X-ray non-destructive analysis device
By introducing a laser marker into the X-ray non-destructive analysis device, real-time marking of the internal structure of the sample is achieved, and the problem of positioning difficulties in sample preparation is solved, which improves work efficiency and saves costs.
Patent Information
- Application Number
- CN202422226967.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-09-11
AI Technical Summary
In the prior art, X-ray non-destructive analysis devices cannot efficiently locate the device structure or defect location of interest during sample preparation, resulting in time-consuming and labor-intensive and increasing test costs.
An X-ray non-destructive analysis device is designed, including a housing, a stage, a detector and a laser marker. The internal structure of the sample is detected by the detector and laser marker is used to perform real-time laser marking at the position of interest, simplifying the subsequent grinding process of the sample.
Improve the working efficiency of sample grinding and sample preparation, avoid mis-grinding of the structure of interest or defects in the location, and save costs.
Smart Images
Figure CN223065205U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor wafer detection, in particular to an X-ray non-destructive analysis device. Background Art
[0002] At present, X-ray non-destructive analysis technology has been widely applied in semiconductor chip analysis. In actual applications, workers will first use X-rays to perform non-destructive analysis on samples to determine the cause of sample failure and locate structures or defects of interest. However, a very difficult problem is faced in subsequent sample preparation, that is, it is impossible to locate the device structures or defects of interest. For example, when we find a defect through X-ray analysis, and then workers use grinding technology to prepare a cross-section of the sample, it is difficult to determine the position of the defect at this time. The commonly used method in the prior art is to grind the sample while putting it back into the X-ray non-destructive analysis device for observation repeatedly until the actual desired structure or defect position is ground. This not only takes a lot of time and effort, reduces work efficiency, but sometimes even grinds off the structure or defect position of interest, increasing the test cost.
[0003] Therefore, it is urgent to design an X-ray non-destructive analysis device to solve the above technical problems. Summary of the Utility Model
[0004] The purpose of the utility model is to provide an X-ray non-destructive analysis device, which can improve the work efficiency of grinding and sample preparation, save time and effort, and achieve the purpose of cost saving.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The utility model provides an X-ray non-destructive analysis device, including:
[0007] A housing;
[0008] A stage, the stage is located inside the housing, and the stage is slidably connected to the bottom of the housing; the stage is configured to place a sample;
[0009] A frame, the frame is located inside the housing;
[0010] A detector, the detector is slidably connected to the frame, the detector is mounted directly above the stage, and the detector is configured to detect the internal structure of the sample;
[0011] A laser marker, the laser marker is arranged above the detector, and the laser marker is coaxially arranged with the detector, and the laser marker is configured to make a laser mark on the surface of the sample.
[0012] As an alternative technical solution of an X-ray non-destructive analysis device, the frame body includes a connecting rod and a sliding rod. One end of the connecting rod is connected to the bottom of the housing, one end of the sliding rod is slidably connected to the connecting rod, the other end of the sliding rod is connected to the detector, and the sliding rod can perform a lifting movement on the connecting rod.
[0013] As an alternative technical solution of an X-ray non-destructive analysis device, a first sliding rail is provided on the connecting rod. The first sliding rail extends in the vertical direction, and one end of the sliding rod is slidably connected to the first sliding rail.
[0014] As an alternative technical solution of an X-ray non-destructive analysis device, the X-ray non-destructive analysis device further includes a driving assembly. The driving assembly is provided on the connecting rod, and the driving assembly is drivingly connected to the sliding rod to enable the sliding rod to perform a lifting movement.
[0015] As an alternative technical solution of an X-ray non-destructive analysis device, the driving assembly includes a motor or a cylinder.
[0016] As an alternative technical solution of an X-ray non-destructive analysis device, the X-ray non-destructive analysis device further includes a base. A second sliding rail is provided on the base, and the stage is slidably connected to the second sliding rail.
[0017] As an alternative technical solution of an X-ray non-destructive analysis device, the second sliding rail extends along the length direction of the housing so that the stage can enter or partially exit the housing.
[0018] As an alternative technical solution of an X-ray non-destructive analysis device, the X-ray non-destructive analysis device further includes a camera. The camera is located inside the housing, and the camera is connected to the top of the housing. The camera is configured to photograph the surface of the sample.
