Vertical sliding rail structure stable in movement and accurate in parking

Abstract

The utility model discloses a vertical sliding rail structure stable in movement and accurate in parking, and belongs to the technical field of photoresist coating. The sliding rail structure comprises a linear guide rail, the linear guide rail is sleeved with a guide sleeve sliding up and down, a vertical groove is formed in one side of the outer wall of the linear guide rail, a rubber strip is installed in the groove, a fastening bolt matched with the rubber strip is installed on the guide sleeve, a connecting block is fixed to the guide sleeve, a connecting column is arranged on the linear guide rail, and the connecting column is connected with the rubber strip. The connecting column is arranged under the connecting block. Precise parking of the vertical sliding rail structure is achieved through matching of the fastening bolt and the rubber strip in the groove, and stable operation is achieved by adjusting friction force between the linear guide rail and the guide sleeve by adjusting tightness of the bolt.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist coating, and particularly relates to a vertical slide rail structure with high movement stability and parking accuracy. Background Art

[0002] As a key material in semiconductor manufacturing, the uniform coating of photoresist is crucial for the quality of integrated circuits. The photoresist spin coating device mainly realizes the relative movement between the upper rigid body and the lower rigid body through the guide rail system, so as to complete the coating process of the photoresist. The stability and accuracy of the guide rail system during the movement directly determine the coating quality.

[0003] Due to the influence of processing accuracy in the existing guide rail system, there is inevitably a gap between the guide rail and the guide sleeve. However, the vertical slide rail part still needs to be improved in terms of movement stability and parking accuracy. Summary of the Utility Model

[0004] Aiming at the deficiencies of the existing technology, the utility model provides a vertical slide rail structure with stable movement and accurate parking to improve the movement stability and parking accuracy of the slide rail part.

[0005] To achieve the above purpose, the utility model designs a vertical slide rail structure with stable movement and accurate parking. It includes a linear guide rail, on which a vertically sliding guide sleeve is sleeved. On one side of the outer wall of the linear guide rail, there is a vertical groove, in which a rubber strip is installed. A fastening bolt cooperating with the rubber strip is installed on the guide sleeve. A connecting block is fixed on the guide sleeve, and a connecting column is provided on the linear guide rail, which is directly below the connecting block. The connecting block is used to fix the upper rigid body, and the connecting column is used to fix the lower rigid body.

[0006] Preferably, the connecting block is provided with a threaded through hole penetrating the guide sleeve, and an adjusting bolt is arranged in the threaded through hole.

[0007] Preferably, a first fixing block is fixed on the linear guide rail, which is directly below the connecting column. The top of the first fixing block is fixed to the bottom of the lower rigid body, playing a role in strengthening the fixation.

[0008] Preferably, a second fixing block is fixed on the guide sleeve, which is directly above the connecting block. The bottom of the second fixing block is fixed to the top of the upper rigid body, playing a role in strengthening the fixation.

[0009] Preferably, the thickness of the rubber strip is less than the depth of the groove.

[0010] Preferably, the cross-section of the linear guide rail is trapezoidal, and chamfers are provided at all four corners of the linear guide rail.

[0011] Preferably, a base is provided at the bottom of the linear guide rail.

[0012] Preferably, an anti-slip pad is provided on the bottom surface of the base.

[0013] Preferably, there are two fastening bolts.

[0014] Preferably, the connecting block is rectangular and the connecting column is cylindrical.

[0015] Advantages of the present utility model:

[0016] 1. The present utility model realizes the precise stop of the vertical slide rail structure through the cooperation of the fastening bolt and the rubber strip in the groove, and realizes stable operation by adjusting the tightness of the bolt to adjust the friction between the linear guide rail and the guide sleeve.

[0017] 2. The present utility model strengthens and fixes the upper rigid body and the lower rigid body through the first fixing block and the second fixing block. When the upper rigid body and the lower rigid body contact and squeeze, the vibration influence between the cylinders is reduced, thereby reducing the vibration influence on the vertical slide rail structure. Description of the drawings

[0018] Figure 1 is a perspective view of the present utility model;

[0019] Figure 2 is a top view of the present utility model;

[0020] Figure 3 is a side view of the present utility model.

