Multi-shaft synchronous rotating device and vacuum treatment equipment

Abstract

The utility model discloses a multi-shaft synchronous rotating device and vacuum processing equipment, and belongs to the technical field of transmission equipment. According to the multi-shaft synchronous rotating device and the vacuum processing equipment, the rotating shafts synchronously rotate through the connecting rod mechanism, the rotating consistency of the rotating shafts is improved, the driving mechanism provides power for the connecting rod mechanism through the at least two power output parts at the same time, the problem that the connecting rod mechanism is stuck can be effectively solved, and the working efficiency is improved. And stable driving force can be provided for the connecting rod mechanism, so that the rotating stability of the rotating shaft is not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of transmission equipment, in particular to a multi-axis synchronous rotation device and a vacuum treatment device. Background Art

[0002] In the prior art, the synchronous rotation of multiple rotating shafts is usually driven by gear transmission or belt transmission. Among them, the cost of the gear transmission scheme is relatively high, and the shaking caused by the superposition of the tooth gaps of multiple groups of gears makes the rotation consistency of multiple rotating shafts not ideal, and the transmission efficiency is low, and the failure rate is high; the cost of the belt transmission scheme is relatively low, but the transmission accuracy is also low, resulting in low rotation consistency of multiple rotating shafts. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a multi-axis synchronous rotation device and a vacuum treatment device, which can not only improve the rotation consistency of multiple rotating shafts, but also not affect the smoothness of the rotation of the rotating shafts.

[0004] To achieve the above purpose, the following technical solutions are provided:

[0005] On the one hand, a multi-axis synchronous rotation device is provided, including a fixing member, a driving mechanism and a multi-axis synchronous rotation unit. The multi-axis synchronous rotation unit includes:

[0006] a mounting member and multiple rotating shafts, the mounting member is fixedly arranged on the fixing member, and multiple rotating shafts are rotatably arranged on the mounting member;

[0007] a connecting rod mechanism for driving the synchronous rotation of multiple rotating shafts;

[0008] The driving mechanism includes at least two power output parts, and at least two power output parts are respectively connected with the connecting rod mechanism to drive the connecting rod mechanism to act.

[0009] As an optional scheme of the multi-axis synchronous rotation device, the driving mechanism includes a driving shaft, the driving shaft is rotatably arranged on the fixing member, and at least two driving wheels are arranged on the driving shaft;

[0010] The multi-axis synchronous rotation unit further includes at least two transmission components, at least two transmission components are arranged in one-to-one correspondence with the at least two driving wheels, the transmission component includes a transmission member and an output wheel, the output wheel is rotatably arranged on the mounting member, the transmission member is respectively meshed with the corresponding driving wheel and the output wheel, and the output wheel is connected with the connecting rod mechanism so that the output wheel can drive the connecting rod mechanism to act.

[0011] As an optional scheme of the multi-axis synchronous rotation device, both ends of the connecting rod mechanism are respectively connected with the output wheels of two of the transmission components.

[0012] As an alternative to the multi-axis synchronous rotation device, the driving wheel is a bevel gear, and the transmission member includes:

[0013] A transmission shaft rotatably provided on the mounting member;

[0014] A transmission bevel gear fixedly provided on the transmission shaft, the transmission bevel gear meshing with the driving wheel;

[0015] A first transmission gear fixedly provided on the transmission shaft, the first transmission gear meshing with the output wheel.

[0016] As an alternative to the multi-axis synchronous rotation device, the transmission assembly further includes a second transmission gear, and both the first transmission gear and the output wheel mesh with the second transmission gear.

[0017] As an alternative to the multi-axis synchronous rotation device, the transmission bevel gear is rotatably provided on the transmission shaft, and the transmission member further includes a gear locking member for locking or unlocking the transmission bevel gear to the transmission shaft.

[0018] As an alternative to the multi-axis synchronous rotation device, the link mechanism includes:

[0019] A first link;

[0020] A plurality of second links, the second links are arranged in one-to-one correspondence with the rotating shafts, the second links are provided on one side in the radial direction of the corresponding rotating shafts, both ends of the second links are respectively connected to the first link and the rotating shafts, and at least one of the first link and the rotating shafts is rotatably connected to the second link;

[0021] At least two third links, the third links are arranged in one-to-one correspondence with the output wheels, the third links are provided on one side in the radial direction of the corresponding output wheels, both ends of the third links are respectively connected to the first link and the output wheels, and at least one of the first link and the output wheels is rotatably connected to the third link.

