Strong field material laser outgassing characteristic measuring device in ultrahigh vacuum environment

Abstract

The utility model provides a device for measuring laser outgassing characteristics of a strong-field material in an ultrahigh vacuum environment. The device comprises a vacuum system, a vacuumizing system, a data acquisition system and a laser emission system, the device comprises two chambers, and the bottoms of the two chambers are connected with a molecular pump and a mechanical pump to provide a vacuum environment for the chambers; the two chambers are provided with high-precision vacuum gauges for collecting air pressure change information of the chambers; the measuring chamber is additionally provided with a thermocouple and a quadrupole mass spectrometer which are communicated with a computer, so that gas components released by the sample are analyzed while the gas release characteristic of the sample after laser ablation is measured. According to the utility model, under the condition that a vacuum environment is not damaged, laser outgassing measurement is continuously carried out on a plurality of different samples, so that the sample replacement time is saved, and the influence on outgassing data caused by multiple times of chamber opening and lofting is reduced. The outgassing characteristics of the sample under different ablation degrees are detected at different positions of the same sample by adjusting four dimensions of a sample holder of a measurement chamber and adjusting the spot size, power and pulse width of a laser.

Description

Technical Field

[0001] The utility model relates to the technical field of material outgassing rate testing, and particularly, to a measuring device for laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment. Background Art

[0002] Any solid material can dissolve and adsorb some gases in an atmospheric environment. When such solid materials are placed in a vacuum environment, they will outgas due to dissolution and desorption. With the increasing maturity of laser technology, the requirements for optical laser coatings are also getting higher and higher. When depositing corresponding laser thin films, the requirements for vacuum degree and residual gases are also increasing. Especially for a coating system with high temperature and high vacuum, even a slight change in the gas environment of the vacuum chamber has a significant impact on vacuum laser coating. Even a small amount of external leakage of the vacuum chamber or residual gases in the chamber can have an obvious effect, which may lead to a sharp decline in the laser resistance of the thin film. Therefore, in production, not only the background vacuum degree needs to be improved, but also the composition of residual gases during laser operation needs to be controlled. Summary of the Utility Model

[0003] According to the above-mentioned technical problems, a measuring device for laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment is provided. The utility model can measure the outgassing rate of a sample under different laser ablation conditions and analyze the composition of the released gases.

[0004] The technical means adopted by the utility model are as follows:

[0005] A measuring device for laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment, comprising: a vacuum system, a vacuum pumping system, a data acquisition system, a laser emission system, and a standard gas cylinder, wherein:

[0006] The vacuum system includes a measurement vacuum chamber, a sample introduction vacuum chamber, and a manual gate valve. The measurement vacuum chamber and the sample introduction vacuum chamber are connected by the manual gate valve;

[0007] The vacuum pumping system includes a measurement chamber molecular pump, a sample introduction chamber molecular pump, a measurement chamber mechanical pump, and a sample introduction chamber mechanical pump; wherein, one end of the measurement chamber molecular pump is connected to the measurement vacuum chamber 1 through a measurement chamber gate valve, and the other end is connected to the measurement chamber mechanical pump; one end of the sample introduction chamber molecular pump is connected to the sample introduction vacuum chamber through a sample introduction chamber gate valve 4, and the other end is connected to the sample introduction chamber mechanical pump;

[0008] The described data acquisition system includes a measurement chamber vacuum gauge, an injection chamber vacuum gauge, a quadrupole mass spectrometer 11, and a thermocouple. Among them, the measurement chamber vacuum gauge is connected to the measurement vacuum chamber and is used to collect the air pressure in the measurement vacuum chamber during the laser degassing process of the sample. The injection chamber vacuum gauge is connected to the injection vacuum chamber and is used to collect the air pressure in the injection vacuum chamber during the laser degassing process of the sample. The quadrupole mass spectrometer is connected to the measurement vacuum chamber and is used to collect the gas composition in the measurement vacuum chamber during the laser degassing process of the sample. The thermocouple is connected to the measurement vacuum chamber and is used to collect the temperature in the measurement vacuum chamber during the laser degassing process of the sample.

[0009] The described laser emission system includes a Nd:YAG laser, a laser power supply, and optical components. Among them, the Nd:YAG laser is coupled with the measurement vacuum chamber and is connected to the laser power supply. The laser emitted by the Nd:YAG laser passes through the optical components so that the laser focus is exactly located on the surface of the measurement sample.

