Movable assembly and wire cutting machine

Abstract

The utility model relates to the technical field of hard and brittle material processing, particularly provides a movable assembly and a wire cutting machine comprising the movable assembly, and aims to solve the technical problem of how to ensure the integrity of a structure for driving a detection mechanism to move when an existing slicing machine realizes automatic operation. Wherein the movable assembly comprises a driving transmission mechanism which can drive a moving part to move along a straight line at a power output end; the protection part comprises a first protection assembly, a second protection assembly and a third protection assembly, a protection space is formed in the first protection assembly, and the driving transmission mechanism is contained in the protection space; on one hand, a moving part is allowed to penetrate through the second protection assembly, the second protection assembly is connected with the power output end, and the moving part is connected with the power output end in a sealed mode through the second protection assembly. By means of the structure, the cleanliness of the environment where the driving transmission mechanism is located can be guaranteed through the combination of wrapping type protection and sealing connection of the movable part.

Description

Technical Field

[0001] The utility model relates to the technical field of processing hard and brittle materials, and specifically provides a movable component and a wire cutting machine comprising the movable component. Background Art

[0002] Taking silicon rods as an example, the processing equipment usually includes a cutter for cutting rods (round rods) according to length specifications, a squarer for cutting round rods of a certain length into square rods, a grinder for grinding square rods, and a slicer for slicing square rods that meet the precision standards after grinding. The working principle of the slicer is as follows: after the square rods are bonded to the wafer support, the cutting wire (such as diamond wire) is reciprocated at high speed to slice the square rods. Each complete slicing operation corresponding to the wire network is usually called a one-knife cutting operation of the slicer.

[0003] The slicing operation of the existing slicer is concentrated near the slicing station. Each cutting operation usually includes dozens of operation steps and is usually completed by one or two operators. This processing method often has the following problems: the operation of the slicer requires high professionalism and proficiency of the operator, and the labor cost is high; the large number of steps makes it easy for the operator to make mistakes, and once the operator makes a mistake, it may cause different degrees of cutting abnormalities. In view of this, after fully studying and analyzing the operation of the slicer, the inventor aims to propose a structural framework that can realize automated slicing operations.

[0004] In the structural framework, it is necessary to detect the wire mesh feature data through detection components, and timely discover whether there are problems such as wire jumpers based on the detected wire mesh feature data, and promptly deal with the problems to ensure the sustainability of the slicer's operation. Accordingly, how to ensure that the detection component can detect the wire mesh in the ideal position is quite necessary for the accuracy of detection and the timeliness of problem discovery. In order to realize the movement of the detection component, it is necessary to rely on the movement of related structures. However, the structure usually contains precision components. If cutting fluid, silicon powder, etc. enter the precision components, it will affect the movement reliability and service life cycle of the components. Utility Model Content

[0005] The utility model aims to at least partially solve at least a part of the above technical problems. Specifically, it solves the technical problem of how to ensure the integrity of the structure that drives the detection component to move during the automation operation of the existing slicer.

[0006] In a first aspect, the present utility model provides a movable component, which includes: a driving transmission mechanism capable of driving a moving part to move linearly at a power output end; and a protection part, which includes: a first protection component forming a protection space, and the driving transmission mechanism is accommodated in the protection space; a second protection component, which on the one hand allows the moving part to penetrate and thus be connected to the power output end, and the moving part is hermetically connected to the power output end through the second protection component.

[0007] With such a configuration, it is possible to seek to ensure the cleanliness of the environment where the driving transmission mechanism is located through the combination of wrapped protection and sealed connection of the movable part.

[0008] For the above linear movable component, in a possible implementation manner, the second protection component includes at least one sealing structure, and the moving part is hermetically connected to the power output end through at least one sealing structure.

[0009] For the above linear movable component, in a possible implementation manner, the second protection component includes: a first sealing structure, which includes a first sealing flexible skin and a second sealing flexible skin respectively disposed on a pair of opposite sides of the movable part; and / or a second sealing structure, which includes a first sealing strip and a second sealing strip respectively disposed on a pair of opposite sides of the movable part.

[0010] With such a configuration, a possible structural form of the second protection component is given.

[0011] For the above linear movable component, in a possible implementation manner, the movable part includes a mating portion, and the first sealing flexible skin and the second sealing flexible skin are disposed at positions of the movable part corresponding to the mating portion.

[0012] For the above linear movable component, in a possible implementation manner, the cross-section of the mating portion along a plane perpendicular to the direction of linear movement is a flat structure, and the flat structure is at least a structure with a width decreasing from the middle to the end near the end portion.

[0013] With such a configuration, it is possible to seek to ensure the sealing performance of the first sealing structure.

[0014] For the above linear movable component, in a possible implementation manner, the cross-section of the mating portion along a plane perpendicular to the direction of linear movement is a spindle-shaped structure.

[0015] With such a configuration, a specific structural form of the mating portion is given.

[0016] For the above-mentioned wire moving component, in a possible implementation, the first sealing flexible skin and / or the second sealing flexible skin are fixedly connected to the first protection component through a sealing flexible skin pressing plate.

[0017] With such a structure, a specific connection method between the sealing flexible skin and the first protection component is provided.

[0018] For the above-mentioned wire moving component, in a possible implementation, the first sealing strip and the second sealing strip include a sealing part, the sealing part is a hollow structure, and the moving part is clamped between the sealing parts of the first sealing strip and the second sealing strip.

[0019] With such a structure, it is possible to achieve a tighter sealing effect.

