Actuator and pneumatic valve

Abstract

The utility model provides an actuator and a pneumatic valve, and the actuator comprises a shell, a driving unit, a valve rod and a floating plate. The valve rod and the driving unit are both arranged in the shell, and the floating plate is arranged outside the shell. And the driving unit is configured to drive the valve rod to ascend and descend in the axial direction of the shell. The valve rod is configured to drive part of the floating plate to synchronously ascend and descend in the ascending and descending process. That is to say, the lifting state of the valve rod can be judged through lifting of the floating plate. Thus, under the condition that the actuator controls the valve, the lifting state of the valve rod corresponds to opening and closing of the valve, and the valve rod and the floating plate synchronously ascend and descend. Therefore, the opening and closing states of the valve can be monitored according to the lifting of the floating plate.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductors, and in particular, to an actuator and a pneumatic valve. Background Art

[0002] The fluid management system for semiconductor manufacturing includes various chemical mixing, transportation, and control systems to ensure a safe and pollution-free chemical fluid transportation environment in semiconductor manufacturing. The gas flow control valve is an important component in the vacuum system and fluid system of semiconductor equipment, playing roles such as opening and closing, controlling flow / direction, and regulating pressure, and is widely used in equipment such as etching machines, ion implanters, and chemical mechanical polishing (CMP) polishing equipment. The gas flow control valve mainly releases the driving gas through the solenoid valve signal, and then controls the opening and closing of the pneumatic valve body.

[0003] However, the gas flow control valves commonly used in semiconductor manufacturing cannot detect whether the valve is actually opened, and thus, the actual opening condition of the gas flow control valve cannot be known. Summary of the Invention

[0004] In view of this, embodiments of the present disclosure provide an actuator and a pneumatic valve to detect the opening and closing of the valve.

[0005] The technical solution of the present invention is implemented as follows:

[0006] Embodiments of the present disclosure provide an actuator, including: a housing, a driving unit, a valve stem, and a floating plate; wherein, the valve stem and the driving unit are both arranged inside the housing, and the floating plate is arranged outside the housing; the driving unit is configured to drive the valve stem to lift and lower along the axial direction of the housing; the valve stem is configured to drive part of the floating plate to lift and lower synchronously during the lifting and lowering process.

[0007] In the above solution, the actuator further includes: a monitoring unit; wherein, the monitoring unit is configured to output a feedback signal based on the lifting and lowering of part of the floating plate.

[0008] In the above solution, the monitoring unit includes: a monitoring circuit; wherein, the floating plate serves as a switch of the monitoring circuit; wherein, during the lifting and lowering process of the floating plate, the monitoring circuit switches between a conducting state and an open state; and, when the monitoring circuit is in the conducting state, the feedback signal is output.

[0009] In the above solution, the monitoring unit includes: a floating plate sensor; wherein, the floating plate sensor is configured to output the feedback signal when it comes into contact with the floating plate.

[0010] In the above solution, a first through-hole is provided at the top of the housing; the actuator further includes: a connection unit; wherein, the connection unit is connected to the floating plate and is configured to suspend the floating plate at the top of the housing; the first end of the valve stem contacts the first end of the floating plate through the first through-hole.

[0011] In the above solution, the connection unit includes: a support structure and a fixing structure; wherein, one side of the support structure is connected to the top of the housing; the other side of the support structure is connected to the fixing structure; the second end of the floating plate is connected to the fixing structure and serves as the rotation center of the floating plate during the lifting and lowering process of the floating plate.

[0012] In the above solution, the connection unit further includes: an adjustment structure; wherein, the adjustment structure is configured to adjust the distance between the floating plate and the top of the housing.

[0013] In the above solution, a second through-hole is provided on the side wall of the housing; the driving unit includes: a pressing plate and a sealing film; wherein, an air cavity is formed between the sealing film and the housing; the air cavity is configured to intake or exhaust air through the second through-hole, and drive the pressing plate to lift or lower based on the intake or exhaust of air; the valve stem passes through the pressing plate and is fixed on the pressing plate.

[0014] An embodiment of the present disclosure also discloses a pneumatic valve, including: a valve body, and an actuator as described in any of the above solutions; wherein, the actuator is configured to control the opening and closing of the fluid passage in the valve body and output a feedback signal when the fluid passage is opened.

[0015] In the above solution, the valve body includes: a valve seat and a diaphragm; wherein, the diaphragm is connected to the second end of the valve stem in the actuator and is configured to move away from the valve seat based on the upward movement of the valve stem; or move closer to the valve seat based on the downward movement of the valve stem.

