Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

93results about "Electrode assembly manufacture" patented technology

Electrode assembly for high-power pulse xenon lamp and preparation method thereof

The invention discloses an electrode assembly for a high-power pulse xenon lamp and a preparation method of the electrode assembly, and aims to overcome the technical defects that a traditional electrode is large in mass and poor in reliability and stability. The electrode assembly is mainly composed of an electrode tip, an electrode stem and a lead seat which are made of cerium-tungsten alloy, niobium and stainless steel. The electrode tip and the electrode rod are stably connected in a mode of combining brazing with interference connection, and the electrode rod and the lead seat adopt a multi-connection structure of brazing, threaded mechanical connection and micro interference connection; the assembled electrode assembly is subjected to degassing, brazing connection and electrode activation treatment at a time in a high-temperature and high-vacuum environment, and the problem of electrode material pollution caused by repeated heating is effectively avoided. The electrode assembly is simple in overall structure, reliable in preparation, excellent in current passing ability, capable of bearing impact force under extreme working conditions and outstanding in burning loss resistance, reliability and stability are remarkably improved, and the long-term stable working requirement and large-scale mass production of the high-power pulse xenon lamp are met.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Automatic threading machine

The utility model discloses an automatic threading machine which comprises a machine table, a molybdenum wire storage mechanism, a vertical frame and a double-shaft transfer platform are sequentially arranged on the upper surface of the machine table, a threading receiving arm and a threading arm which are perpendicular to each other are arranged on the vertical frame, a lead screw is arranged on one side of a lifting guide rod, the upper end of the lead screw is rotatably connected with the lifting guide rod in a penetrating mode, and a gear is fixedly installed at the upper end of the lead screw. A fixing plate is fixedly installed on the side face of the fixing platform, an air cylinder is fixedly installed on the fixing plate, the air cylinder is in driving connection with a telescopic rod, a guide wire lifting table is fixedly installed at the lower end of the telescopic rod, a guide wire nozzle is arranged in the middle of the guide wire lifting table, and the guide wire nozzle is arranged on the guide wire hollow needle in a sliding and sleeving mode. The guide wire hollow needle head is assisted in vertically descending, the stability and accuracy of the guide wire of the guide wire hollow needle head are improved, the automation degree is high, and manual operation is reduced.
Owner:SUZHOU RUIJUN INTELLIGENT TECH CO LTD

Electric field deflector, preparation method thereof and electric field deflection control system

The invention discloses an electric field deflector, a preparation method thereof and an electric field deflection control system, relates to the field of semiconductors, and is used for realizing high-precision control of electron beams. The electric field deflector comprises a substrate, a dielectric layer arranged on one side of the substrate, a first signal interconnection lead connected with the ground electrode, a second signal interconnection lead connected with the signal electrode, a first deflection electrode and a second deflection electrode, wherein the first signal interconnection lead and the second signal interconnection lead are located in the dielectric layer and are connected with the ground electrode, and the first deflection electrode and the second deflection electrode are oppositely arranged. The first deflection electrode is electrically connected with the first signal interconnection lead, and the second deflection electrode is electrically connected with the second signal interconnection lead; the first shielding layer is connected with the first deflection electrode; the particle beam channel penetrates through the area between the first deflection electrode and the second deflection electrode, the part, located between the first signal interconnection lead and the second signal interconnection lead, of the dielectric layer, the first shielding layer and the substrate in the second direction; the second direction is vertical to the substrate; the electric field deflector is used for electric field deflection control of the charged particle beam.
Owner:SHENZHEN XINMAIPU ELECTRONIC TECHNOLOGY CO LTD