[0022] As an alternative to the multi-axis synchronous rotation device, the rotating shaft is provided with a fixture capable of clamping a workpiece.

[0023] As an alternative to the multi-axis synchronous rotation device, a plurality of multi-axis synchronous rotation units are provided, and the plurality of multi-axis synchronous rotation units are sequentially arranged along the circumferential direction of the driving wheel;

[0024] The driving wheel can simultaneously mesh with the transmission members of a plurality of the multi-axis synchronous rotation units.

[0025] As an alternative to the multi-axis synchronous rotation device, the mounting member is movably disposed along the circumferential direction of the driving wheel on the fixing member, and the multi-axis synchronous rotation unit further includes an adjusting and locking member for locking or unlocking the mounting member and the fixing member.

[0026] As an alternative to the multi-axis synchronous rotation device, the fixing member is provided with a guiding groove, and the mounting member is movably disposed along the circumferential direction of the driving wheel in the guiding groove.

[0027] On the other hand, a vacuum processing device is provided, including the multi-axis synchronous rotation device described in any one of the above.

[0028] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0029] In the multi-axis synchronous rotation device and the vacuum processing device of the present utility model, a link mechanism is used to synchronously rotate multiple rotating shafts, improving the consistency of the rotation of the multiple rotating shafts. The driving mechanism simultaneously provides power to the link mechanism through at least two power output parts, which can not only effectively avoid the problem of jamming of the link mechanism, but also provide a stable driving force to the link mechanism, and thus will not affect the smoothness of the rotation of the rotating shaft. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a schematic structural diagram of a multi-axis synchronous rotation unit in an embodiment of the present utility model Figure 1 ;

[0031] Figure 2 is a schematic structural diagram of a multi-axis synchronous rotation unit in an embodiment of the present utility model Figure 2 ;

[0032] Figure 3 is an exploded view of a transmission bevel gear, a first transmission gear and a transmission shaft in an embodiment of the present utility model;

[0033] Figure 4 is a schematic diagram of the overall structure of the first multi-axis synchronous rotation device in an embodiment of the present utility model;

[0034] Figure 5 is a schematic diagram of the end structure of the first multi-axis synchronous rotation device in an embodiment of the present utility model Figure 1 ;

[0035] Figure 6 is a schematic diagram of the end structure of the first multi-axis synchronous rotation device in an embodiment of the present utility model Figure 2 ;

[0036] Figure 7 is a schematic diagram of the end structure of the second multi-axis synchronous rotation device in an embodiment of the present utility model Figure 1 ;

[0037] Figure 8 Schematic diagram of the end structure of the second multi-axis synchronous rotation device in the embodiment of the present utility model Figure 2 .

[0038] Reference numerals:

[0039] 1. Fixing member; 11. Limiting portion; 2. Driving shaft; 21. Driving wheel; 3. Multi-axis synchronous rotation unit; 31. Mounting member; 32. Rotating shaft; 321. Cam; 322. Fixture; 33. Link mechanism; 331. First link; 332. Second link; 333. Third link; 34. Transmission assembly; 341. Transmission member; 3411. Transmission shaft; 3412. Transmission bevel gear; 34121. Threaded hole; 3413. First transmission gear; 342. Output wheel; 343. Second transmission gear; 344. Third transmission gear. Detailed implementation manners

[0040] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. Generally, the components of the embodiments of the present utility model described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents the selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0042] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0043] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0044] In the description of the present utility model, it should also be noted that unless otherwise clearly defined and limited, the terms "arranged" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0045] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0046] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation on the present utility model.

[0047] Such as Figures 1 - 8As shown in the figure, this embodiment provides a multi-axis synchronous rotation device, which includes a fixing member 1, a driving mechanism, and a multi-axis synchronous rotation unit 3. The multi-axis synchronous rotation unit 3 includes a mounting member 31, a plurality of rotating shafts 32, a link mechanism 33, and at least two transmission components 34. The mounting member 31 is fixed to the fixing member 1, and the plurality of rotating shafts 32 are rotatably arranged on the mounting member 31 and are arranged side by side. The driving mechanism includes at least two power output parts, and the at least two power output parts are respectively connected to the link mechanism 33 to drive the link mechanism 33 to act. The plurality of rotating shafts 32 are all connected to the link mechanism 33 so that the link mechanism 33 can drive the plurality of rotating shafts 32 to rotate synchronously.