[0016] An embodiment of the present disclosure provides an actuator, including: a housing, a driving unit, a valve stem, and a floating plate; wherein, the valve stem and the driving unit are both arranged inside the housing, and the floating plate is arranged outside the housing; the driving unit is configured to drive the valve stem to lift and lower along the axial direction of the housing; the valve stem is configured to drive a part of the floating plate to lift and lower synchronously during the lifting and lowering process. That is to say, an embodiment of the present disclosure can judge the lifting and lowering state of the valve stem by the lifting and lowering of the floating plate. In this way, when the actuator controls the valve, the lifting and lowering states of the valve stem respectively correspond to the opening and closing of the valve, and the valve stem and the floating plate lift and lower synchronously. Therefore, an embodiment of the present disclosure can monitor the opening and closing states of the valve according to the lifting and lowering of the floating plate. Description of the Drawings

[0017] Figure 1 Structural schematic of the actuator provided by an embodiment of the present disclosure Figure 1 ;

[0018] Figure 2 Structural schematic of the actuator provided by an embodiment of the present disclosure Figure 2 ;

[0019] Figure 3 Flow schematic of the actuator provided by an embodiment of the present disclosure Figure 3 ;

[0020] Figure 4 Structural schematic of the monitoring unit provided by an embodiment of the present disclosure Figure 1 ;

[0021] Figure 5 Structural schematic of the monitoring unit provided by an embodiment of the present disclosure Figure 2 ;

[0022] Figure 6 Structural schematic diagram of the connection unit provided by an embodiment of the present disclosure;

[0023] Figure 7 Structural schematic diagram of the pneumatic valve provided by an embodiment of the present disclosure. Detailed implementation manners

[0024] In order to make the objectives, technical solutions, and advantages of the present disclosure clearer, the technical solutions of the present disclosure will be further elaborated in detail below in conjunction with the accompanying drawings and embodiments. The described embodiments should not be regarded as limitations on the present disclosure. All other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present disclosure.

[0025] In the following descriptions, reference is made to "some embodiments", which describe a subset of all possible embodiments. However, it can be understood that "some embodiments" can be the same subset or different subsets of all possible embodiments, and they can be combined with each other without conflict.

[0026] If similar descriptions such as "first / second" appear in the application documents, the following explanation is added. In the following descriptions, the terms "first / second / third" only distinguish similar objects and do not represent a specific order for the objects. It can be understood that "first / second / third" can be interchanged with a specific order or sequence when allowed, so that the embodiments of the present disclosure described here can be implemented in an order other than that illustrated or described here.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this disclosure belongs. The terms used herein are for the purpose of describing embodiments of the present disclosure only and are not intended to limit the present disclosure.

[0028] Figure 1 FIG. 4 is a schematic structural diagram of an optional actuator 100 provided by an embodiment of the present disclosure. Referring to Figure 1 FIG. 5, the actuator 100 can be applied to devices such as etching machines, ion implanters, and chemical mechanical polishing (CMP) equipment, and controls the valves in the above devices.

[0029] It should be noted that Figure 1 the actuator (Final Controlling Element) 100 exemplified in FIG. 6 can be any one of a pneumatic actuator, a hydraulic actuator, and an electric actuator, and there is no limitation here. Taking the Figure 2 pneumatic actuator shown in FIG. 7 as an example, the principle of the actuator 100 will be described as follows:

[0030] In an embodiment of the present disclosure, referring to Figure 2 FIG. 8, the actuator 100 may include a housing 10. The housing 10 may include an upper housing 11 and a lower housing 12. The materials of the upper housing 11 and the lower housing 12 may be stainless steel, engineering plastics, etc. The edges of the upper housing 11 and the lower housing 12 may be connected by fasteners such as bolts to form a housing 10 with an internal cavity 13.

[0031] In an embodiment of the present disclosure, referring to Figure 2 FIG. 9, the actuator 100 may further include a driving unit 20 and a valve stem 30. The driving unit 20 can drive the valve stem 30 to move up and down based on the pressure of compressed air. For example, as shown in Figure 2 FIG. 10, the driving unit 20 may include a sealing film 21, a pressing plate, and a spring 24. The pressing plate includes a first pressing plate 22 and a second pressing plate 23. The material of the sealing film 21 may be nitrile rubber (NBR), ethylene propylene diene monomer rubber (EPDM), fluororubber (FPM), etc. The sealing film 21 may be located between the upper housing 11 and the lower housing 12, and the edge of the sealing film 21 is located at the joint position of the upper housing 11 and the lower housing 12. The sealing film 21 can divide the internal cavity 13 of the housing 10 into an upper cavity 131 and a lower cavity 132. The upper cavity 131 exhausts air through a third through hole 103, and the third pressing plate 25 is used to limit the lateral movement of the valve stem 30.

