Convenient-to-clean flow uniformizing plate for solar cell production

Abstract

The utility model discloses a convenient-to-clean flow uniformizing plate for solar cell production. The convenient-to-clean flow uniformizing plate comprises a substrate and an exhaust plate, a containing groove matched with the exhaust plate in size is formed in the base plate, the exhaust plate is placed in the containing groove, and the exhaust plate is connected to the base plate through a limiting block; an air inlet hole is formed in the base plate, a plurality of first communicating holes are formed in the groove wall of the containing groove, and the first communicating holes are communicated with the air inlet hole; a plurality of second communicating holes are formed in the periphery of the exhaust plate, a plurality of exhaust holes are formed in the front face of the exhaust plate and communicate with the second communicating holes, and when the exhaust plate is placed in the containing groove, the first communicating holes are in butt joint with the second communicating holes. Compared with the prior art, the device is of a split structure and can be conveniently taken down to clean the fine exhaust holes, so that gas uniformly flows out, the uniformity of aluminum oxide deposition is improved, and the production efficiency and the product quality of photovoltaic cells are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of flow equalizing plates, in particular to a flow equalizing plate for solar cell production which is convenient to clean. Background Technique

[0002] In the production process of photovoltaic cells (solar cells), the uniform flow of gas is crucial for ensuring the quality and performance of the cells. The traditional flow equalizing plate is of an integral structure. After a long production time, there will be a problem that the exhaust holes are blocked by alumina powder. And the existing integral-structured flow equalizing plate is fixed on the epitaxial equipment, and it is not convenient to clean the exhaust holes, resulting in problems such as uneven gas distribution, large flow resistance, and high energy consumption. These problems will affect the production efficiency and product quality of photovoltaic cells. Content of the Utility Model

[0003] The purpose of the utility model is to provide a flow equalizing plate for solar cell production which is convenient to clean. The flow equalizing plate is of a split structure, which is convenient to remove for cleaning the small exhaust holes, so that the gas flows out evenly, improving the uniformity of alumina deposition and ensuring the production efficiency and product quality of photovoltaic cells, so as to solve the problems raised in the above background technique.

[0004] To achieve the above purpose, the utility model provides the following technical solutions:

[0005] A flow equalizing plate for solar cell production which is convenient to clean, comprising a substrate and an exhaust plate; a receiving groove adapted to the size of the exhaust plate is provided on the substrate, the exhaust plate is placed in the receiving groove, and the exhaust plate is connected to the substrate through a limiting block; an air inlet hole is provided on the substrate, and a plurality of first communication holes are provided on the groove wall of the receiving groove, and the first communication holes communicate with the air inlet hole; a plurality of second communication holes are provided around the exhaust plate, and a plurality of exhaust holes are provided on the front surface of the exhaust plate, and the exhaust holes communicate with the second communication holes. When the exhaust plate is placed in the receiving groove, the first communication holes are docked with the second communication holes.

[0006] A further improvement scheme of the utility model is that mounting plates are provided around the substrate, and mounting holes are provided on the mounting plates; the receiving groove is rectangular and is located at the center of the substrate.

[0007] A further improvement scheme of the utility model is that an air inlet channel is provided in the substrate, and four air inlet holes communicate with the air inlet channel.

[0008] A further improvement scheme of the utility model is that sliding grooves are provided around the exhaust plate, and the limiting blocks are slidably matched with the sliding grooves; the limiting blocks are in a "T" shape, and one end of the limiting block protrudes from the side surface of the exhaust plate.

[0009] A further improvement scheme of the utility model is that limiting holes are provided on the groove wall of the receiving groove, and the limiting blocks can be inserted into the limiting holes when sliding.

[0010] A further improvement of the utility model is that four baffles are connected to the wall of the accommodating groove. When the exhaust plate is placed in the accommodating groove, the back of the exhaust plate contacts the baffles.

[0011] A further improvement of the utility model is that the exhaust holes are arranged in a rectangular array on the exhaust plate.

[0012] A further improvement of the utility model is that a sealing groove is provided at each of the four sides of the exhaust plate, a sealing ring is embedded in the sealing groove, and the second communication holes around the exhaust plate are all located inside the sealing groove.

[0013] The beneficial effects of the utility model:

[0014] The flow equalizing plate for solar cell production of the utility model, which is easy to clean, is a split structure, convenient to remove for cleaning the fine exhaust holes, so that the gas flows out evenly, improving the uniformity of alumina deposition and ensuring the product quality of photovoltaic cells.

[0015] The flow equalizing plate for solar cell production of the utility model, which is easy to clean, the exhaust plate is connected to the substrate through the limiting block, is convenient to disassemble and assemble, saves maintenance time, and ensures the production efficiency of photovoltaic cells.

[0016] The flow equalizing plate for solar cell production of the utility model, which is easy to clean, a sealing groove is provided at each of the four sides of the exhaust plate, and a sealing ring is embedded in the sealing groove to ensure no air leakage when the first communication hole is communicated with the second communication hole. Description of the Drawings

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0018] Figure 2 It is a schematic diagram of the substrate structure of the utility model.

[0019] Figure 3 It is a schematic diagram of the exhaust plate structure of the utility model.

[0020] In the figure: 1 - substrate, 101 - accommodating groove, 102 - air inlet hole, 103 - first communication hole, 104 - mounting plate, 105 - mounting hole, 106 - limiting hole, 107 - baffle, 2 - exhaust plate, 201 - second communication hole, 202 - exhaust hole, 203 - sliding groove, 3 - limiting block. Specific Embodiments

[0021] The following further clarifies the utility model in conjunction with the drawings and specific embodiments.