[0010] The described standard gas cylinder is connected to the injection vacuum chamber through a gas source valve and is used to fill the injection vacuum chamber with inert gas.

[0011] Further, the measurement vacuum chamber and the injection vacuum chamber are spheres made of 316 stainless steel.

[0012] Further, a multi-dimensional sample stage is arranged in the measurement vacuum chamber. The multi-dimensional sample stage includes a sample stage adjusting rod and a manipulator interface. Among them, the sample stage adjusting rod is used to adjust the position of the measurement sample and change the position of laser ablation. The manipulator interface is used to connect the sample delivery manipulator.

[0013] Further, a multi-layer sample rack is arranged in the injection vacuum chamber. The outside of the injection vacuum chamber is connected to the sample delivery manipulator. During measurement, the manual gate valve is opened, and the sample to be measured in the injection vacuum chamber is sent to the multi-dimensional sample stage in the measurement vacuum chamber through the sample delivery manipulator. If multiple samples are measured, the manual gate valve is opened, and the sample that has been measured in the measurement vacuum chamber is taken out by the sample delivery manipulator and placed back on the multi-layer sample rack in the injection vacuum chamber, and other samples to be measured are taken out by the sample delivery manipulator and sent to the measurement vacuum chamber.

[0014] Further, the measurement vacuum chamber and the injection vacuum chamber are isolated by the manual gate valve to prevent the sample to be measured in the injection vacuum chamber from affecting the degassing characteristics of the measurement sample in the measurement vacuum chamber, and at the same time prevent the gas released by the measurement sample from contaminating other samples to be measured.

[0015] Further, the Nd:YAG laser is a femtosecond laser with adjustable pulse width, power, and spot diameter.

[0016] Further, the laser power supply is a pulsed xenon discharge power supply, which is used to provide 220V, 10Hz alternating current for the Nd:YAG laser.

[0017] Further, the optical component includes: a plane mirror, a polarization cube, and a plano-convex focusing lens. The laser emitted by the Nd:YAG laser is refracted by the plane mirror and then passes through the polarization cube, and then is focused by the plano-convex focusing lens and refracted by the plane mirror again, so that the laser focus is exactly located on the surface of the measurement sample.

[0018] Compared with the prior art, the present utility model has the following advantages:

[0019] A device for measuring the laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment provided by the present utility model can continuously analyze and measure the laser outgassing and outgassing components of multiple different samples without destroying the high-vacuum environment.

[0020] Based on the above reasons, the present utility model can be widely promoted in the fields such as the measurement of the outgassing rate of materials. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is the overall system structure block diagram of a device for measuring the laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment of the present utility model.

[0023] Figure 2 It is the structural schematic diagram of a device for measuring the laser outgassing characteristics of strong-field materials in an ultra-high vacuum environment of the present utility model.

[0024] Figure 3 It is the schematic diagram of the sample stage in the measurement chamber of the present utility model.

[0025] Figure 4 It is the schematic diagram of the laser optical path of the present utility model.

[0026] Figure 5 It is the background mass spectrometry signal diagram collected by the quadrupole mass spectrometer of the present utility model.

[0027] Figure 6 It is the curve of the background air pressure in the measurement chamber changing with time collected by the vacuum gauge in the measurement chamber of the present utility model.

[0028] Figure 7 It is the schematic diagram of the laser heating principle of the present utility model.

[0029] Figure 8This is the measurement flow chart of the device of the present utility model.

[0030] In the figure: A, vacuum system; B, vacuum pumping system; C, data acquisition module; D, laser emission system; E, heating system; 1, measurement vacuum chamber; 2, sample injection vacuum chamber; 3, gate valve of measurement chamber; 4, gate valve of sample injection chamber; 5, molecular pump of measurement chamber; 6, molecular pump of sample injection chamber; 7, mechanical pump of measurement chamber; 8, mechanical pump of sample injection chamber; 9, vacuum gauge of measurement chamber; 10, vacuum gauge of sample injection chamber; 11, quadrupole mass spectrometer; 12, thermocouple; 13, Nd:YAG laser; 14, laser power supply; 15, manual gate valve; 16, gas source valve; 17, sample feeding manipulator; 18, standard gas cylinder; 19, plane reflector; 20, polarization cube; 21, plano-convex focusing lens; 22, measurement sample. Specific embodiments

[0031] It should be noted that, without conflict, the embodiments in the present utility model and the features in the embodiments can be combined with each other. The present utility model will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0032] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way restrictive of the present utility model and its application or use. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0033] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments of the present utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of the described features, steps, operations, devices, components and / or their combinations.