[0048] In the multi-axis synchronous rotation device of this embodiment, the link mechanism 33 enables the plurality of rotating shafts 32 to rotate synchronously, improving the consistency of the rotation of the plurality of rotating shafts 32. The driving mechanism provides power to the link mechanism through at least two power output parts at the same time, which can not only effectively avoid the problem of jamming of the link mechanism 33, but also provide a stable driving force to the link mechanism 33, and thus will not affect the smoothness of the rotation of the rotating shaft 32.

[0049] In this embodiment, the driving mechanism includes a driving shaft 2. The driving shaft 2 is rotatably arranged on the fixing member 1, and at least two driving wheels 21 are provided on the driving shaft 2. The multi-axis synchronous rotation unit 3 further includes at least two transmission components 34, and the at least two transmission components 34 are arranged in one-to-one correspondence with the at least two driving wheels 21. The transmission component 34 includes a transmission member 341 and an output wheel 342. The output wheel 342 is rotatably arranged on the mounting member 31. The transmission member 341 is respectively engaged with the corresponding driving wheel 21 and the output wheel 342 so that the driving wheel 21 can drive the output wheel 342 to rotate through the corresponding transmission member 341. The output wheel 342 is connected to the link mechanism 33 so that the output wheel 342 can drive the link mechanism 33 to act. It can be understood that in this embodiment, the power output part is the output wheel 342.

[0050] In the multi-axis synchronous rotation device of this embodiment, the driving shaft 2 rotates to drive all the driving wheels 21 to rotate. The driving wheels 21 drive the output wheels 342 to rotate through the transmission members 341 engaged with them. The output wheels 342 drive the link mechanism 33 to act so that the link mechanism 33 drives the plurality of rotating shafts 32 to rotate synchronously.

[0051] The at least two transmission components 34 are driven by the same driving shaft 2, which can ensure the uniformity of the force on the link mechanism 33 and enable the link mechanism 33 to operate smoothly.

[0052] Optionally, the linkage mechanism 33 includes a first link 331, a second link 332, and a third link 333. There are multiple second links 332, and the second links 332 are arranged in one-to-one correspondence with the rotating shafts 32. The second links 332 are arranged on one side in the radial direction of the corresponding rotating shafts 32. Two ends of the second link 332 are respectively connected to the first link 331 and the rotating shaft 32, and at least one of the first link 331 and the rotating shaft 32 is rotatably connected to the second link 332; there are at least two third links 333, and the third links 333 are arranged in one-to-one correspondence with the output wheels 342. The third links 333 are arranged on one side in the radial direction of the corresponding output wheels 342. Two ends of the third link 333 are respectively connected to the first link 331 and the output wheel 342, and at least one of the first link 331 and the output wheel 342 is rotatably connected to the third link 333. When the output wheel 342 rotates, the first link 331 can be driven to act through the third link 333, and further the first link 331 can drive the multiple rotating shafts 32 to rotate synchronously through the multiple second links 332.

[0053] In this embodiment, one end of the second link 332 is rotatably connected to the first link 331, and the other end is fixedly connected to the rotating shaft 32; one end of the third link 333 is rotatably connected to the first link 331, and the other end is fixedly connected to the output wheel 342. In other embodiments, it is also possible to fixedly connect one end of the second link 332 to the first link 331 and rotatably connect the other end to the rotating shaft 32; fixedly connect one end of the third link 333 to the first link 331 and rotatably connect the other end to the output wheel 342. Of course, it is also possible to rotatably connect both ends of the second link 332 to the first link 331 and the rotating shaft 32 respectively; rotatably connect both ends of the third link 333 to the first link 331 and the output wheel 342 respectively.

[0054] Exemplarily, one end of the second link 332 is rotatably connected to the first link 331 through a rotating support member such as a bearing; further, one end of the third link 333 is rotatably connected to the first link 331 through a rotating support member such as a bearing, thereby improving the smoothness of the rotation of the first link 331 and the rotating shaft 32.

[0055] Further, cams 321 are provided on the multiple rotating shafts 32. The cams 321 are sleeved on the outside of the corresponding rotating shafts 32 and fixedly connected to the rotating shafts 32. One end of the second link 332 is rotatably connected to the first link 331, and the other end is fixedly connected to the cam 321. With such a setting, the convenience of connecting the second link 332 to the rotating shaft 32 is improved, facilitating assembly.

