Pin correction device and semiconductor manufacturing equipment

Abstract

The utility model provides a pin correction device and semiconductor manufacturing equipment, relates to the technical field of semiconductor manufacturing equipment, and solves the technical problem that in the prior art, pin correction needs to be carried out on pin deformation of an IPM (Intelligent Power Module) so as to improve the consistency of pins of an IPM product. The pin correction device and the semiconductor manufacturing equipment comprise a positioning assembly which is used for positioning a to-be-corrected module; the left-right correction assembly drives the pins of the to-be-corrected module to swing back and forth in the first direction; and the front-back correction assembly drives the pins of the to-be-corrected module to swing back and forth along a second direction perpendicular to the first direction. According to the pin correction device and the semiconductor manufacturing equipment, pin correction is realized through consistent swing, so that a pin deformation product meets the pin consistency requirement.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, and in particular to a pin correction device and a semiconductor manufacturing equipment. Background Art

[0002] In the semiconductor manufacturing of IPM modules, after the IPM modules are formed through the module forming process, the deformation error of the module pin dimensions needs to be maintained within ±0.2 mm. However, after the IPM module products are formed in the forming die, there is often a pin springback stress in the pins, resulting in a deviation in the formed pin dimensions of the IPM module products. Therefore, it is necessary to perform a consistency correction on the formed pins to compensate for the deviation in the formed dimensions caused by the springback stress. In addition, during the circulation and use of IPM module products, pin deformation is inevitable, and a pin repair device is also required to correct the pins of the IPM module products with pin deformation. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a pin correction device and a semiconductor manufacturing equipment to solve the technical problem in the prior art that the pins of IPM modules need to be corrected to improve the pin consistency of IPM module products. The many technical effects that can be produced by the preferred technical solutions provided by the utility model are described in detail below.

[0004] To achieve the above purpose, the utility model provides the following technical solutions:

[0005] The pin correction device provided by the utility model includes:

[0006] A positioning component for positioning the module to be corrected;

[0007] A left and right correction component for driving the pins of the module to be corrected to swing reciprocally in a first direction;

[0008] A front and back correction component for driving the pins of the module to be corrected to swing reciprocally in a second direction perpendicular to the first direction.

[0009] Optionally, the positioning component is used to position the module to be corrected at a first position and a second position;

[0010] The left and right correction component includes a left and right moving component and a left and right correction jig. The left and right correction jig cooperates with the pins of the module to be corrected at the first position, and the left and right moving component drives the left and right correction jig to move reciprocally in the first direction;

[0011] The front and back correction component includes a front and back moving component and a front and back correction jig. The front and back correction jig cooperates with the pins of the module to be corrected at the second position, and the front and back moving component drives the front and back correction jig to move reciprocally in the second direction.

[0012] Optionally, the left - right moving component includes a left - right driving structure, a left - right lead screw, left - right bearing seats, left - right guide rails, left - right sliders and a left - right moving platform, and the left - right correction jig is arranged on the left - right moving platform;

[0013] The left - right guide rails are arranged parallel to the left - right lead screw. The left - right moving platform is connected to the left - right sliders, and the left - right sliders are matched with the left - right guide rails;

[0014] The left - right bearing seats are matched with the left - right lead screw. The left - right moving platform is connected to the left - right bearing seats, and the left - right driving structure drives the left - right lead screw to rotate, driving the left - right moving platform to reciprocate along the length directions of the left - right lead screw and the left - right guide rails.

[0015] Optionally, the left - right driving structure includes a left - right correction motor, a small synchronous pulley, a synchronous belt and a large synchronous pulley. The synchronous belt is connected between the small synchronous pulley and the large synchronous pulley. The small synchronous pulley is connected to the left - right correction motor, and the large synchronous pulley is connected to the left - right lead screw. The left - right correction motor drives the left - right lead screw to rotate.