[0034] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be clear that, for the sake of convenience of description, the sizes of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific values should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0035] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom" are generally based on the orientation or positional relationships shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description. Without contrary instructions, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as limiting the protection scope of the present utility model: the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0036] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above" can be used here to describe the spatial positional relationships of a device or feature shown in the drawings with other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned as "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0037] In addition, it should be noted that the use of words such as "first", "second" to limit components is only for the convenience of differentiating the corresponding components. Without otherwise stating, the above words have no special meanings. Therefore, it should not be construed as limiting the protection scope of the present utility model.

[0038] Such asFigure 1 As shown in the figure, the present utility model provides a measuring device for the laser outgassing characteristics of strong field materials in an ultra-high vacuum environment, including: a vacuum system A, a vacuum pumping system B, a data acquisition system C, a laser emission system D, and a standard gas cylinder 18, wherein:

[0039] As Figure 2 shown in the figure, the vacuum system includes a measurement vacuum chamber 1, a sample introduction vacuum chamber 2, and a manual gate valve 15; wherein, the measurement vacuum chamber 1 and the sample introduction vacuum chamber 2 are connected by the manual gate valve 15;

[0040] As Figure 2 shown in the figure, the vacuum pumping system includes a measurement chamber molecular pump 5, a sample introduction chamber molecular pump 6, a measurement chamber mechanical pump 7, and a sample introduction chamber mechanical pump 8; wherein, one end of the measurement chamber molecular pump 5 is connected to the measurement vacuum chamber 1 through a measurement chamber gate valve 3, and the other end is connected to the measurement chamber mechanical pump 7; one end of the sample introduction chamber molecular pump 6 is connected to the sample introduction vacuum chamber 2 through a sample introduction chamber gate valve 4, and the other end is connected to the sample introduction chamber mechanical pump 8;

[0041] As Figure 2 shown in the figure, the data acquisition system includes a measurement chamber vacuum gauge 9, a sample introduction chamber vacuum gauge 10, a quadrupole mass spectrometer 11, and a thermocouple 12; wherein, the measurement chamber vacuum gauge 9 is connected to the measurement vacuum chamber 1 and is used to collect the air pressure in the measurement vacuum chamber 1 during the laser outgassing process of the sample, the sample introduction chamber vacuum gauge 10 is connected to the sample introduction vacuum chamber 2 and is used to collect the air pressure in the sample introduction vacuum chamber 2 during the laser outgassing process of the sample; the quadrupole mass spectrometer 11 is connected to the measurement vacuum chamber 1 and is used to collect the gas components in the measurement vacuum chamber 1 during the laser outgassing process of the sample; the thermocouple 12 is connected to the measurement vacuum chamber 1 and is used to collect the temperature in the measurement vacuum chamber 1 during the laser outgassing process of the sample; in this embodiment, the measurement chamber vacuum gauge 9, the sample introduction chamber vacuum gauge 10, the quadrupole mass spectrometer 11, and the thermocouple 12 communicate with a computer to complete the real-time display and collection of data. It can realize the real-time monitoring of the physical changes of the measured sample.

[0042] As Figure 2 shown in the figure, the laser emission system includes a Nd:YAG laser 13, a laser power supply 14, and optical components; wherein, the Nd:YAG laser 13 is coupled to the measurement vacuum chamber 1 and is connected to the laser power supply 14; the laser emitted by the Nd:YAG laser 13 passes through the optical components so that the laser focus is exactly located on the surface of the measured sample 22;

[0043] As Figure 2As shown, the standard gas cylinder 18 is connected to the sampling vacuum chamber 2 through a gas source valve 16 and is used to fill the sampling vacuum chamber 2 with an inert gas. In this embodiment, the standard gas cylinder 18 provides an inert gas to be filled into the sampling vacuum chamber for breaking the vacuum to take and place samples before and after the experiment, and to protect the inner wall of the vacuum chamber from being contaminated by impurities in the air.