Method for simply and quickly installing dynode of electron multiplier

The invention discloses a method for simply and rapidly installing a dynode of an electron multiplier, and belongs to the field of electron multiplier assembly. According to the method, extra tools are not needed, and only three long screws and a pair of pointed tweezers need to be additionally used. According to the method, the problem that time and labor are wasted when the ceramic plate of the multiplier and nine dynodes are folded and aligned is solved, and the installation of the dynodes can be effectively accelerated. During installation, the three long screws are inserted into the through holes of the ceramic plate bottom plate, then the screws are sleeved with the limiting stainless steel cylinders respectively, then the nine dynodes and the collecting plate are sequentially installed on the ceramic plate bottom plate, then the ceramic plate top plate is sleeved with the three screws, the hexagonal studs are screwed, and the ceramic plate top plate is installed on the ceramic plate bottom plate. And the distance between the top and bottom ceramic plates is about 4mm longer than that of the limiting stainless steel cylinder. The nine dynodes and the collecting plate are sequentially stirred through pointed tweezers, the upper feet of the dynodes and the collecting plate enter the small mounting holes corresponding to the top plate of the ceramic plate, the lower feet of the dynodes do not leave the small mounting holes corresponding to the bottom ceramic plate, and the top ceramic plate and the bottom ceramic plate are tightened after completion. And the long screws are replaced by the original screws of the multiplier in sequence, and the dynode is assembled.
Owner:ZHEJIANG UNIV +1

Magneto-electrostatic sensing, focusing, and steering of electron beams in vacuum electron devices

ActiveUS12463000B2Transit-tube electron/ion gunsTravelling-wave tubesManufacturing technologyParticle physics
Vacuum electron devices (VEDs) are produced having a plurality of two-dimensional layers of various materials that are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together using brazing, diffusion bonding, assisted diffusion bonding, solid state bonding, cold welding, ultrasonic welding, and the like. The manufacturing process enables incorporation of metallic, magnetic, and ceramic materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability. The VEDs so produced include a combination of magnetic and electrostatic lenses for electron beam control.
Owner:ELVE INC

A cascade coaxial virtual cathode reflex triode array and method of assembling same

The present application relates to coaxial reflection triode and its assembling method, specifically relates to a kind of coaxial virtual cathode reflection triode array and its assembling method, solve the pulse hard X-ray utilization efficiency of plane type reflection triode is lower, application exists limitation, it is difficult to realize series connection, or the technical problems, such as the structure of coaxial reflection triode is complex, pulse hard X-ray utilization efficiency is lower.The present application is based on the coaxial reflection triode to remove the inner cathode, in the working process, electron passing through anode foil forms virtual cathode in the inside of anode;Through the circular hole of anode foil and suspension electrode installed on anode pedestal, and the circular hole of anode foil and ground cathode installed on suspension electrode, form two-stage series-connected triode array;Array arrangement is used to adjust radiation field distribution, improve the utilization efficiency of pulse hard X-ray;Through series connection work, it can be applied to large high-voltage pulse source, further improve the radiation intensity of pulse hard X-ray.
Owner:NORTHWEST INST OF NUCLEAR TECH

Brazing structure, brazing method, and x-ray tube

The present disclosure relates to a brazing structure. The brazing structure may comprise a first portion and a second portion. At least one of the first portion or the second portion may include a connection-reinforcing surface. The connection-reinforcing surface may include a groove region and a filler placement region. The filler placement region may be configured to hold a filler material in solid state before brazing. The groove region may include a plurality of grooves where the filler material flows into after being melted. The first portion and the second portion may be connected by a braze joint formed by the filler material.
Owner:WUHAN UNITED IMAGING HEALTHCARE CO LTD

A correction device for a magnetron anode antenna

The present application relates to the technical field of mechanical equipment, disclose a kind of magnetron anode antenna's correction device.Correction device includes fixed frame, workbench and correction component;Correction component includes rotary drive structure and multiple clamping correction structures, rotary drive structure is slidably arranged on the side of fixed frame, multiple clamping correction structures are rotatably arranged on rotary drive structure, and each anode cylinder is coaxially arranged with each clamping correction structure, and clamping correction structure is used to clamp and correct the antenna, so that the antenna is concentrically arranged with the anode cylinder;Rotary drive structure drives clamping correction structure to drive antenna to rotate to eliminate the stress after antenna correction.By setting multiple clamping correction structures, the correction device can not only be one-to-one correction, but also multiple anode components can be corrected simultaneously, to improve work efficiency and versatility.
Owner:SHENZHEN TENSUN IND EQUIP