[0020] For the above-mentioned wire moving component, in a possible implementation, the first sealing strip and the second sealing strip include a connecting part, and the connecting part is connected to the first protection component through a sealing strip connecting component.

[0021] With such a structure, a specific installation method of the first / second sealing strip on the moving component is provided. For example, the sealing strip connecting component can be a sealing strip bracket, etc.

[0022] For the above-mentioned wire moving component, in a possible implementation, a first sealing pad is provided between the sealing strip connecting component and the first protection component.

[0023] With such a structure, it is possible to achieve a tighter sealing effect.

[0024] For the above-mentioned wire moving component, in a possible implementation, the first sealing structure is arranged at a position where the moving part is close to the driving transmission mechanism, and the second sealing structure is arranged at a position where the moving part is far from the driving transmission mechanism.

[0025] With such a structure, a relative positional relationship between the first sealing structure and the second sealing structure is provided.

[0026] For the above-mentioned wire moving component, in a possible implementation, the moving component includes an installation part, and the driving transmission mechanism is arranged in the installation part.

[0027] The first protection component includes a protection plate, and the protection plate is fixedly arranged in the installation part.

[0028] With such a structure, a possible structural form of the first protection component is provided.

[0029] For the above-mentioned wire activity component, in a possible implementation manner, a first protective gasket is provided between the installation part and the first protective component.

[0030] With such a structure, it is possible to ensure the sealing performance at the connection corresponding to the first protective component.

[0031] In a second aspect, the present invention provides a wire cutting machine, which includes the activity component described in any one of the above.

[0032] It can be understood that the wire cutting machine has all the technical effects of the activity component described in any one of the above, and will not be elaborated here.

[0033] For the above-mentioned wire cutting machine, in a possible implementation manner, the wire cutting machine is a slicing machine.

[0034] With such a structure, a specific equipment form of the wire cutting machine is given. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Taking a silicon rod to be sliced (hereinafter simply referred to as a silicon rod, and the product obtained by slicing operation is a silicon wafer) as an example of the workpiece, and referring to the accompanying drawings, the preferred implementation manners of the present invention will be described. In the drawings:

[0036] Figure 1 shows a schematic structural diagram of a slicing machine according to an embodiment of the present invention;

[0037] Figure 2 shows an installation schematic diagram of a detection mechanism of a slicing machine according to a first embodiment of the present invention;

[0038] Figure 3 shows an installation schematic diagram of a detection mechanism of a slicing machine according to a second embodiment of the present invention;

[0039] Figure 4 shows a schematic structural diagram of a detection mechanism of a slicing machine according to an embodiment of the present invention Figure 1 , and the drawing mainly shows the detection component, the first activity component, the second activity component and the connection component of the detection mechanism;

[0040] Figure 5 shows a schematic structural diagram of a detection mechanism of a slicing machine according to an embodiment of the present invention Figure 2 , and the drawing mainly shows the connection component and the adjustment component of the detection mechanism;

[0041] Figure 6 shows a schematic structural diagram of a detection mechanism of a slicing machine according to an embodiment of the present invention Figure 3 , and the drawing mainly shows the connection plate in the connection component and a part of the adjustment component arranged on the connection plate;

[0042] Figure 7 The structural schematic diagram of a slicing machine with a longitudinally adjusting component added, showing an embodiment of the present utility model.

[0043] Figure 8 The structural schematic diagram of the detection mechanism of a slicing machine, showing an embodiment of the present utility model. Figure 4 In the figure, the second movable component is mainly shown.

[0044] Figure 9 The structural schematic diagram of the first protective component of a slicing machine, showing an embodiment of the present utility model. Figure 1 ;

[0045] Figure 10 The structural schematic diagram of the first protective component of a slicing machine, showing an embodiment of the present utility model. Figure 2 ;

[0046] Figure 11 The sectional view schematic diagram of the connecting seat in the connecting component of a slicing machine, showing an embodiment of the present utility model. The shuttle-shaped structure is shown in the figure.

[0047] Figure 12 The matching schematic diagram of the sealing rubber sheet and the shuttle-shaped structure in the first protective component of a slicing machine, showing an embodiment of the present utility model.

[0048] Figure 13 The principle schematic diagram of the sealing strip in the first protective component of a slicing machine, showing an embodiment of the present utility model.

[0049] Figure 14 The exploded view schematic diagram of the second protective component of a slicing machine, showing an embodiment of the present utility model; and

[0050] Figure 15 The structural schematic diagram of the second protective component of a slicing machine, showing an embodiment of the present utility model.

[0051] Reference Signs:

[0052] 100. Slicing machine;

[0053] 1. Frame;

[0054] 2. Cutting mechanism;

[0055] 21. First cutting main roller; 22. Second cutting main roller;

[0056] 3. Feed mechanism;

[0057] 4. Wire mesh;

[0058] 5. Detection mechanism;

[0059] 51. Laser sensor; 511. Fixed bracket for distance measuring sensor

[0060] 52. Moving component

[0061] 521. First moving component

[0062] 5211. Module mounting plate; 5212. First moving transmission component

[0063] 522. Second moving component

[0064] 5221. Second moving rotating shaft; 5222. Second moving angle adjustment screw; 5223. Second moving oblong hole

[0065] 523. Connecting component

[0066] 5231. Connecting seat

[0067] 52311. Connecting seat body; 52312. Spindle structure

[0068] 5232. Adjusting plate; 5233. Connecting plate

[0069] 524. Adjusting component

[0070] 5241. Adjusting oblong hole of connecting plate; 5242. Guide groove of connecting plate; 5243. Adjusting lug of connecting plate; 5244. Adjusting oblong hole of adjusting plate