[0044] During specific implementation, as a preferred implementation manner of the present utility model, the measurement vacuum chamber 1 and the sampling vacuum chamber 2 are spheres made of 316 stainless steel. After being baked at 150 °C for 12 hours, their outgassing rates are much less than 6.6×10 -12 Pa·m 3 / (s·cm 2 ).

[0045] During specific implementation, as a preferred implementation manner of the present utility model, as Figure 3 shown, the measurement vacuum chamber 1 is used to place the measurement material and is internally provided with a sample stage that can move in four dimensions of x, y, z, and r. The multi-dimensional sample stage includes a sample stage adjustment rod and a manipulator interface; among them, the sample stage adjustment rod is used to adjust the position of the measurement sample and change the position of laser ablation; the manipulator interface is used to connect the sample delivery manipulator 17.

[0046] During specific implementation, as a preferred implementation manner of the present utility model, multiple layers of sample racks are arranged in the sampling vacuum chamber 2, and the outside of the sampling vacuum chamber 2 is connected to the sample delivery manipulator 17; by adjusting the height of the sample racks and the cooperation of the manual gate valve 15 and the sample delivery manipulator 17, continuous measurement of multiple samples can be realized without breaking the vacuum. That is: open the manual gate valve 15, and send the sample to be measured in the sampling vacuum chamber 2 into the multi-dimensional sample stage of the measurement vacuum chamber 1 through the sample delivery manipulator 17; if multiple samples are to be measured, open the manual gate valve 15, use the sample delivery manipulator 17 to take out the sample that has been measured in the measurement vacuum chamber 1 and put it back on the multi-layer sample rack in the sampling vacuum chamber 2, and use the sample delivery manipulator 17 to take out other samples to be measured and send them into the measurement vacuum chamber 1.

[0047] During specific implementation, as a preferred implementation manner of the present utility model, the measurement vacuum chamber 1 and the sampling vacuum chamber 2 are isolated by using the manual gate valve 15 to prevent the sample to be measured in the sampling vacuum chamber 2 from affecting the outgassing characteristics of the measurement sample in the measurement vacuum chamber 1, and at the same time prevent the gas released by the measurement sample from contaminating other samples to be measured. In this embodiment, the measurement vacuum chamber 1, the sampling vacuum chamber 2, and the flange joints connected thereto are all processed by a high-precision machine tool to ensure that their structures and dimensions are the same. The processing process adopts ultra-high vacuum treatment, including cleaning, high-temperature annealing, and coating. During use, the overall baking and degassing treatment is carried out regularly, and the baking temperature is set at 150 °C.

[0048] In specific implementation, as a preferred implementation manner of the present utility model, the Nd:YAG laser 13 is a femtosecond laser with adjustable pulse width, power, and spot diameter.

[0049] In specific implementation, as a preferred implementation manner of the present utility model, the laser power supply 14 is a pulsed xenon discharge power supply, which is used to provide 220V, 10Hz alternating current for the Nd:YAG laser 13. In this embodiment, the pulsed xenon discharge power supply and the water circulation refrigeration machine are integrated together. Internal circulation distilled water cooling and external circulation air cooling are adopted. It is internally provided with a cooling fan, a water tank, a heat exchanger, a temperature probe, a filter, a temperature alarm, a flow switch, etc.

[0050] In specific implementation, as a preferred implementation manner of the present utility model, as Figure 4 shown, the optical components include: a plane mirror 19, a polarization cube 20, and a plano-convex focusing lens 21; wherein, the laser emitted by the Nd:YAG laser 13 is refracted by the plane mirror 19 and then passes through the polarization cube 20, and then is focused by the plano-convex focusing lens 21 and refracted by the plane mirror again, so that the laser focus is exactly located on the surface of the measurement sample 22. In this embodiment, appropriate laser parameters (such as pulse width, spot size) are used in combination with corresponding optical devices to perform laser ablation on the surface of the sample to be measured. The heat conduction process of the laser-vaporized material can be described by the one-dimensional heat flow equation, that is:

[0051]

[0052] wherein, T is the temperature, ρ is the mass density of the sample to be measured, k is the specific heat capacity of the sample to be measured, A is the surface absorptivity of the sample to be measured, I0 is the incident laser intensity, z is the normal direction of the sample to be measured, and α is the absorption coefficient of the sample to be measured.