[0056] In this embodiment, the first connecting rod 331 is an integrally formed structure. In other words, a plurality of second connecting rods 332 and at least two third connecting rods 333 are connected by one first connecting rod 331, which has a simple structure and is easy to assemble. In other embodiments, the first connecting rod 331 may also include a plurality of branch connecting rods, and the plurality of branch connecting rods are fixedly connected in sequence to form a whole. Specifically, a branch connecting rod is provided between two adjacent second connecting rods 332, and between the third connecting rod 333 and the adjacent second connecting rod 332.

[0057] It should be noted that for the first connecting rod 331 with a relatively short length, the installation position of the output wheel 342 can be arbitrarily selected. For the first connecting rod 331 with a relatively long length, preferably, both ends of the connecting rod mechanism 33 are respectively connected to the output wheels 342 of two of the transmission components 34, so as to provide power to both ends of the connecting rod mechanism 33 through the two transmission components 34 respectively, which is beneficial to ensuring uniform force on the connecting rod mechanism 33 and avoiding jamming problems.

[0058] In this embodiment, there are two transmission components 34, which are respectively arranged at both ends of the connecting rod mechanism 33. The output wheels 342 of the two transmission components 34 are respectively connected to both ends of the connecting rod mechanism 33. On the one hand, it ensures uniform force on the connecting rod mechanism 33 and avoids jamming problems. On the other hand, it is beneficial to reducing the number of transmission components 34, thereby simplifying the structure of the multi-axis synchronous rotation unit 3, avoiding interference problems, and facilitating layout and assembly.

[0059] In this embodiment, the driving wheel 21 is a bevel gear, the output wheel 342 is a cylindrical gear, and the transmission member 341 includes a transmission shaft 3411, a transmission bevel gear 3412, and a first transmission gear 3413. The transmission shaft 3411 is rotatably arranged on the mounting member 31; the transmission bevel gear 3412 is fixedly arranged on the transmission shaft 3411, and the transmission bevel gear 3412 meshes with the driving wheel 21; the first transmission gear 3413 is fixedly arranged on the transmission shaft 3411, and the first transmission gear 3413 meshes with the output wheel 342. With such a setting, the transmission direction can be changed through the driving wheel 21 and the transmission bevel gear 3412, which is convenient for the layout of the driving shaft 2 and the plurality of rotating shafts 32, so as to reduce the space occupied by the multi-axis synchronous rotation unit 3.

[0060] Optionally, the transmission component 34 further includes a second transmission gear 343, and both the first transmission gear 3413 and the output wheel 342 mesh with the second transmission gear 343. With such a setting, the distance between the connecting rod mechanism 33 and the transmission bevel gear 3412 can be increased through the second transmission gear 343 to avoid interference between the two.

[0061] Optionally, the rotating shaft 32 is provided with a fixture 322 capable of clamping a workpiece. Clamping the workpiece to the fixture 322 enables the workpiece to rotate driven by the rotating shaft 32, and thus multiple workpieces can rotate synchronously. It should be noted that the type and structure of the fixture 322 are not limited in this embodiment. The fixture 322 can be a jaw or a suction cup, etc.

[0062] Furthermore, the transmission shaft 3411, the gear shaft of the second transmission gear 343, and the gear shaft of the output wheel 342 are all provided with a fixture 322 capable of clamping a workpiece. In other words, the transmission shaft 3411, the gear shaft of the second transmission gear 343, and the gear shaft of the output wheel 342 can all be used as the rotating shaft 32 and have the same function as the rotating shaft 32. In other words, the rotating shaft 32, the transmission shaft 3411, the gear shaft of the second transmission gear 343, and the gear shaft of the output wheel 342 can all be used to load the workpieces to be processed. Therefore, the purpose of increasing the number of workpieces loaded can be achieved.

[0063] Optionally, the transmission assembly 34 further includes a third transmission gear 344. The third transmission gear 344 meshes with the first transmission gear 3413, and the third transmission gear 344 and the second transmission gear 343 are respectively located on both sides of the first transmission gear 3413. Furthermore, the gear shaft of the third transmission gear 344 is also provided with a fixture 322 capable of clamping a workpiece. Thus, the gear shaft of the third transmission gear 344 can also be used as the rotating shaft 32 and have the same function as the rotating shaft 32. Loading the workpieces to be processed on the gear shaft of the third transmission gear 344 can achieve the purpose of further increasing the number of workpieces loaded.