[0071] 525. Longitudinal moving component

[0072] 6. Protection component

[0073] 61. First protection component

[0074] 611. Protection sheet metal; 6111. Protection sheet metal gasket

[0075] 612. Opening sealing component

[0076] 6121. Sealing rubber sheet; 61211. Sealing rubber sheet pressing plate

[0077] 6122. Sealing strip; 61221. Sealing strip bracket

[0078] 62. Second protection component

[0079] 6211. Sensor protection cover; 6212. Sensor protection cover plate; 6213. Protection cover gasket

[0080] 622. Waterproof connector

[0081] 623. Transparent sealing plate

[0082] 6231, Transparent Sealing Plate Pressing Plate; 6232, Transparent Sealing Plate Gasket;

[0083] 6241, Compressed Air Inlet; 6242, Compressed Air Outlet;

[0084] 625, Flushing Assembly;

[0085] 200, Silicon Rod. Specific Embodiment

[0086] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention. For example, although these embodiments are introduced in combination with a specific combination of operation steps, obviously, those skilled in the art can adjust the steps such as adding, reducing, or replacing according to actual needs.

[0087] It should be noted that in the description of the present invention, unless otherwise clearly defined and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0088] In addition, in order to better illustrate the present invention, numerous specific details are given in the following specific embodiments. Those skilled in the art should understand that the present invention can also be implemented without some specific details. In some instances, the principles of the slicing machine well-known to those skilled in the art are not described in detail in order to highlight the gist of the present invention.

[0089] The slicing machine is mainly a device for using the wire mesh of the cutting wire (such as diamond wire, etc.) of a wire cutting machine to cut a silicon rod (usually called a square rod or a finished square rod) with a grinding accuracy up to the standard along its radial direction (for a workpiece with a strip structure having a length, for the sake of description, the length direction of the workpiece is called the axial direction, and the direction of the cross-section perpendicular to the axial direction is called the radial direction) to obtain monocrystalline silicon wafers. The following will be described with reference to Figures 1 to 15 at least a part of

[0090] Mainly with reference to Figure 1, in a possible implementation, the slicing machine 100 includes a slicing machine body, which mainly includes a frame 1. The frame forms a cutting chamber, and a cutting mechanism 2 and a feed mechanism 3 are arranged in the cutting chamber. In this example, the cutting mechanism includes three main cutting rollers distributed in an inverted triangle shape, and the feed mechanism is arranged above the cutting mechanism. The silicon rod 200 to be sliced can be fixed to the feed mechanism, and the feed mechanism carrying the silicon rod to be sliced can move in the vertical direction in a direction close to / away from the cutting mechanism. After the feed mechanism approaches the cutting mechanism, the silicon rod can be sliced by the wire mesh 4 wound around the cutting mechanism. After the slicing operation is completed, the feed mechanism moves away from the cutting mechanism to complete the retraction operation.

[0091] Taking the slicing operation as an example, generally, the process of a complete slicing operation includes: after completing stick - rod (sticking the square rod to be sliced onto a backing plate, and then sticking the backing plate to the crystal carrier. For example, the backing plate can be a plastic plate, a resin plate, a glass plate, etc.), fixing the crystal carrier on the feed mechanism. During the reciprocating movement of the wire mesh between the three main cutting rollers of the slicing machine, by driving the silicon rod to approach the wire mesh with the feed mechanism, the wire mesh can slice the silicon rod by wire sawing. During the slicing operation of the slicing machine on the silicon rod, the liquid supply system of the slicing machine needs to continuously spray cutting fluid to the slicing operation area at the slicing station. For example, the spray pipe of the liquid supply system discharges the cutting fluid to the wire mesh and the square rod continuously with a set flow rate as the spray parameter. Among them, the cutting fluid mainly plays roles such as cooling and lubrication during the slicing operation, and takes away silicon powder generated at the cut seam during the slicing operation.

[0092] In a possible implementation, the slicing machine 100 further includes a visual processing unit, which mainly realizes the automatic control of the slicing machine based on visual observation data. For example, the visual processing unit mainly includes a detection mechanism 5 and a controller (which can be set in the slicing machine, remote central control room, etc.). The detection mechanism is mainly used to collect wire mesh feature data related to the slicing operation in real - time, and the controller judges whether there are problems such as wire jumping, excessive wire bow, the silicon rod not being cut through by the wire mesh, and wire hanging during retraction according to the collected data. Specifically:

[0093] (1) During the slicing operation, each diamond segment of the wire mesh is wound in the corresponding wire grooves on the main cutting rollers, so as to complete the slicing operation of the silicon rod by wire sawing along with the reciprocating movement of the wire mesh. However, during the slicing operation, there may be a wire - jumping problem between adjacent diamond segments in the wire mesh. Specifically, the diamond wire corresponding to one or several wire grooves jumps out of the groove and overlaps with the diamond wire in the adjacent wire groove. If the wire - jumping problem is not dealt with in time, it will lead to wire breakage, which not only affects the sustainability of the automatic operation of the slicing machine, but also affects the quality of monocrystalline silicon wafers.

[0094] (2) During the slicing operation, the feed mechanism of the slicing machine drives the silicon rod to feed towards the wire mesh. During this period, the wire mesh will be pressed down to form a wire bow. If the wire bow is too large and not intervened in time, it will lead to risks such as wire breakage of the wire mesh.

