Hot plate waste discharge pipeline

Abstract

The utility model relates to the technical field of waste discharge of gluing and developing equipment, and discloses a hot plate waste discharge pipeline which comprises a first waste discharge pipe, a second waste discharge pipe and a plurality of third waste discharge pipes, a plurality of waste discharge channels are separately and independently arranged in an inner cavity of the first waste discharge pipe, and the second waste discharge pipe is arranged on one side of the first waste discharge pipe; the waste discharge channel is independently communicated with a plurality of waste discharge branch pipes, the second waste discharge pipe and the third waste discharge pipe are respectively communicated with a plurality of waste discharge branch pipes, one end of each waste discharge branch pipe is communicated with a waste discharge port of a process unit, and the waste discharge branch pipes are independently arranged. According to the hot plate waste discharging device, waste discharging modes of all the hot plates are partitioned, when the waste discharging pressure of one hot plate fluctuates, the influence on waste discharging of other hot plates is isolated, and therefore the waste discharging amount of the hot plates is easier to control, and the processing quality of the hot plates is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of waste discharge of coating and developing equipment, in particular to a waste discharge pipeline for a hot plate. Background Technique

[0002] In the existing semiconductor processing, it is necessary to bake the wafers. For example, before coating the photoresist, the wafers need to be placed in a tackifying unit. During the tackifying process, the exhaust gas generated during the tackifying process needs to be discharged; after the tackifying process is completed, the photoresist is coated on the surface of the wafers, and then the wafers are placed in a hot plate for baking. During the baking process, the exhaust gas generated by the photoresist is discharged; after lithography by a lithography machine, the developing solution is coated on the wafers, and then the wafers are placed in a hot plate for baking. During the baking process, the exhaust gas generated by the developing solution is discharged.

[0003] In the prior art, the pipelines connected to the waste discharge ports of each unit are interconnected. When exhausting, the air pressure in each exhaust pipeline will affect the pressure of the total waste discharge pipeline, resulting in difficult regulation of pressure changes. Moreover, when discharging waste, the pressure drop in the pipeline is obvious, resulting in difficult achievement of the desired pressure for the waste discharge of some processes. Content of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the utility model provides a waste discharge pipeline for a hot plate, which solves the problems that the existing waste discharge pipelines of the hot plate are interconnected, when exhausting, the air pressure in each exhaust pipeline will affect the pressure of the total waste discharge pipeline, resulting in difficult regulation of pressure changes, and when discharging waste, the pressure drop in the pipeline is obvious, resulting in difficult achievement of the desired pressure for the waste discharge of some processes.

[0006] (2) Technical Solutions

[0007] To achieve the above object, the utility model is realized through the following technical solutions:

[0008] A waste discharge pipeline for a hot plate includes a first waste discharge pipe, a second waste discharge pipe and a plurality of third waste discharge pipes. A plurality of waste discharge channels are separately arranged in the inner cavity of the first waste discharge pipe. The second waste discharge pipe is arranged on one side of the first waste discharge pipe; each of the waste discharge channels is independently communicated with a plurality of waste discharge branch pipes. A plurality of the waste discharge branch pipes are communicated and arranged on both the second waste discharge pipe and the third waste discharge pipes. One end of each waste discharge branch pipe is communicated with the waste discharge port of a process unit, and the waste discharge branch pipes are independently arranged from each other.

[0009] Preferably, several partition plates are arranged inside the first waste discharge pipe to form several independent waste discharge channels. Several first waste discharge branch pipes, second waste discharge branch pipes and third waste discharge branch pipes are respectively communicated with the several waste discharge channels, and the several first waste discharge branch pipes, second waste discharge branch pipes and third waste discharge branch pipes are respectively communicated with one of the waste discharge channels.

[0010] Preferably, the lower part of the second waste discharge pipe is partitioned to form two waste discharge channels, and several fourth waste discharge branch pipes are respectively communicated with the two waste discharge channels. Several of the fourth waste discharge branch pipes with large waste discharge volume are communicated with the lower waste discharge channel.

[0011] Preferably, several fifth waste discharge branch pipes are respectively arranged and communicated on several of the third waste discharge pipes.

[0012] Preferably, the first waste discharge pipe, the second waste discharge pipe and several of the third waste discharge pipes are all arranged vertically, and the first waste discharge branch pipe, the second waste discharge branch pipe, the third waste discharge branch pipe, the fourth waste discharge branch pipe and the fifth waste discharge branch pipe are arranged horizontally between the first waste discharge pipe and the third waste discharge pipe.