[0032] The first pressing plate 22 and the second pressing plate 23 are respectively located above and below the sealing film 21. Threads can be provided on a part of the surface of the valve stem 30, and the valve stem 30 can be fixed to the first pressing plate 22 and the second pressing plate 23 through the threaded part and fasteners such as nuts. The first pressing plate 22 and the second pressing plate 23 can be fixed on the sealing film 21 by clamping the sealing film 21. The first pressing plate 22 and the second pressing plate 23 can be movably arranged in the inner cavity 13 of the housing 10. One end of the spring 24 can be arranged in the limiting groove of the first pressing plate 22, and the other end of the spring 24 abuts against the limiting groove of the upper housing 11.

[0033] In the embodiment of the present disclosure, with reference to Figure 2 , the driving unit 20 is configured to drive the valve stem 30 to move up and down along the axial direction of the housing 10. For example, when compressed gas enters the lower cavity 132 from the outside of the actuator 100, the sealing film 21 deforms upward based on the pressure of the compressed gas, and then drives the first pressing plate 22, the second pressing plate 23 and the valve stem 30 to rise, and the first pressing plate 22 can compress the spring 24. Conversely, when the actuator 100 does not receive external compressed gas, the spring 24 resets, driving the first pressing plate 22, the second pressing plate 23 and the valve stem 30 to descend.

[0034] In the embodiment of the present disclosure, with reference to Figure 2 , the floating plate 40 is arranged outside the housing 10. The valve stem 30 is configured to drive a part of the floating plate 40 to move up and down synchronously during the up and down movement. For example, the floating plate 40 can be suspended at the top of the housing 10. The valve stem 30 can extend out of the housing 10 through the first through hole 101 at the top of the housing 10. The first end of the valve stem 30 contacts the first end of the floating plate 40 through the first through hole 101. When the valve stem 30 rises, it can abut against the floating plate 40, thereby driving the floating plate 40 to rise. Conversely, when the valve stem 30 descends, the floating plate 40 can descend based on its own gravity. That is to say, in the embodiment of the present disclosure, the up and down state of the valve stem 30 can be judged by the up and down movement of the floating plate 40. In this way, when the actuator 100 controls the valve, the up and down states of the valve stem 30 respectively correspond to the opening and closing of the valve, and the valve stem 30 and the floating plate 40 move up and down synchronously. Therefore, the embodiment of the present disclosure can monitor the opening and closing states of the valve according to the up and down movement of the floating plate 40.

[0035] Figure 3 FIG. is a schematic structural diagram of another alternative actuator 100 provided by the embodiment of the present disclosure, Figure 4 and Figure 5 are both Figure 3 optional structures of the monitoring unit 50 in Figure 4 and are both front sectional views. It should be noted that the monitoring unit 50 can include Figure 5The monitoring circuit 52 therein. The programmable logic controller 70 and the monitoring unit 50 can both be devices in semiconductor manufacturing equipment such as etching machines, ion implantation machines, and chemical mechanical polishing (CMP) polishing equipment. Both the monitoring circuit 52 and the floating plate sensor 51 can be electrically connected to the programmable logic controller (PLC) 70 and input the generated feedback signal into the programmable logic controller 70. Both the monitoring circuit 52 and the floating plate sensor 51 can be used in cooperation with the programmable logic controller 70 to achieve automatic monitoring of the actuator 100.

[0036] In some embodiments of the present disclosure, referring to Figure 3 , the actuator 100 further includes a monitoring unit 50. Among them, the monitoring unit 50 is configured to output a feedback signal based on the lifting of the partial floating plate 40.

[0037] In an embodiment of the present disclosure, referring to Figure 4 , the monitoring unit 50 includes a floating plate sensor 51. The floating plate sensor 51 is disposed on the adjustment structure 63 or the support structure 61 of the connection unit. The floating plate sensor 51 is configured to output a feedback signal when it comes into contact with the floating plate 40. For example, the floating plate sensor 51 can be a piezoelectric sensor. When the floating plate 40 abuts against the piezoelectric sensor, the floating plate sensor 51 can generate a feedback signal based on the pressure of the floating plate 40. Thus, the floating plate sensor 51 can transmit the feedback signal to a control circuit such as the programmable logic controller 70 to achieve automatic monitoring of the actuator 100.

