 to move into the sample preparation heating tank 4. The electric clamping head 31 extends into the sample preparation heating tank 4 and clamps the partition plate 44 inside the sample box 43. Then, the electric push rod 33 drives the connecting arm 32 and the electric clamping head 31 to return to the original position, and takes out the sample box 43 from the sample preparation heating tank 4. After taking out the sample box 43, the operator can further process the sample in the sample box 43.

[0042] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is impossible to enumerate all the implementation manners here. Any obvious changes or variations derived from the technical solutions of the present invention still fall within the protection scope of the present invention.

Claims

1. An electron microscope sample preparation and heating device, comprising a base (1), characterized in that: A movable sample preparation and heating tank (4) is arranged on the upper side of the base (1); an opening and closing cover assembly (2) is arranged on the base (1) at the rear side of the sample preparation and heating tank (4); a sampling assembly (3) is arranged on the base (1) at the right side of the sample preparation and heating tank (4); and adjustable feet (5) are arranged at the bottom of the base (1) near the four corners; The sample preparation heating tank (4) comprises an outer shell (41), a sample box (43), a high temperature resistant heat insulating filler (46), a resistance heating disk (47), an electromagnetic induction coil (48) and a metal heat conductive inner cylinder (49); a metal heat conductive inner cylinder (49) is arranged inside the outer shell (41); a high temperature resistant heat insulating filler (46) is filled between the metal heat conductive inner cylinder (49) and the outer shell (41); a resistance heating disk (47) is arranged at the bottom of the metal heat conductive inner cylinder (49); an electromagnetic induction coil (48) is arranged on the annular surface of the metal heat conductive inner cylinder (49); and a sample box (43) is arranged inside the metal heat conductive inner cylinder (49).

2. The electron microscope sample preparation and heating device according to claim 1, characterized in that: A handle (42) is fixedly mounted on the annular front side of the outer shell (41) by means of bolts.

3. The electron microscope sample preparation and heating device according to claim 2, characterized in that: A plurality of groups of partition plates (44) are arranged at equal angles inside the sample box (43), and the height of the partition plates (44) in the middle group is higher than the heights of the other partition plates (44).

4. The electron microscope sample preparation and heating device according to claim 3, characterized in that: A circle of limit retaining ring (410) is fixedly provided on the inner wall of the metal heat-conducting inner cylinder (49), and two groups of clamping blocks (411) are symmetrically fixedly provided on the left and right sides of the upper surface of the limit retaining ring (410), and two groups of notched grooves (45) adapted to the clamping blocks (411) are symmetrically provided at the edge of the top surface of the sample box (43).

5. The electron microscope sample preparation and heating device according to claim 4, characterized in that: The outer shell (41) is provided with ear plates (6) on both sides of the annular surface, and a slider (7) is fixedly connected to the lower side of the ear plate (6). The upper surface of the base (1) is provided with guide rails (8) corresponding to the position of the slider (7) on both sides of the left and right sides, and the slider (7) is connected to the guide rail (8) in a cooperative manner.

6. The electron microscope sample preparation and heating device according to claim 1, characterized in that: The opening and closing cover assembly (2) comprises a hydraulic rod (21), a cross beam plate (22), a fixed support column (23), a connecting frame (24), and a sealing cover plate (25). The cross beam plate (22) is arranged in parallel at intervals on the upper side of the base (1). The left and right ends of the cross beam plate (22) are fixedly connected to the base (1) via two groups of fixed support columns (23). The center of the cross beam plate (22) is equipped with a hydraulic rod (21). The lower end of the hydraulic rod (21) passes through the cross beam plate (22) and is connected to the connecting frame (24). The lower side of the connecting frame (24) is fixedly connected to a sealing cover plate (25) that matches the sample preparation heating tank (4).

7. The electron microscope sample preparation and heating device according to claim 6, characterized in that: A layer of a heat reflection plate (26) made of a metal material is provided on the bottom surface of the sealing cover plate (25), and a heat reflection coating is provided on the surface of the heat reflection plate (26).

8. The electron microscope sample preparation and heating device according to claim 1, characterized in that: The sampling assembly (3) comprises an electric clamping head (31), a connecting arm (32) and an electric push rod (33); the electric push rod (33) is fixedly mounted on a base (1) on the right side of the sample preparation heating tank (4); the connecting arm (32) is fixedly connected to the output end of the electric push rod (33); and the electric clamping head (31) is mounted on the lower side of the left end of the connecting arm (32).

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