[0019] As an alternative technical solution of an X-ray non-destructive analysis device, a lighting lamp is further provided inside the housing.
[0020] As an alternative technical solution of an X-ray non-destructive analysis device, a viewing window is provided on the side wall of the housing, and glass is embedded in the viewing window.
[0021] The beneficial effects of the present utility model at least include:
[0022] The present utility model provides an X-ray non-destructive analysis device, which includes a housing, a stage, a frame, a detector and a laser marker. Among them, the stage is located inside the housing, and the stage is slidably connected to the bottom of the housing; the stage is configured to place a sample. The frame is located inside the housing. The detector is slidably connected to the frame, the detector is mounted directly above the stage, and the detector is configured to detect the internal structure of the sample. The laser marker is arranged above the detector, and the laser marker is coaxially arranged with the detector, and the laser marker is configured to make a laser mark on the surface of the sample.
[0023] In this way, during the actual detection process, the operator can place the sample on the stage, and then send the sample into the housing through the stage so that the sample is directly below the detector. The operator scans the sample with X-rays through the detector to detect the internal structure of the sample. When an interesting structure or a defect position in the sample is found, the position can be directly marked with a laser by the laser marker immediately. In this way, during the subsequent cross-section preparation process of the sample, the laser-marked position of the sample can be precisely ground directly, so that there is no need to repeatedly put the sample back into the X-ray non-destructive analysis device for observation, which saves time and effort and can improve the working efficiency of grinding and sample preparation. At the same time, it can also avoid grinding off the interesting structure or defect position, achieving the purpose of cost saving. Description of the Drawings
[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for description in the embodiments of the present utility model. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present utility model and these drawings.
[0025] Figure 1 It is a schematic structural diagram of the X-ray non-destructive analysis device provided by the embodiment of the present utility model.
[0026] Reference Signs
[0027] 100, housing; 200, stage; 300, frame; 310, connecting rod; 320, sliding rod; 330, first slide rail; 400, detector; 500, laser marker; 600, drive assembly; 700, base; 710, second slide rail; 800, camera. Detailed Embodiments
[0028] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated herein generally may be arranged and designed in a variety of different configurations.
[0029] Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts fall within the scope of protection of the present utility model.
[0030] It should be noted that like reference numerals and letters denote like items in the following figures. Therefore, once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.
[0031] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, "a plurality of" means two or more.
[0032] In the description of the present utility model, it should also be noted that unless otherwise clearly defined and limited, the terms "set" and "connect" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model may be understood according to specific circumstances.
[0033] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the first and second features not being in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "below", "under" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.
[0034] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.
[0035] This embodiment provides an X-ray non-destructive analysis device, which can improve the working efficiency of grinding and sample preparation, save time and effort, and achieve the purpose of cost saving.
[0036] As Figure 1 shown, the X-ray non-destructive analysis device mainly includes a housing 100, a stage 200, a frame 300, a detector 400 and a laser marker 500. Among them, the stage 200 is located inside the housing 100, and the stage 200 is slidably connected to the bottom of the housing 100; the stage 200 is configured to place samples. The frame 300 is located inside the housing 100. The detector 400 is slidably connected to the frame 300, the detector 400 is mounted directly above the stage 200, and the detector 400 is configured to detect the internal structure of the sample. The laser marker 500 is disposed above the detector 400, and the laser marker 500 is coaxially disposed with the detector 400, and the laser marker 500 is configured to make a laser mark on the surface of the sample.
[0037] Based on the above design, in this embodiment, an operator can place a sample on the stage 200 and then send the sample into the interior of the housing 100 through the stage 200 so that the sample is directly below the detector 400. The operator performs X-ray scanning on the sample through the detector 400 to detect the internal structure of the sample. When a structure of interest or a defective position in the sample is found, the laser marker 500 can directly perform laser marking on this position immediately. In this way, during the subsequent cross-section preparation process of the sample, precise grinding can be directly performed on the laser-marked position of the sample, thus eliminating the need to repeatedly place the sample back into the X-ray non-destructive analysis device for observation, saving time and effort, and improving the working efficiency of grinding and sample preparation. At the same time, it can also avoid grinding off the structure of interest or the defective position, achieving the purpose of cost savings.