[0095] (3) After each cut is completed, it is necessary to manually judge whether the silicon rod is completely cut through by the wire mesh of the diamond wire. In general, the conditions for manually judging that the silicon rod is completely cut through by the wire mesh are: the diamond wire cuts into the backing plate to a specific depth (usually 3 - 6 mm) and the wire mesh remains flat as a whole.

[0096] (4) After each cut is completed, the processed silicon wafer needs to be lifted (retracted) relative to the cutting mechanism (mainly including the cutting main roller) that constructs the wire mesh. During the retraction process, it is necessary to manually judge whether there is a problem of wire hanging during retraction. The specific manifestation of wire hanging during retraction is that one or more diamond wire segments in the wire mesh are pulled up by the silicon wafer during the lifting of the silicon rod. If not discovered and processed in time, it will cause the diamond wire to break, which will affect the quality of the silicon wafer and the production change efficiency of the slicing machine.

[0097] The present utility model aims to obtain wire mesh characteristic data in the case of one or more of the above problems through a detection mechanism. Through relevant analysis, it is expected to achieve automated operation based on visual detection.

[0098] In a possible implementation manner, an operation door is respectively arranged on the left and right sides of the cutting chamber. Two detection mechanisms 5 are respectively arranged in the cutting chamber near the two operation doors. For example, in Figure 2 the illustrated embodiment, the two detection mechanisms 5 are respectively installed above the cutting chamber. For example, in Figure 3 the illustrated embodiment, the two detection mechanisms 5 are respectively installed below the cutting chamber. The two detection mechanisms 5 are respectively used to collect wire mesh characteristic data on the cutting main rollers corresponding to the upper left and upper right (such as respectively denoted as the first cutting main roller 21 and the second cutting main roller 22) to complete the automated control of the slicing machine based on visual observation. Obviously, a detection mechanism can also be configured only for one of the cutting main rollers.

[0099] Mainly refer to Figures 1 to 4, in a possible implementation, the detection mechanism 5 mainly includes a ranging sensor as a detection component and a movable component 52. For example, the ranging sensor can be a laser sensor 51. For example, the laser sensor can be a point laser ranging sensor or a line laser ranging sensor. The movable component 52 is arranged on the frame 1, and the laser sensor is arranged on the movable component 52. The movable component can drive the laser sensor to move so that the ranging sensor can collect the wire mesh feature data of a set position / area or collect the dynamic wire mesh feature data. On this basis, it is expected to comprehensively and accurately detect the slicing operation through the wire mesh feature data collected by the laser sensor. For example, in the case of problems such as the silicon rod not being cut through by the wire mesh, wire jumping, and wire hanging during retraction of the tool, it can be timely detected and corresponding countermeasures can be given. Obviously, the laser sensor is just a specific form of the ranging sensor, and those skilled in the art can also use other types of optical sensors as detection components according to actual needs to achieve the collection of wire mesh feature data.

[0100]

Movable Component

[0101] Continue to refer to Figure 4 , in a possible implementation, the movable component 52 mainly includes a first movable component 521 and a second movable component 522. Among them, the first movable component can drive the laser sensor to move in a direction substantially parallel to the axis of the cutting main roller, and the second movable component can drive the laser sensor to rotate by a certain amount within the area where the wire mesh feature data can be collected. Among them, the first movable component can be arranged at the top or bottom of the cutting chamber, and the second movable component can be arranged on the first movable component in a direct or indirect connection manner. In this way, it is expected to make the laser sensor collect the wire mesh feature data of the target position through the combination of the linear motion corresponding to the first movable component and the rotation corresponding to the second movable component.

[0102] In a possible implementation, the first movable component 521 mainly includes a first movable driving component and a first movable transmission component 5212. For example, in this example, the first movable driving component is a driving motor, and the first movable transmission component is a lead screw nut mechanism. Among them, the second movable component can be fixedly connected to the nut of the lead screw nut mechanism. In this way, the laser sensor arranged on the second movable component can move along the lead screw under the drive of the driving motor. To ensure the reliability of the linear movement, for example, a first movable guiding component can be added to the first movable component. For example, the first movable guiding component can include structures such as linear guide rails, optical axes, and hard rails.

[0103] Obviously, the structural form of the above-mentioned first movable component is only an exemplary description, and those skilled in the art can flexibly change it according to actual needs. For example, the first movable transmission component can also be a rack and pinion mechanism, etc., and the first movable component can also be a power cylinder capable of outputting linear motion (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder, etc.) or any form of linear module, etc.

[0104] Mainly referring to Figure 4 and Figure 5 , in a possible implementation manner, the movable component 52 further includes a connection component 523, and the second movable component 522 is connected to the first movable component 521 through the connection component 523. Among them, the connection component 523 mainly includes a connection seat 5231 serving as a first connection part connected to the first movable component, an adjustment plate 5232 serving as a second connection part connected to the second movable component, and a connection plate 5233 serving as a third connection part disposed between the connection seat and the adjustment plate. As shown in the figure, the X-axis direction represents the axial direction of the cutting main roller, the Y-axis direction represents the running direction of the diamond wire, and the Z-axis direction represents the vertical direction (the feeding direction of the feeding mechanism).