[0016] Optionally, the front - rear moving component includes a front - rear driving structure, front - rear guide rails, front - rear sliders, a front - rear lead screw, front - rear bearing seats and a front - rear moving platform, and the front - rear correction jig is arranged on the front - rear moving platform;

[0017] The front - rear guide rails are arranged parallel to the front - rear lead screw. The front - rear moving platform is connected to the front - rear sliders, and the front - rear sliders are matched with the front - rear guide rails;

[0018] The front - rear bearing seats are matched with the front - rear lead screw. The front - rear moving platform is connected to the front - rear bearing seats, and the front - rear driving structure drives the front - rear lead screw to rotate, driving the front - rear moving platform to reciprocate along the length directions of the front - rear lead screw and the front - rear guide rails.

[0019] Optionally, the front - rear driving structure includes a front - rear correction motor, and the front - rear correction motor is connected to the front - rear lead screw through a coupling.

[0020] Optionally, the positioning component includes a positioning bracket. At least one positioning part is arranged on the positioning bracket, and a positioning pin group is arranged on at least one of the positioning parts. A positioning groove group is arranged on the module to be corrected, and the positioning pin group is matched with the positioning groove group for positioning the module to be corrected.

[0021] Optionally, the left - right correction jig includes a thick - pin left - right correction block and a thin - pin left - right correction block. A number of thick - pin left - right limiting grooves are arranged on the thick - pin left - right correction block, and a number of thin - pin left - right limiting grooves are arranged on the thin - pin left - right correction block.

[0022] Optionally, the front and rear correction fixtures include a thick-pin front and rear correction block and a thin-pin front and rear correction block. A number of thick-pin front and rear limit grooves are provided on the thick-pin front and rear correction block, and a number of thin-pin front and rear limit grooves are provided on the thin-pin front and rear correction block.

[0023] A semiconductor manufacturing apparatus includes the pin correction device as described above.

[0024] The beneficial effects of the present utility model are as follows: The pin correction device and the semiconductor manufacturing apparatus provided by the present utility model include a positioning assembly, a left and right correction assembly, and a front and rear correction assembly. The positioning assembly is used to position the module to be corrected, and then the left and right correction assembly drives the pins of the module to be corrected to swing reciprocally along the first direction, thereby realizing the correction of the pins in the first direction; the front and rear correction assembly drives the pins of the module to be corrected to swing reciprocally along the second direction, thereby realizing the correction of the pins in the second direction; by successively swinging the pins along the first direction and the second direction, the pin correction is realized through consistent swinging, so that the pin-deformed products meet the requirements. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 is the perspective view (one) of the present utility model;

[0027] Figure 2 is the perspective view (two) of the present utility model;

[0028] Figure 3 is the exploded view of the present utility model;

[0029] Figure 4 is the structural schematic diagram of the module to be corrected of the present utility model;

[0030] Figure 5 is the positioning structural schematic diagram of the left and right correction fixtures and the front and rear correction fixtures of the present utility model.

[0031] In the figure:

[0032] 100, support base; 200, positioning bracket; 300, left and right correction assembly; 400, front and rear correction assembly; 500, module to be corrected;

[0033] 21, first positioning portion; 22, second positioning portion; 23, positioning pin group;

[0034] 31. Left and right moving component; 32. Left and right correction jig; 33. Base; 34. Fixed block; 35. Fixed groove;

[0035] 311. Left and right correction motor; 312. Small synchronous pulley; 313. Synchronous belt; 314. Large synchronous pulley; 315. Left and right lead screw; 316. Left and right bearing block; 317. Left and right guide rail; 318. Left and right slider; 319. Left and right moving platform;

[0036] 321. Coarse pin left and right correction block; 322. Fine pin left and right correction block; 323. Coarse pin left and right limit groove; 324. Fine pin left and right limit groove;

[0037] 41. Front and back moving component; 42. Front and back correction jig; 43. In-place slide; 44. First in-place sensor; 45. Second in-place sensor;

[0038] 411. Front and back correction motor; 412. Coupling; 413. Front and back guide rail; 414. Front and back slider; 415. Front and back lead screw; 416. Front and back bearing block; 417. Front and back moving platform;

[0039] 421. Coarse pin front and back correction block; 422. Fine pin front and back correction block; 423. Coarse pin front and back limit groove; 424. Fine pin front and back limit groove;