[0053] For the surface temperature of the sample to be measured after laser heating, for femtosecond laser, due to its short action time and the end of the laser before the electrons reach thermal equilibrium relaxation time with the material lattice, the heat conduction term in the one-dimensional heat flow equation is ignored The equation becomes:

[0054]

[0055] When the laser pulse ends, the surface temperature of the material is:

[0056]

[0057] wherein, F l is the laser energy density, and the value is F l =I0τ l . Further, it can be obtained from the energy conservation equation that the temperature of the material surface after the pulse width ends is:

[0058]

[0059] Among them, I l is the laser power density, τ l is the incident laser pulse width. Therefore, during the measurement process, under the conditions of given laser wavelength and pulse width, the desorption of all gases in the laser irradiation area of ​​the sample to be measured can be achieved by changing the output energy of the laser. (The calculation formulas involved above all belong to the prior art and are not within the scope of protection of this application).

[0060] Example

[0061] The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment provided by the embodiment of the utility model is applied to specific scenarios, such as Figure 8 As shown, including:

[0062] Step 1: Heat and degas the vacuum chamber and the sample holder in advance. In this embodiment, heating and degassing are performed using a heating system E, which belongs to the prior art, so the system is not described in detail here.

[0063] Step 2, after cleaning and drying the sample to be tested, place it into the sample injection vacuum chamber 2;

[0064] Step 3, open the measuring chamber vacuum gauge 9, the injection chamber vacuum gauge 10, the thermocouple 12, the manual gate valve 14, the measuring chamber mechanical pump 7, the injection chamber mechanical pump 8, the measuring chamber gate valve 3, and the injection chamber gate valve 4 in sequence to evacuate the system; when it is detected that the measuring chamber vacuum gauge 9 and the injection chamber vacuum gauge 10 are both less than 10 -1 When Pa, the molecular pump 5 in the measuring chamber and the molecular pump 6 in the injection chamber are turned on.

[0065] Step 4: Close the manual gate valve 15 and wait until the vacuum gauge 16 in the measuring chamber reaches 10. -3 The quadrupole mass spectrometer 11 is turned on when the pressure drops below 0.5 Pa. The changes of the gas pressure and gas composition in the vacuum chamber 1 are observed and recorded within 24 hours as background outgassing data.

[0066] Step 5: After the background outgassing data is recorded, the manual gate valve 15 is opened, and the sample to be tested in the sample feeding vacuum chamber 2 is sent to the sample stage of the measuring vacuum chamber 1 by the sample sending manipulator 17 .

[0067] Step 6, close the manual gate valve 15, adjust the sample stage to a suitable position through the sample stage adjustment rod, turn on the laser power supply 14, adjust the appropriate parameters and use the laser 13 to perform thermal desorption of the gas on the sample to be tested.

[0068] Step 7: Observe and record the changes in the air pressure and gas composition in the vacuum chamber 1 after laser outgassing within 24 hours.

[0069] Step 8: If multiple samples are to be measured, open the manual gate valve 15, use the sample feeding manipulator 17 to take out the measured samples in the measurement vacuum chamber 1 that have completed measurement, place them back on the multi-layer sample rack in the sample injection vacuum chamber 2, use the sample feeding manipulator 17 to take out other samples to be measured and send them into the measurement vacuum chamber 1, and repeat Step 6 and Step 7.

[0070] Step 9: After the test is completed, turn off the measuring instrument. Close the gate valve 3 of the measurement chamber and the gate valve 4 of the sample injection chamber. The system stops pumping, open the gas source valve 16 to fill the vacuum chamber with high-purity nitrogen. After the chamber pressure is balanced with the external pressure, open the sample injection vacuum chamber 2 to take out all the samples to be measured and complete data acquisition.

[0071] Step 10: Calculate the gas flow rate Q released at each moment. The calculation formula is Q = C×P, where C is the volume of the measurement vacuum chamber 1 and P is the reading of the vacuum gauge 9 in the measurement chamber at the current moment. As Figure 6 shown, it is the curve of the background air pressure in the measurement chamber collected by the vacuum gauge in the measurement chamber changing with time;

[0072] Step 11: Take the derivative of the gas flow rate Q calculated in Step 10 with respect to time t to obtain the outgassing rate q at the current moment;

[0073] Step 12: As Figure 5 shown, it is the background mass spectrum signal diagram collected by the quadrupole mass spectrometer 11; process the data of the gas components and the samples to be measured collected by the quadrupole mass spectrometer 11, and obtain the changes of components such as H2, O2, CO2, N2 / CO, CH4, etc. in the gas after laser thermal desorption outgassing by identifying the molecular mass numbers.