[0064] In this embodiment, the transmission assembly 34 adopts a gear transmission form, which can provide a stable driving force to the link mechanism 33, and thus will not affect the smooth rotation of the rotating shaft 32.

[0065] It should be noted that in this embodiment, bevel gears (i.e., both the driving wheel 21 and the transmission bevel gear 3412 are bevel gears) are used to change the torque transmission direction. In other embodiments, the torque transmission direction can also be changed by transmission mechanisms such as a pulley and a lever or a worm and a worm gear.

[0066] Furthermore, in this embodiment, one driving shaft 2 is used to provide power to both ends of the link mechanism 33 simultaneously, which is equivalent to only setting one driving source. In other embodiments, the driving mechanism can also include two driving sources, and the two driving sources respectively provide power to both ends of the link mechanism 33. For example, the driving mechanism includes two motors, and the two motors are respectively connected to the output wheels of the two transmission assemblies. In other words, the output wheels are directly driven to rotate by the motors. Of course, the driving mechanism can also adopt other structures as long as it can provide two driving forces to the link mechanism 33 simultaneously, and no limitation is made here.

[0067] Optionally, asFigure 3 As shown, the drive bevel gear 3412 is detachably mounted on the drive shaft 3411. Exemplarily, the drive bevel gear 3412 is rotatably provided on the drive shaft 3411. The transmission member 341 further includes a gear locking member for locking or unlocking the drive bevel gear 3412 and the drive shaft 3411. It can be understood that after unlocking the gear locking member, the fixed connection between the drive bevel gear 3412 and the drive shaft 3411 is released, and the drive bevel gear 3412 can rotate relative to the drive shaft 3411.

[0068] Since there are multiple transmission assemblies 34, in order to ensure the synchronization of the multiple transmission assemblies 34, it is necessary to make the installation angles between the drive bevel gear 3412 and the first transmission gear 3413 the same. In this embodiment, the first transmission gear 3413 is key-connected to the drive shaft 3411. When it is necessary to adjust the angle of the drive bevel gear 3412, the gear locking member can be unlocked, and then the drive bevel gear 3412 can be rotated around the drive shaft 3411 to a suitable position, and then the drive bevel gear 3412 and the drive shaft 3411 can be locked by using the gear locking member. The adjustment method is simple.

[0069] Exemplarily, the gear locking member includes a plurality of bolts. The drive bevel gear 3412 is provided with a plurality of threaded holes 34121. The plurality of bolts are threadedly connected to the plurality of threaded holes 34121 one by one. One end of the bolt passes through the corresponding threaded hole 34121 and abuts against the drive shaft 3411, so that the drive bevel gear 3412 and the drive shaft 3411 can be locked by the plurality of bolts without affecting the normal operation of the drive bevel gear 3412.

[0070] Optionally, as Figure 4 shown, there are a plurality of multi-axis synchronous rotation units 3, and the plurality of multi-axis synchronous rotation units 3 are sequentially arranged along the circumferential direction of the drive wheel 21; the drive wheel 21 can be simultaneously engaged with the transmission members 341 of the plurality of multi-axis synchronous rotation units 3, thereby driving the output wheels 342 of the plurality of multi-axis synchronous rotation units 3 to rotate. With this arrangement, the rotation shafts 32 of the plurality of multi-axis synchronous rotation units 3 can be synchronously rotated by one drive shaft 2, which has the purpose of increasing the number of workpieces loaded, thereby expanding the application range of the multi-axis synchronous rotation device and consuming less energy.

[0071] Optionally, the mounting member 31 is circumferentially movably arranged on the fixing member 1 along the driving wheel 21. The multi-axis synchronous rotation unit 3 further includes an adjusting and locking member for locking or unlocking the mounting member 31 and the fixing member 1. Unlocking the adjusting and locking member enables the mounting member 31 to move circumferentially along the driving wheel 21 to adjust the mounting position of the multi-axis synchronous rotation unit 3 corresponding to the mounting member 31. In other words, the angle between two adjacent multi-axis synchronous rotation units 3 can be adjusted to meet different requirements. After the mounting member 31 moves to a suitable position, the adjusting and locking member can be used to lock the mounting member 31 and the fixing member 1, which is convenient to operate.