[0040] 51. Positioning groove group. Detailed implementation manner

[0041] The following can refer to the attached drawings Figures 1 to 5And understand the content of the present utility model and the differences between the present utility model and the prior art through the text content. The following further describes the technical solutions (including the preferred technical solutions) of the present utility model by means of the attached drawings and by listing some optional embodiments of the present utility model. It should be noted that: any technical feature and any technical solution in this embodiment are one or several of a variety of optional technical features or optional technical solutions. For the sake of concise description, all alternative technical features and alternative technical solutions of the present utility model cannot be exhausted in this document, nor is it convenient to emphasize that each implementation manner of a technical feature is one of the optional multiple implementation manners. Therefore, those skilled in the art should be aware that: any technical means provided by the present utility model can be replaced, or any two or more technical means or technical features provided by the present utility model can be combined with each other to obtain a new technical solution. Any technical feature and any technical solution within this embodiment do not limit the protection scope of the present utility model. The protection scope of the present utility model should include any alternative technical solution that those skilled in the art can think of without creative work, and any new technical solution obtained by those skilled in the art by combining any two or more technical means or technical features provided by the present utility model with each other.

[0042] In the description of the present utility model, it should be noted that unless otherwise specified, the meaning of "a plurality of" is two or more; the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0043] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0044] The present utility model provides a pin correction device and a semiconductor manufacturing device that achieve pin correction through consistent swinging, so that the pin-deformed products meet the pin consistency requirements.

[0045] The following is combined with Figures 1 to 5A more detailed description of the technical solution provided by the present utility model is given.

[0046] The present utility model provides a pin correction device, comprising:

[0047] a positioning component for positioning the module 500 to be corrected;

[0048] a left - right correction component 300 for driving the pins of the module 500 to be corrected to swing reciprocally along a first direction;

[0049] a front - rear correction component 400 for driving the pins of the module 500 to be corrected to swing reciprocally along a second direction perpendicular to the first direction.

[0050] The pin correction device provided by the present utility model includes a positioning component, a left - right correction component 300 and a front - rear correction component 400. The positioning component is used to position the module 500 to be corrected, and then the left - right correction component 300 drives the pins of the module 500 to be corrected to swing reciprocally along the first direction, thereby realizing the correction of the pins in the first direction; the front - rear correction component 400 drives the pins of the module 500 to be corrected to swing reciprocally along the second direction, thereby realizing the correction of the pins in the second direction; by successively making the pins swing reciprocally along the first direction and the second direction, the pin correction is realized through consistent swinging, so that the pin - deformed products meet the requirements.

[0051] It should be noted that the left - right correction component 300 drives the pins of the module 500 to be corrected to swing reciprocally along the first direction, and the front - rear correction component 400 drives the pins of the module 500 to be corrected to swing reciprocally along the second direction. The reciprocating swing stroke is between 0 - 5 mm. The number of reciprocating swings is determined according to different product requirements and swing correction effects.

[0052] In some embodiments of the present utility model, the positioning component is used to position the module 500 to be corrected at a first position and a second position;

[0053] The left - right correction component 300 includes a left - right moving component 31 and a left - right correction jig 32. The left - right correction jig 32 cooperates with the pins of the module 500 to be corrected at the first position, and the left - right moving component 31 drives the left - right correction jig 32 to reciprocally move along the first direction;

[0054] The front - rear correction component 400 includes a front - rear moving component 41 and a front - rear correction jig 42. The front - rear correction jig 42 cooperates with the pins of the module 500 to be corrected at the second position, and the front - rear moving component 41 drives the front - rear correction jig 42 to reciprocally move along the second direction.

[0055] In some of the above embodiments of the present utility model, the positioning component is used to position the module 500 to be corrected at a first position and a second position. When at the first position, the left-right correction component 300 drives the pins of the module 500 to be corrected to reciprocally swing in a first direction, completing the correction of the pins in the left-right direction; when at the second position, the front-back correction component 400 drives the pins of the module 500 to be corrected to reciprocally swing in a second direction, completing the correction of the pins in the front-back direction, thereby realizing the correction of the pins through consistent swinging in the front-back, left, and right directions, so that the pin-deformed products meet the requirements.