[0074] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment, characterized in that: include: A vacuum system (A), a vacuum pumping system (B), a data acquisition system (C), a laser emission system (D) and a standard gas cylinder (18), wherein: The vacuum system (A) comprises a measuring vacuum chamber (1), a sampling vacuum chamber (2) and a manual gate valve (15); wherein the measuring vacuum chamber (1) and the sampling vacuum chamber (2) are connected via the manual gate valve (15); The vacuum pumping system (B) comprises a measuring chamber gate valve (3), an injection chamber gate valve (4), a measuring chamber molecular pump (5), an injection chamber molecular pump (6), a measuring chamber mechanical pump (7) and an injection chamber mechanical pump (8); wherein one end of the measuring chamber molecular pump (5) is connected to the measuring vacuum chamber (1) via the measuring chamber gate valve (3), and the other end is connected to the measuring chamber mechanical pump (7); one end of the injection chamber molecular pump (6) is connected to the injection vacuum chamber (2) via the injection chamber gate valve (4), and the other end is connected to the injection chamber mechanical pump (8); The data acquisition system (C) comprises a measuring chamber vacuum gauge (9), an injection chamber vacuum gauge (10), a quadrupole mass spectrometer (11) and a thermocouple (12); wherein the measuring chamber vacuum gauge (9) is connected to the measuring vacuum chamber (1) and is used to collect the gas pressure of the measuring vacuum chamber (1) during the laser degassing of the sample; the injection chamber vacuum gauge (10) is connected to the injection vacuum chamber (2) and is used to collect the gas pressure of the injection vacuum chamber (2) during the laser degassing of the sample; the quadrupole mass spectrometer (11) is connected to the measuring vacuum chamber (1) and is used to collect the gas composition of the measuring vacuum chamber (1) during the laser degassing of the sample; and the thermocouple (12) is connected to the measuring vacuum chamber (1) and is used to collect the temperature of the measuring vacuum chamber (1) during the laser degassing of the sample; The laser emission system (D) comprises a Nd:YAG laser (13), a laser power supply (14) and an optical component; wherein the Nd:YAG laser (13) is coupled to a measurement vacuum chamber (1) and connected to the laser power supply (14); the laser light emitted by the Nd:YAG laser (13) passes through the optical component so that the laser focus is located on the surface of the measurement sample (22); The standard gas cylinder (18) is connected to the sample injection vacuum chamber (2) via a gas source valve (16) and is used to fill the sample injection vacuum chamber (2) with inert gas.

2. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: The measuring vacuum chamber (1) and the sampling vacuum chamber (2) are spheres made of 316 stainless steel.

3. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: A multi-dimensional sample stage is arranged in the measurement vacuum chamber (1), and the multi-dimensional sample stage comprises a sample stage adjustment rod and a manipulator interface; wherein the sample stage adjustment rod is used to adjust the position of the measurement sample and change the position of laser ablation; and the manipulator interface is used to connect a sample delivery manipulator (17).

4. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: A multi-layer sample rack is arranged in the sample injection vacuum chamber (2), and a sample delivery robot (17) is connected to the outside of the sample injection vacuum chamber (2).

5. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: The Nd:YAG laser (13) is a femtosecond laser with adjustable pulse width, power and spot diameter.

6. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: The laser power supply (14) is a pulsed xenon discharge power supply, which is used to provide 220V, 10Hz alternating current to the Nd:YAG laser (13).

7. The device for measuring the laser outgassing characteristics of a strong field material in an ultra-high vacuum environment according to claim 1, characterized in that: The optical components include: a plane reflector (19), a polarization cube (20), and a plano-convex focusing mirror (21); wherein the laser light emitted by the Nd:YAG laser (13) is refracted by the plane reflector (19) and then passes through the polarization cube (20), and then is focused by the plano-convex focusing mirror (21) and then refracted again by the plane reflector, so that the laser focus is located exactly on the surface of the measurement sample (22).

Images