[0013] (III) Beneficial effects

[0014] The utility model has the following beneficial effects:

[0015] For the waste discharge pipeline of the hot plate, through several waste discharge channels independently arranged in the inner cavity of the waste discharge pipe, when pressure fluctuation occurs in a single waste discharge branch pipe, it will not affect the normal waste discharge of other waste discharge channels, so that the pressures in the pipelines do not interfere with each other. And only the respective gases are discharged in their respective pipelines, and there will be no large difference in the pressures between the upstream and downstream in the pipeline, meeting the pressure drop requirements for waste discharge. Description of the drawings

[0016] Figure 1 is the schematic diagram of the overall front view structure of the utility model;

[0017] Figure 2 is the schematic diagram of the overall rear view structure of the utility model;

[0018] Figure 3 is the schematic diagram of the internal structure of the first waste discharge pipe of the utility model;

[0019] Figure 4 is the schematic diagram of the overall front view structure of the layout after distinguishing and marking the waste discharge pipe and the waste discharge branch pipe of the utility model;

[0020] Figure 5 is the schematic diagram of the overall rear view structure of the layout after distinguishing and marking the waste discharge pipe and the waste discharge branch pipe of the utility model;

[0021] Figure 6 is the schematic diagram of the actual application layout of the utility model.

[0022] In the figure: 1. First row of waste pipes; 11. Partition board; 12. Waste discharge channel; 2. First row of waste discharge branch pipes; 3. Second row of waste discharge branch pipes; 4. Third row of waste discharge branch pipes; 5. Second row of waste pipes; 6. Fourth row of waste discharge branch pipes; 7. Third row of waste pipes; 8. Fifth row of waste discharge branch pipes. Specific implementation manner

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0024] Please refer to Figure 1 , the present invention provides a technical solution: a hot plate waste discharge pipeline, including a first waste discharge pipe 1, a second waste discharge pipe 5, and a plurality of third waste discharge pipes 7. A plurality of waste discharge channels 12 are separately and independently arranged in the inner cavity of the first waste discharge pipe 1. The second waste discharge pipe 5 is arranged on one side of the first waste discharge pipe 1; each waste discharge channel 12 is independently communicated with a plurality of waste discharge branch pipes. A plurality of waste discharge branch pipes are connected and arranged on both the second waste discharge pipe 5 and the third waste discharge pipe 7. One end of the waste discharge branch pipe is communicated with the waste discharge port of the process unit, and the waste discharge branch pipes are independently arranged from each other.

[0025] In the present invention, through a plurality of waste discharge channels 12 separately and independently arranged in the inner cavity of the first waste discharge pipe 1, when there is a pressure fluctuation in a single waste discharge branch pipe, it will not affect the normal waste discharge of other waste discharge channels 12, so that the pressures in the pipelines do not interfere with each other. And only the respective gases are discharged in their respective pipelines, and there will be no large difference in the upstream and downstream pressures in the pipeline, meeting the pressure drop requirements for waste discharge.

[0026] In this embodiment, a plurality of waste discharge channels 12 that are independent of each other are formed in the first waste discharge pipe 1 by separating with a plurality of partition boards 11. A first waste discharge branch pipe 2, a second waste discharge branch pipe 3, and a third waste discharge branch pipe 4 are respectively communicated with the plurality of waste discharge channels 12. The plurality of first waste discharge branch pipes 2, second waste discharge branch pipes 3, and third waste discharge branch pipes 4 are respectively communicated with one waste discharge channel 12.

[0027] Refer to Figure 1As shown, in this embodiment, the lower part of the second waste discharge pipe 5 is partitioned to form two waste discharge channels 12, and a number of fourth waste discharge branch pipes 6 are respectively communicated with the two waste discharge channels 12. A number of fourth waste discharge branch pipes 6 with a large waste discharge volume are communicated with the lower waste discharge channel 12. By arranging two waste discharge channels 12 in the lower part of the second waste discharge pipe 5, the waste discharge channels 12 of the two lower waste discharge branch pipes are distinguished from those of the four upper branch pipes, so as to prevent the situation that when sharing a waste discharge channel 12, the waste discharge volume of the two lower fourth waste discharge branch pipes 6 is large, resulting in a small negative pressure on the upper side of the waste discharge pipeline, thus affecting the waste discharge of the upper hot plate.

[0028] In this embodiment, a number of fifth waste discharge branch pipes 8 are respectively communicated and arranged on a number of third waste discharge pipes 7.

[0029] Refer to Figure 4 And 5 As shown, in this embodiment, the first waste discharge pipe 1, the second waste discharge pipe 5 and a number of third waste discharge pipes 7 are all vertically arranged, and the first waste discharge branch pipe 2, the second waste discharge branch pipe 3, the third waste discharge branch pipe 4, the fourth waste discharge branch pipe 6 and the fifth waste discharge branch pipe 8 are horizontally arranged between the first waste discharge pipe 1 and the third waste discharge pipe 7. Through the vertically and horizontally arranged waste discharge pipes and waste discharge branch pipes, the waste discharge requirements of each level of hot waste discharge ports in the wafer coating and developing processes can be well adapted, and the exhaust gas of multiple unit waste discharge ports can be efficiently discharged independently of each other.