[0105] In a possible implementation manner, the connection seat 5231 includes a connection seat main body 52311, and a shuttle-shaped structure 52312 serving as a connection seat matching part is formed on or provided on the connection seat main body 52311. For example, in this example, the connection seat main body generally includes a connection seat horizontal part and a connection seat vertical part. The connection seat horizontal part is fixedly connected to the nut of the lead screw nut mechanism by means of fasteners such as screws. The connection seat vertical part forms a shuttle-shaped structure in the area near the horizontal part. The shuttle-shaped structure is clamped between two sealing rubber sheets described below, and thus can reduce the influence of the laser sensor on the reliability of the rubber sheet protection during its movement along the X direction. Specifically, the shuttle-shaped structure can reduce the gap opened between the sealing strips, and thus is expected to obtain a better sealing effect. Obviously, the connection seat matching part can also be other structural forms except the shuttle-shaped structure. For example, one narrow side of the cross-section of the connection seat matching part is convex outward in a rectangle, the long side and the narrow side of the rectangle are changed to arc structures, and the rectangle is changed to a flat and long ellipse, etc.

[0106] In a possible implementation manner, the movable component 52 further includes an adjustment component 524, and the adjustment component is mainly used to adjust the position of the laser sensor relative to the first connection part / wire mesh. For example, in this example, the adjustment component 524 can adjust the position of the laser sensor relative to the first connection part / wire mesh along the Y / Z axis direction.

[0107] Mainly referring to Figure 5 and Figure 6, in a possible implementation, the connecting plate 5233 generally includes a horizontal portion and a vertical portion of the connecting plate. A pair of connecting plate adjustment slotted holes 5241 as a first adjustment structure are provided on the upper horizontal portion of the connecting plate along the Y-axis direction. Correspondingly, a connecting seat mounting portion is provided on the vertical portion of the connecting seat below the connecting seat. A pair of adjustment screws that can cooperate with the connecting plate adjustment slotted holes 5241 are provided on the connecting seat mounting portion. By the cooperation of the first adjustment slotted hole and the corresponding adjustment screw, the relative position relationship between the connecting plate and the connecting seat along the Y-axis direction can be adjusted.

[0108] In a possible implementation, a connecting plate guiding groove 5242 as a second adjustment structure is formed in the vertical portion of the connecting plate 5233 below in the area near the adjustment plate. The adjustment plate can move vertically in the guiding groove. In this way, the adjustment of the adjustment plate in the Z-axis direction can be realized, or during the process of realizing the Z-axis direction adjustment by means of the following third / fourth adjustment structures, the movement reliability of the adjustment plate during the Z-axis direction adjustment can be ensured.

[0109] In a possible implementation, a connecting plate adjustment lug 5243 as a third adjustment structure is provided on the vertical portion of the connecting plate 5233 below corresponding to the connecting plate guiding groove 5242. A through hole is provided on the connecting plate adjustment lug. Correspondingly, an adjustment screw and nut assembly can be configured for the through hole of the connecting plate adjustment lug. For example, in the case where the height is determined, the nut and screw above the connecting plate adjustment lug are tightened at the position corresponding to the current height.

[0110] In a possible implementation, a pair of adjustment plate adjustment slotted holes 5244 extending vertically are machined on the adjustment plate 5232 near the upper position as a fourth adjustment structure. A pair of adjustment screws are configured on the connecting plate at the position corresponding to the adjustment plate adjustment slotted holes. In this way, the relative position relationship between the connecting seat and the adjustment plate along the Z-axis direction can be adjusted by the combination of the adjustment plate adjustment slotted holes 5244 and the adjustment screws. In this example, the connecting plate adjustment lug is located between the adjustment plate adjustment slotted holes 5244.

[0111] In this way, the adjustment component composed of the first / second / third / fourth adjustment structures can achieve the adjustment of the adjustment plate in the Y-axis direction (the first adjustment structure) and the Z-axis direction (the second / third / fourth adjustment structures). In addition, in cases such as when the specifications of the main cutting roller change during the replacement of the main cutting roller or when the axle distance is switched, the detection mechanism can also be made to adapt to different cutting mechanisms through the adjustment function of the adjustment component. It can be understood that the specific structures and combination methods of the above-mentioned first / second / third adjustment structures are only an exemplary description of the adjustment component, and those skilled in the art can flexibly adjust it according to actual needs. For example, it can include but is not limited to: swapping the installation positions of the slotted holes and the adjustment screws, omitting one of the slotted holes and the lugs, replacing the current guiding groove with a structure in which the protrusion provided on the adjustment plate can move along the strip-shaped groove provided in the middle of the connecting plate, etc.

[0112]

Longitudinal Adjustment Component

[0113] Especially for the aforementioned situation where the specifications of the main cutting roller change during the replacement of the main cutting roller, in addition to achieving the adjustment in the Z-axis direction through the aforementioned second / third / fourth adjustment components, it can also be achieved through the following method:

[0114] Mainly referring to Figure 7 , in a possible implementation manner, the movable component 52 includes a longitudinal movement component 525, and the aforementioned first movable component is slidably arranged on the Z-direction movable component, so that the laser sensor and other parts of the movable component can achieve the movement in the Z-axis direction by means of the longitudinal movement component.

[0115] Obviously, the longitudinal adjustment component can also be jointly arranged with the aforementioned second / third / fourth adjustment components to better adjust the position of the laser sensor in the Z-axis direction. Exemplarily, a larger range of adjustment is achieved through the longitudinal movement component, while a smaller range of adjustment is achieved through the aforementioned ones.

[0116] In a possible implementation manner, the longitudinal movement component 525 includes a longitudinal movement driving component and a longitudinal movement transmission component. For example, the longitudinal movement driving component can be a driving motor, a rotating module, etc., and the longitudinal movement transmission component can be a lead screw-nut mechanism, a gear-rack mechanism, etc. To ensure the reliability of linear movement, a longitudinal movement guiding component can be added to the longitudinal movement component. For example, the longitudinal movement guiding component can include structures such as linear guide rails, optical axes, and hard rails.