[0038] In an embodiment of the present disclosure, referring to Figure 5 , the monitoring unit 50 includes a monitoring circuit 52. The floating plate 40 serves as a switch of the monitoring circuit 52. Among them, during the lifting of the floating plate 40, the monitoring circuit 52 switches between a conducting state and an open state. And when the monitoring circuit 52 is in the conducting state, a feedback signal is output. For example, the actuator 100 can be disposed in a normally closed (NC) pneumatic valve. When the valve stem 30 rises, the normally closed (NC) pneumatic valve is in an open state, and at the same time, the floating plate 40 also triggers the monitoring circuit 52 to switch from the open state to the conducting state. Thus, the monitoring unit 50 can transmit the feedback signal to a control circuit such as the programmable logic controller 70 to achieve automatic monitoring of the actuator 100.

[0039] Figure 6 is a schematic structural diagram of an optional actuator 100 provided by an embodiment of the present disclosure. It should be noted that Figure 6 is Figure 4 a top view of Figure 5 The top view of Figure 6 can be understood with reference to Figure 4 , Figure 5 and Figure 6The floating plate 40 shown in the figure may be cylindrical, and the support structure 61 may be cylindrical. The floating plate 40 may also be in a straight plate shape or other structures, and the support structure 61 may also be a screw structure or the like, which is not limited here.

[0040] In some embodiments of the present disclosure, in combination with Figure 4 and Figure 6 , the actuator 100 further includes a connection unit 60. The connection unit 60 connects the floating plate 40. The connection unit 60 is configured to suspend the floating plate 40 above the top of the housing 10. The first end of the valve stem 30 contacts the first end of the floating plate 40 through the first through hole 101.

[0041] In the embodiments of the present disclosure, in combination with Figure 4 and Figure 6 , the connection unit 60 includes a support structure 61 and a fixing structure 62. One side of the support structure 61 is connected to the top of the housing 10. For example, the support structure 61 can fix one side of the cylinder to the housing 10 by screwing. The other side of the support structure 61 is connected to the fixing structure 62. The fixing structure 62 may be a cross bar, and the cross bar penetrates through the second end of the floating plate 40 and the support structure 61. The first end of the floating plate 40 abuts against the valve stem 30, and the second end of the floating plate 40 is fixed to the support structure 61 through the fixing structure 62. In this way, when the valve stem 30 rises or falls, the second end of the floating plate 40 can serve as the rotation center of the floating plate 40. The valve stem 30 can transmit the force to the floating plate 40 through the first end of the floating plate 40, driving the first end of the floating plate 40 to rise.

[0042] In some embodiments of the present disclosure, in combination with Figure 4 and Figure 6 , the connection unit 60 further includes an adjustment structure 63. The adjustment structure 63 is configured to adjust the distance between the floating plate 40 and the top of the housing 10.

[0043] In the embodiments of the present disclosure, in combination with Figure 4 and Figure 6 , the adjustment structure 63 can be arranged on the support structure 61 in the manner shown in Figure 6 . The adjustment structure 63 may be a lifting motor. The adjustment structure 63 is electrically connected to the programmable logic controller 70 in Figure 3 , and receives Figure 3The control signal of the programmable logic controller 70 is used to raise and lower. The lifting motor can be provided with a lead screw, and the support structure 61 can be provided with a lead screw groove that cooperates with the lead screw. The lead screw of the lifting motor can be raised and lowered in the lead screw groove. During the rising process of the floating plate 40, the first end of the floating plate 40 will contact the adjusting structure 63 and then stop rising. Thus, the adjusting structure 63 can adjust its height on the support structure 61 to limit the rising height of the floating plate 40, and further adjust the distance between the floating plate 40 and the top of the housing 10. In this way, when the actuator 100 controls the valve, the rising distance of the valve stem 30 corresponds to the opening degree of the valve, and the valve stem 30 and the floating plate 40 are lifted and lowered synchronously. Therefore, the embodiment of the present disclosure can adjust the opening degree of the valve by adjusting the rising distance of the floating plate 40.

[0044] Figure 7 is a schematic structural diagram of an optional pneumatic valve 200 provided by an embodiment of the present disclosure. Refer to Figure 7 , the pneumatic valve 200 includes a valve body 210 and the actuator 100 in any of the above embodiments. Among them, the actuator 100 is configured to control the opening and closing of the fluid passage 211 in the valve body 210. It should be noted that Figure 7 The actuator 100 in can be understood with reference to the above embodiments and will not be elaborated here.

[0045] In some embodiments of the present disclosure, refer to Figure 7 , the valve body 210 includes a valve seat 212 and a diaphragm 213. Among them, the diaphragm 213 is connected to the second end of the valve stem 30 in the actuator 100. The diaphragm 213 is configured to move away from the valve seat 212 based on the rising of the valve stem 30, or the diaphragm 213 is configured to approach the valve seat 212 based on the falling of the valve stem 30.