[0038] In this embodiment, the laser marker 500 is arranged above the detector 400 and the laser marker 500 and the detector 400 are coaxially arranged. This has the following effects: First, it can enable the laser marker 500 and the detector 400 to share the same visual axis and focal length, significantly improving the accuracy of positioning. The laser beam can accurately point to the area detected by the detector 400, reducing the error caused by inaccurate positioning. Second, the coaxial arrangement of the laser marker 500 and the detector 400 can simplify the operation process and reduce the time consumed by adjusting the positions or focal lengths of the two. At the same time, since the laser beam and the detector 400 can simultaneously focus on the same area, the detection process can be more rapid and efficient. Third, in a multi-step or complex detection process, the positioning error of each step may accumulate and affect the final detection result. The coaxial arrangement of the laser marker 500 and the detector 400 can minimize this error accumulation. Fourth, the coaxial arrangement of the laser marker 500 and the detector 400 can save the space of the X-ray non-destructive analysis device, making the layout of the X-ray non-destructive analysis device more compact and improving the integration degree.
[0039] Exemplarily, the laser marker 500 in this embodiment can be set as common semiconductor laser marking machines, YAG laser marking machines, fiber laser marking machines, ultraviolet laser marking machines, infrared laser marking machines, etc. on the market. Their working principles and specific structures belong to the prior art and will not be elaborated in detail here.
[0040] Exemplarily, the detector 400 in this embodiment can be set as common scintillation detectors, thin-film transistor (TFT) detectors, IGZO detectors, amorphous silicon (a-Si) detectors, etc. on the market. Their working principles and specific structures belong to the prior art and will not be elaborated in detail here.
[0041] As Figure 1As shown, in this embodiment, the frame 300 includes a connecting rod 310 and a sliding rod 320. One end of the connecting rod 310 is connected to the bottom of the housing 100. One end of the sliding rod 320 is slidably connected to the connecting rod 310, and the other end of the sliding rod 320 is connected to the detector 400. The sliding rod 320 can move up and down on the connecting rod 310.
[0042] Through the arrangement of the connecting rod 310 and the sliding rod 320, the actual position of the detector 400 from the sample relative to the laser marker 500 can be changed, thereby improving the flexibility in detecting the sample and laser-marking the sample. That is to say, the operator can flexibly change the distance between the detector 400 and the sample according to specific requirements.
[0043] Further, in this embodiment, a first slide rail 330 is provided on the connecting rod 310. The first slide rail 330 extends in the vertical direction. One end of the sliding rod 320 is slidably connected to the first slide rail 330. The X-ray non-destructive analysis device further includes a driving assembly 600. The driving assembly 600 is provided on the connecting rod 310 and is drivingly connected to the sliding rod 320 to enable the sliding rod 320 to move up and down.
[0044] Through the arrangement of the first slide rail 330 and the driving assembly 600, the up-and-down movement of the sliding rod 320 on the connecting rod 310 is realized, which facilitates adjusting the distance between the detector 400 and the sample and improves the flexibility in detecting the sample and laser-marking the sample.
[0045] Exemplarily, the driving assembly 600 in this embodiment can be set as a motor or a cylinder.
[0046] As Figure 1 shown, in this embodiment, the X-ray non-destructive analysis device further includes a base 700. A second slide rail 710 is provided on the base 700. The carrier 200 is slidably connected to the second slide rail 710.
[0047] Through the arrangement of the second slide rail 710, the actual position of the carrier 200 can be changed, and further, it can be ensured as much as possible that the sample on the carrier 200 is directly opposite to the detector 400, which is beneficial to improving the positioning accuracy and making the sample as much as possible located at the middle position of the focused area of the laser beam and the detector 400.
[0048] Further, in this embodiment, the second slide rail 710 extends along the length direction of the housing 100 to enable the carrier 200 to enter or partially withdraw from the housing 100. This is beneficial for the operator to pick up and place the sample and improves work efficiency.
[0049] Before non-destructive analysis of the sample in this embodiment, the sample needs to be encapsulated and protected with a sealing glue, that is, the sample is wrapped with a solid sealing glue to avoid damaging the sample during the detection process and improve safety.
[0050] In addition, in order to avoid the phenomenon that the sample moves relative to the stage 200 during the detection process, the operator can temporarily paste the sample on the stage 200 with tape to improve the stability of the sample.