Anode assembly and method of processing thereof

The application belongs to the technical field of X-ray tubes, and discloses an anode assembly and a processing method thereof. The anode assembly comprises a molybdenum reflector, a molybdenum rotor assembly and an intermediate layer. The intermediate layer is made of metal material and is arranged between the molybdenum reflector and the molybdenum rotor assembly by using the processing method. In the heating process, the intermediate layer can effectively absorb and buffer thermal stress and shrinkage stress generated from the molybdenum components on both sides due to heating and cooling through plastic deformation of the intermediate layer, thereby greatly reducing the risk of micro-cracks caused by stress concentration. Moreover, since the chemical affinity of the intermediate layer to impurity atoms is higher than that of molybdenum material, in a protective atmosphere or a vacuum environment, the intermediate layer can be ensured to preferentially react with the harmful impurities in the interface area during the welding process to form stable compounds, thereby preventing the impurities from segregating at the grain boundaries of molybdenum, significantly improving the microstructure and toughness of the molybdenum heat-affected zone, and enhancing the anti-grain boundary cracking ability.
Owner:苏州益腾电子科技有限公司

Junction between hexaboride-containing and tantalum-containing components

Apparatus and methods are disclosed for a mechanically stable, long-life junction between hexaboride-containing and tantalum-containing components. Examples are used as a cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded to a hexaboride electrode. Some embodiments use a tantalum adapter and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto a filament and the electrode then welded to the adapter.
Owner:FEI CO

System and method for laser structuring of x-ray tube component surfaces

A system and method of texturing a surface of an X-ray tube component, which comprises applying laser radiation to the surface of the X-ray component to remove material from the surface of the X-ray tube component by producing a pattern of varying structures on the surface of the X-ray tube component to improve the emissivity of the X-ray tube component.
Owner:GE PRECISION HEALTHCARE LLC

Plane micro-nano vacuum diode based on self-packaging vacuum channel and preparation method thereof

The invention discloses a planar micro-nano vacuum diode based on a self-packaging vacuum channel. The diode comprises a substrate and a hyperbolic nanostructure, the hyperbolic nanostructure is arranged on the upper surface of the substrate, and the hyperbolic nanostructure comprises a nano micro-tip cathode, a nano micro-tip anode, a self-packaging oxide layer and a vacuum channel; the nanometer micro-tip cathode and the nanometer micro-tip anode are located on a first straight line, and a gap between the tip of the nanometer micro-tip cathode and the tip of the nanometer micro-tip anode is a vacuum channel; and the self-packaging oxide layer wraps the nano micro-tip cathode, the vacuum channel and the nano micro-tip anode. The diode has the characteristic that the diode does not depend on a high-vacuum-degree environment.
Owner:SUN YAT SEN UNIV

Energy tuner for a gated field emission cathode device, and associated method

A field emission cathode device includes a cathode element having a field emission surface and an adjacent gate electrode element defining a first gap therebetween. A gate voltage applied to the gate electrode element causes the field emission surface to emit electrons that are accelerated through the gate electrode element. The gate electrode element is disposed between the cathode element and an anode element, the anode element having an anode voltage applied thereto to attract the electrons emitted through the gate electrode element. A tuning electrode element is disposed between the gate electrode element and the anode element. The tuning electrode element has a tuning voltage applied thereto to decelerate the electrons directed through the gate electrode element and to direct the electrons therethrough toward the anode element. An associated method of forming a field emission cathode device is also provided.
Owner:NCX CORP

A welding method for electron gun cathode heat shield assembly

The present invention provides a method for welding a cathode heat shield assembly of an electron gun, wherein the cathode heat shield assembly includes a heat shield tube, a cathode assembly, and a heater assembly. The cathode assembly includes a cathode tube, a cathode cake, and a cathode support tube sleeved around the outer circumference and lower end of the cathode tube, wherein a heater passage hole is formed at the bottom of the cathode support tube. The welding method for the cathode heat shield assembly includes the following steps: a pressing step: applying pre-pressure to the cathode tube and the cathode support tube to compress the contact surfaces of the cathode tube and the cathode support tube to form a conductive path; a resistance welding step: applying power to the cathode tube and the cathode support tube to form a molten core at the connection between the cathode tube and the cathode support tube; and a power-off forging step: stopping power to the cathode tube and the cathode support tube and maintaining pressure between the cathode tube and the cathode support tube to allow the molten core to cool and crystallize. Through the above welding method, sufficient bonding force between the cathode tube and the cathode support tube is ensured, and the electron emission effect of the cathode is improved.
Owner:山东微波电真空技术有限公司