[0030] As shown in the appendix Figures 4 - 6 As shown, the waste discharge pipes of this solution are set as four types: the first waste discharge pipe 1, the second waste discharge pipe 5, the third waste discharge pipe 7 and the waste discharge branch pipes, corresponding to different hot plate processes respectively. Each type of pipeline is connected to its corresponding hot plate waste discharge port, and three waste discharge pipelines 12 are partitioned in the first waste discharge pipe 1. Through the mutually partitioned pipelines, the pressure fluctuations occurring in the second waste discharge branch pipe 3 (red pipeline) will not affect the first waste discharge branch pipe 2 and the third waste discharge branch pipe 4 (gray and blue pipelines), so that the pressures in the pipelines do not interfere with each other, and only the gases of their respective pipelines are discharged in their respective pipelines, and there will be no large difference in the pressures upstream and downstream in the pipeline, meeting the pressure drop requirements for waste discharge.

[0031] In the prior art, in the first waste discharge pipe 1, three hot plate waste discharge ports are communicated through waste discharge branch pipes, and the three waste discharge branch pipes share a waste discharge pipe. The pressure change of one waste discharge port will affect the overall pressure change of the waste discharge branch pipe. Therefore, in this solution, a partition is provided in the first waste discharge pipe 1 to distinguish the three waste discharge branch pipes and prevent them from affecting each other.

[0032] The second row of waste pipes 5 and the third row of waste pipes 7 are another group of waste pipes (green pipelines), which are divided into two wholes, left and right, with the direction close to the first row of waste pipes 1 (gray waste pipes) being the left side. In the pipeline of the second row of waste pipes 5, the second row of waste pipes 5 is divided into several paths. Among them, several fourth-row waste branch pipes 6 are aggregated into two paths of the second row of waste pipes 5. For example, the waste pipes of the following two fourth-row waste branch pipes 6 are distinguished from the waste pipes of the above four fourth-row waste branch pipes 6. This can prevent the large waste discharge of the following two branch pipes when sharing a waste pipe, resulting in a relatively small negative pressure on the upper side of the waste pipe, thereby affecting the waste discharge of the waste discharge port of the upper hot plate.

[0033] In the right-side waste discharge pipeline, that is, the third row of waste pipes 7, the third row of waste pipes 7 is also divided into several paths. The difference from the left side is that the fifth-row waste branch pipe 8 discharges waste through three third-row waste pipes 7, and the effect is the same as that of the second row of waste pipes 5 described above.

[0034] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation. An element defined by the statement "comprising a..." does not exclude the existence of additional identical elements in the process, method, article or device comprising the element.

[0035] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A hot plate waste discharge pipeline, characterized in that, It includes a first row of waste pipes, a second row of waste pipes and several third row of waste pipes. A number of waste discharge channels are independently arranged in the inner cavity of the first row of waste pipes. The second row of waste pipes is arranged on one side of the first row of waste pipes. Each of the waste discharge channels is independently connected to a number of waste discharge branch pipes. A number of the waste discharge branch pipes are connected and arranged on the second row of waste pipes and the third row of waste pipes. One end of each waste discharge branch pipe is connected to the waste discharge port of the process unit, and the waste discharge branch pipes are independently arranged with respect to each other.

2. The hot plate waste discharge pipe according to claim 1, characterized in that: In the first row of waste pipes, a number of waste discharge channels are formed by separating with several partitions, and a first waste discharge branch pipe, a second waste discharge branch pipe and a third waste discharge branch pipe are respectively connected to the number of waste discharge channels. The number of the first waste discharge branch pipes, the second waste discharge branch pipes and the third waste discharge branch pipes are respectively connected to one of the waste discharge channels.

3. The hot plate waste discharge pipe according to claim 2, characterized in that: The lower part of the second row of waste pipes is separated to form two waste discharge channels, and a number of fourth waste discharge branch pipes are respectively connected to the two waste discharge channels. A number of the fourth waste discharge branch pipes with large waste discharge volume are connected to the waste discharge channel located at the lower part.

4. The waste discharge pipeline of a hot plate according to claim 3, wherein: A number of fifth waste discharge branch pipes are respectively connected and arranged on the number of the third row of waste pipes.

5. The waste discharge pipeline of a hot plate according to claim 4, wherein: The first row of waste pipes, the second row of waste pipes and the number of the third row of waste pipes are all vertically arranged, and the first waste discharge branch pipe, the second waste discharge branch pipe, the third waste discharge branch pipe, the fourth waste discharge branch pipe and the fifth waste discharge branch pipe are horizontally arranged between the first row of waste pipes and the third row of waste pipes.

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