[0051] As Figure 1 shown, in this embodiment, the X-ray non-destructive analysis device further includes a camera 800 and a display screen (not shown in the figure). The camera 800 is located inside the housing 100 and is connected to the top of the housing 100. The camera 800 is configured to capture the surface of the sample. The camera 800 can transmit the captured image to the display screen for the operator to observe, so that the operator can accurately grasp the actual position of the sample and the surface condition of the sample.
[0052] It can be understood that the detector 400, the camera 800 and the display screen in this embodiment are all electrically connected, so as to facilitate the transmission of the image detected by the detector 400 and the image captured by the camera 800. The principle of transmitting images by the detector 400 and the camera 800 belongs to conventional technology and will not be elaborated here.
[0053] Optionally, a lighting lamp (not shown in the figure) is further provided inside the housing 100 in this embodiment, which is used to illuminate the sample and improve the clarity of the image captured by the camera 800.
[0054] Optionally, a visual window is provided on the side wall of the housing 100 in this embodiment, which is convenient for the operator to directly observe the actual situation of the sample inside the housing 100 from the outside. Glass is embedded on the visual window, which can prevent foreign objects from entering the housing 100 and interfering with the non-destructive testing and analysis process.
[0055] Obviously, the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments here. Various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.
[0056] Note that in the description of this specification, the descriptions referring to the reference terms "some embodiments", "other embodiments", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.
Claims
1. X-ray non-destructive analysis device, characterized in that Comprising: A housing (100); A stage (200), the stage (200) is located inside the housing (100), and the stage (200) is slidably connected to the bottom of the housing (100); the stage (200) is configured to place a sample; A frame (300), the frame (300) is located inside the housing (100); A detector (400), the detector (400) is slidably connected to the frame (300), the detector (400) is mounted directly above the stage (200), and the detector (400) is configured to detect the internal structure of the sample; A laser marker (500), the laser marker (500) is disposed above the detector (400), and the laser marker (500) is coaxially arranged with the detector (400), and the laser marker (500) is configured to perform laser marking on the surface of the sample.
2. The X-ray non-destructive analysis device according to claim 1, wherein The frame (300) includes a connecting rod (310) and a sliding rod (320), one end of the connecting rod (310) is connected to the bottom of the housing (100), one end of the sliding rod (320) is slidably connected to the connecting rod (310), and the other end of the sliding rod (320) is connected to the detector (400), and the sliding rod (320) can perform lifting movement on the connecting rod (310).
3. The X-ray non-destructive analysis device according to claim 2, characterized in that, A first slide rail (330) is provided on the connecting rod (310), the first slide rail (330) extends in the vertical direction, and one end of the sliding rod (320) is slidably connected to the first slide rail (330).
4. The X-ray non-destructive analysis device according to claim 3, characterized in that, The X-ray non-destructive analysis device further includes a driving assembly (600), the driving assembly (600) is provided on the connecting rod (310), and the driving assembly (600) is drivingly connected to the sliding rod (320) to enable the sliding rod (320) to perform lifting movement.
5. The X-ray non-destructive analysis device according to claim 4, characterized in that, The driving assembly (600) includes a motor or a cylinder.
6. The X-ray non-destructive analysis device according to claim 1, characterized in that, The X-ray non-destructive analysis device further includes a base (700), a second slide rail (710) is provided on the base (700), and the stage (200) is slidably connected to the second slide rail (710).
7. The X-ray non-destructive analysis device according to claim 6, characterized in that, The second slide rail (710) extends along the length direction of the housing (100) to enable the stage (200) to enter or partially exit the housing (100).
8. The X-ray nondestructive analysis device according to any one of claims 1-7, characterized in that, The X-ray non-destructive analysis device further includes a camera (800), the camera (800) is located inside the housing (100), and the camera (800) is connected to the top of the housing (100), and the camera (800) is configured to photograph the surface of the sample.
9. The X-ray non-destructive analysis device according to any one of claims 1-7, characterized in that, A lighting lamp is further provided inside the housing (100).
10. The X-ray non-destructive analysis device according to any one of claims 1-7, characterized in that, A visual window is opened on the side wall of the housing (100), and glass is embedded in the visual window.