[0117] Obviously, the above-described structural form of the longitudinal movement component is only an exemplary description, and those skilled in the art can flexibly modify it according to actual needs. For example, the structures of the longitudinal movement component and the first movable component may be the same or different. Similar to the aforementioned first movable component, the longitudinal movement component may also be a power cylinder capable of outputting linear motion (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder, etc.) or any form of linear module, etc.

[0118] Mainly referring to Figure 4 and Figure 8 , in a possible implementation manner, the laser sensor 51 is disposed on the laser sensor fixing bracket 511 serving as the laser sensor mounting portion, and the laser sensor fixing bracket 511 is rotatably connected to the adjustment plate 5232 by means of the second movable component 522. Among them, the second movable component 522 mainly includes a second movable rotating shaft 5221 and a second movable angle adjustment screw 5222. For example, in this example, the second movable rotating shaft 5221 is disposed on the adjustment plate 5232. Correspondingly, a through hole cooperating with the second movable rotating shaft 5221 is provided on the laser sensor fixing bracket 511. The second movable angle adjustment screw 5222 is disposed on the side portion of the adjustment plate 5232 in the vertical direction. The second movable angle adjustment screw includes two angle adjustment screws. By adjusting the positions of the two angle adjustment screws in the horizontal direction and cooperating with the rotation of the laser sensor fixing bracket 511 around the second movable rotating shaft 5221, the rotation of the laser sensor fixing bracket relative to the adjustment plate can be realized, thereby realizing the angle fine adjustment of the laser sensor fixing bracket around the second movable rotating shaft.

[0119] In a possible implementation manner, the second movable component 522 further includes one or more second movable slotted holes 5223. For example, in this example, there are two second movable slotted holes and they are disposed on the laser sensor fixing bracket 511. Correspondingly, fixing screws capable of cooperating with the two second movable slotted holes 5223 are provided on the adjustment plate 5232. In this way, after the adjustment is completed, the laser sensor fixing bracket and the adjustment plate can be reliably fixedly connected through the fixing screws, so as to ensure that the laser sensor mounted on the laser sensor fixing bracket can detect the wire mesh features at an ideal angle.

[0120] Obviously, the above-described structural form of the second movable component is only an exemplary description, and those skilled in the art can flexibly modify it according to actual needs. For example, any structure capable of realizing pivotal connection between the adjustment plate and the laser sensor fixing bracket can be used as the second movable component, such as a combination of a motor and a gear pair, a rotating module, etc.

[0121] It can be seen that through the setting of the movable component, the position of the laser sensor relative to the wire mesh can be adjusted flexibly. On this basis, it is expected to combine the aforementioned linear motion and rotation with the adjustment in the Y / Z axis directions so that the laser sensor can better collect the wire mesh feature data.

[0122]

Protective Component

[0123] Mainly referring to Figures 9 to 15 , during the slicing operation, the multi-wire high-speed cutting of the square bar by the diamond wire will cause the cutting fluid to splash, so the internal environment of the cutting chamber is very harsh, which is very unfriendly to the detection mechanism inside the cutting chamber. In a possible implementation manner, the detection mechanism is configured with a protective component. For example, the protective component is mainly used to prevent the intrusion of cutting fluid / dust, the accumulation of silicon powder, etc., so as to ensure the sustainability of the slicing operation and the reliability of the detection mechanism.

[0124] Mainly referring to Figures 9 to 13 , in a possible implementation manner, the protective component 6 includes a first protective component 61 for the first movable component 521. This is because the first movable component 521 includes a drive / transmission mechanism. For example, the drive transmission mechanism usually includes precision components such as a lead screw nut mechanism. Assuming that silicon powder, silicon mud, etc. enter the inside of the precision components, it will affect the reliability of the transmission setting and cause the drive transmission to fail. Therefore, in this embodiment, the first protective component is mainly provided to prevent the intrusion of cutting fluid / silicon dust, etc. into the inside of the first movable component.

[0125] In a possible implementation manner, the first movable component 521 further includes a module mounting plate 5211 as an installation part. The first movable component is installed in the cutting chamber of the slicing machine 100 through the module mounting plate 5211, and the first movable transmission component 5212 is arranged on the module mounting plate 5211 by means of fasteners such as screws. Among them, the first protective component 61 mainly includes a protective sheet metal 611, and the first movable drive part and the first movable transmission component 5212 are accommodated in the space formed by the protective sheet metal 611 and the module mounting plate 5211, so as to form a preliminary, wrapped protection form.

[0126] In a possible implementation manner, a sealing structure such as a protective sheet metal gasket 6111 is provided between the protective sheet metal 611 and the module mounting plate 5211 to improve the sealing performance.

[0127] Among them, an opening is provided on the protective sheet metal 611 to facilitate the fixation of the connection component and the first movable component. Through the protruding position of the connection component, the first protective component 61 further includes an opening sealing component 612 provided for the opening. Among them, the opening sealing component adopts at least one sealing method to ensure the sealing effect corresponding to the opening area.

[0128] In this example, the opening sealing assembly 612 includes a first opening sealing structure and a second opening sealing structure. Both opening sealing assemblies use a soft sealing method to achieve sealing protection for the opening area. The first opening sealing structure is located above the second opening sealing structure. Obviously, those skilled in the art can determine the number of sealing layers, the specific form of each sealing layer, the relative position between each sealing layer, etc. according to actual needs.