[0072] Optionally, the fixing member 1 is provided with a guiding groove, and the mounting member 31 is circumferentially movably arranged in the guiding groove along the driving wheel 21. With such a setting, the guiding groove can support and guide the mounting member 31, facilitating the control of the movement amount of the mounting member 31 and improving the stability of the mounting member 31.

[0073] Exemplarily, the adjusting and locking member is a bolt. One end of the bolt passes through the guiding groove and is threadedly connected to the mounting member 31. Loosening the bolt enables the mounting member 31 to move circumferentially along the driving wheel 21. When the mounting member 31 moves to a suitable position, tightening the bolt can lock the mounting member 31 and the fixing member 1.

[0074] Optionally, as Figures 4 - 6 shown, the fixing member 1 includes a limiting portion 11 arranged circumferentially along the driving wheel 21, and one side of the mounting member 31 in the radial direction of the driving wheel 21 abuts against the limiting portion 11. With such a setting, it is convenient to limit the radial movement of the mounting member 31 along the driving wheel 21 by the limiting portion 11, ensuring the normal meshing of the driving wheel 21 and the driven gear.

[0075] In this embodiment, the fixing member 1 is a circular flange, and the limiting portion 11 is a limiting ring. The limiting ring is sleeved on the outer side of the circular flange and fixedly connected to the circular flange. The mounting member 31 is provided with a limiting arc surface corresponding to the limiting ring. The inner side surface of the limiting ring in the radial direction of the driving wheel 21 abuts against the limiting arc surface to limit the radial movement of the mounting member 31 along the driving wheel 21 without affecting the circumferential movement of the mounting member 31 along the driving wheel 21. Of course, in other embodiments, the limiting portion 11 may also include a plurality of arc-shaped plates located on the circumference of the same preset circle (the preset circle is coaxially arranged with the driving wheel 21), and the inner side surface of the arc-shaped plates in the radial direction of the driving wheel 21 abuts against the mounting member 31, which can also limit the radial movement of the mounting member 31 along the driving wheel 21.

[0076] Of course, as Figures 7 - 8 shown, in other embodiments, the fixing member 1 can also be set as a polygonal structure such as a square or a regular octagon, and the mounting member 31 can be fixedly installed on the fixing member 1 through an adjusting and locking member such as a bolt.

[0077] Exemplarily, the working principle of the multi-axis synchronous rotation device in this embodiment is as follows:

[0078] The rotation of the drive shaft 2 drives the rotation of the drive wheel 21 on the drive shaft 2. The drive wheel 21 drives the rotation of the transmission bevel gear 3412 meshed with it. The transmission bevel gear 3412 drives the rotation of the transmission shaft 3411 and then drives the rotation of the first transmission gear 3413. The first transmission gear 3413 drives the rotation of the second transmission gear 343 and the third transmission gear 344 meshed with it. The second transmission gear 343 drives the rotation of the output wheel 342 meshed with it. The output wheel 342 drives the first link 331 to act through the third link 333. The first link 331 drives the synchronous rotation of a plurality of rotating shafts 32 through a plurality of second links 332.

[0079] This embodiment also provides a vacuum processing device, including the multi-axis synchronous rotation device as described above. It should be noted that the vacuum processing device in this embodiment can be a vacuum coating device, which can clamp the workpiece through the fixture 322 and perform vacuum coating operations on the workpiece. Of course, the vacuum processing device can also be a vacuum etching device, which clamps the workpiece through the fixture 322 and performs vacuum etching operations on the workpiece.

[0080] The vacuum processing device in this embodiment, by applying the above multi-axis synchronous rotation device, has the same functions and beneficial effects as the above multi-axis synchronous rotation device.

[0081] Note that the above is only the preferred embodiment of the present invention and the applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A multi-axis synchronous rotation device, characterized in that, It includes a fixing member (1), a driving mechanism, and a multi-axis synchronous rotation unit (3), and the multi-axis synchronous rotation unit (3) includes: A mounting member (31) and a plurality of rotating shafts (32), the mounting member (31) is fixed to the fixing member (1), and the plurality of rotating shafts (32) are rotatably arranged on the mounting member (31); A link mechanism (33), the link mechanism (33) is used to drive the plurality of rotating shafts (32) to rotate synchronously; The driving mechanism includes at least two power output parts, and at least two of the power output parts are respectively connected to the link mechanism (33) to drive the link mechanism (33) to act.