Multilayer vacuum electronic device and manufacturing method

ActiveJP7794930B2Transit-tube vessels/containersTransit-tube electron/ion guns
SOLUTION: To joint vacuum electronic devices (VEDs) having a plurality of two-dimensional layers formed of different materials and create at least one VED at the same time, a two-dimensional material layer being mechanically processed to include features necessary for device operations to form features of a three-dimension when the two-dimensional material layer is assembled and is joined and becomes a three-dimensional structure and the two-dimensional layers being joined together to have a structure similar to a sandwich.EFFECT: This manufacturing step makes it possible to built in a metal material, a magnetic material, a ceramic material, and other materials which are necessary to manufacture a VED while maintaining a required positional accuracy and a large number of devices for a batch capacity.SELECTED DRAWING: Figure 1
Owner:エルヴ·インコーポレーテッド

Multi-layer vacuum electron device and method of manufacture

PendingUS20250182994A1Transit-tube electron/ion gunsTravelling-wave tubesAtomic physicsChemistry
Vacuum electron devices (VEDs) having a plurality of two-dimensional layers of various materials are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together into a sandwich-like structure. The manufacturing process enables incorporation of metallic, magnetic, ceramic materials, and other materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability.
Owner:ELVE INC

X-ray tube and method of manufacturing an x-ray tube

An X-ray tube according to an embodiment includes a periphery that keeps the inside in vacuum, an anode target that generates X-rays by collision of hot electrons, and a cathode electron gun that emits the hot electrons to the anode target, and includes a periphery assembly that has a metal cylindrical support body fixing portion and constitutes the periphery, and a cathode assembly that has a metal support body that holds the cathode electron gun at a front end portion, and in the support body fixing portion, the support body of the cathode assembly is fixed at an inner peripheral side by welding.
Owner:CANON ELECTRON TUBES & DEVICES CO LTD

Method for preparing multi-layer composite anode matrix through diffusion bonding

The invention provides a method for preparing a multi-layer composite anode matrix by diffusion bonding, which comprises the following steps of: designing and processing according to the shape requirement of the composite anode matrix to obtain a basic component of the composite anode matrix, and then carrying out sheath forming, hot isostatic pressure diffusion bonding treatment, machining and high-temperature exhaust treatment to obtain a finished product of the composite anode matrix. The preparation method is high in production efficiency, and the prepared composite anode matrix has the advantages of being high in high-temperature strength and high in dynamic balance precision.
Owner:BEIJING TIANLONG TUNGSTEN & MOLYBDENUM TECH CO LTD +2

Electron gun device

An electron gun device (10), in particular for an X-ray tube (12), is proposed, comprising: a metallic first electrode (14) having a first electrode contact surface (16); a metallic second electrode (18) having a second electrode contact surface (20); and a ring-shaped ceramic insulator (22) having a first insulator contact surface (24) on a first side with respect to an axial direction (26) of the insulator (22) and a second insulator contact surface (28) on an opposite second side with respect to the axial direction (26), wherein, in an assembled state, the first insulator contact surface (24) faces the first electrode contact surface (16) and is connected to the first electrode contact surface (16) via a first brazing joint (30), and the second insulator contact surface (28) faces the second electrode contact surface (20) and is connected to the second electrode contact surface (20) via a second brazing joint (32).
Owner:COMET AG

Field emitter assembly

Apparatus and methods are disclosed for a mechanically stable, long-life, cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded between a hexaboride electrode and a metal filament. Some embodiments use a tungsten filament, a tantalum adapter, and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto the filament and the electrode then welded to the adapter.
Owner:FEI CO

A solder, a solder paste, a magnetron cathode assembly and a method of making the same