[0056] Specifically, the left-right correction component 300 includes a left-right moving component 31 and a left-right correction jig 32. The left-right correction jig 32 cooperates with the pins of the module 500 to be corrected at the first position. The left-right moving component 31 drives the left-right correction jig 32 to reciprocally move in the first direction, thereby driving the pins of the module 500 to be corrected to reciprocally move in the first direction, realizing the left-right correction of the pins.

[0057] The front-back correction component 400 includes a front-back moving component 41 and a front-back correction jig 42. The front-back correction jig 42 cooperates with the pins of the module 500 to be corrected at the second position. The front-back moving component 41 drives the front-back correction jig 42 to reciprocally move in the second direction, thereby driving the pins of the module 500 to be corrected to reciprocally move in the second direction, realizing the front-back correction of the pins.

[0058] It should be noted that the left-right correction jig 32 cooperates with the pins of the module 500 to be corrected at the first position. The left-right correction jig 32 can limit the position of the pins in the first direction, so that when the left-right moving component 31 drives the left-right correction jig 32 to move, the left-right correction jig 32 can drive the pins to swing in the first direction to complete the pin correction; similarly, the front-back correction jig 42 cooperates with the pins of the module 500 to be corrected at the second position. The front-back correction jig 42 can limit the position of the pins in the second direction, so that when the front-back moving component 41 drives the front-back correction jig 42 to move, the front-back correction jig 42 can drive the pins to swing in the second direction to complete the pin correction.

[0059] It can be understood that in some embodiments, the module 500 to be corrected can also be positioned at the same position through the positioning component. By driving the left-right correction component 300 and the front-back correction component 400 to move, the left-right correction component 300 and the front-back correction component 400 respectively complete the correction of the pins of the module 500 to be corrected at the same position.

[0060] In some embodiments of the present utility model, the positioning assembly includes a positioning bracket 200. A first positioning portion 21 and a second positioning portion 22 are provided on the positioning bracket 200. Positioning pin groups 23 are provided on both the first positioning portion 21 and the second positioning portion 22. A positioning slot group 51 is provided on the module 500 to be corrected. The positioning pin groups 23 cooperate with the positioning slot group 51. The positioning pin groups 23 of the first positioning portion 21 and the second positioning portion 22 are used to position the module 500 to be corrected at a first position and a second position respectively.

[0061] In some of the above embodiments of the present utility model, by providing the first positioning portion 21 and the second positioning portion 22 on the positioning bracket 200, and positioning pin groups 23 are provided on both the first positioning portion 21 and the second positioning portion 22, the module 500 to be corrected is positioned at the first position and the second position respectively, so as to complete the left-right and front-back pin corrections at the first position and the second position respectively.

[0062] It can be understood that after the left-right pin correction is completed at the first position, the module 500 to be corrected is moved to the second position, and the front-back pin correction can be completed. The movement of the module 500 to be corrected from the first position to the second position can be completed manually or by using a manipulator.

[0063] In some embodiments of the present utility model, the left-right correction jig 32 includes a thick-pin left-right correction block 321 and a thin-pin left-right correction block 322. A plurality of thick-pin left-right limiting slots 323 are provided on the thick-pin left-right correction block 321. A plurality of thin-pin left-right limiting slots 324 are provided on the thin-pin left-right correction block 322.

[0064] The front-back correction jig 42 includes a thick-pin front-back correction block 421 and a thin-pin front-back correction block 422. A plurality of thick-pin front-back limiting slots 423 are provided on the thick-pin front-back correction block 421. A plurality of thin-pin front-back limiting slots 424 are provided on the thin-pin front-back correction block 422.

[0065] In some of the above embodiments of the present utility model, the left-right correction jig 32 includes a thick-pin left-right correction block 321 and a thin-pin left-right correction block 322. The thick-pin left-right limiting slots 323 on the thick-pin left-right correction block 321 are arranged corresponding to the thick pins of the module 500 to be corrected. The thin-pin left-right limiting slots 324 on the thin-pin left-right correction block 322 are arranged corresponding to the thin pins of the module 500 to be corrected, so as to position the thick pins and thin pins of the module 500 to be corrected respectively, and drive the thick pins and thin pins of the module 500 to be corrected to swing reciprocally to achieve consistency correction.