[0022] Embodiment 1: As Figures 1 to 3As shown in the figure, a flow equalizing plate for the production of solar cells that is convenient for cleaning includes a substrate 1 and an exhaust plate 2; a receiving groove 101 adapted to the size of the exhaust plate 2 is provided on the substrate 1, the exhaust plate 2 is placed in the receiving groove 101, and the exhaust plate 2 is connected to the substrate 1 through a limiting block 3; an air inlet hole 102 is provided on the substrate 1, and a number of first communication holes 103 are provided on the groove wall of the receiving groove 101, and the first communication holes 103 communicate with the air inlet hole 102; a number of second communication holes 201 are provided around the exhaust plate 2, and a number of exhaust holes 202 are provided on the front surface of the exhaust plate 2, the exhaust holes 202 communicate with the second communication holes 201, and when the exhaust plate 2 is placed in the receiving groove 101, the first communication holes 103 are docked with the second communication holes 201.

[0023] Mounting plates 104 are provided around the substrate 1, and mounting holes 105 are provided on the mounting plates 104; the receiving groove 101 is rectangular, and the receiving groove 101 is located at the center of the substrate 1.

[0024] An air inlet channel is provided inside the substrate 1, and the four air inlet holes 102 communicate with the air inlet channel.

[0025] Sliding grooves 203 are provided around the exhaust plate 2, and the limiting blocks 3 are slidably fitted in the sliding grooves 203; the limiting blocks 3 are in a "T" shape, and one end of the limiting blocks 3 protrudes from the side surface of the exhaust plate 2.

[0026] Limiting holes 106 are provided on the groove wall of the receiving groove 101, and the limiting blocks 3 can be inserted into the limiting holes 106 when sliding.

[0027] Four baffles 107 are connected to the groove wall of the receiving groove 101, and when the exhaust plate 2 is placed in the receiving groove 101, the back surface of the exhaust plate 2 contacts the baffles 107.

[0028] The exhaust holes 202 are arranged in a rectangular array on the exhaust plate 2.

[0029] A sealing groove is provided around the exhaust plate 2, a sealing ring is embedded in the sealing groove, and the second communication holes 201 around the exhaust plate 2 are all located inside the sealing groove.

[0030] The specific working principle of the present utility model is as follows:

[0031] When the utility model works, it is connected to an epitaxial device through the mounting holes 105 on the substrate 1. During operation, process gas enters the intake channel through the intake holes 102, enters the second communication holes 201 through the first communication holes 103, and finally uniformly inputs the process gas into the reaction chamber through the exhaust holes 202. After working for a long time, the exhaust holes 202 are easily blocked by alumina powder. The operator pulls the limit block 3, and the limit block 3 disengages from the limit hole 106, then the exhaust plate 2 can be removed from the epitaxial device. The operator uses a special needle-shaped tool to clean the exhaust holes 202. After cleaning, the operator places the exhaust plate 2 into the accommodation groove 101 and pushes the limit block 3, and the limit block 3 is inserted into the limit hole 106, thus completing the installation of the exhaust plate 2.

[0032] The above embodiments are only used to illustrate the technical concept and features of the present utility model, and the purpose is to enable those who are familiar with this technology to understand the content of the present utility model and implement it accordingly, and it should not be used to limit the protection scope of the present utility model. Any equivalent transformation or modification made according to the spirit and essence of the present utility model should be covered within the protection scope of the present utility model.

Claims

1. A flow equalizer for solar cell production that is easy to clean, characterized in that: The invention comprises a base plate (1) and an exhaust plate (2); the base plate (1) is provided with a receiving groove (101) whose size matches that of the exhaust plate (2); the exhaust plate (2) is placed in the receiving groove (101), and the exhaust plate (2) is connected to the base plate (1) via a stopper (3); the base plate (1) is provided with an air inlet hole (102); a plurality of first connecting holes (103) are provided on the groove wall of the receiving groove (101), and the first connecting holes (103) are connected to the air inlet hole (102); a plurality of second connecting holes (201) are provided around the exhaust plate (2), a plurality of exhaust holes (202) are provided on the front surface of the exhaust plate (2), the exhaust holes (202) are connected to the second connecting holes (201), and when the exhaust plate (2) is placed in the receiving groove (101), the first connecting holes (103) are butted against the second connecting holes (201).

2. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: The base plate (1) is provided with mounting plates (104) around its periphery, and the mounting plates (104) are provided with mounting holes (105); the accommodating groove (101) is rectangular, and the accommodating groove (101) is located at the center of the base plate (1).

3. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: An air intake channel is provided in the base plate (1), and the four air intake holes (102) are in communication with the air intake channel.

4. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: The exhaust plate (2) is provided with sliding grooves (203) around its periphery, and the limiting block (3) is slidably engaged with the sliding grooves (203); the limiting block (3) is in a "T" shape, and one end of the limiting block (3) protrudes from the side surface of the exhaust plate (2).

5. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: A limiting hole (106) is provided on the groove wall of the accommodating groove (101), and the limiting block (3) can be inserted into the limiting hole (106) when sliding.

6. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: Four baffles (107) are connected to the groove wall of the accommodating groove (101); when the exhaust plate (2) is placed in the accommodating groove (101), the back surface of the exhaust plate (2) contacts the baffles (107).

7. The easy-to-clean flow equalizer for solar cell production according to claim 1, characterized in that: The exhaust holes (202) are arranged in a rectangular array on the exhaust plate (2).

8. The easy-to-clean flow equalizer for solar cell production according to claim 2, characterized in that: The exhaust plate (2) is provided with a sealing groove on each of its four sides, a sealing ring is embedded in the sealing groove, and the second communication holes (201) on the four sides of the exhaust plate (2) are all located inside the sealing groove.

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