The application discloses a kind of solder, solder slurry, magnetron cathode assembly and preparation method thereof, it is related to magnetron cathode assembly field.Therein, solder is obtained by 15-40wt% tungsten, 30-60wt% molybdenum and 15-40wt% nickel mixed ball milling.Solder slurry includes organic carrier, solvent and solder, organic carrier is 5-15% of the weight of the solder, solvent is 5-20% of the weight of the solder.Lamp filament and molybdenum end cap in magnetron cathode assembly are brazed using the above-mentioned solder, specific operation method is that solder slurry is coated on molybdenum end cap, sintering forms solder layer, then again heating melts solder layer to weld and fix lamp filament and molybdenum end cap.The solder in the present application has the advantages of low cost, low brazing temperature and wide range, low vapor pressure, can improve the welding effect of lamp filament and molybdenum end cap while reducing the bubbling probability of molybdenum end cap, so as to improve the qualified rate of finished product of magnetron cathode assembly.
Owner:佛山市海欣光电科技有限公司

Tool for sealing travelling wave tube cathode supporting assembly

The utility model discloses a tool for sealing a cathode supporting assembly of a traveling wave tube, relates to the technical field of traveling wave tube assembly, and is mainly used for solving the defects of the conventional tool for sealing. According to the main structure, the device comprises a base, the upper surface of the base is connected with an emitter installation boss, the outer side of the emitter installation boss is sleeved with a positioning sleeve, and the inner wall of the positioning sleeve is provided with a positioning step; a pressing cap is arranged above the positioning sleeve, an emitter pressing block is arranged below the pressing cap, a supporting seat pressing block is arranged on the upper surface of the pressing cap, and a supporting frame pressing block is arranged on the upper surface of the supporting seat pressing block. The utility model provides a tool for sealing a traveling wave tube cathode support assembly, which can effectively fix each part of the cathode support assembly in the brazing process and avoid displacement of each part.
Owner:CHENGDU GUOGUANG ELECTRIC

Electron gun and assembling method thereof

PendingCN120432366ATransit-tube electron/ion gunsElectrode and associated part arrangementsParticle physicsDark current
The invention discloses an electron gun and an assembling method thereof, and relates to the technical field of electron guns, a first mounting area, a first sealing element and a cathode are subjected to press fitting at room temperature to form the electron gun; the first sealing element is respectively attached to the first mounting area and the cathode, and forms a first sealing pair and a second sealing pair with the first mounting area and the cathode respectively, so that the effective sealing performance between the cathode and the shell is ensured, the vacuum environment of the electron gun is favorably maintained, and the electron gun has good performance; in addition, welding modes such as brazing needed by assembly of the electron gun in the prior art are omitted, the problem that due to the fact that impurities are attached to the inner surface of the accelerating cavity, long time needs to be consumed during aging of the electron gun is solved, and dark current is reduced. Under the condition that materials for manufacturing the electron gun are the same, compared with an electron gun assembled in a high-temperature welding furnace through welding, the electron gun is not annealed at a high temperature, so that the electron gun has higher hardness, the sparking phenomenon is reduced, and the aging time of the electron gun is further shortened.
Owner:SHANGHAI HANG YE VACUUM EQUIP SCI & TECH CO LTD

A method for producing a focus-controllable x-ray tube

The application relates to a preparation method of a focus-controllable X-ray tube, and belongs to the technical field of X-rays, solving the problems of low CT imaging quality of X-rays generated by the existing X-ray tube and poor focus adjustment flexibility. The method comprises the following steps: preparing an electron beam generator, a focusing device, a lens assembly, a target material assembly and a tube body; the lens assembly comprises two electron optical lenses; the prepared electron beam generator, the focusing device, the lens assembly and the target material assembly are sequentially fixed in the tube body; when the lens assembly is fixed, the first electron optical lens is first fixed, then the second electron optical lens is arranged at a position with a preset distance from the first electron optical lens, and the second electron optical lens is rotated so that the pole plate with the opposite polarity to the pole plate of the first electron optical lens is aligned in the axial direction of the tube body. The micro-focus X-rays generated by the prepared X-ray tube have a more circular focus and higher adjustment flexibility.
Owner:BEIJING HANGXING MACHINERY MFG CO LTD

Magnet array holder for accelerated assembly and improved alignment in vacuum electronic devices