[0066] Similarly, the front and rear correction fixture 42 includes a thick-pin front and rear correction block 421 and a thin-pin front and rear correction block 422. The thick-pin front and rear limit slots 423 on the thick-pin front and rear correction block 421 are correspondingly arranged with the thick pins of the module 500 to be corrected, and the thin-pin front and rear limit slots 424 on the thin-pin front and rear correction block 422 are correspondingly arranged with the thin pins of the module 500 to be corrected, respectively positioning the thick pins and thin pins of the module 500 to be corrected, driving the thick pins and thin pins of the module 500 to swing reciprocally, and achieving consistency correction.

[0067] It can be understood that the left and right correction fixture 32 and the front and rear correction fixture 42 are used to position the pins of the module 500 to be corrected, and their specific structures are adjusted correspondingly according to the arrangement mode of the pins of the module 500 to be corrected.

[0068] It should be noted that the sizes of the thick-pin left and right limit slots 323 and the thick-pin front and rear limit slots 423 are 1-1.5 times that of the thick pins, and the sizes of the thin-pin left and right limit slots 324 and the thin-pin front and rear limit slots 424 are 1-1.5 times that of the thin pins, so as to facilitate the thick pins or thin pins to enter; for example, when the left and right correction fixture 32 reciprocally moves along the first direction, the size of the thick-pin left and right limit slot 323 along the first direction is 1-1.5 times the size of the thick pin in the first direction, and the size of the thin-pin left and right limit slot 324 along the first direction is 1-1.5 times the size of the thin pin in the first direction.

[0069] In some embodiments of the present utility model, the left and right moving assembly 31 includes a left and right driving structure, a left and right lead screw 315, left and right bearing seats 316, left and right guide rails 317, left and right sliders 318 and a left and right moving platform 319, and the left and right correction fixture 32 is arranged on the left and right moving platform 319;

[0070] The left and right guide rails 317 are arranged in parallel with the left and right lead screw 315. The left and right moving platform 319 is connected with the left and right sliders 318, and the left and right sliders 318 are matched with the left and right guide rails 317;

[0071] The left and right bearing seats 316 are matched with the left and right lead screw 315. The left and right moving platform 319 is connected with the left and right bearing seats 316, and the left and right driving structure drives the left and right lead screw 315 to rotate, driving the left and right moving platform 319 to reciprocally move along the length directions of the left and right lead screw 315 and the left and right guide rails 317.

[0072] In some of the above embodiments of the present utility model, the left - right moving assembly 31 adopts a left - right driving structure, a left - right lead screw 315 and a left - right bearing block 316 to cooperate to achieve the precise reciprocating movement of the left - right moving platform 319. The left - right sliders 318 and the left - right guide rails 317 cooperate to play a guiding role, and can ensure the levelness of the left - right moving platform 319, ensure the moving stability of the left - right moving platform 319, guarantee the consistency of pin swing, and improve the pin correction effect.

[0073] Specifically, the left - right driving structure includes a left - right correction motor 311, a small synchronous pulley 312, a synchronous belt 313 and a large synchronous pulley 314. The synchronous belt 313 is connected between the small synchronous pulley 312 and the large synchronous pulley 314. The small synchronous pulley 312 is connected to the left - right correction motor 311, the large synchronous pulley 314 is connected to the left - right lead screw 315, and the left - right correction motor 311 drives the left - right lead screw 315 to rotate.

[0074] In some embodiments of the present utility model, the front - rear moving assembly 41 includes a front - rear driving structure, front - rear guide rails 413, front - rear sliders 414, front - rear lead screws 415, front - rear bearing blocks 416 and a front - rear moving platform 417. The front - rear correction jig 42 is arranged on the front - rear moving platform 417;

[0075] The front - rear guide rails 413 are arranged in parallel with the front - rear lead screws 415. The front - rear moving platform 417 is connected to the front - rear sliders 414, and the front - rear sliders 414 cooperate with the front - rear guide rails 413;

[0076] The front - rear bearing blocks 416 cooperate with the front - rear lead screws 415. The front - rear moving platform 417 is connected to the front - rear bearing blocks 416. The front - rear driving structure drives the front - rear lead screw 415 to rotate, driving the front - rear moving platform 417 to reciprocate along the length directions of the front - rear lead screw 415 and the front - rear guide rails 413.