[0129] In a possible implementation manner, the first opening sealing structure includes a sealing rubber sheet 6121. For example, the sealing rubber sheet is made of silica gel. For example, sealing rubber sheets are respectively arranged on both sides of the connection assembly. For example, the sealing rubber sheet can be fixedly connected to the protective sheet metal 611 through a sealing rubber sheet pressing plate 61211. The shuttle-shaped structure on the aforementioned connection seat is adapted to the area of the sealing rubber sheet. Compared with the rectangular structure, the end of the shuttle-shaped structure can effectively reduce the gap opened between the two sealing rubber sheets, thereby ensuring the first sealing effect.

[0130] In a possible implementation manner, the second opening sealing structure includes a sealing strip 6122 with a hollow structure. For example, the sealing strip is snap-fitted on a sealing strip bracket 61221, and the sealing strip bracket is fixedly arranged on the protective sheet metal. Similar to the sealing rubber sheet, the sealing strips are also symmetrically arranged on both sides of the connection assembly. Among them, the installation distance a between the snap-fitting positions of the sealing strips on both sides should be less than twice the size (width along the horizontal direction) of the hollow chamber formed by the sealing strip, so as to ensure that the two sealing strips can be mutually extruded, so that there is no gap between the two sealing strips in the non-passing area of the connection bracket, thereby ensuring the second sealing effect.

[0131] In a possible implementation manner, the protection assembly includes a second protection assembly 62 for the laser sensor. This is because the laser sensor is a detection component with relatively high sensitivity, and it has relatively high requirements for clarity and cleanliness during the detection process. Therefore, in this embodiment, the integrity of the detection component and the cleanliness of its environment are mainly ensured by the setting of the second protection assembly.

[0132] Mainly refer to Figure 14 and Figure 15In one possible implementation, the second protection component 62 includes a sensor protection cover shell assembly. In this example, the sensor protection cover shell assembly includes a sensor protection cover 6211 with one side open and a sensor protection cover plate 6222. The sensor protection cover 6211 and the sensor protection cover plate 6222 form a receiving space, and the laser sensor is arranged inside the sensor protection cover with the aid of fasteners such as screws. Obviously, other structural forms can also be used to form the sensor protection cover shell assembly, such as two semi-shell structures (such as left and right semi-shells, upper and lower semi-shells, etc.), a lower cover shell and an upper top plate, etc. Based on this, a preliminary method can be achieved by wrapping protection. In this example, a protection cover sealing gasket 6223 is provided between the sensor protection cover 6211 and the sensor protection cover plate 6222 to ensure the sealing effect of the sensor protection cover shell assembly.

[0133] In a possible implementation, a connector is provided on the sensor protective cover 6211, and the sensor cable and other related leads can be led out through the connector. For example, a connector is provided on the side of the sensor protective cover facing away from the network (such as the back side), wherein the connector is a waterproof connector 622. It is understandable that those skilled in the art can select any connector form with a waterproof function.

[0134] In a possible implementation, a light-transmitting hole is provided on the side of the sensor protective cover close to the wire mesh (such as the front side) to allow the laser sensor to transmit / receive laser through the light-transmitting hole to collect the characteristic data of the wire mesh. A light-transmitting sealing plate 623 is provided at the position of the sensor protective cover corresponding to the light-transmitting hole to protect the area of ​​the light-transmitting hole, such as providing a light-transmitting sealing plate 623 outside the light-transmitting hole. For example, the light-transmitting sealing plate is preferably sapphire glass. Preferably, a hydrophobic coating can be added to the light-transmitting sealing plate to reduce the adhesion of the cutting fluid on the light-transmitting sealing plate.

[0135] In a possible implementation, the light-transmitting sealing plate 623 is fixed to the sensor protective cover shell assembly via a light-transmitting sealing plate pressing plate 6231. Light-transmitting sealing plate sealing gaskets 6232 are respectively provided between the light-transmitting sealing plate pressing plate 6231 and the light-transmitting sealing plate 623 and between the light-transmitting sealing plate 623 and the sensor protective cover 621 to improve the sealing performance of the area of ​​the sensor protective cover corresponding to the light-transmitting hole.

[0136] In a possible implementation, in order to ensure that the internal space of the sensor protective cover assembly is dry and free of water vapor, a compressed gas assembly is configured for the sensor protective cover. For example, a compressed air outlet 6241 and a compressed air inlet 6242 are provided on the sensor protective cover. The compressed air source, the compressed air outlet, the compressed air inlet in the compressed gas assembly and the internal space of the sensor protective cover form a loop, and compressed air is introduced into the loop through the compressed air source to realize the air circulation in the internal space, so as to ensure that the internal space of the protective cover can be in a dry state without water vapor.

[0137] In a possible implementation, the second protection component 62 further includes a flushing component 625, which is mainly used to clean the light-transmitting sealing plate 623 to ensure good light transmittance. For example, in this example, a flushing component 625 is respectively provided above and below the sensor protective cover assembly at positions (outside) close to the light-transmitting sealing plate 623, and the two flushing components are arranged approximately symmetrically. For example, the flushing component includes a backflush nozzle, and the backflush nozzle can emit a flushing medium and enter the internal space of the sensor protective cover assembly through the backflush inlet to clean the light-transmitting sealing plate 623. For example, the flushing medium can be liquid, gas or a water vapor mixture, etc. Obviously, those skilled in the art can determine the structural form, number, relative position relationship between the flushing components and their installation positions on the sensor protective cover according to actual needs. Exemplarily, only one flushing component is provided.