A magnet array holder configured to retain magnet pieces and / or non-magnet pieces to form a magnet array, the magnet array configured to manipulate one or more electron beams in a vacuum electronic device when assembled, the magnet array holder comprising a set of slots configured to receive magnet and / or non-magnet pieces; a set of pockets to receive magnet and / or non-magnet pieces; and one or more attachment interfaces configured to couple the magnet array holder to a vacuum electronic device.
Owner:ELVE INC

A high-temperature-resistant composite anode substrate and a preparation method thereof

The application provides a high-temperature-resistant composite anode base and a preparation method thereof. The preparation method comprises the following steps: firstly, designing and processing a basic component of the composite anode base according to the shape requirement of the composite anode base; and then, welding, isothermal pressing, mechanical processing and high-temperature exhaust treatment are sequentially performed to obtain the finished product of the composite anode base. The preparation method has high production efficiency, and the composite anode base prepared by the method has the advantages of high high-temperature strength and high dynamic balance precision. In addition, the preparation process is relatively simple, and the requirement for equipment is relatively low.
Owner:BEIJING TIANLONG TUNGSTEN & MOLYBDENUM TECH CO LTD +2

X-ray rotating anode with two different grain structures in the focal track coating.

A rotating X-ray anode for generating X-rays includes a carrier and at least one annular focal track coating extending along a focal track on the carrier. The carrier is made of Mo or a Mo-based alloy. The at least one annular focal track coating is made of W or a W-based alloy. The focal track coating has, starting from the carrier and perpendicular to the focal track plane, a first layer and a second layer located directly above the first layer. The first layer is characterized by a different grain structure from the second layer.
Owner:PLANSEE SE

A kind of magnetron cathode end cap and anode cylinder eccentric adjusting device

This utility model discloses an eccentric adjustment device for the cathode end cap and anode cylinder of a magnetron, including an indexing turntable assembly and a carrier cylinder. The indexing turntable assembly has a turntable, and the carrier cylinder is rotatably mounted on the turntable. It also includes a vision system, comprising a camera for upward imaging of the output end cap and the connecting ring; a carrier cylinder rotation drive mechanism for driving the magnetron assembly to rotate, including a carrier cylinder servo motor that drives the carrier cylinder to rotate; a pressing assembly, including a pressing block servo motor and a pressing block for pressing down the top outer periphery of the ceramic shaft, the pressing block servo motor driving the pressing block to move up and down; and a control system, which is signal-connected to the vision system and controls the indexing turntable assembly, the carrier cylinder rotation drive mechanism, and the pressing assembly. This eccentric adjustment device for the magnetron cathode end cap and anode cylinder improves the effectiveness of eccentric adjustment and increases work efficiency.
Owner:FOSHAN DHSZ ELECTRIC APPLIANCES CO LTD

Electrode and filament coupled by adapter

Apparatus and methods are disclosed for a mechanically stable, long-life, cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded between a hexaboride electrode and a metal filament. Some embodiments use a tungsten filament, a tantalum adapter, and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto the filament and the electrode then welded to the adapter.
Owner:FEI CO

Integrated manufacturing system and method for photocathode of photomultiplier

The invention discloses a photomultiplier photocathode integrated manufacturing system and method, and belongs to the technical field of photoelectric detection. The device comprises a precision processing cavity design, configuration of a composite three-stage vacuum pump set system with precise monitoring and control, a cleaning and degassing unit integrating plasma cleaning, high-temperature baking and an electronic brushing module, a dynamic evaporation system with multi-parameter in-situ control, and a packaging unit with laser ranging matched with visual precision cooperative positioning. On the basis of the integrated system, the steps of photocathode substrate surface cleaning, chamber baking, alkali source degassing, electronic brushing, photocathode evaporation and packaging are sequentially executed. According to the invention, the quantum efficiency of the photocathode is greater than or equal to 30% and the surface photoelectric efficiency distribution deviation is less than or equal to 5% under the wavelength of 550nm by relying on a 10-9Pa-level ultrahigh vacuum environment and combining a dynamic intelligent model to iterate evaporation process parameters in real time, so that the problem that the service life of the photocathode is short is effectively solved, the sensitivity is doubled compared with that of a traditional device, the production efficiency and the cost are optimized, and leap-type improvement of the efficiency is realized.
Owner:ZHIWEI PHOTONIC DEVICES (KUNMING) CO LTD