2. The multi-axis synchronous rotation device according to claim 1, characterized in that The driving mechanism includes a driving shaft (2), the driving shaft (2) is rotatably arranged on the fixing member (1), and at least two driving wheels (21) are arranged on the driving shaft (2); The multi-axis synchronous rotation unit (3) further includes at least two transmission components (34), and at least two of the transmission components (34) are arranged in one-to-one correspondence with the at least two driving wheels (21). The transmission component (34) includes a transmission member (341) and an output wheel (342). The output wheel (342) is rotatably arranged on the mounting member (31). The transmission member (341) is respectively meshed with the corresponding driving wheel (21) and the output wheel (342), and the output wheel (342) is connected to the link mechanism (33) so that the output wheel (342) can drive the link mechanism (33) to act.

3. The multi-axis synchronous rotation device according to claim 2, characterized in that, Both ends of the link mechanism (33) are respectively connected to the output wheels (342) of two of the transmission components (34).

4. The multi-axis synchronous rotation device according to claim 2, characterized in that, The driving wheel (21) is a bevel gear, and the transmission member (341) includes: A transmission shaft (3411), the transmission shaft (3411) is rotatably arranged on the mounting member (31); A transmission bevel gear (3412), the transmission bevel gear (3412) is fixed to the transmission shaft (3411), and the transmission bevel gear (3412) is meshed with the driving wheel (21); A first transmission gear (3413), the first transmission gear (3413) is fixed to the transmission shaft (3411), and the first transmission gear (3413) is meshed with the output wheel (342).

5. The multi-axis synchronous rotation device according to claim 4, characterized in that, The transmission component (34) further includes a second transmission gear (343), and both the first transmission gear (3413) and the output wheel (342) are meshed with the second transmission gear (343).

6. The multi-axis synchronous rotation device according to claim 5, characterized in that, The transmission bevel gear (3412) is rotatably arranged on the transmission shaft (3411), and the transmission member (341) further includes a gear locking member, and the gear locking member is used to lock or unlock the transmission bevel gear (3412) and the transmission shaft (3411).

7. The multi-axis synchronous rotation device according to claim 2, wherein The link mechanism (33) includes: A first link (331); A plurality of second linkages (332), the second linkages (332) being provided in one-to-one correspondence with the rotating shafts (32), the second linkages (332) being disposed on one side in the radial direction of the corresponding rotating shafts (32), both ends of the second linkages (332) being respectively connected to the first linkage (331) and the rotating shafts (32), and at least one of the first linkage (331) and the rotating shafts (32) being rotatably connected to the second linkages (332); At least two third linkages (333), the third linkages (333) being provided in one-to-one correspondence with the output wheels (342), the third linkages (333) being disposed on one side in the radial direction of the corresponding output wheels (342), both ends of the third linkages (333) being respectively connected to the first linkage (331) and the output wheels (342), and at least one of the first linkage (331) and the output wheels (342) being rotatably connected to the third linkages (333).

8. The multi-axis synchronous rotation device according to claim 1, characterized in that, The rotating shaft (32) is provided with a fixture (322) capable of clamping a workpiece.

9. The multi-axis synchronous rotation device according to claim 2, characterized in that, A plurality of the multi-axis synchronous rotation units (3) are provided, and the plurality of multi-axis synchronous rotation units (3) are sequentially arranged along the circumferential direction of the driving wheel (21); The driving wheel (21) can simultaneously mesh with the transmission members (341) of the plurality of multi-axis synchronous rotation units (3).

10. The multi-axis synchronous rotation device according to claim 9, characterized in that, The mounting member (31) is movably disposed along the circumferential direction of the driving wheel (21) on the fixing member (1), and the multi-axis synchronous rotation unit (3) further includes an adjusting and locking member for locking or unlocking the mounting member (31) and the fixing member (1).

11. The multi-axis synchronous rotation device according to claim 10, wherein The fixing member (1) is provided with a guiding groove, and the mounting member (31) is movably disposed along the circumferential direction of the driving wheel (21) in the guiding groove.

12. A vacuum treatment device, characterized in that, Comprising the multi-axis synchronous rotation device according to any one of claims 1-11.

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