[0138] It can be seen that through the settings of the first protection component and the second protection component, effective protection can be provided for the first moving component and the laser sensor of the detection mechanism. On this basis, the reliability of the detection mechanism can be ensured.

[0139] Based on the above structure, visual inspection for the slicing machine can be realized. Taking the jumper wire among them as an example, the wire mesh feature data wound around the first cutting main roller and the second cutting main roller of the cutting mechanism are respectively collected by two laser sensors. Specifically, the distance between two adjacent diamond wire segments in the wire mesh is detected. Among them, when one of the diamond wire segments has a jumper wire situation, the distance between it and the adjacent diamond wire segment will be significantly greater than the distance between two other diamond wire segments without jumper wire. Specifically, assume that the distance (groove pitch) between two adjacent wire grooves on the cutting main roller is m, and the distance between two diamond wire segments in two adjacent wire grooves wound on the cutting main roller is b (m≈b). When one or more diamond wire segments in the wire mesh have a jumper wire situation, there will be an obvious situation where m≠b. Exemplarily, if the distance of the corresponding diamond wire segment is denoted as a, by comparing the distances between two adjacent diamond wire segments, when a situation of 0.1≤|a - b|≤m occurs for a certain diamond wire segment, it can be determined that the position of this diamond wire segment has a jumper wire problem. If it is determined that there is a jumper wire problem with the diamond wire, an alarm is issued at the position corresponding to the cutting chamber or the central control room to call relevant operators for manual intervention to eliminate the jumper wire problem in a timely manner. After the jumper wire problem is solved, the slicing machine can be restored to the normal automated operation state.

[0140] It can be seen that in the preferred embodiment of the present invention, by introducing a laser sensor into the detection mechanism, visual acquisition of wire mesh feature data can be performed, and based on this, automated slicing operation based on visual acquisition can be realized. Through the setting of the movable component, the laser sensor can perform visual acquisition of wire mesh feature data through the combination of movement and rotation, so that problems such as jumper wire, too large wire bow, the silicon rod not being cut through by the diamond wire, and wire hanging during retraction of the tool can be discovered in a timely manner, thus ensuring the reliability of the automated slicing operation. Through the setting of the adjustment component, it can be ensured that the laser sensor can perform more accurate visual acquisition of wire mesh features, thereby further ensuring the reliability of the automated slicing operation. Through the setting of the protection component, the working reliability of the movable component and the distance measurement sensor during the automated slicing operation can be ensured.

[0141] So far, the technical solution of the present invention has been described in combination with the preferred embodiments shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of the present invention.

Claims

1. An active component, characterized in that, The movable component includes: A driving transmission mechanism that can drive a moving part to move linearly at its power output end; and A protection part, which includes: A first protection component that forms a protection space, and the driving transmission mechanism is accommodated in the protection space; A second protection component that, on the one hand, allows the moving part to penetrate and thus be connected to the power output end, and the moving part is hermetically connected to the power output end through the second protection component.

2. The movable component according to claim 1, characterized in that, The second protection component includes at least one sealing structure, and the moving part is hermetically connected to the power output end through at least one sealing structure.

3. The movable component according to claim 2, wherein The second protection component includes: A first sealing structure that includes a first sealing flexible skin and a second sealing flexible skin respectively disposed on a pair of opposite sides of the moving part; and / or A second sealing structure that includes a first sealing strip and a second sealing strip respectively disposed on a pair of opposite sides of the moving part.

4. The movable component according to claim 3, characterized in that, The moving part includes a mating part, and the first sealing flexible skin and the second sealing flexible skin are disposed at positions of the moving part corresponding to the mating part.

5. The movable component according to claim 4, characterized in that, The cross-section of the mating part in a plane perpendicular to the direction of linear movement is a flat structure, and the flat structure is at least in a part near the end a structure with a width decreasing from the middle to the end.

6. The movable component according to claim 5, wherein, The cross-section of the mating part in a plane perpendicular to the direction of linear movement is a fusiform structure.

7. The movable component according to claim 3, characterized in that, The first sealing flexible skin and / or the second sealing flexible skin are fixedly connected to the first protection component through a sealing flexible skin pressing plate.

8. The movable component according to claim 3, wherein, The first sealing strip and the second sealing strip include a sealing part, and the sealing part is a hollow structure, and the moving part is clamped between the sealing parts of the first sealing strip and the second sealing strip.

9. The movable component according to claim 8, wherein, The first sealing strip and the second sealing strip include a connecting part, and the connecting part is connected to the first protection component through a sealing strip connecting component.

10. The movable component according to claim 9, characterized in that, A first sealing gasket is provided between the sealing strip connecting component and the first protection component.

11. The movable component according to claim 3, wherein The first sealing structure is disposed at a position where the moving part is close to the driving transmission mechanism, and the second sealing structure is disposed at a position where the moving part is far from the driving transmission mechanism.

12. The movable component according to claim 1, wherein, The movable component includes a mounting part, and the driving transmission mechanism is disposed on the mounting part, The first protection component includes a protection plate, and the protection plate is fixedly disposed on the mounting part.

13. The movable component according to claim 12, characterized in that, A first protection sealing gasket is provided between the mounting part and the first protection component.

14. A wire cutting machine, characterized in that, The wire cutting machine includes the movable component according to any one of claims 1 to 13.

15. The wire cutting machine according to claim 14, characterized in that, The wire cutting machine is a slicing machine.

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