[0046] In the embodiment of the present disclosure, refer to Figure 7 , the valve body 210 is a component that controls the fluid flow and is usually made of materials such as cast iron, cast steel, or stainless steel. The valve body 210 can be in various forms such as a ball valve, a butterfly valve, or a gate valve. The distance between the diaphragm 213 and the valve seat 212 is the opening degree of the valve body 210. The valve seat 212 can be a fluid sealing component and can be made of highly elastic materials such as rubber and polytetrafluoroethylene. The diaphragm 213 can be made of rubber, polyester, or special fluorine materials, etc. The diaphragm 213 and the valve stem 30 are responsible for opening and closing the valve. The floating plate 40 is used to monitor the position of the valve and feedback signals to the control system to ensure that the valve reaches the predetermined position. Thus, precise control is achieved.

[0047] It should be noted that in this text, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the process, method, article or device comprising that element.

[0048] The serial numbers of the above-described embodiments of the present disclosure are for description only and do not represent the superiority or inferiority of the embodiments. The methods disclosed in several method embodiments provided by the present disclosure can be arbitrarily combined without conflict to obtain new method embodiments. The features disclosed in several product embodiments provided by the present disclosure can be arbitrarily combined without conflict to obtain new product embodiments. The features disclosed in several method or device embodiments provided by the present disclosure can be arbitrarily combined without conflict to obtain new method embodiments or device embodiments.

[0049] The above is only the specific implementation manner of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present disclosure can easily think of changes or substitutions, which should all be covered within the protection scope of the present disclosure.

Claims

1. An actuator, characterized in that, Comprising: A housing, a drive unit, a valve stem, and a floating plate; wherein, The valve stem and the drive unit are both disposed within the housing, and the floating plate is disposed outside the housing; The drive unit is configured to drive the valve stem to move up and down along the axial direction of the housing; The valve stem is configured to drive part of the floating plate to move up and down synchronously during the up and down movement.

2. The actuator according to claim 1, characterized in that, The actuator further comprises: a monitoring unit; wherein, The monitoring unit is configured to output a feedback signal based on the up and down movement of part of the floating plate.

3. The actuator according to claim 2, characterized in that, The monitoring unit comprises: a monitoring circuit; wherein, The floating plate serves as a switch of the monitoring circuit; wherein, during the up and down movement of the floating plate, the monitoring circuit switches between a conducting state and an open state; and, when the monitoring circuit is in the conducting state, the feedback signal is output.

4. The actuator according to claim 2, wherein, The monitoring unit comprises: a floating plate sensor; wherein, The floating plate sensor is configured to output the feedback signal when it comes into contact with the floating plate.

5. The actuator according to claim 1, characterized in that, A first through hole is provided at the top of the housing; the actuator further comprises: a connecting unit; wherein, The connecting unit connects the floating plate and is configured to suspend the floating plate above the top of the housing; The first end of the valve stem contacts the first end of the floating plate through the first through hole.

6. The actuator according to claim 5, characterized in that, The connecting unit comprises: a support structure and a fixing structure; wherein, One side of the support structure is connected to the top of the housing; the other side of the support structure is connected to the fixing structure; The second end of the floating plate is connected to the fixing structure and serves as the rotation center of the floating plate during the up and down movement of the floating plate.

7. The actuator according to claim 5, wherein The connecting unit further comprises: an adjusting structure; wherein, The adjusting structure is configured to adjust the distance between the floating plate and the top of the housing.

8. The actuator according to claim 1, characterized in that, A second through hole is provided on the side wall of the housing; the drive unit comprises: a pressing plate and a sealing film; wherein, An air chamber is formed between the sealing film and the housing; The air chamber is configured to intake or exhaust air through the second through hole, and drive the pressing plate to move up and down based on the intake or exhaust of air; The valve stem penetrates through the pressing plate and is fixed on the pressing plate.

9. A pneumatic valve, characterized in that, The pneumatic valve comprises: a valve body, and the actuator as described in any one of claims 1 to 8; wherein, the actuator is configured to control the opening and closing of the fluid passage in the valve body and output a feedback signal when the fluid passage is open.

10. The pneumatic valve according to claim 9, characterized in that, The valve body comprises: a valve seat and a diaphragm; wherein, The diaphragm is connected to the second end of the valve stem in the actuator and is configured to move away from the valve seat based on the upward movement of the valve stem; or move closer to the valve seat based on the downward movement of the valve stem.

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