[0077] In some of the above embodiments of the present utility model, the front - rear moving assembly 41 adopts a front - rear driving structure, a front - rear lead screw 415 and a front - rear bearing block 416 to cooperate to achieve the precise reciprocating movement of the front - rear moving platform 417. The front - rear sliders 414 and the front - rear guide rails 413 cooperate to play a guiding role, and can ensure the levelness of the front - rear moving platform 417, ensure the moving stability of the front - rear moving platform 417, guarantee the consistency of pin swing, and improve the pin correction effect.

[0078] Specifically, the front - rear driving structure includes a front - rear correction motor 411, and the front - rear correction motor 411 is connected to the front - rear lead screw 415 through a coupling 412.

[0079] Embodiment 1:

[0080] The present utility model provides a pin correction device, as Figures 1 - 3 shown, which includes a support base 100. A positioning bracket 200, a left - right correction assembly 300, and a front - rear correction assembly 400 are arranged on the support base 100. A first positioning portion 21 and a second positioning portion 22 are arranged on the positioning bracket 200. Positioning pin groups 23 are arranged on both the first positioning portion 21 and the second positioning portion 22. A positioning groove group 51 is arranged on the module 500 to be corrected. The positioning pin groups 23 cooperate with the positioning groove group 51. The positioning pin groups 23 of the first positioning portion 21 and the second positioning portion 22 are used to position the module 500 to be corrected at a first position and a second position respectively.

[0081] Specifically, as Figure 4 shown, the module 500 to be corrected is an IPM forming module, and this IPM forming module has two rows of thick pins and thin pins.

[0082] Furthermore, the left - right correction assembly 300 includes a left - right moving assembly 31 and a left - right correction jig 32. The left - right correction jig 32 cooperates with the pins of the module 500 to be corrected at the first position. The left - right moving assembly 31 drives the left - right correction jig 32 to reciprocate along a first direction, and drives the pins of the module 500 to be corrected to swing reciprocally along the first direction.

[0083] The front - rear correction assembly 400 includes a front - rear moving assembly 41 and a front - rear correction jig 42. The front - rear correction jig 42 cooperates with the pins of the module 500 to be corrected at the second position. The front - rear moving assembly 41 drives the front - rear correction jig 42 to reciprocate along a second direction, and drives the pins of the module 500 to be corrected to swing reciprocally along the second direction.

[0084] The left - right correction jig 32 includes two rows of thick - pin left - right correction blocks 321 and two rows of thin - pin left - right correction blocks 322. A number of thick - pin left - right limiting grooves 323 are arranged on the thick - pin left - right correction blocks 321, and a number of thin - pin left - right limiting grooves 324 are arranged on the thin - pin left - right correction blocks 322.

[0085] The front - rear correction jig 42 includes two rows of thick - pin front - rear correction blocks 421 and two rows of thin - pin front - rear correction blocks 422. A number of thick - pin front - rear limiting grooves 423 are arranged on the thick - pin front - rear correction blocks 421, and a number of thin - pin front - rear limiting grooves 424 are arranged on the thin - pin front - rear correction blocks 422.

[0086] Specifically, the thick - pin left - right limiting grooves 323, the thin - pin left - right limiting grooves 324, the thick - pin front - rear limiting grooves 423, and the thin - pin front - rear limiting grooves 424 are all U - shaped grooves or square grooves.

[0087] Specifically, the left - right moving assembly 31 includes a left - right driving structure, a left - right lead screw 315, left - right bearing seats 316, left - right guide rails 317, left - right sliders 318 and a left - right moving platform 319, and the left - right correction jig 32 is arranged on the left - right moving platform 319;

[0088] The left - right guide rails 317 are arranged in parallel with the left - right lead screw 315. The left - right moving platform 319 is connected to the left - right sliders 318, and the left - right sliders 318 are matched with the left - right guide rails 317;

[0089] The left - right bearing seats 316 are matched with the left - right lead screw 315. The left - right moving platform 319 is connected to the left - right bearing seats 316. The left - right driving structure drives the left - right lead screw 315 to rotate, driving the left - right moving platform 319 to reciprocate along the length directions of the left - right lead screw 315 and the left - right guide rails 317.