[0021] Reference numerals:

[0022] 1 linear guide rail, 11 groove, 12 rubber strip, 13 connecting column, 14 first fixing block,

[0023] 2 guide sleeve, 21 fastening bolt, 22 connecting block, 221 threaded through hole, 222 adjusting bolt, 23 second fixing block,

[0024] 3 base. Detailed implementation manners

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0026] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0027] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0028] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality of" means two or more, unless otherwise specifically defined.

[0029] The reference to "one embodiment" or "some embodiments" etc. described in the specification of the present application means that a specific feature, structure or characteristic described in connection with the embodiment is included in one or more embodiments of the present application. Thus, the statements "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments", etc. that appear in different places in this specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0030] The present utility model will be further described below in conjunction with the drawings and specific embodiments.

[0031] Embodiment

[0032] As Figures 1 to 3The vertical slide rail structure with stable and precise motion stop shown in the figure includes a linear guide rail 1. The cross-section of the linear guide rail 1 is trapezoidal and chamfers are provided at all four corners of the linear guide rail 1. A base 3 is provided at the bottom of the linear guide rail 1. An anti-slip pad is provided on the bottom surface of the base 3. A guide sleeve 2 that slides up and down is sleeved on the linear guide rail 1. A vertical groove 11 is provided on one side of the outer wall of the linear guide rail 1, and a rubber strip 12 is installed in the groove 11. The thickness of the rubber strip 12 is less than the depth of the groove 11. Two fastening bolts 21 that cooperate with the rubber strip 12 are installed on the guide sleeve 2. A rectangular connecting block 22 is fixed on the guide sleeve 2. A threaded through hole 221 that penetrates the guide sleeve 2 is provided on the connecting block 22, and an adjusting bolt 222 is provided in the threaded through hole 221. A second fixing block 23 is fixed on the guide sleeve 2, and the second fixing block 23 is located directly above the connecting block 22. A cylindrical connecting column 13 is provided on the linear guide rail 1, and the connecting column 13 is located directly below the connecting block 22. A first fixing block 14 is fixed on the linear guide rail 1, and the first fixing block 14 is located directly below the connecting column 13.

[0033] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A vertical slide rail structure with stable movement, precise stopping, and accuracy, characterized in that: It includes a linear guide rail (1), on which a vertically sliding guide sleeve (2) is sleeved. On one side of the outer wall of the linear guide rail (1), there is a vertical groove (11), and a rubber strip (12) is installed in the groove (11). A fastening bolt (21) that cooperates with the rubber strip (12) is installed on the guide sleeve (2). A connecting block (22) is fixed on the guide sleeve (2), and a connecting column (13) is provided on the linear guide rail (1), and the connecting column (13) is located directly below the connecting block (22).

2. The vertical slide rail structure with stable movement, precise stopping, and accuracy according to claim 1, characterized in that: A threaded through hole (221) that penetrates the guide sleeve (2) is provided on the connecting block (22), and an adjusting bolt (222) is provided in the threaded through hole (221).

3. The vertical slide rail structure with stable movement, precise stopping, and accuracy according to claim 1, wherein: A first fixing block (14) is fixed on the linear guide rail (1), and the first fixing block (14) is located directly below the connecting column (13).

4. The vertical slide rail structure with stable movement, precise stopping and accuracy according to claim 1, characterized in that: A second fixing block (23) is fixed on the guide sleeve (2), and the second fixing block (23) is located directly above the connecting block (22).

5. The vertical slide rail structure with stable movement, precise stopping and accuracy according to claim 1, characterized in that: The thickness of the rubber strip (12) is less than the depth of the groove (11).

6. The vertical slide rail structure with stable movement, precise stopping and accuracy according to claim 1, characterized in that: The cross-section of the linear guide rail (1) is trapezoidal, and chamfers are provided at all four corners of the linear guide rail (1).

7. The vertical slide rail structure with stable movement, precise stop and accuracy according to claim 1, characterized in that: A base (3) is provided at the bottom of the linear guide rail (1).

8. The vertical slide rail structure with stable movement, precise stopping and accuracy according to claim 7, characterized in that: An anti-slip pad is provided on the bottom surface of the base (3).

9. The vertical slide rail structure with stable movement, precise stopping and accuracy according to claim 1, characterized in that: There are two fastening bolts (21).

10. The vertical slide rail structure with stable movement, precise stop and accuracy according to claim 1, characterized in that: The connecting block (22) is rectangular, and the connecting column (13) is cylindrical.

Images