[0090] The left - right driving structure includes a left - right correction motor 311, a small synchronous pulley 312, a synchronous belt 313 and a large synchronous pulley 314. The synchronous belt 313 is connected between the small synchronous pulley 312 and the large synchronous pulley 314. The small synchronous pulley 312 is connected to the left - right correction motor 311, and the large synchronous pulley 314 is connected to the left - right lead screw 315. The left - right correction motor 311 drives the left - right lead screw 315 to rotate.

[0091] The front - rear moving assembly 41 includes a front - rear driving structure, front - rear guide rails 413, front - rear sliders 414, front - rear lead screws 415, front - rear bearing seats 416 and a front - rear moving platform 417, and the front - rear correction jig 42 is arranged on the front - rear moving platform 417;

[0092] The front - rear guide rails 413 are arranged in parallel with the front - rear lead screws 415. The front - rear moving platform 417 is connected to the front - rear sliders 414, and the front - rear sliders 414 are matched with the front - rear guide rails 413;

[0093] The front - rear bearing seats 416 are matched with the front - rear lead screws 415. The front - rear moving platform 417 is connected to the front - rear bearing seats 416. The front - rear driving structure drives the front - rear lead screw 415 to rotate, driving the front - rear moving platform 417 to reciprocate along the length directions of the front - rear lead screw 415 and the front - rear guide rails 413.

[0094] The front - rear driving structure includes a front - rear correction motor 411, and the front - rear correction motor 411 is connected to the front - rear lead screw 415 through a coupling 412.

[0095] It can be understood that, as Figure 5As shown in the figure, both the two rows of thick-foot left and right correction blocks 321 and the two rows of thin-foot left and right correction blocks 322 are connected to the left and right moving platforms 319 through the fixing blocks 34 and the base 33, that is, the base 33 is connected to the left and right moving platforms 319, the fixing blocks 34 are connected to the base 33, and the two rows of thick-foot left and right correction blocks 321 and the two rows of thin-foot left and right correction blocks 322 are respectively connected to the corresponding fixing blocks 34; similarly, both the two rows of thick-foot front and back correction blocks 421 and the two rows of thin-foot front and back correction blocks 422 are connected to the front and back moving platforms 417 through the fixing blocks 34 and the base 33, that is, the base 33 is connected to the front and back moving platforms 417, the fixing blocks 34 are connected to the base 33, and the two rows of thick-foot front and back correction blocks 421 and the two rows of thin-foot front and back correction blocks 422 are respectively connected to the corresponding fixing blocks 34.

[0096] Optionally, fixing grooves 35 are provided on the fixing blocks 34. The two rows of thick-foot left and right correction blocks 321 are positioned through the fixing grooves 35, the two rows of thin-foot left and right correction blocks 322 are positioned through the fixing grooves 35, the two rows of thick-foot front and back correction blocks 421 are positioned through the fixing grooves 35, and the two rows of thin-foot front and back correction blocks 422 are positioned through two groups of fixing grooves 35.

[0097] It can be understood that the fixing grooves 35 are adjusted according to the structures or shapes of the thick-foot left and right correction blocks 321, the thin-foot left and right correction blocks 322, the thick-foot front and back correction blocks 421, and the thin-foot front and back correction blocks 422.

[0098] Furthermore, it further includes a left and right movement limiting component and a front and back movement limiting component. Both the left and right movement limiting component and the front and back movement limiting component include a positioning slide piece 43, a first in-place sensor 44, and a second in-place sensor 45. The positioning slide piece 43 is arranged on the left and right bearing seats 316 or the front and back bearing seats 416, and the first in-place sensor 44 and the second in-place sensor 45 are arranged on the movement path of the positioning slide piece 43. The displacement of the reciprocating movement is determined by the first in-place sensor 44 and the second in-place sensor 45.

[0099] Among them, the first in-place sensor 44 and the second in-place sensor 45 are photoelectric sensors.

[0100] The present utility model also provides a semiconductor manufacturing device, including the pin correction device as described above.

[0101] In the description of this specification, the description with reference to terms such as "example", "embodiment" or "some embodiments" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0102] Certainly, the creation of the utility model is not limited to the above embodiments. Those skilled in the art can make equivalent deformations or substitutions without departing from the spirit of the utility model, and these equivalent deformations or substitutions are all included within the scope defined by the claims of this application.

Claims

1. A pin correction device, characterized in that, Comprising: A positioning component for positioning the module to be corrected; A left - right correction component for driving the pins of the module to be corrected to swing reciprocally in a first direction; A front - rear correction component for driving the pins of the module to be corrected to swing reciprocally in a second direction perpendicular to the first direction.

2. The pin correction device according to claim 1, wherein The positioning component is used to position the module to be corrected at a first position and a second position; The left - right correction component includes a left - right moving component and a left - right correction jig. The left - right correction jig cooperates with the pins of the module to be corrected at the first position, and the left - right moving component drives the left - right correction jig to move reciprocally in the first direction; The front - rear correction component includes a front - rear moving component and a front - rear correction jig. The front - rear correction jig cooperates with the pins of the module to be corrected at the second position, and the front - rear moving component drives the front - rear correction jig to move reciprocally in the second direction.

3. The pin correction device according to claim 2, wherein, The left - right moving component includes a left - right driving structure, a left - right lead screw, left - right bearing seats, left - right guide rails, left - right sliders and a left - right moving platform. The left - right correction jig is arranged on the left - right moving platform; The left - right guide rails are arranged in parallel with the left - right lead screw. The left - right moving platform is connected to the left - right sliders, and the left - right sliders cooperate with the left - right guide rails; The left - right bearing seats cooperate with the left - right lead screw. The left - right moving platform is connected to the left - right bearing seats. The left - right driving structure drives the left - right lead screw to rotate, driving the left - right moving platform to move reciprocally along the length directions of the left - right lead screw and the left - right guide rails.

4. The pin correction device according to claim 3, characterized in that The left - right driving structure includes a left - right correction motor, a small synchronous pulley, a synchronous belt and a large synchronous pulley. The synchronous belt is connected between the small synchronous pulley and the large synchronous pulley. The small synchronous pulley is connected to the left - right correction motor, and the large synchronous pulley is connected to the left - right lead screw. The left - right correction motor drives the left - right lead screw to rotate.

5. The pin correction device according to claim 2, wherein The front - rear moving component includes a front - rear driving structure, front - rear guide rails, front - rear sliders, front - rear lead screws, front - rear bearing seats and a front - rear moving platform. The front - rear correction jig is arranged on the front - rear moving platform; The front - rear guide rails are arranged in parallel with the front - rear lead screws. The front - rear moving platform is connected to the front - rear sliders, and the front - rear sliders cooperate with the front - rear guide rails; The front - rear bearing seats cooperate with the front - rear lead screws. The front - rear moving platform is connected to the front - rear bearing seats. The front - rear driving structure drives the front - rear lead screw to rotate, driving the front - rear moving platform to move reciprocally along the length directions of the front - rear lead screw and the front - rear guide rails.

6. The pin correction device according to claim 5, characterized in that, The front - rear driving structure includes a front - rear correction motor, and the front - rear correction motor is connected to the front - rear lead screw through a coupling.

7. The pin correction device according to claim 2, characterized in that The positioning component includes a positioning bracket. Two positioning parts are arranged on the positioning bracket, and positioning pin groups are arranged on both of the two positioning parts. A positioning groove group is arranged on the module to be corrected. The positioning pin groups cooperate with the positioning groove group for positioning the module to be corrected.

8. The pin correction device according to claim 2, characterized in that, The left - right correction jig includes a thick - pin left - right correction block and a thin - pin left - right correction block. A number of thick - pin left - right limiting grooves are arranged on the thick - pin left - right correction block, and a number of thin - pin left - right limiting grooves are arranged on the thin - pin left - right correction block.

9. The pin correction device according to claim 2, wherein, The front and rear correction fixture includes a thick-pin front and rear correction block and a thin-pin front and rear correction block. A plurality of thick-pin front and rear limit slots are provided on the thick-pin front and rear correction block, and a plurality of thin-pin front and rear limit slots are provided on the thin-pin front and rear correction block.

10. A semiconductor manufacturing device, characterized in that, It includes the pin correction device according to any one of claims 1-9.

Images